High speed and short duration

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CPC
H01J2237/0432

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/0432High speed and short duration

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for charged particle beam modulation
- Patent number 11,049,689
- Issue date Jun 29, 2021
- ASML Netherlands B.V.
- Ehud Shaked
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method of arc detection using dynamic threshold
- Patent number 10,515,780
- Issue date Dec 24, 2019
- Axcelis Technologies, Inc.
- Yusef Nouri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam blanker and method for blanking a charged particle beam
- Patent number 10,410,820
- Issue date Sep 10, 2019
- Carl Zeiss SMT GmbH
- Michael Budach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Studying dynamic specimen behavior in a charged-particle microscope
- Patent number 10,340,113
- Issue date Jul 2, 2019
- FEI Company
- Erik René Kieft
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultra broad band continuously tunable electron beam pulser
- Patent number 10,319,556
- Issue date Jun 11, 2019
- Euclid Techlabs, LLC
- Chunguang Jing
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems including a beam projection device providing variable expos...
- Patent number 10,115,562
- Issue date Oct 30, 2018
- Samsung Electronics Co., Ltd.
- Suyoung Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Time-resolved charged particle microscopy
- Patent number 10,032,599
- Issue date Jul 24, 2018
- FEI Cmnpany
- Erik René Kieft
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam writing method and multi charged partic...
- Patent number 10,020,159
- Issue date Jul 10, 2018
- NuFlare Technology, Inc.
- Hiroshi Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dynamic pattern generator and method of toggling mirror cells of th...
- Patent number 9,679,747
- Issue date Jun 13, 2017
- Taiwan Semiconductor Manufacturing Company Ltd.
- Shao-Yu Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam writing method and multi charged partic...
- Patent number 9,570,267
- Issue date Feb 14, 2017
- NuFlare Technology, Inc.
- Hiroshi Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-speed multiframe dynamic transmission electron microscope imag...
- Patent number 9,373,479
- Issue date Jun 21, 2016
- Lawrence Livermore National Security, LLC
- Bryan W. Reed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for electron emission and device including such a...
- Patent number 9,263,229
- Issue date Feb 16, 2016
- Centre National de la Recherche Scientifique (Cnrs)
- Arnaud Arbouet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Drawing apparatus, and method of manufacturing article
- Patent number 9,245,715
- Issue date Jan 26, 2016
- Canon Kabushiki Kaisha
- Tomoyuki Morita
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Photocathode high-frequency electron-gun cavity apparatus
- Patent number 9,224,571
- Issue date Dec 29, 2015
- INTER-UNIVERSITY RESEARCH INSTITUTE CORPORATION
- Junji Urakawa
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Multi charged particle beam writing method and multi charged partic...
- Patent number 9,202,673
- Issue date Dec 1, 2015
- NuFlare Technology, Inc.
- Hiroshi Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam pulsing device for use in charged-particle microscopy
- Patent number 9,048,060
- Issue date Jun 2, 2015
- FEI Company
- Erik René Kieft
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope
- Patent number 9,024,256
- Issue date May 5, 2015
- Board of Trustees of Michigan State University
- Chong-Yu Ruan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photon induced near field electron microscope and biological imagin...
- Patent number 8,963,085
- Issue date Feb 24, 2015
- California Institute of Technology
- Ahmed H. Zewail
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measuring/inspecting apparatus and measuring/inspecting method enab...
- Patent number 8,890,096
- Issue date Nov 18, 2014
- Hitachi High-Technologies Corporation
- Wen Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for 4D tomography and ultrafast scanning electron...
- Patent number 8,841,613
- Issue date Sep 23, 2014
- California Institute of Technology
- Ahmed H. Zewail
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for controlled particle beam manufacturing
- Patent number 8,658,994
- Issue date Feb 25, 2014
- Nexgen Semi Holding, Inc.
- Michael John Zani
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Image processing method
- Patent number 8,644,637
- Issue date Feb 4, 2014
- Canon Kabushiki Kaisha
- Takeo Suga
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam processing
- Patent number 8,598,542
- Issue date Dec 3, 2013
- FEI Company
- Milos Toth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Beam blanker for interrupting a beam of charged particles
- Patent number 8,569,712
- Issue date Oct 29, 2013
- FEI Company
- Guido Martinus Henricus Knippels
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photon induced near field electron microscope and biological imagin...
- Patent number 8,569,695
- Issue date Oct 29, 2013
- California Institute of Technology
- Ahmed H. Zewail
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Accelerator on a chip having a grid and plate cell
- Patent number 8,564,225
- Issue date Oct 22, 2013
- Transmute, Inc.
- Kim L. Hailey
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lithography system
- Patent number 8,525,134
- Issue date Sep 3, 2013
- Mapper Lithography IP B.V.
- Jan-Jaco Marco Wieland
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Photon induced near field electron microscope and biological imagin...
- Patent number 8,429,761
- Issue date Apr 23, 2013
- California Institute of Technology
- Ahmed H. Zewail
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for generating femtosecond electron beam
- Patent number 8,278,813
- Issue date Oct 2, 2012
- POSTECH Academy-Industry Foundation
