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HELECTRICITY H01Electric elements H01SDEVICES USING STIMULATED EMISSION H01S3/00Lasers

Current Industry

H01S3/104in gas lasers

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Patents Grantslast 30 patents

Information Patent Grant
Excimer laser system with long service intervals
- Patent number 12,160,080
- Issue date Dec 3, 2024
- STRATA SKIN SCIENCES, INC.
- James Morris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for aligning master oscillator power amplifier...
- Patent number 11,973,302
- Issue date Apr 30, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Lin Louis Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gaseous laser systems with edge-defining element and related techni...
- Patent number 11,855,406
- Issue date Dec 26, 2023
- XEMED LLC
- F. William Hersman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Residual gain monitoring and reduction for EUV drive laser
- Patent number 11,737,200
- Issue date Aug 22, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Lin Louis Chang
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Methods and systems for aligning master oscillator power amplifier...
- Patent number 11,588,293
- Issue date Feb 21, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Lin Louis Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas laser apparatus
- Patent number 11,081,850
- Issue date Aug 3, 2021
- Gigaphoton Inc.
- Natsushi Suzuki
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Laser light energy and dose control using repetition rate based gai...
- Patent number 11,081,852
- Issue date Aug 3, 2021
- Cymer, LLC
- Yingbo Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Excimer laser apparatus and electronic-device manufacturing method
- Patent number 11,079,686
- Issue date Aug 3, 2021
- Gigaphoton Inc.
- Keisuke Ishida
- G01 - MEASURING TESTING
Information Patent Grant
Residual gain monitoring and reduction for EUV drive laser
- Patent number 10,980,100
- Issue date Apr 13, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Lin Louis Chang
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Laser apparatus
- Patent number 10,971,886
- Issue date Apr 6, 2021
- Gigaphoton Inc.
- Takeshi Asayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas laser apparatus
- Patent number 10,971,883
- Issue date Apr 6, 2021
- Gigaphoton Inc.
- Natsushi Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser apparatus
- Patent number 10,965,090
- Issue date Mar 30, 2021
- Gigaphoton Inc.
- Takeshi Asayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for spatiotemporal control of a laser and appli...
- Patent number 10,897,115
- Issue date Jan 19, 2021
- University of Rochester
- Dustin H. Froula
- G02 - OPTICS
Information Patent Grant
Laser apparatus and extreme ultraviolet light generating system
- Patent number 10,897,118
- Issue date Jan 19, 2021
- Gigaphoton Inc.
- Yoshiaki Kurosawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gas optimization in a gas discharge light source
- Patent number 10,892,594
- Issue date Jan 12, 2021
- Cymer, LLC
- Tanuj Aggarwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser gas regeneration system and laser system
- Patent number 10,879,664
- Issue date Dec 29, 2020
- Gigaphoton Inc.
- Masanori Yashiro
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Laser machining device
- Patent number 10,741,988
- Issue date Aug 11, 2020
- FANUC CORPORATION
- Kazuya Oota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas laser apparatus
- Patent number 10,666,008
- Issue date May 26, 2020
- Gigaphoton Inc.
- Natsushi Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser apparatus and measurement unit
- Patent number 10,483,713
- Issue date Nov 19, 2019
- Gigaphoton Inc.
- Seiji Nogiwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser unit
- Patent number 10,447,001
- Issue date Oct 15, 2019
- Gigaphoton Inc.
- Minoru Taniyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for generating extreme ultraviolet light
- Patent number 10,306,743
- Issue date May 28, 2019
- Gigaphoton Inc.
- Tsukasa Hori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser system
- Patent number 10,290,992
- Issue date May 14, 2019
- Gigaphoton Inc.
- Hiroshi Umeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for generating extreme ultraviolet light
- Patent number 10,251,255
- Issue date Apr 2, 2019
- Gigaphoton Inc.
- Tsukasa Hori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser apparatus, EUV light generation system, and method of control...
- Patent number 10,224,686
- Issue date Mar 5, 2019
- Gigaphoton Inc.
- Yasufumi Kawasuji
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Gas optimization in a gas discharge light source
- Patent number 10,218,147
- Issue date Feb 26, 2019
- Cymer, LLC
- Tanuj Aggarwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser unit and non-transitory computer-readable storage medium
- Patent number 10,164,396
- Issue date Dec 25, 2018
- Gigaphoton Inc.
- Akihiko Kurosu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for generating extreme ultraviolet light
- Patent number 10,117,317
- Issue date Oct 30, 2018
- Gigaphoton Inc.
- Tsukasa Hori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System for reclaiming, rebalancing and recirculating laser gas mixt...
- Patent number 10,103,507
- Issue date Oct 16, 2018
- Matheson Tri-Gas, Inc.
- Joseph Vininski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas laser apparatus
- Patent number 10,038,295
- Issue date Jul 31, 2018
- Gigaphoton Inc.
- Natsushi Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser system
- Patent number 9,991,665
- Issue date Jun 5, 2018
- Gigaphoton Inc.
- Hiroshi Umeda
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND SYSTEMS FOR ALIGNING MASTER OSCILLATOR POWER AMPLIFIER...
