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Patents Grants
last 30 patents
Information
Patent Grant
Excimer laser system with long service intervals
Patent number
12,160,080
Issue date
Dec 3, 2024
STRATA SKIN SCIENCES, INC.
James Morris
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Line narrowed gas laser apparatus, control method therefor, electro...
Patent number
12,140,869
Issue date
Nov 12, 2024
Gigaphoton Inc.
Yousuke Fujimaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Line narrowed gas laser apparatus, control method therefor, electro...
Patent number
12,105,426
Issue date
Oct 1, 2024
Gigaphoton Inc.
Yousuke Fujimaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas monitoring system
Patent number
11,988,966
Issue date
May 21, 2024
Cymer, LLC
Andrei Dorobantu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithography system bandwidth control
Patent number
11,769,982
Issue date
Sep 26, 2023
Cymer, LLC
Tanuj Aggarwal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Residual gain monitoring and reduction for EUV drive laser
Patent number
11,737,200
Issue date
Aug 22, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Lin Louis Chang
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Laser apparatus and extreme ultraviolet light generation system
Patent number
11,539,180
Issue date
Dec 27, 2022
Gigaphoton Inc.
Yoshiaki Kurosawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser apparatus, laser apparatus management system, and laser appar...
Patent number
11,502,478
Issue date
Nov 15, 2022
Gigaphoton Inc.
Hiroyuki Masuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optical processing apparatus, optical processing method, and optica...
Patent number
11,482,826
Issue date
Oct 25, 2022
Ricoh Company, Ltd.
Asato Tamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser chamber, method for manufacturing seal member, and method for...
Patent number
11,349,272
Issue date
May 31, 2022
Gigaphoton Inc.
Masaharu Miki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Control device and control method for controlling laser oscillator
Patent number
11,289,874
Issue date
Mar 29, 2022
FANUC CORPORATION
Satoshi Kagiwada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Excimer laser apparatus and method for manufacturing electronic device
Patent number
11,271,361
Issue date
Mar 8, 2022
Gigaphoton Inc.
Keisuke Ishida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Capacitor cooling structure and laser apparatus
Patent number
11,050,210
Issue date
Jun 29, 2021
Gigaphoton Inc.
Hisakazu Katsuumi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Dark cavity laser
Patent number
11,043,788
Issue date
Jun 22, 2021
Wenzhou Collaborative Innovation Center of Laser and Optoelectronics
Jingbiao Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser oscillation device
Patent number
10,998,692
Issue date
May 4, 2021
Mitsubishi Electric Corporation
Tomohiro Kyoto
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Residual gain monitoring and reduction for EUV drive laser
Patent number
10,980,100
Issue date
Apr 13, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Lin Louis Chang
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Laser apparatus
Patent number
10,971,886
Issue date
Apr 6, 2021
Gigaphoton Inc.
Takeshi Asayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser device, laser machining apparatus, and method for controlling...
Patent number
10,965,089
Issue date
Mar 30, 2021
Mitsubishi Electric Corporation
Tomohiro Kyoto
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Laser apparatus and extreme ultraviolet light generating system
Patent number
10,897,118
Issue date
Jan 19, 2021
Gigaphoton Inc.
Yoshiaki Kurosawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Gas optimization in a gas discharge light source
Patent number
10,892,594
Issue date
Jan 12, 2021
Cymer, LLC
Tanuj Aggarwal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser gas purifying system and laser system
Patent number
10,892,592
Issue date
Jan 12, 2021
Gigaphoton Inc.
Natsushi Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithography system bandwidth control
Patent number
10,833,471
Issue date
Nov 10, 2020
Cymer, LLC
Tanuj Aggarwal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Generating plasma or laser pulses by radiofrequency excitation pulses
Patent number
10,777,961
Issue date
Sep 15, 2020
Trumpf Laser- und Systemtechnik GmbH
Robert Schulz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Excimer laser apparatus
Patent number
10,673,200
Issue date
Jun 2, 2020
Gigaphoton Inc.
Yousuke Fujimaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Line narrowed laser apparatus
Patent number
10,615,565
Issue date
Apr 7, 2020
Gigaphoton Inc.
Hiroshi Furusato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser apparatus and extreme ultraviolet light generation system
Patent number
10,461,494
Issue date
Oct 29, 2019
Gigaphoton Inc.
Yoshiaki Kurosawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser unit
Patent number
10,447,001
Issue date
Oct 15, 2019
Gigaphoton Inc.
Minoru Taniyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser feedback control systems
Patent number
10,374,384
Issue date
Aug 6, 2019
AFL Telecommunications LLC
Mohamed Amine Jebali
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Line narrowed laser apparatus
Patent number
10,283,927
Issue date
May 7, 2019
Gigaphoton Inc.
Hiroshi Furusato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Tunable laser system and amplifier using a noble gas-filled hollow-...
Patent number
10,243,319
Issue date
Mar 26, 2019
The United States of America as represented by the Secretary of the Air Force
Christian K. Keyser
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
EXCIMER LASER WITH IMPROVED BEAM UNIFORMITY AND STABILITY
Publication number
20240372313
Publication date
Nov 7, 2024
COHERENT LASERSYSTEMS GMBH & CO. KG
Igor BRAGIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS CONTROL APPARATUS FOR GAS DISCHARGE STAGE
Publication number
20240291226
Publication date
Aug 29, 2024
CYMER, LLC
Siyu Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
Publication number
20240146011
Publication date
May 2, 2024
Gigaphoton Inc.
