Hollow targets

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CPC
H01J37/342

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/342Hollow targets

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Potassium sodium niobate sputtering target and production method th...
- Patent number 12,188,118
- Issue date Jan 7, 2025
- JX Advanced Metals Corporation
- Ryosuke Sakashita
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Movable magnet array for magnetron sputtering
- Patent number 12,191,128
- Issue date Jan 7, 2025
- Intellivation LLC
- Michael G. Simmons
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
PVD target design and semiconductor devices formed using the same
- Patent number 12,180,576
- Issue date Dec 31, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Hsi Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cr—Si sintered body, sputtering target, and method for producing th...
- Patent number 12,173,398
- Issue date Dec 24, 2024
- Tosoh Corporation
- Hiroyuki Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 12,163,215
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Koji Maeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition process apparatus and method of optimizin...
- Patent number 12,165,935
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chen-Hung Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Corrosion resistant and low embrittlement aluminum alloy coatings o...
- Patent number 12,134,817
- Issue date Nov 5, 2024
- The Boeing Company
- Stephen P. Gaydos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Target, film forming apparatus, and method of manufacturing film fo...
- Patent number 12,125,690
- Issue date Oct 22, 2024
- JSW AFTY CORPORATION
- Hironori Torii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Oxide semiconductor sputtering target and method of fabricating thi...
- Patent number 12,119,225
- Issue date Oct 15, 2024
- KV Materials Co., Ltd.
- Shinhyuk Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for improving deposition process
- Patent number 12,112,930
- Issue date Oct 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jung-Tang Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
TiCN having reduced growth defects by means of HiPIMS
- Patent number 12,110,580
- Issue date Oct 8, 2024
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Denis Kurapov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Inverted cylindrical magnetron (ICM) system and methods of use
- Patent number 12,106,924
- Issue date Oct 1, 2024
- Vactronix Scientific, LLC.
- Tianzong Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering target and method for manufacturing sputtering target
- Patent number 12,106,949
- Issue date Oct 1, 2024
- JX Advanced Metals Corporation
- Yuki Furuya
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Method of forming nitride semiconductor film
- Patent number 12,094,710
- Issue date Sep 17, 2024
- Tokyo Electron Limited
- Nobuaki Takahashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hybrid ion source for aluminum ion generation using a target holder...
- Patent number 12,094,681
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Graham Wright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sputtering target, manufacturing method therefor, and manufacturing...
- Patent number 12,091,743
- Issue date Sep 17, 2024
- JX Advanced Metals Corporation
- Yasuyuki Iwabuchi
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Method for coating a substrate with tantalum nitride
- Patent number 12,084,755
- Issue date Sep 10, 2024
- SAFRAN
- Marjorie Christine Cavarroc
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing tool and methods of operation
- Patent number 12,087,563
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Liang Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrically and magnetically enhanced ionized physical vapor depos...
- Patent number 12,077,849
- Issue date Sep 3, 2024
- IonQuest Corp.
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering target product and method for producing recycled sputter...
- Patent number 12,054,822
- Issue date Aug 6, 2024
- JX Advanced Metals Corporation
- Kengo Kaminaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrochromic devices
- Patent number 12,043,890
- Issue date Jul 23, 2024
- View, Inc.
- Zhongchun Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Niobium sputtering target
- Patent number 12,020,916
- Issue date Jun 25, 2024
- JX Metals Corpo tion
- Yuki Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Target material supply apparatus and method
- Patent number 11,988,967
- Issue date May 21, 2024
- ASML Netherlands B.V.
- Jon David Tedrow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Garnet compound, sintered body and sputtering target containing same
- Patent number 11,987,504
- Issue date May 21, 2024
- Idemitsu Kosan Co., Ltd.
- Kazuyoshi Inoue
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Transparent conductive oxide thin film and use thereof
- Patent number 11,982,017
- Issue date May 14, 2024
- Ningbo Institute of Materials Technology & Engineering, Chinese Academy of Sc...
- Ruyi Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing sputtering target, method for forming oxid...
- Patent number 11,967,505
- Issue date Apr 23, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Cr—Si sintered body
- Patent number 11,967,493
- Issue date Apr 23, 2024
- Tosoh Corporation
- Hiroyuki Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming nickel silicide materials
- Patent number 11,965,236
- Issue date Apr 23, 2024
- Applied Materials, Inc.
- Minrui Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid sputter target
- Patent number 11,952,654
- Issue date Apr 9, 2024
- EVATEC AG
- Dominik Jaeger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Isolated volume seals and method of forming an isolated volume with...
- Patent number 11,955,355
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Kirankumar Neelasandra Savandaiah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
TUNGSTEN SINTERED SPUTTERING TARGET