- Yong Woon Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical switching in a lithography system
- Patent number 8,242,470
- Issue date Aug 14, 2012
- Mapper Lithography IP B.V.
- Marco Jan-Jaco Wieland
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR CHARGED PARTICLE BEAM MODULATION
- Publication number 20200176219
- Publication date Jun 4, 2020
- ASML NETHERLANDS B.V.
- Ehud Shaked
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
- Publication number 20180358203
- Publication date Dec 13, 2018
- NuFlare Technology, Inc.
- Hirofumi MORITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...
- Publication number 20180261421
- Publication date Sep 13, 2018
- NuFlare Technology, Inc.
- Hiroshi MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TIME-RESOLVED CHARGED PARTICLE MICROSCOPY
- Publication number 20180151326
- Publication date May 31, 2018
- FEI Company
- Erik René Kieft
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON MICROSCOPE
- Publication number 20140346355
- Publication date Nov 27, 2014
- Board of Trustees of Michigan State University
- Chong-Yu Ruan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...
- Publication number 20140124684
- Publication date May 8, 2014
- NuFlare Technology, Inc.
- Hiroshi MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BEAM PULSING DEVICE FOR USE IN CHARGED-PARTICLE MICROSCOPY
- Publication number 20140103225
- Publication date Apr 17, 2014
- FEI Company
- Erik René Kieft
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20140106279
- Publication date Apr 17, 2014
- Canon Kabushiki Kaisha
- Tomoyuki MORITA
- B82 - NANO-TECHNOLOGY
Information Patent Application
PHOTON INDUCED NEAR FIELD ELECTRON MICROSCOPE AND BIOLOGICAL IMAGIN...
- Publication number 20140084160
- Publication date Mar 27, 2014
- California Institute of Technology
- Ahmed H. Zewail
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEASURING/INSPECTING APPARATUS AND MEASURING/INSPECTING METHOD
- Publication number 20140008534
- Publication date Jan 9, 2014
- Wen LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTON INDUCED NEAR FIELD ELECTRON MICROSCOPE AND BIOLOGICAL IMAGIN...
- Publication number 20130234022
- Publication date Sep 12, 2013
- California Institute of Technology
- Ahmed H. Zewail
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTOCATHODE HIGH-FREQUENCY ELECTRON-GUN CAVITY APPARATUS
- Publication number 20130187541
- Publication date Jul 25, 2013
- Junji Urakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMAGE PROCESSING METHOD
- Publication number 20120301043
- Publication date Nov 29, 2012
- Canon Kabushiki Kaisha
- Takeo Suga
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Beam Blanker for Interrupting a Beam of Charged Particles
- Publication number 20120261586
- Publication date Oct 18, 2012
- FEI Company
- Guido Martinus Henricus Knippels
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING
- Publication number 20120112323
- Publication date May 10, 2012
- NEXGEN SEMI HOLDING, INC.
- Michael John Zani
- B82 - NANO-TECHNOLOGY
Information Patent Application
OPTICAL SWITCHING IN A LITHOGRAPHY SYSTEM
- Publication number 20120043457
- Publication date Feb 23, 2012
- Jan-Jaco Marco Wieland
- B82 - NANO-TECHNOLOGY
Information Patent Application
Particle Beam System
- Publication number 20120025093
- Publication date Feb 2, 2012
- CARL ZEISS NTS GMBH
- Josef Biberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR 4D TOMOGRAPHY AND ULTRAFAST SCANNING ELECTRON...
- Publication number 20110284744
- Publication date Nov 24, 2011
- California Institute of Technology
- Ahmed H. Zewail
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTON INDUCED NEAR FIELD ELECTRON MICROSCOPE AND BIOLOGICAL IMAGIN...
- Publication number 20110220792
- Publication date Sep 15, 2011
- California Institute of Technology
- Ahmed H. Zewail
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WEAK-LENS COUPLING OF HIGH CURRENT ELECTRON SOURCES TO ELECTRON MIC...
- Publication number 20110168888
- Publication date Jul 14, 2011
- LAWRENCE LIVERMORE NATIONAL SECURITY, LLC
- Bryan W. Reed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM PROCESSING
- Publication number 20100224592
- Publication date Sep 9, 2010
- FEI Company
- MILOS TOTH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
APPARATUS AND METHOD FOR GENERATING FEMTOSECOND ELECTRON BEAM
- Publication number 20100117510
- Publication date May 13, 2010
- POSTECH Acadamy-Industry Foundation
- Yong Woon PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING
- Publication number 20100098922
- Publication date Apr 22, 2010
- NEXGEN SEMI HOLDING, INC.
- Michael John Zani
- B82 - NANO-TECHNOLOGY
Information Patent Application
LITHOGRAPHY SYSTEM
- Publication number 20100045958
- Publication date Feb 25, 2010
- Jan-Jaco Marco Wieland
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR ULTRAFAST PHOTOELECTRON MICROSCOPE
- Publication number 20090236521
- Publication date Sep 24, 2009
- California Institute of Technology
- Ahmed Zewail
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED-PARTICLE BEAM WRITING APPARATUS AND CHARGED-PARTICLE BEAM W...
- Publication number 20090084990
- Publication date Apr 2, 2009
- NuFlare Technology, Inc.
- Rieko NISHIMURA
- B82 - NANO-TECHNOLOGY
Information Patent Application
INTENSITY MODULATED ELECTRON BEAM AND APPLICATION TO ELECTRON BEAM...
- Publication number 20090026912
- Publication date Jan 29, 2009
- KLA-Tencor Technologies Corporation
- Vincenzo Lordi
- B82 - NANO-TECHNOLOGY
Information Patent Application
OPTICAL SWITCHING IN LITHOGRAPHY SYSTEM
- Publication number 20080158537
- Publication date Jul 3, 2008
- Jan-Jaco Marco Wieland
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method of reducing particle contamination for ion implanters
- Publication number 20080157681
- Publication date Jul 3, 2008
- Axcelis Technologies, Inc.
- Yongzhang Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL SWITCHING IN LITHOGRAPHY SYSTEM
- Publication number 20080158536
- Publication date Jul 3, 2008
- Jan-Jaco Marco Wieland
- B82 - NANO-TECHNOLOGY

