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  • CPC
  • C23C16/4557
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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

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C23C16/4557Heated nozzles
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
    • Publication number 20240141490
    • Publication date May 2, 2024
    • Kokusai Electric Corporation
    • Mika Urushihara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ACOUSTIC WAVE ASSISTED CHEMICAL VAPOR IINFILTRATION
    • Publication number 20240141479
    • Publication date May 2, 2024
    • RTX Corporation
    • JinQuan Xu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION SOURCE AND DEPOSITION APPARATUS INCLUDING THE SAME
    • Publication number 20240141489
    • Publication date May 2, 2024
    • SAMSUNG DISPLAY CO., LTD.
    • JAEWAN SEOL
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
    • Publication number 20240112907
    • Publication date Apr 4, 2024
    • Kokusai Electric Corporation
    • Shoma MIYATA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    GAS SUPPLIER PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMI...
    • Publication number 20240102165
    • Publication date Mar 28, 2024
    • Kojusai Electric Corporation
    • Shuhei Saido
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CVD REACTOR COMPRISING A PROCESS CHAMBER FLOOR RISING IN A FEEDER ZONE
    • Publication number 20240102164
    • Publication date Mar 28, 2024
    • AIXTRON SE
    • Levin David Richard Johannes BEE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
    • Publication number 20240093372
    • Publication date Mar 21, 2024
    • Kokusai Electric Corporation
    • Tadashi TAKASAKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ATOMIC LAYER DEPOSITION PART COATING CHAMBER
    • Publication number 20240093367
    • Publication date Mar 21, 2024
    • Sriharsha DHARMAPURA SATHYANARAYANAMURTHY
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20240084451
    • Publication date Mar 14, 2024
    • Samsung Electronics Co., Ltd.
    • JEONGHYEONG LEE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20240068097
    • Publication date Feb 29, 2024
    • ASM IP HOLDING B.V.
    • Subir Parui
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Showerhead Assembly with Heated Showerhead
    • Publication number 20240068096
    • Publication date Feb 29, 2024
    • Anantha K. SUBRAMANI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
    • Publication number 20240055233
    • Publication date Feb 15, 2024
    • JUSUNG ENGINEERING CO., LTD.
    • Chul-Joo HWANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SHOWERHEAD ASSEMBLY AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20240042462
    • Publication date Feb 8, 2024
    • TES CO., LTD.
    • Kyung-Ho JANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SHOWERHEAD ASSEMBLY AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20240042463
    • Publication date Feb 8, 2024
    • TES CO., LTD.
    • Kyung-Ho JANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM DEPOSITION APPARATUS
    • Publication number 20240038498
    • Publication date Feb 1, 2024
    • TOKYO ELECTRON LIMITED
    • Taehoon PARK
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SEMICONDUCTOR MANUFACTURING APPARATUS
    • Publication number 20240018657
    • Publication date Jan 18, 2024
    • Samsung Electronics Co., Ltd.
    • Jae Hyun YANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ROLL-TO-ROLL PROCESSING
    • Publication number 20240018653
    • Publication date Jan 18, 2024
    • KALPANA TECHNOLOGIES B.V.
    • Diederick Adrianus Spee
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION APPARATUS
    • Publication number 20240011157
    • Publication date Jan 11, 2024
    • National Cheng Kung University
    • Yu Chi CHANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20230416917
    • Publication date Dec 28, 2023
    • WONIK IPS CO., LTD.
    • Kee Jun KIM
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SEMICONDUCTOR PROCESS CHAMBER
    • Publication number 20230392260
    • Publication date Dec 7, 2023
    • Hanwha Corporation
    • Dong Won SEO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
    • Publication number 20230395378
    • Publication date Dec 7, 2023
    • Kokusai Electric Corporation
    • Takumi ITO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ALD APPARATUS, METHOD AND VALVE
    • Publication number 20230383404
    • Publication date Nov 30, 2023
    • Picosun Oy
    • Marko PUDAS
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING DEVICE
    • Publication number 20230374662
    • Publication date Nov 23, 2023
    • Jusung Engineering Co., Ltd.
    • Dae Soo JANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PECVD APPARATUS FOR IN-SITU DEPOSITION OF FILM STACKS
    • Publication number 20230366094
    • Publication date Nov 16, 2023
    • Novellus Systems, Inc.
    • Jason Dirk Haverkamp
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR USING SHIELD PLATE IN A CVD REACTOR
    • Publication number 20230357928
    • Publication date Nov 9, 2023
    • AIXTRON SE
    • Adam BOYD
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF FORMING A SILICON COMPRISING LAYER
    • Publication number 20230360905
    • Publication date Nov 9, 2023
    • ASM IP HOLDING, B.V.
    • Werner Knaepen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEVICE FOR DIFFUSING A PRECURSOR WITH A CONTAINER HAVING AT LEAST O...
    • Publication number 20230332289
    • Publication date Oct 19, 2023
    • Commissariat A L'Energie Atomique et Aux Energies Alternatives
    • Hicham MASKROT
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAS INLET ELEMENT OF A CVD REACTOR WITH TWO INFEED POINTS
    • Publication number 20230323537
    • Publication date Oct 12, 2023
    • AIXTRON SE
    • Adam BOYD
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SYMMETRIC PUMP DOWN MINI-VOLUME WITH LAMINAR FLOW CAVITY GAS INJECT...
    • Publication number 20230323536
    • Publication date Oct 12, 2023
    • Applied Materials, Inc.
    • Kirankumar Neelasandra SAVANDAIAH
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    INTERSECTING MODULE
    • Publication number 20230295805
    • Publication date Sep 21, 2023
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Yung-Syuan LAN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...