Koji ASHIKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL METHOD OF DISCHARGE-EXCITATION TYPE LASER DEVICE, DISCHARGE...
Publication number
20240128706
Publication date
Apr 18, 2024
Gigaphoton Inc.
Keisuke ISHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAVELENGTH CONTROL METHOD, LASER APPARATUS, AND METHOD FOR MANUFACT...
Publication number
20240111219
Publication date
Apr 4, 2024
Gigaphoton Inc.
Shigeto KISHIMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
Publication number
20230396033
Publication date
Dec 7, 2023
Gigaphoton Inc.
Keisuke ISHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL METHOD OF LASER SYSTEM, LASER SYSTEM, AND ELECTRONIC DEVICE...
Publication number
20230318252
Publication date
Oct 5, 2023
Gigaphoton Inc.
Takeshi ASAYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
UNDERCUT ELECTRODES FOR A GAS DISCHARGE LASER CHAMBER
Publication number
20230016894
Publication date
Jan 19, 2023
CYMER, LLC
Edward Siqi Luo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LINE NARROWED GAS LASER APPARATUS, CONTROL METHOD THEREFOR, ELECTRO...
Publication number
20220385029
Publication date
Dec 1, 2022
Gigaphoton Inc.
Yousuke FUJIMAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR AND METHOD OF GENERATING MULTIPLE LASER BEAMS
Publication number
20220255288
Publication date
Aug 11, 2022
CYMER, LLC
Walter Dale Gillespie
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXCIMER LASER SYSTEM WITH LONG SERVICE INTERVALS
Publication number
20220094133
Publication date
Mar 24, 2022
STRATA SKIN SCIENCES, INC.
James Morris
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS MONITORING SYSTEM
Publication number
20210226407
Publication date
Jul 22, 2021
CYMER, LLC
Andrei Dorobantu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS LASER DEVICE
Publication number
20210167568
Publication date
Jun 3, 2021
Gigaphoton Inc.
Hiroshi UMEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DARK CAVITY LASER
Publication number
20210028595
Publication date
Jan 28, 2021
Wenzhou Collaborative Innovation Center Of Laser And Optoelectronics
JINGBIAO CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LITHOGRAPHY SYSTEM BANDWIDTH CONTROL
Publication number
20210021094
Publication date
Jan 21, 2021
CYMER, LLC
Tanuj Aggarwal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER DEVICE, LASER MACHINING APPARATUS, AND METHOD FOR CONTROLLING...
Publication number
20200388980
Publication date
Dec 10, 2020
Mitsubishi Electric Corporation
Tomohiro KYOTO
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LASER GAS MANAGEMENT SYSTEM, METHOD FOR MANUFACTURING ELECTRONIC DE...
Publication number
20200366049
Publication date
Nov 19, 2020
Gigaphoton Inc.
Hiroaki TSUSHIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXCIMER LASER APPARATUS AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
Publication number
20200244032
Publication date
Jul 30, 2020
Gigaphoton Inc.
Keisuke ISHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CAPACITOR COOLING STRUCTURE AND LASER APPARATUS
Publication number
20200136336
Publication date
Apr 30, 2020
Gigaphoton Inc.
Hisakazu KATSUUMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER APPARATUS, LASER APPARATUS MANAGEMENT SYSTEM, AND LASER APPAR...
Publication number
20200067259
Publication date
Feb 27, 2020
Gigaphoton Inc.
Hiroyuki MASUDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH-VOLTAGE PULSE GENERATOR AND GAS LASER APPARATUS
Publication number
20190252846
Publication date
Aug 15, 2019
National University Corporation Nagaoka University of Technology
Weihua JIANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPTICAL PROCESSING APPARATUS, OPTICAL PROCESSING METHOD, AND OPTICA...
Publication number
20190221985
Publication date
Jul 18, 2019
Asato TAMURA
G02 - OPTICS
Information
Patent Application
GAS OPTIMIZATION IN A GAS DISCHARGE LIGHT SOURCE
Publication number
20190190229
Publication date
Jun 20, 2019
CYMER, LLC
Tanuj Aggarwal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER UNIT AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM
Publication number
20190081451
Publication date
Mar 14, 2019
Gigaphoton Inc.
Akihiko KUROSU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATING SYSTEM
Publication number
20180375283
Publication date
Dec 27, 2018
Gigaphoton Inc.
Yoshiaki KUROSAWA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ENERGY CONTROLLER FOR EXCIMER-LASER SILICON CRYSTALLIZATION
Publication number
20180348644
Publication date
Dec 6, 2018
COHERENT LASERSYSTEMS GMBH & CO. KG
Igor BRAGIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
Publication number
20180351322
Publication date
Dec 6, 2018
Gigaphoton Inc.
Yoshiaki KUROSAWA
G01 - MEASURING TESTING
Information
Patent Application
EXCIMER LASER OSCILLATION DEVICE HAVING GAS RECYCLE FUNCTION
Publication number
20180337510
Publication date
Nov 22, 2018
L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
Terumasa KOURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LINE NARROWED LASER APPARATUS
Publication number
20180323568
Publication date
Nov 8, 2018
Gigaphoton Inc.
Hiroshi FURUSATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXCIMER LASER APPARATUS
Publication number
20180261973
Publication date
Sep 13, 2018
Gigaphoton Inc.
Yousuke FUJIMAKI
H01 - BASIC ELECTRIC ELEMENTS