in projection exposure systems

Industry

CPC
G02B27/4222

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

GPHYSICS G02Optics G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS G02B27/00Other optical systems Other optical apparatus

Current Industry

G02B27/4222in projection exposure systems

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Display for augmented reality
- Patent number 12,242,059
- Issue date Mar 4, 2025
- Snap Inc.
- Mohmed Salim Valera
- G02 - OPTICS
Information Patent Grant
Dental scanning system with structured light projection
- Patent number 12,178,685
- Issue date Dec 31, 2024
- Align Technology, Inc.
- Ofer Saphier
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Diffractive optical element, projection device, and measurement dev...
- Patent number 12,147,058
- Issue date Nov 19, 2024
- AGC Inc.
- Ryota Murakami
- G01 - MEASURING TESTING
Information Patent Grant
Intraoral 3D scanner employing multiple miniature cameras and multi...
- Patent number 11,896,461
- Issue date Feb 13, 2024
- Align Technology, Inc.
- Ofer Saphier
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Intraoral 3D scanner employing light projectors with pattern genera...
- Patent number 11,826,225
- Issue date Nov 28, 2023
- Align Technology, Inc.
- Ofer Saphier
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Exposure apparatus, exposure method, and method for manufacturing s...
- Patent number 11,747,737
- Issue date Sep 5, 2023
- Canon Kabushiki Kaisha
- Kazuhiro Takahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Diffractive optical element, projection device, and measurement device
- Patent number 11,536,981
- Issue date Dec 27, 2022
- AGC Inc.
- Ryota Murakami
- G01 - MEASURING TESTING
Information Patent Grant
Intraoral 3D scanner employing multiple miniature cameras and multi...
- Patent number 11,534,273
- Issue date Dec 27, 2022
- Align Technology, Inc.
- Ofer Saphier
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
EUV lithography system with diffraction optics
- Patent number 11,520,235
- Issue date Dec 6, 2022
- Kenneth Carlisle Johnson
- G02 - OPTICS
Information Patent Grant
Light field intraoral 3D scanner with structured light illumination
- Patent number 11,096,765
- Issue date Aug 24, 2021
- Align Technology, Inc.
- Yossef Atiya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Structured light projector and method for structured light projecti...
- Patent number 10,996,483
- Issue date May 4, 2021
- Himax Technologies Limited
- Ching-Wen Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Projector, electronic device having projector, and method for obtai...
- Patent number 10,942,362
- Issue date Mar 9, 2021
- Himax Technologies Limited
- Biing-Seng Wu
- G02 - OPTICS
Information Patent Grant
Optical device and associated system
- Patent number 10,712,667
- Issue date Jul 14, 2020
- ASML Netherlands B.V.
- Sumant Sukdew Ramanujan Oemrawsingh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Diffractive optical element and light irradiation apparatus
- Patent number 10,704,763
- Issue date Jul 7, 2020
- Dai Nippon Printing Co., Ltd.
- Yuichi Miyazaki
- G02 - OPTICS
Information Patent Grant
Optical lens and projection device having the same
- Patent number 10,684,453
- Issue date Jun 16, 2020
- Young Optics Inc.
- Sheng-Tang Lai
- G02 - OPTICS
Information Patent Grant
Unidirectional grating-based backlighting employing an angularly se...
- Patent number 10,670,920
- Issue date Jun 2, 2020
- LEIA INC.
- David A. Fattal
- G02 - OPTICS
Information Patent Grant
Wavelength-based optical filtering
- Patent number 10,663,866
- Issue date May 26, 2020
- ASML Netherlands B.V.
- Alexander Anthony Schafgans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Diffractive optical element and light irradiation apparatus
- Patent number 10,591,133
- Issue date Mar 17, 2020
- Dai Nippon Printing Co., Ltd.
- Yuichi Miyazaki
- F21 - LIGHTING
Information Patent Grant
Real-time variable parameter micro-nano optical field modulation sy...
- Patent number 10,054,859
- Issue date Aug 21, 2018
- Soochow University
- Yan Ye
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Diffractive optics element, method for manufacturing diffractive op...
- Patent number 9,658,464
- Issue date May 23, 2017
- Seiko Epson Corporation
- Hidemitsu Sorimachi
- G02 - OPTICS
Information Patent Grant
Diffractive optical element, design method thereof and application...
- Patent number 9,547,181
- Issue date Jan 17, 2017
- Institute of Physics, Chinese Academy of Sciences
- Guozhen Yang
- G02 - OPTICS
Information Patent Grant
