Horizontal carrier comprising wall type elements whereby the substrates are vertically supported

Industry

CPC
H01L21/67326

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67326Horizontal carrier comprising wall type elements whereby the substrates are vertically supported

Industries

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,915,947
- Issue date Feb 27, 2024
- Tokyo Electron Limited
- Takumi Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film-forming device
- Patent number 11,891,692
- Issue date Feb 6, 2024
- Murata Manufacturing Co., Ltd.
- Yasuhiro Chikaishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal processing susceptor
- Patent number 11,848,226
- Issue date Dec 19, 2023
- Applied Materials, Inc.
- Anhthu Ngo
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Apparatus for conducting plasma surface treatment, board treatment...
- Patent number 11,728,142
- Issue date Aug 15, 2023
- Samsung Electronics Co., Ltd.
- Junyoung Oh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cassette for substrates of display devices
- Patent number 11,670,530
- Issue date Jun 6, 2023
- Samsung Display Co., Ltd.
- Youngdae Song
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chip carrier device
- Patent number 11,587,808
- Issue date Feb 21, 2023
- Powertech Technology Inc.
- Shih-Chun Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Horizontal substrate boat
- Patent number 11,521,876
- Issue date Dec 6, 2022
- Tokyo Electron Limited
- Ioan Domsa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate storage container and gas replacement unit
- Patent number 11,488,850
- Issue date Nov 1, 2022
- Shin-Etsu Polymer Co., Ltd.
- Osamu Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plating chuck
- Patent number 11,469,134
- Issue date Oct 11, 2022
- ACM Research (Shanghai) Inc.
- Hui Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing device
- Patent number 11,469,127
- Issue date Oct 11, 2022
- Kioxia Corporation
- Shigeru Kinoshita
- B08 - CLEANING
Information Patent Grant
Wafer container and method for holding wafer
- Patent number 11,387,124
- Issue date Jul 12, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wei-Kang Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cassette for substrates of display devices
- Patent number 11,367,639
- Issue date Jun 21, 2022
- Samsung Display Co., Ltd.
- Youngdae Song
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for die container warehousing
- Patent number 11,348,816
- Issue date May 31, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsung-Sheng Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Separators for handling, transporting, or storing semiconductor wafers
- Patent number 11,257,700
- Issue date Feb 22, 2022
- Daewon Semiconductor Packaging Industrial Company
- Sunna Chung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing meihod
- Patent number 11,232,959
- Issue date Jan 25, 2022
- Tokyo Electron Limited
- Takumi Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of pre aligning carrier, wafer and carrier-wafer combination...
- Patent number 11,183,411
- Issue date Nov 23, 2021
- APPLIED MATERIALS, INC.
- Kim Ramkumar Vellore
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal processing susceptor
- Patent number 10,930,543
- Issue date Feb 23, 2021
- Applied Materials, Inc.
- Anhthu Ngo
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method of pre aligning carrier, wafer and carrier-wafer combination...
- Patent number 10,916,464
- Issue date Feb 9, 2021
- Applied Materials, Inc.
- Kim Ramkumar Vellore
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method for assembling tube assembly
- Patent number 10,840,118
- Issue date Nov 17, 2020
- Eugene Technology Co., Ltd.
- Cha Young Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate carriers with isolation membrane
- Patent number 10,818,530
- Issue date Oct 27, 2020
- Murata Machinery, Ltd.
- Fachri Atamny
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer container and method for holding wafer
- Patent number 10,811,291
- Issue date Oct 20, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wei-Kang Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-line system for mass production of organic optoelectronic device...
- Patent number 10,790,466
- Issue date Sep 29, 2020
- Feng-Wen Yen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stackable substrate carriers
- Patent number 10,770,323
- Issue date Sep 8, 2020
- Brooks Automation GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bowing semiconductor wafers
- Patent number 10,720,351
- Issue date Jul 21, 2020
- SunPower Corporation
- Emmanuel Chua Abas
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 10,640,869
- Issue date May 5, 2020
- Kokusai Electric Corporation
- Kazuyuki Okuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor wafer carriers
- Patent number 10,553,466
- Issue date Feb 4, 2020
- SunPower Corporation
- Emmanuel Chua Abas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate storing container
- Patent number 10,535,540
- Issue date Jan 14, 2020
- Miraial Co., Ltd.
- Yuta Kanamori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Posture changing device
- Patent number 10,395,961
- Issue date Aug 27, 2019
- SCREEN Holdings Co., Ltd.
- Yukiteru Miyamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate carrying device and substrate regularity detecting method
- Patent number 10,139,221
- Issue date Nov 27, 2018
- BOE Technology Group Co., Ltd.
- Lianjie Qu
- G01 - MEASURING TESTING
Information Patent Grant
Bowing semiconductor wafers
- Patent number 10,068,787
- Issue date Sep 4, 2018
- SunPower Corporation
- Emmanuel Chua Abas
