horizontal transfer of a single workpiece

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H01L21/67748

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67748horizontal transfer of a single workpiece

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for transferring wafer, and apparatus for cont...
- Patent number 12,176,233
- Issue date Dec 24, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Fencheng Zheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum apparatus
- Patent number 12,142,512
- Issue date Nov 12, 2024
- NuFlare Technology, Inc.
- Yoshiaki Shinohara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 12,131,923
- Issue date Oct 29, 2024
- Ebara Corporation
- Yuta Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for chemical mechanical polishing process
- Patent number 12,131,897
- Issue date Oct 29, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-I Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems for integrated decomposition and scanning of a semiconducti...
- Patent number 12,094,738
- Issue date Sep 17, 2024
- Elemental Scientific, Inc.
- Tyler Yost
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber architecture for epitaxial deposition and advanced epitaxia...
- Patent number 12,060,651
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Tetsuya Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,057,326
- Issue date Aug 6, 2024
- Tokyo Electron Limited
- Shota Umezaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Teaching method of transfer device and processing system
- Patent number 12,030,179
- Issue date Jul 9, 2024
- Tokyo Electron Limited
- Toshiaki Toyomaki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Semiconductor fabrication system embedded with effective baking module
- Patent number 12,033,863
- Issue date Jul 9, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Han-Yu Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate transfer apparatus and substrate processing system
- Patent number 12,033,878
- Issue date Jul 9, 2024
- Tokyo Electron Limited
- Tatsuo Hatano
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,027,402
- Issue date Jul 2, 2024
- Ebara Corporation
- Toshio Yokoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for transporting substrate, system for processing substra...
- Patent number 12,009,240
- Issue date Jun 11, 2024
- Tokyo Electron Limited
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transport apparatus
- Patent number 11,978,651
- Issue date May 7, 2024
- BROOKS AUTOMATION US, LLC
- Robert T. Caveney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for processing substrate and method of transferring subst...
- Patent number 11,961,758
- Issue date Apr 16, 2024
- Tokyo Electron Limited
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,955,350
- Issue date Apr 9, 2024
- SCREEN Holdings Co., Ltd.
- Noritake Sumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pin-less substrate transfer apparatus and method for a processing c...
- Patent number 11,948,828
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Sultan Malik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for performing semiconductor processes with coate...
- Patent number 11,939,664
- Issue date Mar 26, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Meng-Chun Hsieh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system, substrate processing method and comput...
- Patent number 11,929,268
- Issue date Mar 12, 2024
- Tokyo Electron Limited
- Munehisa Kodama
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus and method for treating substrate including process chamb...
- Patent number 11,923,216
- Issue date Mar 5, 2024
- Samsung Electronics Co., Ltd.
- Seung Min Shin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transport apparatus
- Patent number 11,894,252
- Issue date Feb 6, 2024
- BROOKS AUTOMATION US, LLC
- Robert T. Caveney
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,887,869
- Issue date Jan 30, 2024
- Tokyo Electron Limited
- Nobuhiko Mouri
- B08 - CLEANING
Information Patent Grant
In-situ apparatus for semiconductor process module
- Patent number 11,887,879
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Yogananda Sarode Vishwanath
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and arrangement for handling and processing substrates
- Patent number RE49725
- Issue date Nov 14, 2023
- ASML Netherlands B.V.
- Hendrik Jan De Jong
Information Patent Grant
Processing apparatus configured for processing wafers continuously...
- Patent number 11,810,807
- Issue date Nov 7, 2023
- Disco Corporation
- Akiko Kigawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems for integrated decomposition and scanning of a semiconducti...
- Patent number 11,804,390
- Issue date Oct 31, 2023
- Elemental Scientific, Inc.
- Tyler Yost
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method, control device and vacuum arrangement
- Patent number 11,804,385
- Issue date Oct 31, 2023
- VON ARDENNE Asset GmbH & Co. KG
- Mirko Loehnert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer system, transfer method, and transfer apparatus
- Patent number 11,804,391
- Issue date Oct 31, 2023
- Kabushiki Kaisha Yaskawa Denki
- Osamu Komiyaji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical treatment, deposition and/or infiltration apparatus and me...
- Patent number 11,802,338
- Issue date Oct 31, 2023
- ASM IP Holding B.V.
- Robert Huggare
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate transfer system and load lock module
- Patent number 11,791,180
- Issue date Oct 17, 2023
- Tokyo Electron Limited
