having amino groups bound to acyclic carbon atoms of the carbon skeleton

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    Resist composition and patterning process

    • Patent number 10,126,647
    • Issue date Nov 13, 2018
    • Shin-Etsu Chemical Co., Ltd.
    • Jun Hatakeyama
    • C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...

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