TREA

Illumination systems for mask or workpiece

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Industry

  • CPC
  • H01J2237/31718
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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/31718Illumination systems for mask or workpiece
Industries