Imaging plates

Industry

CPC
H01J2237/2447

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/2447Imaging plates

Industries

Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam apparatus with multiple detectors and methods...
- Patent number 12,142,455
- Issue date Nov 12, 2024
- ASML Netherlands B.V.
- Xuedong Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Target and algorithm to measure overlay by modeling back scattering...
- Patent number 12,100,574
- Issue date Sep 24, 2024
- KLA Corporation
- Nadav Gutman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system
- Patent number 12,068,128
- Issue date Aug 20, 2024
- HITACHI HIGH-TECH CORPORATION
- Yusuke Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple charged-particle beam apparatus with low crosstalk
- Patent number 12,033,830
- Issue date Jul 9, 2024
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pulsed charged-particle beam system
- Patent number 11,942,302
- Issue date Mar 26, 2024
- ASML Netherlands B.V.
- Arno Jan Bleeker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope device and electron beam inspection ap...
- Patent number 11,908,657
- Issue date Feb 20, 2024
- Zhongke Jingyuan Electron Limited
- Qinglang Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detection and correction of system responses in real-time
- Patent number 11,894,214
- Issue date Feb 6, 2024
- KLA Corporation
- Henning Stoschus
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Backscattered electron detector, apparatus of charged-particle beam...
- Patent number 11,854,763
- Issue date Dec 26, 2023
- BORRIES PTE. LTD.
- Wei Fang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Embedded high-Z marker material and process for alignment of multil...
- Patent number 11,823,864
- Issue date Nov 21, 2023
- HRL Laboratories, LLC
- Christopher Bohn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Primary charged particle beam current measurement
- Patent number 11,817,292
- Issue date Nov 14, 2023
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- John Breuer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bandpass charged particle energy filtering detector for charged par...
- Patent number 11,749,495
- Issue date Sep 5, 2023
- KLA Corp.
- Youfei Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 11,749,497
- Issue date Sep 5, 2023
- HITACHI HIGH-TECH CORPORATION
- Shunsuke Mizutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,728,127
- Issue date Aug 15, 2023
- HITACHI HIGH-TECH CORPORATION
- Takuma Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam inspection apparatus with improved detection performance...
- Patent number 11,721,521
- Issue date Aug 8, 2023
- ASML Netherlands B.V.
- Weiming Ren
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam device and analysis method
- Patent number 11,710,615
- Issue date Jul 25, 2023
- Jeol Ltd.
- Kenichi Tsutsumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and setting assisting method
- Patent number 11,682,539
- Issue date Jun 20, 2023
- Jeol Ltd.
- Kazutaka Watakabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device for inspection of a specimen with a pl...
- Patent number 11,676,795
- Issue date Jun 13, 2023
- FEI Company
- Pavel Stejskal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of charged-particle beam such as scanning electron micros...
- Patent number 11,664,189
- Issue date May 30, 2023
- BORRIES PTE. LTD.
- Zhongwei Chen
- B08 - CLEANING
Information Patent Grant
Charged particle beam apparatus
- Patent number 11,646,172
- Issue date May 9, 2023
- HITACHI HIGH-TECH CORPORATION
- Takafumi Miwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope and a method for overlay monitoring
- Patent number 11,646,173
- Issue date May 9, 2023
- Applied Materials Israel Ltd.
- Itay Asulin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Back-scatter electrons (BSE) imaging with a SEM in tilted mode usin...
- Patent number 11,626,267
- Issue date Apr 11, 2023
- Applied Materials Israel Ltd.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sensor module for scanning electron microscopy applications
- Patent number 11,610,757
- Issue date Mar 21, 2023
- KLA Corporation
- Marcel Trimpl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and setting assisting method
- Patent number 11,574,795
- Issue date Feb 7, 2023
- Jeol Ltd.
- Kazutaka Watakabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 11,562,882
- Issue date Jan 24, 2023
- HITACHI HIGH-TECH CORPORATION
- Takuma Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and setting assisting method
- Patent number 11,557,458
- Issue date Jan 17, 2023
- Jeol Ltd.
- Kazutaka Watakabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscopy system and pattern depth measurement m...
- Patent number 11,545,336
- Issue date Jan 3, 2023
- HITACHI HIGH-TECH CORPORATION
- Takahiro Nishihata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detection and correction of system responses in real-time
- Patent number 11,508,551
- Issue date Nov 22, 2022
- KLA Corporation
- Henning Stoschus
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Wafer inspection based on electron beam induced current
- Patent number 11,501,949
- Issue date Nov 15, 2022
- ASML Netherlands B.V.
- Long Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for processing a microstructured component
- Patent number 11,487,211
- Issue date Nov 1, 2022
- Carl Zeiss SMT GmbH
- Nicole Auth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple charged-particle beam apparatus with low crosstalk
- Patent number 11,469,074
- Issue date Oct 11, 2022
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR CONFIRMING AND FINDING AN IONIZATION EDGE WITHIN A MEASU...
- Publication number 20240379324
- Publication date Nov 14, 2024