- Norihiko Amikura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer mechanism to reduce back-side substrate contact
- Patent number 11,784,076
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Masato Ishii
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LOAD PORT AND METHODS OF OPERATION
- Publication number 20240387208
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Fam SHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR FABRICATION SYSTEM EMBEDDED WITH EFFECTIVE BAKING MODULE
- Publication number 20240347345
- Publication date Oct 17, 2024
- Taiwan Semiconductor Manufacturing Co., LTD
- Han-Yu Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240339339
- Publication date Oct 10, 2024
- TOKYO ELECTRON LIMITED
- Shota Umezaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TRANSPORTING SUBSTRATE, SYSTEM FOR PROCESSING SUBSTRA...
- Publication number 20240290645
- Publication date Aug 29, 2024
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PROCESSING SUBSTRATE AND METHOD OF TRANSFERRING SUBST...
- Publication number 20240222186
- Publication date Jul 4, 2024
- TOKYO ELECTRON LIMITED
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240213046
- Publication date Jun 27, 2024
- TOKYO ELECTRON LIMITED
- Nobuhiko Mouri
- B08 - CLEANING
Information Patent Application
CHAMBER ARCHITECTURE FOR EPITAXIAL DEPOSITION AND ADVANCED EPITAXIA...
- Publication number 20240209544
- Publication date Jun 27, 2024
- Applied Materials, Inc.
- Tetsuya ISHIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ORGANIC SOLVENT SUPPLYING APPARATUS, SUBSTRATE PROCESSING METHOD, A...
- Publication number 20240203726
- Publication date Jun 20, 2024
- SEMES CO., LTD.
- Myung Seok CHA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSPORT APPARATUS
- Publication number 20240178032
- Publication date May 30, 2024
- Robert T. Caveney
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Contactless Conveying Device
- Publication number 20240174459
- Publication date May 30, 2024
- ROBERT BOSCH GmbH
- Heike Raatz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER METHOD
- Publication number 20240153807
- Publication date May 9, 2024
- TOKYO ELECTRON LIMITED
- Nanako SHINODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESS EQUIPMENT
- Publication number 20240150888
- Publication date May 9, 2024
- Applied Materials, Inc.
- Bhaskar PRASAD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING DEVICE OF DISPLAY DEVICE
- Publication number 20240112932
- Publication date Apr 4, 2024
- Japan Display Inc.
- Takanobu TAKENAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20240105483
- Publication date Mar 28, 2024
- SCREEN Holdings Co., Ltd.
- Ichiro MITSUYOSHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUSCEPTOR TRANSFER FOR PROCESS CHAMBER
- Publication number 20240105485
- Publication date Mar 28, 2024
- Applied Materials, Inc.
- Ribhu GAUTAM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATIC WAFER CENTERING METHOD AND APPARATUS
- Publication number 20240087938
- Publication date Mar 14, 2024
- BROOKS AUTOMATION US, LLC
- Alexander KRUPYSHEV
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SYSTEMS FOR INTEGRATED DECOMPOSITION AND SCANNING OF A SEMICONDUCTI...
- Publication number 20240006201
- Publication date Jan 4, 2024
- ELEMENTAL SCIENTIFIC, INC.
- Tyler Yost
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT
- Publication number 20230420279
- Publication date Dec 28, 2023
- Applied Materials, Inc.
- Masato ISHII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230402303
- Publication date Dec 14, 2023
- TOKYO ELECTRON LIMITED
- Tsunenaga Nakashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS FOR INTEGRATED DECOMPOSITION AND SCANNING OF A SEMICONDUCTI...
- Publication number 20230395406
- Publication date Dec 7, 2023
- ELEMENTAL SCIENTIFIC, INC.
- Tyler Yost
- G01 - MEASURING TESTING
Information Patent Application
AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER
- Publication number 20230395410
- Publication date Dec 7, 2023
- LAM RESEARCH CORPORATION
- Jacob L. Hiester
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20230307278
- Publication date Sep 28, 2023
- TOKYO ELECTRON LIMITED
- Dongwei LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PRODUCING A GAS CURTAIN OF PURGE GAS IN A...
- Publication number 20230287566
- Publication date Sep 14, 2023
- Siltronic AG
- Patrick MOOS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER METHOD
- Publication number 20230282503
- Publication date Sep 7, 2023
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR CHEMICAL MECHANICAL POLISHING PROCESS
- Publication number 20230274929
- Publication date Aug 31, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-I PENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSPORT APPARATUS
- Publication number 20230197493
- Publication date Jun 22, 2023
- BROOKS AUTOMATION US, LLC
- Robert T. Caveney
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
APPARATUS FOR TRANSFERRING SUBSTRATE AND METHOD FOR TRANSFERRING SU...
- Publication number 20230170239
- Publication date Jun 1, 2023
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230143307
- Publication date May 11, 2023
- BROOKS AUTOMATION US, LLC
- Jairo T. Moura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TRANSPORTING SUBSTRATE AND SYSTEM FOR TREATING SUBSTR...
- Publication number 20230130873
- Publication date Apr 27, 2023
- SEMES CO., LTD.
- Sun Ho Ha
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SYSTEMS FOR INTEGRATED DECOMPOSITION AND SCANNING OF A SEMICONDUCTI...
- Publication number 20230111929
- Publication date Apr 13, 2023
- ELEMENTAL SCIENTIFIC, INC.
- Tyler Yost
- H01 - BASIC ELECTRIC ELEMENTS