High speed and short duration

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Systems and methods for charged particle beam modulation

System and method of arc detection using dynamic threshold

Beam blanker and method for blanking a charged particle beam

Studying dynamic specimen behavior in a charged-particle microscope

Ultra broad band continuously tunable electron beam pulser

Systems including a beam projection device providing variable expos...

Time-resolved charged particle microscopy

Multi charged particle beam writing method and multi charged partic...

Dynamic pattern generator and method of toggling mirror cells of th...

Multi charged particle beam writing method and multi charged partic...

High-speed multiframe dynamic transmission electron microscope imag...

Device and method for electron emission and device including such a...

Drawing apparatus, and method of manufacturing article

Photocathode high-frequency electron-gun cavity apparatus

Multi charged particle beam writing method and multi charged partic...

Beam pulsing device for use in charged-particle microscopy

Electron microscope

Photon induced near field electron microscope and biological imagin...

Measuring/inspecting apparatus and measuring/inspecting method enab...

Method and system for 4D tomography and ultrafast scanning electron...

Apparatus and method for controlled particle beam manufacturing

Image processing method

Charged particle beam processing

Beam blanker for interrupting a beam of charged particles

Photon induced near field electron microscope and biological imagin...

Accelerator on a chip having a grid and plate cell

Lithography system

Photon induced near field electron microscope and biological imagin...

Apparatus and method for generating femtosecond electron beam

Optical switching in a lithography system

Patents Applicationslast 30 patents

SYSTEMS AND METHODS FOR CHARGED PARTICLE BEAM MODULATION

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...

MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...

TIME-RESOLVED CHARGED PARTICLE MICROSCOPY

ELECTRON MICROSCOPE

MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...

BEAM PULSING DEVICE FOR USE IN CHARGED-PARTICLE MICROSCOPY

DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

PHOTON INDUCED NEAR FIELD ELECTRON MICROSCOPE AND BIOLOGICAL IMAGIN...

MEASURING/INSPECTING APPARATUS AND MEASURING/INSPECTING METHOD

PHOTON INDUCED NEAR FIELD ELECTRON MICROSCOPE AND BIOLOGICAL IMAGIN...

PHOTOCATHODE HIGH-FREQUENCY ELECTRON-GUN CAVITY APPARATUS

IMAGE PROCESSING METHOD

Beam Blanker for Interrupting a Beam of Charged Particles

APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING

OPTICAL SWITCHING IN A LITHOGRAPHY SYSTEM

Particle Beam System

METHOD AND SYSTEM FOR 4D TOMOGRAPHY AND ULTRAFAST SCANNING ELECTRON...

PHOTON INDUCED NEAR FIELD ELECTRON MICROSCOPE AND BIOLOGICAL IMAGIN...

WEAK-LENS COUPLING OF HIGH CURRENT ELECTRON SOURCES TO ELECTRON MIC...

CHARGED PARTICLE BEAM PROCESSING

APPARATUS AND METHOD FOR GENERATING FEMTOSECOND ELECTRON BEAM

APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING

LITHOGRAPHY SYSTEM

METHOD AND SYSTEM FOR ULTRAFAST PHOTOELECTRON MICROSCOPE

CHARGED-PARTICLE BEAM WRITING APPARATUS AND CHARGED-PARTICLE BEAM W...

INTENSITY MODULATED ELECTRON BEAM AND APPLICATION TO ELECTRON BEAM...

OPTICAL SWITCHING IN LITHOGRAPHY SYSTEM

Method of reducing particle contamination for ion implanters

OPTICAL SWITCHING IN LITHOGRAPHY SYSTEM