- FEI Company
- Wouter Rene J. VAN DEN BROEK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam System
- Publication number 20240371601
- Publication date Nov 7, 2024
- HITACHI HIGH-TECH CORPORATION
- Yusuke NAKAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH RESOLUTION, LOW ENERGY ELECTRON MICROSCOPE FOR PROVIDING TOPOG...
- Publication number 20240272099
- Publication date Aug 15, 2024
- Carl Zeiss SMT GMBH
- Daniel Schwarz
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE BY USING...
- Publication number 20240203688
- Publication date Jun 20, 2024
- Samsung Electronics Co., Ltd.
- Kunsu KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE SENSORS INCLUDING WIDE BANDGAP MATERIALS
- Publication number 20240194442
- Publication date Jun 13, 2024
- FEI Company
- Branislav Straka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR MULTI-BEAM ELECTRON MICROSCOPY USING A DETECT...
- Publication number 20240194440
- Publication date Jun 13, 2024
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NON-DESTRUCTIVE SEM-BASED DEPTH-PROFILING OF SAMPLES
- Publication number 20240096591
- Publication date Mar 21, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Dror Shemesh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR INDEXING ELECTRON DIFFRACTION PATTERNS
- Publication number 20230395350
- Publication date Dec 7, 2023
- Oxford Instruments Nanotechnology Tools Limited
- Patrick Trimby
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS AND PROCESSOR SYSTEM
- Publication number 20230335373
- Publication date Oct 19, 2023
- HITACHI HIGH-TECH CORPORATION
- Akio YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID SCANNING ELECTRON MICROSCOPY AND ACOUSTO-OPTIC BASED METROLOGY
- Publication number 20230326713
- Publication date Oct 12, 2023
- APPLIED MATERIALS ISRAEL LTD.
- Guy Shwartz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR SIGNAL ELECTRON DETECTION IN AN INSPECTION...
- Publication number 20230298851
- Publication date Sep 21, 2023
- ASML NETHERLANDS B.V.
- Chih-Yu JEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus
- Publication number 20230274910
- Publication date Aug 31, 2023
- JEOL Ltd.
- Takeshi Otsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS SUPPLY DEVICE, SYSTEM HAVING A GAS SUPPLY DEVICE, AND PARTICLE...
- Publication number 20230241650
- Publication date Aug 3, 2023
- CARL ZEISS MICROSCOPY GMBH
- Andreas Schmaunz
- B08 - CLEANING
Information Patent Application
SENSOR MODULE FOR SCANNING ELECTRON MICROSCOPY APPLICATIONS
- Publication number 20230230800
- Publication date Jul 20, 2023
- KLA Corporation
- Marcel Trimpl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR PERFORMING SAMPLE LIFT-OUT FOR HIGHLY REACT...
- Publication number 20230215683
- Publication date Jul 6, 2023
- FEI Company
- Adam STOKES
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE ANALYSIS SYSTEM COMPRISING A PULSED ELECTRON SOURCE
- Publication number 20230170176
- Publication date Jun 1, 2023
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Daniel COMPARAT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PULSED CHARGED-PARTICLE BEAM SYSTEM
- Publication number 20230154722
- Publication date May 18, 2023
- ASML NETHERLANDS B.V.
- Arno Jan BLEEKER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR ENERGY SELECTIVE DIRECT ELECTRON IMAGING
- Publication number 20230145436
- Publication date May 11, 2023
- DIRECT ELECTRON, LP
- Benjamin BAMMES
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR ELECTRON CRYOMICROSCOPY
- Publication number 20230135352
- Publication date May 4, 2023
- United Kingdom Research and Innovation
- Greg MCMULLAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR SIGNAL ELECTRON DETECTION
- Publication number 20230137186
- Publication date May 4, 2023
- ASML NETHERLANDS B.V.
- Weiming REN
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR SIGNAL ELECTRON DETECTION
- Publication number 20230112447
- Publication date Apr 13, 2023
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20230109853
- Publication date Apr 13, 2023
- TASMIT, INC.
- Naoya SAITOH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENERGY BAND-PASS FILTERING FOR IMPROVED HIGH LANDING ENERGY BACKSCA...
- Publication number 20230109695
- Publication date Apr 13, 2023
- ASML NETHERLANDS B.V.
- Xuechen ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BANDPASS CHARGED PARTICLE ENERGY FILTERING DETECTOR FOR CHARGED PAR...
- Publication number 20230104558
- Publication date Apr 6, 2023
- KLA Corporation
- Youfei Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Detection and Correction of System Responses in Real-Time
- Publication number 20230045072
- Publication date Feb 9, 2023
- KLA Corporation
- Henning Stoschus
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MULTIPLE CHARGED-PARTICLE BEAM APPARATUS WITH LOW CROSSTALK
- Publication number 20230020194
- Publication date Jan 19, 2023
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR OPERATING A PARTICLE BEAM MICROSCOPE, PARTICLE BEAM MICR...
- Publication number 20230011964
- Publication date Jan 12, 2023
- CARL ZEISS MICROSCOPY GMBH
- Martin Ross-Messemer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE DEVICE AND ELECTRON BEAM INSPECTION AP...
- Publication number 20230005704
- Publication date Jan 5, 2023
- Zhongke Jingyuan Electron Limited, Beijing (CN)
- Qinglang Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE DEVICE, DETECTOR, AND METHODS
- Publication number 20230005706
- Publication date Jan 5, 2023
- ASML NETHERLANDS B.V.
- Albertus Victor Gerardus MANGNUS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN INSPECTING DEVICE
- Publication number 20220359151
- Publication date Nov 10, 2022
- Hitachi High-Tech Corporation
- Wei Sun
- G06 - COMPUTING CALCULATING COUNTING