horizontal transfer of a single workpiece

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus and method for transferring wafer, and apparatus for cont...

Vacuum apparatus

Polishing apparatus and polishing method

Method and system for chemical mechanical polishing process

Systems for integrated decomposition and scanning of a semiconducti...

Chamber architecture for epitaxial deposition and advanced epitaxia...

Substrate processing apparatus and substrate processing method

Teaching method of transfer device and processing system

Semiconductor fabrication system embedded with effective baking module

Substrate transfer apparatus and substrate processing system

Substrate processing apparatus and substrate processing method

Apparatus for transporting substrate, system for processing substra...

Substrate transport apparatus

Apparatus for processing substrate and method of transferring subst...

Substrate processing apparatus

Pin-less substrate transfer apparatus and method for a processing c...

System and method for performing semiconductor processes with coate...

Substrate processing system, substrate processing method and comput...

Apparatus and method for treating substrate including process chamb...

Substrate transport apparatus

Substrate processing apparatus and substrate processing method

In-situ apparatus for semiconductor process module

Method and arrangement for handling and processing substrates

Processing apparatus configured for processing wafers continuously...

Systems for integrated decomposition and scanning of a semiconducti...

Method, control device and vacuum arrangement

Transfer system, transfer method, and transfer apparatus

Chemical treatment, deposition and/or infiltration apparatus and me...

Substrate transfer system and load lock module

Substrate transfer mechanism to reduce back-side substrate contact

Patents Applicationslast 30 patents

LOAD PORT AND METHODS OF OPERATION

SEMICONDUCTOR FABRICATION SYSTEM EMBEDDED WITH EFFECTIVE BAKING MODULE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

APPARATUS FOR TRANSPORTING SUBSTRATE, SYSTEM FOR PROCESSING SUBSTRA...

APPARATUS FOR PROCESSING SUBSTRATE AND METHOD OF TRANSFERRING SUBST...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

CHAMBER ARCHITECTURE FOR EPITAXIAL DEPOSITION AND ADVANCED EPITAXIA...

ORGANIC SOLVENT SUPPLYING APPARATUS, SUBSTRATE PROCESSING METHOD, A...

SUBSTRATE TRANSPORT APPARATUS

Contactless Conveying Device

SUBSTRATE TRANSFER METHOD

SEMICONDUCTOR PROCESS EQUIPMENT

MANUFACTURING DEVICE OF DISPLAY DEVICE

SUBSTRATE TREATING APPARATUS

SUSCEPTOR TRANSFER FOR PROCESS CHAMBER

AUTOMATIC WAFER CENTERING METHOD AND APPARATUS

SYSTEMS FOR INTEGRATED DECOMPOSITION AND SCANNING OF A SEMICONDUCTI...

SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SYSTEMS FOR INTEGRATED DECOMPOSITION AND SCANNING OF A SEMICONDUCTI...

AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER

SUBSTRATE PROCESSING SYSTEM

METHOD AND APPARATUS FOR PRODUCING A GAS CURTAIN OF PURGE GAS IN A...

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER METHOD

METHOD AND SYSTEM FOR CHEMICAL MECHANICAL POLISHING PROCESS

SUBSTRATE TRANSPORT APPARATUS

APPARATUS FOR TRANSFERRING SUBSTRATE AND METHOD FOR TRANSFERRING SU...

SUBSTRATE PROCESSING APPARATUS

APPARATUS FOR TRANSPORTING SUBSTRATE AND SYSTEM FOR TREATING SUBSTR...

SYSTEMS FOR INTEGRATED DECOMPOSITION AND SCANNING OF A SEMICONDUCTI...