Image distortions due to scanning

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CPC
H01J2237/1536

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HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/1536Image distortions due to scanning

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method and system of image-forming multi-electron beams
- Patent number 12,165,831
- Issue date Dec 10, 2024
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and inspection method
- Patent number 12,057,288
- Issue date Aug 6, 2024
- HITACHI HIGH-TECH CORPORATION
- Momoyo Enyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,887,807
- Issue date Jan 30, 2024
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection tool and method of determining a distortion of an inspec...
- Patent number 11,728,129
- Issue date Aug 15, 2023
- ASML Netherlands B.V.
- Peter Christianus Johannes Maria De Loijer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,587,758
- Issue date Feb 21, 2023
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for learning-guided electron microscopy
- Patent number 11,557,459
- Issue date Jan 17, 2023
- Massachusetts Institute of Technology
- Nir Shavit
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Field curvature correction for multi-beam inspection systems
- Patent number 11,302,511
- Issue date Apr 12, 2022
- KLA Corporation
- Alan Brodie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection tool and method of determining a distortion of an inspec...
- Patent number 11,251,015
- Issue date Feb 15, 2022
- ASML Netherlands B.V.
- Peter Christianus Johannes Maria De Loijer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam observation device, electron beam observation system,...
- Patent number 11,170,969
- Issue date Nov 9, 2021
- HITACHI HIGH-TECH CORPORATION
- Koichi Hamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for learning-guided electron microscopy
- Patent number 11,164,721
- Issue date Nov 2, 2021
- Massachusetts Institute of Technology
- Nir Shavit
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam system and method
- Patent number 10,896,800
- Issue date Jan 19, 2021
- Carl Zeiss MultiSEM GmbH
- Christoph Riedesel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 10,879,031
- Issue date Dec 29, 2020
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for edge-of-wafer inspection and review
- Patent number 10,770,258
- Issue date Sep 8, 2020
- KLA-Tencor Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple electron beam irradiation apparatus, multiple electron bea...
- Patent number 10,734,190
- Issue date Aug 4, 2020
- NuFlare Technology, Inc.
- Atsushi Ando
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 10,651,004
- Issue date May 12, 2020
- Hitachi, Ltd.
- Yasuhiro Shirasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple charged particle beam writing apparatus, and multiple char...
- Patent number 10,607,812
- Issue date Mar 31, 2020
- NuFlare Technology, Inc.
- Hideo Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Distortion measurement method for electron microscope image, electr...
- Patent number 10,541,111
- Issue date Jan 21, 2020
- Jeol Ltd.
- Yuji Konyuba
- G01 - MEASURING TESTING
Information Patent Grant
Method for inspecting a specimen and charged particle multi-beam de...
- Patent number 10,453,645
- Issue date Oct 22, 2019
- Applied Materials Israel Ltd.
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aberration correction method, aberration correction system, and cha...
- Patent number 10,446,361
- Issue date Oct 15, 2019
- Hitachi High-Technologies Corporation
- Zhaohui Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 10,395,886
- Issue date Aug 27, 2019
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for aberration correction in an electron beam system
- Patent number 10,224,177
- Issue date Mar 5, 2019
- KLA-Tencor Corporation
- Christopher Sears
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for edge-of-wafer inspection and review
- Patent number 10,056,224
- Issue date Aug 21, 2018
- KLA-Tencor Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged-particle beam device
- Patent number 9,443,695
- Issue date Sep 13, 2016
- Hitachi High-Technologies Corporation
- Takeyoshi Ohashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 9,312,091
- Issue date Apr 12, 2016
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 9,287,083
- Issue date Mar 15, 2016
- Hitachi High-Technologies Corporation
- Shinichi Tomita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle instrument
- Patent number 9,230,775
- Issue date Jan 5, 2016
- Hitachi High-Technologies Corporation
- Takeyoshi Ohashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus and method using a scanning electron microscope
- Patent number 9,177,759
- Issue date Nov 3, 2015
- Hitachi High-Technologies Corporation
- Wen Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for scanning a surface of an object using a pa...
- Patent number 9,136,090
- Issue date Sep 15, 2015
- Carl Zeiss Microscopy GmbH
- Ralph Pulwey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 9,110,384
- Issue date Aug 18, 2015
- Hitachi High-Technologies Corporation
- Seiko Omori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning electron microscope and a method for imaging a specimen us...
- Patent number 8,853,630
- Issue date Oct 7, 2014
- Hitachi High-Technologies Corporation
- Atsushi Miyamoto
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20240128044