- Publication number 20240408671
- Publication date Dec 12, 2024
- JX NIPPON MINING & METALS CORPORATION
- Ryo Suzuki
- B22 - CASTING POWDER METALLURGY
Information Patent Application
LOW CARBON DEFECT COPPER-MANGANESE SPUTTERING TARGET AND METHOD FOR...
- Publication number 20240384394
- Publication date Nov 21, 2024
- Tosoh SMD, Inc.
- Eduardo del Rio Perez
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW CARBON DEFECT COPPER-MANGANESE SPUTTERING TARGET AND METHOD FOR...
- Publication number 20240384395
- Publication date Nov 21, 2024
- Tosoh SMD, Inc.
- Eduardo del Rio Perez
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Improving Deposition Process
- Publication number 20240387155
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jung-Tang Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
- Publication number 20240347327
- Publication date Oct 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Liang LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IGZO SPUTTERING TARGET
- Publication number 20240344193
- Publication date Oct 17, 2024
- JX Metals Corporation
- Kazutaka Murai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ISOLATED VOLUME SEALS AND METHOD OF FORMING AN ISOLATED VOLUME WITH...
- Publication number 20240332046
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Kirankumar Neelasandra SAVANDAIAH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20240321563
- Publication date Sep 26, 2024
- SHIBAURA MECHATRONICS CORPORATION
- Shigeki MATSUNAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROCHROMIC DEVICES
- Publication number 20240263294
- Publication date Aug 8, 2024
- View, Inc.
- Zhongchun Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING TARGET AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20240263296
- Publication date Aug 8, 2024
- Chao Chen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CYLINDRICAL CATHODE AND CHAMBER USING SAME FOR SPUTTERING
- Publication number 20240258087
- Publication date Aug 1, 2024
- INTEVAC, INC.
- Samuel D. Harkness
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TUNGSTEN SUBOXIDE CERAMIC TARGET
- Publication number 20240229226
- Publication date Jul 11, 2024
- SOLERAS ADVANCED COATINGS BV
- Ignacio CARETTI GIANGASPRO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF NON-STOICHIOMETRIC METAL COMPOUND LAYER
- Publication number 20240229228
- Publication date Jul 11, 2024
- SOLERAS ADVANCED COATINGS BV
- Wilmert DE BOSSCHER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITION OF DENSE CHROMIUM ON A SUBSTRATE
- Publication number 20240209493
- Publication date Jun 27, 2024
- HYDROMECANIQUE ET FROTTEMENT
- Christophe Heau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POWER LIMITER WITH WAVEGUIDE HAVING AN LaCoO3 FILM
- Publication number 20240209491
- Publication date Jun 27, 2024
- Northrop Grumman Systems Corporation
- Rajashree Bhattacharya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALUMINUM ALLOYS AND PROCESSES FOR MAKING ALUMINUM -SCANDIUM SPUTTER...
- Publication number 20240194463
- Publication date Jun 13, 2024
- MATERION CORPORATION
- Vitaliy V. Myasnikov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOFT MAGNETIC MULTILAYER DESPOSITION APPARATUS, METHODS OF MANUFACT...
- Publication number 20240186064
- Publication date Jun 6, 2024
- Evatec AG
- Claudiu Valentin FALUB
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
SPUTTER TARGETS FOR SELF-DOPED SOURCE AND DRAIN CONTACTS
- Publication number 20240186127
- Publication date Jun 6, 2024
- Intel Corporation
- Ilya V. Karpov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS AND DEPOSITION METHOD USING THE SAME
- Publication number 20240183029
- Publication date Jun 6, 2024
- SAMSUNG DISPLAY CO., LTD.
- HYUNEOK SHIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHODS FOR DEPOSITING MATERIAL ON A SUBSTRATE
- Publication number 20240170269
- Publication date May 23, 2024
- Applied Materials, Inc.
- Harish PENMETHSA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TUNGSTEN SUBOXIDE CERAMIC TARGET
- Publication number 20240133024
- Publication date Apr 25, 2024
- SOLERAS ADVANCED COATINGS BV
- Ignacio CARETTI GIANGASPRO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION OF NON-STOICHIOMETRIC METAL COMPOUND LAYER
- Publication number 20240133025
- Publication date Apr 25, 2024
- SOLERAS ADVANCED COATINGS BV
- Wilmert DE BOSSCHER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HOT-ROLLED COPPER ALLOY SHEET AND SPUTTERING TARGET
- Publication number 20240124955
- Publication date Apr 18, 2024
- MITSUBISHI MATERIALS CORPORATION
- Yosuke NAKASATO
- B22 - CASTING POWDER METALLURGY
Information Patent Application
Deposition Of Piezoelectric Films
- Publication number 20240114800
- Publication date Apr 4, 2024
- Applied Materials, Inc.
- Vijay Bhan Sharma
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
- Publication number 20240096609
- Publication date Mar 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Liang LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM DEPOSITION OF A LOW RESISTIVITY METAL
- Publication number 20240093356
- Publication date Mar 21, 2024
- VEECO INSTRUMENTS INC.
- Narasimhan SRINIVASAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING TARGET AND SPUTTERING APPARATUS INCLUDING THE SAME
- Publication number 20240084441
- Publication date Mar 14, 2024
- SAMSUNG DISPLAY CO., LTD.
- HYUNEOK SHIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POTASSIUM SODIUM NIOBATE SPUTTERING TARGET AND PRODUCTION METHOD TH...
- Publication number 20240052478
- Publication date Feb 15, 2024
- JX Metals Corporation
- Ryosuke Sakashita
- C01 - INORGANIC CHEMISTRY
Information Patent Application
METHOD OF DEPOSITING SILICON NITRIDE FILM, APPARATUS FOR DEPOSITING...
- Publication number 20240055239
- Publication date Feb 15, 2024
- Ulvac, Inc.
- Yuta Ando
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATED CUTTING TOOL WITH AN ALTERNATING LAYER COMPOSITION
- Publication number 20240024957
- Publication date Jan 25, 2024
- WALTER AG
- Veit SCHIER
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Hollow targets