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
THERMAL PROCESSING SUSCEPTOR
- Publication number 20240112945
- Publication date Apr 4, 2024
- Applied Materials, Inc.
- Anhthu NGO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20240105483
- Publication date Mar 28, 2024
- SCREEN Holdings Co., Ltd.
- Ichiro MITSUYOSHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER SHIFT DETECTION
- Publication number 20240105480
- Publication date Mar 28, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
- Ming-Sze Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER FILM FRAME CARRIER
- Publication number 20230360940
- Publication date Nov 9, 2023
- Applied Materials, Inc.
- Jason A. Rye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230343609
- Publication date Oct 26, 2023
- WONIK IPS CO., LTD.
- Min Su KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CARRIER DISC INSTALLATION/UNINSTALLATION DEVICE AND INSTALLAT...
- Publication number 20230104871
- Publication date Apr 6, 2023
- MAO-YEN SUNG
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SEPARATORS FOR HANDLING, TRANSPORTING, OR STORING SEMICONDUCTOR WAFERS
- Publication number 20230005771
- Publication date Jan 5, 2023
- Daewon Semiconductor Packaging Industrial Company
- Sunna Chung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CASSETTE FOR SUBSTRATES OF DISPLAY DEVICES
- Publication number 20220392794
- Publication date Dec 8, 2022
- SAMSUNG DISPLAY CO., LTD.
- Youngdae SONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE OF MASS TRANSFERRING CHIPS
- Publication number 20220359249
- Publication date Nov 10, 2022
- AU OPTRONICS CORPORATION
- Wei-Chieh CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR MOVING AN OBJECT INTO A PROCESSING STATION, C...
- Publication number 20220336243
- Publication date Oct 20, 2022
- Atotech Deutschland GmbH
- Rüdiger PRETSCHER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR DIE CONTAINER WAREHOUSING
- Publication number 20220262656
- Publication date Aug 18, 2022
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Tsung-Sheng KUO
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220108898
- Publication date Apr 7, 2022
- TOKYO ELECTRON LIMITED
- Takumi Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TRANSFERRING SUBSTRATE, AND APPARATUS AND METHOD FOR...
- Publication number 20220013393
- Publication date Jan 13, 2022
- SEMES CO., LTD.
- JINWOO JUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CASSETTE FOR SUBSTRATES OF DISPLAY DEVICES
- Publication number 20210249289
- Publication date Aug 12, 2021
- SAMSUNG DISPLAY CO., LTD.
- Youngdae SONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHIP CARRIER DEVICE
- Publication number 20210217641
- Publication date Jul 15, 2021
- Powertech Technology Inc.
- Shih-Chun CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL PROCESSING SUSCEPTOR
- Publication number 20210175115
- Publication date Jun 10, 2021
- Applied Materials, Inc.
- Anhthu NGO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PRE ALIGNING CARRIER, WAFER AND CARRIER-WAFER COMBINATION...
- Publication number 20210159106
- Publication date May 27, 2021
- Applied Materials, Inc.
- Kim Ramkumar VELLORE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE
- Publication number 20210082728
- Publication date Mar 18, 2021
- Kioxia Corporation
- Shigeru Kinoshita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLATING CHUCK
- Publication number 20210066106
- Publication date Mar 4, 2021
- ACM Research (Shanghai) Inc.
- Hui Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CLEANING DEVICE
- Publication number 20210035822
- Publication date Feb 4, 2021
- SK SILTRON CO., LTD.
- Se Geun HA
- B08 - CLEANING
Information Patent Application
METHOD OF PRE ALIGNING CARRIER, WAFER AND CARRIER-WAFER COMBINATION...
- Publication number 20210028044
- Publication date Jan 28, 2021
- Applied Materials, Inc.
- Kim Ramkumar VELLORE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CONTAINER AND METHOD FOR HOLDING WAFER
- Publication number 20210013057
- Publication date Jan 14, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Kang Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR WAFER PROCESSING CHAMBER
- Publication number 20200161146
- Publication date May 21, 2020
- VEECO INSTRUMENTS INC.
- David Goldberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR DIE CONTAINER WAREHOUSING
- Publication number 20200043758
- Publication date Feb 6, 2020
- Tainan Semiconductor Manufacturing Co., Ltd
- Tsung-Sheng KUO
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
Substrate Storage Container and Gas Replacement Unit
- Publication number 20190393062
- Publication date Dec 26, 2019
- Shin-Etsu Polymer Co., Ltd.
- Osamu Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPOR REDUCTION DEVICE FOR A SEMICONDUCTOR WAFER
- Publication number 20190279887
- Publication date Sep 12, 2019
- Kuo Yang Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Horizontal Substrate Boat
- Publication number 20190279891
- Publication date Sep 12, 2019
- TOKYO ELECTRON LIMITED
- Ioan Domsa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190172734
- Publication date Jun 6, 2019
- TOKYO ELECTRON LIMITED
- Takumi Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOLAR CELL SILICON WAFER CARRYING DEVICE AND TRANSMISSION SYSTEM
- Publication number 20190148195
- Publication date May 16, 2019
- Beijing Juntai Innovation Technology Co., Ltd.
- SHICHENG YUAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CONTAINER AND METHOD FOR HOLDING WAFER
- Publication number 20190139792
- Publication date May 9, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wei-Kang Liu
- H01 - BASIC ELECTRIC ELEMENTS