Imaging plates

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Charged particle beam apparatus with multiple detectors and methods...

Target and algorithm to measure overlay by modeling back scattering...

Charged particle beam system

Multiple charged-particle beam apparatus with low crosstalk

Pulsed charged-particle beam system

Scanning electron microscope device and electron beam inspection ap...

Detection and correction of system responses in real-time

Backscattered electron detector, apparatus of charged-particle beam...

Embedded high-Z marker material and process for alignment of multil...

Primary charged particle beam current measurement

Bandpass charged particle energy filtering detector for charged par...

Charged particle beam apparatus

Charged particle beam device

Multi-beam inspection apparatus with improved detection performance...

Charged particle beam device and analysis method

Charged particle beam apparatus and setting assisting method

Charged particle beam device for inspection of a specimen with a pl...

Apparatus of charged-particle beam such as scanning electron micros...

Charged particle beam apparatus

Scanning electron microscope and a method for overlay monitoring

Back-scatter electrons (BSE) imaging with a SEM in tilted mode usin...

Sensor module for scanning electron microscopy applications

Charged particle beam apparatus and setting assisting method

Scanning electron microscope

Charged particle beam apparatus and setting assisting method

Scanning electron microscopy system and pattern depth measurement m...

Detection and correction of system responses in real-time

Wafer inspection based on electron beam induced current

Device and method for processing a microstructured component

Multiple charged-particle beam apparatus with low crosstalk

Patents Applicationslast 30 patents

METHOD FOR CONFIRMING AND FINDING AN IONIZATION EDGE WITHIN A MEASU...

Charged Particle Beam System

HIGH RESOLUTION, LOW ENERGY ELECTRON MICROSCOPE FOR PROVIDING TOPOG...

APPARATUS AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE BY USING...

CHARGED PARTICLE SENSORS INCLUDING WIDE BANDGAP MATERIALS

SYSTEM AND METHOD FOR MULTI-BEAM ELECTRON MICROSCOPY USING A DETECT...

NON-DESTRUCTIVE SEM-BASED DEPTH-PROFILING OF SAMPLES

METHOD AND SYSTEM FOR INDEXING ELECTRON DIFFRACTION PATTERNS

CHARGED PARTICLE BEAM APPARATUS AND PROCESSOR SYSTEM

HYBRID SCANNING ELECTRON MICROSCOPY AND ACOUSTO-OPTIC BASED METROLOGY

SYSTEMS AND METHODS FOR SIGNAL ELECTRON DETECTION IN AN INSPECTION...

Charged Particle Beam Apparatus

GAS SUPPLY DEVICE, SYSTEM HAVING A GAS SUPPLY DEVICE, AND PARTICLE...

SENSOR MODULE FOR SCANNING ELECTRON MICROSCOPY APPLICATIONS

SYSTEMS AND METHODS FOR PERFORMING SAMPLE LIFT-OUT FOR HIGHLY REACT...

SURFACE ANALYSIS SYSTEM COMPRISING A PULSED ELECTRON SOURCE

PULSED CHARGED-PARTICLE BEAM SYSTEM

METHOD AND APPARATUS FOR ENERGY SELECTIVE DIRECT ELECTRON IMAGING

SYSTEM AND METHOD FOR ELECTRON CRYOMICROSCOPY

SYSTEMS AND METHODS FOR SIGNAL ELECTRON DETECTION

SYSTEMS AND METHODS FOR SIGNAL ELECTRON DETECTION

SCANNING ELECTRON MICROSCOPE

ENERGY BAND-PASS FILTERING FOR IMPROVED HIGH LANDING ENERGY BACKSCA...

BANDPASS CHARGED PARTICLE ENERGY FILTERING DETECTOR FOR CHARGED PAR...

Detection and Correction of System Responses in Real-Time

MULTIPLE CHARGED-PARTICLE BEAM APPARATUS WITH LOW CROSSTALK

METHOD FOR OPERATING A PARTICLE BEAM MICROSCOPE, PARTICLE BEAM MICR...

SCANNING ELECTRON MICROSCOPE DEVICE AND ELECTRON BEAM INSPECTION AP...

CHARGED PARTICLE DEVICE, DETECTOR, AND METHODS

PATTERN INSPECTING DEVICE