- Publication number 20240297476
- Publication date Sep 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Lin Louis Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GASEOUS LASER SYSTEMS WITH EDGE-DEFINING ELEMENT AND RELATED TECHNI...
- Publication number 20240170910
- Publication date May 23, 2024
- F. William Hersman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER POWER CONTROL
- Publication number 20240072508
- Publication date Feb 29, 2024
- KWIK LOK CORPORATION
- Andrew Leonard Roy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCING ENERGY CONSUMPTION OF A GAS DISCHARGE CHAMBER BLOWER
- Publication number 20240039228
- Publication date Feb 1, 2024
- CYMER, LLC
- Mohammad Taghi Mohebbi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GASEOUS LASER SYSTEMS WITH EDGE-DEFINING ELEMENT AND RELATED TECHNI...
- Publication number 20230318251
- Publication date Oct 5, 2023
- Xemed LLC
- F. William Hersman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR ALIGNING MASTER OSCILLATOR POWER AMPLIFIER...
- Publication number 20230208092
- Publication date Jun 29, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Lin Louis Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL PULSED POWER SYSTEM WITH INDEPENDENT VOLTAGE AND TIMING CONTRO...
- Publication number 20230017337
- Publication date Jan 19, 2023
- CYMER, LLC
- Paul Christopher Melcher
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PACKED-BED FILTER FOR METAL FLUORIDE DUST TRAPPING IN LASER DISCHAR...
- Publication number 20230008480
- Publication date Jan 12, 2023
- CYMER, LLC
- Ulrich Niemann
- B03 - SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES O...
Information Patent Application
GAS CONTROL METHOD AND RELATED USES
- Publication number 20220285902
- Publication date Sep 8, 2022
- CYMER, LLC
- Yingbo Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER PROCESSING METHOD OF PRINTED CIRCUIT BOARD AND LASER PROCESSI...
- Publication number 20220216665
- Publication date Jul 7, 2022
- OFUNA ENTERPRISE Japan Co., Ltd.
- Kunio ARAI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXCIMER LASER SYSTEM WITH LONG SERVICE INTERVALS
- Publication number 20220094133
- Publication date Mar 24, 2022
- STRATA SKIN SCIENCES, INC.
- James Morris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Residual gain monitoring and reduction for EUV drive laser
- Publication number 20210235572
- Publication date Jul 29, 2021
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun-Lin Louis Chang
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
GAS LASER DEVICE
- Publication number 20210167568
- Publication date Jun 3, 2021
- Gigaphoton Inc.
- Hiroshi UMEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXCIMER LASER APPARATUS AND ELECTRONIC-DEVICE MANUFACTURING METHOD
- Publication number 20200274315
- Publication date Aug 27, 2020
- Gigaphoton Inc.
- Keisuke ISHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER APPARATUS
- Publication number 20200244029
- Publication date Jul 30, 2020
- Gigaphoton Inc.
- Natsushi SUZUKI
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Residual gain monitoring and reduction for EUV drive laser
- Publication number 20200146137
- Publication date May 7, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun-Lin Louis Chang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER APPARATUS
- Publication number 20190280451
- Publication date Sep 12, 2019
- Gigaphoton Inc.
- Takeshi ASAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER GAS REGENERATION SYSTEM AND LASER SYSTEM
- Publication number 20190237928
- Publication date Aug 1, 2019
- Gigaphoton Inc.
- Masanori YASHIRO
- C01 - INORGANIC CHEMISTRY
Information Patent Application
GAS OPTIMIZATION IN A GAS DISCHARGE LIGHT SOURCE
- Publication number 20190190229
- Publication date Jun 20, 2019
- CYMER, LLC
- Tanuj Aggarwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER DEVICE
- Publication number 20190148905
- Publication date May 16, 2019
- Gigaphoton Inc.
- Hiroshi UMEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
- Publication number 20190141826
- Publication date May 9, 2019
- GIGAPHOTON INC.
- Tsukasa HORI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEMS AND METHODS FOR SPATIOTEMPORAL CONTROL OF A LASER AND APPLI...
- Publication number 20190103720
- Publication date Apr 4, 2019
- University of Rochester
- Dustin H. Froula
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER APPARATUS
- Publication number 20190081450
- Publication date Mar 14, 2019
- Gigaphoton Inc.
- Natsushi SUZUKI
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
LASER UNIT AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM
- Publication number 20190081451
- Publication date Mar 14, 2019
- Gigaphoton Inc.
- Akihiko KUROSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER APPARATUS
- Publication number 20190081449
- Publication date Mar 14, 2019
- Gigaphoton Inc.
- Natsushi SUZUKI
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
GAS LASER APPARATUS
- Publication number 20190074655
- Publication date Mar 7, 2019
- Gigaphoton Inc.
- Natsushi SUZUKI
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
GAS LASER APPARATUS
- Publication number 20190074654
- Publication date Mar 7, 2019
- Gigaphoton Inc.
- Natsushi SUZUKI
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
- Publication number 20190037677
- Publication date Jan 31, 2019
- GIGAPHOTON INC.
- Tsukasa HORI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
GAS LASER APPARATUS
- Publication number 20190020167
- Publication date Jan 17, 2019
- Gigaphoton Inc.
- Natsushi SUZUKI
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
LASER MACHINING DEVICE
- Publication number 20180301862
- Publication date Oct 18, 2018
- FANUC CORPORATION
- Kazuya OOTA
- H01 - BASIC ELECTRIC ELEMENTS