- Publication date Apr 18, 2024
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM CHARGED PARTICLE BEAM SYSTEM WITH ANISOTROPIC FILTERING...
- Publication number 20240128051
- Publication date Apr 18, 2024
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM OF IMAGE-FORMING MULTI-ELECTRON BEAMS
- Publication number 20240096586
- Publication date Mar 21, 2024
- KLA Corporation
- Xinrong JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISTORTION OPTIMIZED MULTI-BEAM SCANNING SYSTEM
- Publication number 20240096587
- Publication date Mar 21, 2024
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20230282441
- Publication date Sep 7, 2023
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device and Scan Waveform Generation Method
- Publication number 20230260739
- Publication date Aug 17, 2023
- Hitachi High-Tech Corporation
- Keisuke TANUMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sample Display Method
- Publication number 20230178329
- Publication date Jun 8, 2023
- TESCAN BRNO s.r.o.
- Jiri Dluhos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM DIGITAL SCAN AND IMAGE ACQUISITION
- Publication number 20220351936
- Publication date Nov 3, 2022
- Carl Zeiss MultiSEM GmbH
- Nicolas Kaufmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device and Inspection Method
- Publication number 20220328279
- Publication date Oct 13, 2022
- Hitachi High-Tech Corporation
- Momoyo ENYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION TOOL AND METHOD OF DETERMINING A DISTORTION OF AN INSPEC...
- Publication number 20220270848
- Publication date Aug 25, 2022
- ASML NETHERLANDS B.V.
- Peter Christianus Johannes Maria DE LOIJER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Learning-Guided Electron Microscopy
- Publication number 20220068599
- Publication date Mar 3, 2022
- Massachusetts Institute of Technology
- Nir Shavit
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20210233736
- Publication date Jul 29, 2021
- ASML Netherlands B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION TOOL AND METHOD OF DETERMINING A DISTORTION OF AN INSPEC...
- Publication number 20200321187
- Publication date Oct 8, 2020
- ASML NETHERLANDS B.V.
- Peter Christianus Johannes Maria DE LOIJER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Learning-Guided Electron Microscopy
- Publication number 20200312614
- Publication date Oct 1, 2020
- Massachusetts Institute of Technology
- Nir Shavit
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20200152412
- Publication date May 14, 2020
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE ELECTRON BEAM IRRADIATION APPARATUS, MULTIPLE ELECTRON BEA...
- Publication number 20190355547
- Publication date Nov 21, 2019
- NuFlare Technology, Inc.
- Atsushi Ando
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM AND METHOD
- Publication number 20190355544
- Publication date Nov 21, 2019
- CARL ZEISS MICROSCOPY GMBH
- Christoph Riedesel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTIPLE CHAR...
- Publication number 20190198290
- Publication date Jun 27, 2019
- NuFlare Technology, Inc.
- Hideo INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20190103250
- Publication date Apr 4, 2019
- Hitachi High-Technologies Corporation
- Toshiyuki YOKOSUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System for Edge-of-Wafer Inspection and Review
- Publication number 20190006143
- Publication date Jan 3, 2019
- KLA-Tencor Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Distortion Measurement Method for Electron Microscope Image, Electr...
- Publication number 20180342370
- Publication date Nov 29, 2018
- JEOL Ltd.
- Yuji Konyuba
- G01 - MEASURING TESTING
Information Patent Application
SCANNING ELECTRON MICROSCOPE AND A METHOD FOR IMAGING A SPECIMEN US...
- Publication number 20140145078
- Publication date May 29, 2014
- Hitachi High-Technologies Corporation
- Atsushi Miyamoto
- G01 - MEASURING TESTING
Information Patent Application
Method and Apparatus for Scanning a Surface of an Object Using a Pa...
- Publication number 20130320226
- Publication date Dec 5, 2013
- CARL ZEISS MICROSCOPY GMBH
- Ralph Pulwey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20130299715
- Publication date Nov 14, 2013
- Hitachi High-Technologies Corporation
- Shinichi Tomita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PRODUCING A REPRESENTATION OF AN OBJECT BY MEANS OF A PA...
- Publication number 20130270437
- Publication date Oct 17, 2013
- Josef Biberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMBINE APPARATUS OF SCANNING ELECTRON MICROSCOPE AND ENERGY DISPER...
- Publication number 20130070900
- Publication date Mar 21, 2013
- COXEM CO., LTD.
- Jun-Hee Lee
- G01 - MEASURING TESTING
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20120298865
- Publication date Nov 29, 2012
- Seiko Omori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CHARGED PARTICLE INSTRUMENT
- Publication number 20120286160
- Publication date Nov 15, 2012
- Hitachi High-Technologies Corporation
- Takeyoshi OHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE-POLE ELECTROSTATIC DEFLECTOR FOR IMPROVING THROUGHPUT OF F...
- Publication number 20120205537
- Publication date Aug 16, 2012
- Xinrong JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scanning Electron Microscope and a Method for Imaging a Specimen Us...
- Publication number 20120181426
- Publication date Jul 19, 2012
- Atsushi MIYAMOTO
- G01 - MEASURING TESTING

