Illumination systems for mask or workpiece

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Industry

CPC
H01J2237/31718

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/31718Illumination systems for mask or workpiece

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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR PROCESSING OR IMAGING A SAMPLE
- Publication number 20180033586
- Publication date Feb 1, 2018
- MAPPER LITHOGRAPHY IP BV
- Paul IJmert SCHEFFERS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-Beam Writing Using Inclined Exposure Stripes
- Publication number 20160336147
- Publication date Nov 17, 2016
- IMS Nanofabrication AG
- Elmar Platzgummer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Bi-Directional Double-Pass Multi-Beam Writing
- Publication number 20160276131
- Publication date Sep 22, 2016
- IMS Nanofabrication AG
- Elmar Platzgummer
- H01 - BASIC ELECTRIC ELEMENTS