in gas lasers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Excimer laser system with long service intervals

Methods and systems for aligning master oscillator power amplifier...

Gaseous laser systems with edge-defining element and related techni...

Residual gain monitoring and reduction for EUV drive laser

Methods and systems for aligning master oscillator power amplifier...

Gas laser apparatus

Laser light energy and dose control using repetition rate based gai...

Excimer laser apparatus and electronic-device manufacturing method

Residual gain monitoring and reduction for EUV drive laser

Laser apparatus

Gas laser apparatus

Laser apparatus

Systems and methods for spatiotemporal control of a laser and appli...

Laser apparatus and extreme ultraviolet light generating system

Gas optimization in a gas discharge light source

Laser gas regeneration system and laser system

Laser machining device

Gas laser apparatus

Laser apparatus and measurement unit

Laser unit

System and method for generating extreme ultraviolet light

Laser system

System and method for generating extreme ultraviolet light

Laser apparatus, EUV light generation system, and method of control...

Gas optimization in a gas discharge light source

Laser unit and non-transitory computer-readable storage medium

System and method for generating extreme ultraviolet light

System for reclaiming, rebalancing and recirculating laser gas mixt...

Gas laser apparatus

Laser system

Patents Applicationslast 30 patents

METHODS AND SYSTEMS FOR ALIGNING MASTER OSCILLATOR POWER AMPLIFIER...

GASEOUS LASER SYSTEMS WITH EDGE-DEFINING ELEMENT AND RELATED TECHNI...

LASER POWER CONTROL

REDUCING ENERGY CONSUMPTION OF A GAS DISCHARGE CHAMBER BLOWER

GASEOUS LASER SYSTEMS WITH EDGE-DEFINING ELEMENT AND RELATED TECHNI...

METHODS AND SYSTEMS FOR ALIGNING MASTER OSCILLATOR POWER AMPLIFIER...

DUAL PULSED POWER SYSTEM WITH INDEPENDENT VOLTAGE AND TIMING CONTRO...

PACKED-BED FILTER FOR METAL FLUORIDE DUST TRAPPING IN LASER DISCHAR...

GAS CONTROL METHOD AND RELATED USES

LASER PROCESSING METHOD OF PRINTED CIRCUIT BOARD AND LASER PROCESSI...

EXCIMER LASER SYSTEM WITH LONG SERVICE INTERVALS

Residual gain monitoring and reduction for EUV drive laser

GAS LASER DEVICE

EXCIMER LASER APPARATUS AND ELECTRONIC-DEVICE MANUFACTURING METHOD

GAS LASER APPARATUS

Residual gain monitoring and reduction for EUV drive laser

LASER APPARATUS

LASER GAS REGENERATION SYSTEM AND LASER SYSTEM

GAS OPTIMIZATION IN A GAS DISCHARGE LIGHT SOURCE

GAS LASER DEVICE

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT

SYSTEMS AND METHODS FOR SPATIOTEMPORAL CONTROL OF A LASER AND APPLI...

GAS LASER APPARATUS

LASER UNIT AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM

GAS LASER APPARATUS

GAS LASER APPARATUS

GAS LASER APPARATUS

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT

GAS LASER APPARATUS

LASER MACHINING DEVICE