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Potassium sodium niobate sputtering target and production method th...

Movable magnet array for magnetron sputtering

PVD target design and semiconductor devices formed using the same

Cr—Si sintered body, sputtering target, and method for producing th...

Film forming apparatus and film forming method

Physical vapor deposition process apparatus and method of optimizin...

Corrosion resistant and low embrittlement aluminum alloy coatings o...

Target, film forming apparatus, and method of manufacturing film fo...

Oxide semiconductor sputtering target and method of fabricating thi...

Method for improving deposition process

TiCN having reduced growth defects by means of HiPIMS

Inverted cylindrical magnetron (ICM) system and methods of use

Sputtering target and method for manufacturing sputtering target

Method of forming nitride semiconductor film

Hybrid ion source for aluminum ion generation using a target holder...

Sputtering target, manufacturing method therefor, and manufacturing...

Method for coating a substrate with tantalum nitride

Semiconductor processing tool and methods of operation

Electrically and magnetically enhanced ionized physical vapor depos...

Sputtering target product and method for producing recycled sputter...

Electrochromic devices

Niobium sputtering target

Target material supply apparatus and method

Garnet compound, sintered body and sputtering target containing same

Transparent conductive oxide thin film and use thereof

Method for manufacturing sputtering target, method for forming oxid...

Cr—Si sintered body

Method of forming nickel silicide materials

Liquid sputter target

Isolated volume seals and method of forming an isolated volume with...

Patents Applicationslast 30 patents

TUNGSTEN SINTERED SPUTTERING TARGET

LOW CARBON DEFECT COPPER-MANGANESE SPUTTERING TARGET AND METHOD FOR...

LOW CARBON DEFECT COPPER-MANGANESE SPUTTERING TARGET AND METHOD FOR...

Method for Improving Deposition Process

SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION

IGZO SPUTTERING TARGET

ISOLATED VOLUME SEALS AND METHOD OF FORMING AN ISOLATED VOLUME WITH...

FILM FORMING APPARATUS

ELECTROCHROMIC DEVICES

SPUTTERING TARGET AND METHOD FOR MANUFACTURING THE SAME

CYLINDRICAL CATHODE AND CHAMBER USING SAME FOR SPUTTERING

TUNGSTEN SUBOXIDE CERAMIC TARGET

DEPOSITION OF NON-STOICHIOMETRIC METAL COMPOUND LAYER

METHOD FOR DEPOSITION OF DENSE CHROMIUM ON A SUBSTRATE

POWER LIMITER WITH WAVEGUIDE HAVING AN LaCoO3 FILM

ALUMINUM ALLOYS AND PROCESSES FOR MAKING ALUMINUM -SCANDIUM SPUTTER...

SOFT MAGNETIC MULTILAYER DESPOSITION APPARATUS, METHODS OF MANUFACT...

SPUTTER TARGETS FOR SELF-DOPED SOURCE AND DRAIN CONTACTS

DEPOSITION APPARATUS AND DEPOSITION METHOD USING THE SAME

SYSTEM AND METHODS FOR DEPOSITING MATERIAL ON A SUBSTRATE

TUNGSTEN SUBOXIDE CERAMIC TARGET

DEPOSITION OF NON-STOICHIOMETRIC METAL COMPOUND LAYER

HOT-ROLLED COPPER ALLOY SHEET AND SPUTTERING TARGET

Deposition Of Piezoelectric Films

SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION

ION BEAM DEPOSITION OF A LOW RESISTIVITY METAL

SPUTTERING TARGET AND SPUTTERING APPARATUS INCLUDING THE SAME

POTASSIUM SODIUM NIOBATE SPUTTERING TARGET AND PRODUCTION METHOD TH...

METHOD OF DEPOSITING SILICON NITRIDE FILM, APPARATUS FOR DEPOSITING...

COATED CUTTING TOOL WITH AN ALTERNATING LAYER COMPOSITION