Image distortions due to scanning

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and system of image-forming multi-electron beams

Charged particle beam device and inspection method

Apparatus of plural charged-particle beams

Inspection tool and method of determining a distortion of an inspec...

Apparatus of plural charged-particle beams

System and method for learning-guided electron microscopy

Field curvature correction for multi-beam inspection systems

Inspection tool and method of determining a distortion of an inspec...

Electron beam observation device, electron beam observation system,...

System and method for learning-guided electron microscopy

Charged particle beam system and method

Apparatus of plural charged-particle beams

Method and system for edge-of-wafer inspection and review

Multiple electron beam irradiation apparatus, multiple electron bea...

Charged particle beam device

Multiple charged particle beam writing apparatus, and multiple char...

Distortion measurement method for electron microscope image, electr...

Method for inspecting a specimen and charged particle multi-beam de...

Aberration correction method, aberration correction system, and cha...

Apparatus of plural charged-particle beams

Method and system for aberration correction in an electron beam system

Method and system for edge-of-wafer inspection and review

Charged-particle beam device

Charged particle beam apparatus

Charged particle beam device

Charged particle instrument

Processing apparatus and method using a scanning electron microscope

Method and apparatus for scanning a surface of an object using a pa...

Scanning electron microscope

Scanning electron microscope and a method for imaging a specimen us...

Patents Applicationslast 30 patents

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

MULTI-BEAM CHARGED PARTICLE BEAM SYSTEM WITH ANISOTROPIC FILTERING...

METHOD AND SYSTEM OF IMAGE-FORMING MULTI-ELECTRON BEAMS

DISTORTION OPTIMIZED MULTI-BEAM SCANNING SYSTEM

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

Charged Particle Beam Device and Scan Waveform Generation Method

Sample Display Method

MULTI-BEAM DIGITAL SCAN AND IMAGE ACQUISITION

Charged Particle Beam Device and Inspection Method

INSPECTION TOOL AND METHOD OF DETERMINING A DISTORTION OF AN INSPEC...

System and Method for Learning-Guided Electron Microscopy

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

INSPECTION TOOL AND METHOD OF DETERMINING A DISTORTION OF AN INSPEC...

System and Method for Learning-Guided Electron Microscopy

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

MULTIPLE ELECTRON BEAM IRRADIATION APPARATUS, MULTIPLE ELECTRON BEA...

CHARGED PARTICLE BEAM SYSTEM AND METHOD

MULTIPLE CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTIPLE CHAR...

Charged Particle Beam Device

Method and System for Edge-of-Wafer Inspection and Review

Distortion Measurement Method for Electron Microscope Image, Electr...

SCANNING ELECTRON MICROSCOPE AND A METHOD FOR IMAGING A SPECIMEN US...

Method and Apparatus for Scanning a Surface of an Object Using a Pa...

CHARGED PARTICLE BEAM DEVICE

METHOD FOR PRODUCING A REPRESENTATION OF AN OBJECT BY MEANS OF A PA...

COMBINE APPARATUS OF SCANNING ELECTRON MICROSCOPE AND ENERGY DISPER...

SCANNING ELECTRON MICROSCOPE

CHARGED PARTICLE INSTRUMENT

MULTIPLE-POLE ELECTROSTATIC DEFLECTOR FOR IMPROVING THROUGHPUT OF F...

Scanning Electron Microscope and a Method for Imaging a Specimen Us...