Horizontal carrier comprising wall type elements whereby the substrates are vertically supported

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Film-forming device

Thermal processing susceptor

Apparatus for conducting plasma surface treatment, board treatment...

Cassette for substrates of display devices

Chip carrier device

Horizontal substrate boat

Substrate storage container and gas replacement unit

Plating chuck

Substrate processing device

Wafer container and method for holding wafer

Cassette for substrates of display devices

Systems and methods for die container warehousing

Separators for handling, transporting, or storing semiconductor wafers

Substrate processing apparatus and substrate processing meihod

Method of pre aligning carrier, wafer and carrier-wafer combination...

Thermal processing susceptor

Method of pre aligning carrier, wafer and carrier-wafer combination...

Substrate processing apparatus and method for assembling tube assembly

Substrate carriers with isolation membrane

Wafer container and method for holding wafer

In-line system for mass production of organic optoelectronic device...

Stackable substrate carriers

Bowing semiconductor wafers

Method of manufacturing semiconductor device, substrate processing...

Semiconductor wafer carriers

Substrate storing container

Posture changing device

Substrate carrying device and substrate regularity detecting method

Bowing semiconductor wafers

Patents Applicationslast 30 patents

THERMAL PROCESSING SUSCEPTOR

SUBSTRATE TREATING APPARATUS

WAFER SHIFT DETECTION

WAFER FILM FRAME CARRIER

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

WAFER CARRIER DISC INSTALLATION/UNINSTALLATION DEVICE AND INSTALLAT...

SEPARATORS FOR HANDLING, TRANSPORTING, OR STORING SEMICONDUCTOR WAFERS

CASSETTE FOR SUBSTRATES OF DISPLAY DEVICES

DEVICE OF MASS TRANSFERRING CHIPS

DEVICE AND METHOD FOR MOVING AN OBJECT INTO A PROCESSING STATION, C...

SYSTEMS AND METHODS FOR DIE CONTAINER WAREHOUSING

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

APPARATUS FOR TRANSFERRING SUBSTRATE, AND APPARATUS AND METHOD FOR...

CASSETTE FOR SUBSTRATES OF DISPLAY DEVICES

CHIP CARRIER DEVICE

THERMAL PROCESSING SUSCEPTOR

METHOD OF PRE ALIGNING CARRIER, WAFER AND CARRIER-WAFER COMBINATION...

SUBSTRATE PROCESSING DEVICE

PLATING CHUCK

WAFER CLEANING DEVICE

METHOD OF PRE ALIGNING CARRIER, WAFER AND CARRIER-WAFER COMBINATION...

WAFER CONTAINER AND METHOD FOR HOLDING WAFER

SEMICONDUCTOR WAFER PROCESSING CHAMBER

SYSTEMS AND METHODS FOR DIE CONTAINER WAREHOUSING

Substrate Storage Container and Gas Replacement Unit

VAPOR REDUCTION DEVICE FOR A SEMICONDUCTOR WAFER

Horizontal Substrate Boat

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SOLAR CELL SILICON WAFER CARRYING DEVICE AND TRANSMISSION SYSTEM

WAFER CONTAINER AND METHOD FOR HOLDING WAFER