Defect detection system for extreme ultraviolet lithography mask
- Patent number 9,546,964
- Issue date Jan 17, 2017
- The Institute of Microelectronics of Chinese Academy of Sciences
- Hailiang Li
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography pupil shaping optical system and method for generating...
- Patent number 9,323,052
- Issue date Apr 26, 2016
- Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences
- Fang Zhang
- G02 - OPTICS
Information Patent Grant
Optical systems and methods for absorbance modulation
- Patent number 8,994,920
- Issue date Mar 31, 2015
- Kenneth C. Johnson
- G02 - OPTICS
Information Patent Grant
EUV projection lens and optic system having the same
- Patent number 8,637,840
- Issue date Jan 28, 2014
- Samsung Electronics Co., Ltd.
- Dong-Gun Lee
- G02 - OPTICS
Information Patent Grant
Telecentricity corrector for microlithographic projection system
- Patent number 8,314,922
- Issue date Nov 20, 2012
- Corning Incorporated
- Jim D Cornell
- G02 - OPTICS
Information Patent Grant
Apparatus for polarization-specific examination, optical imaging sy...
- Patent number 7,277,182
- Issue date Oct 2, 2007
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G01 - MEASURING TESTING
Information Patent Grant
Blazed diffractive optical element and projection objective for a m...
- Patent number 7,262,915
- Issue date Aug 28, 2007
- Carl Zeiss AG
- Bernd Kleemann
- G02 - OPTICS
Information Patent Grant
Optical element and optical system
- Patent number 6,967,796
- Issue date Nov 22, 2005
- Canon Kabushiki Kaisha
- Seiji Takeuchi
- G02 - OPTICS
Information Patent Grant
Achromatic fresnel optics for ultraviolet and x-ray radiation
- Patent number 6,917,472
- Issue date Jul 12, 2005
- Xradia, Inc.
- Wenbing Yun
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
INTRAORAL 3D SCANNING SYSTEM USING UNIFORM STRUCTURED LIGHT PROJECTION
- Publication number 20250032227
- Publication date Jan 30, 2025
- Align Technology, Inc.
- Ofer Saphier
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
DISPLAY FOR AUGMENTED REALITY
- Publication number 20240411140
- Publication date Dec 12, 2024
- Snap Inc.
- Mohamed Salim Valera
- G02 - OPTICS
Information Patent Application
DENTAL SCANNING SYSTEM WITH STRUCTURED LIGHT PROJECTION
- Publication number 20240156577
- Publication date May 16, 2024
- Align Technology, Inc.
- Ofer Saphier
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INTRAORAL 3D SCANNING SYSTEM USING STRUCTURED LIGHT PROJECTION
- Publication number 20240138961
- Publication date May 2, 2024
- Align Technology, Inc.
- Ofer Saphier
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMAGING OPTICAL UNIT
- Publication number 20240103382
- Publication date Mar 28, 2024
- Carl Zeiss SMT GMBH
- Hans-Jürgen Rostalski
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE AND METHOD FOR COMPENSATING EFFECTS OF PANTOSCOPIC TILT OR W...
- Publication number 20240094536
- Publication date Mar 21, 2024
- Snap Inc.
- Mohmed Salim Valera
- G02 - OPTICS
Information Patent Application
DISPLAY APPARATUS FOR PROVIDING AN ENLARGED DISPLAY AREA
- Publication number 20230418085
- Publication date Dec 28, 2023
- SHENZHEN QIZE TECHNOLOGY PARTNERSHIP ( LIMITED PARTNERSHIP)
- YISHENG ZHU
- B60 - VEHICLES IN GENERAL
Information Patent Application
LIGHTGUIDE WITH IMAGE-FORMING DIFFRACTIVE IN-COUPLER
- Publication number 20230393322
- Publication date Dec 7, 2023
- Meta Platforms Technologies, LLC
- Xiayu Feng
- G02 - OPTICS
Information Patent Application
ILLUMINATING SPATIAL LIGHT MODULATOR WITH LED ARRAY
- Publication number 20230236417
- Publication date Jul 27, 2023
- Microsoft Technology Licensing, LLC
- Ishan CHATTERJEE
- G02 - OPTICS
Information Patent Application
DIFFRACTIVE OPTICAL ELEMENT, PROJECTION DEVICE, AND MEASUREMENT DEV...
- Publication number 20230108188
- Publication date Apr 6, 2023
- AGC Inc.
- Ryota MURAKAMI
- G02 - OPTICS
Information Patent Application
INTRAORAL 3D SCANNER EMPLOYING MULTIPLE CAMERAS AND MINIATURE PATTE...
- Publication number 20220280269
- Publication date Sep 8, 2022
- Align Technology, Inc.
- Ofer Saphier
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DISPLAY FOR AUGMENTED REALITY
- Publication number 20220197036
- Publication date Jun 23, 2022
- Wave Optics Ltd.
- Mohmed Salim Valera
- G02 - OPTICS
Information Patent Application
EUV Lithography System with Diffraction Optics
- Publication number 20220107568
- Publication date Apr 7, 2022
- Kenneth Carlisle Johnson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR MANUFACTURING S...
- Publication number 20220066326
- Publication date Mar 3, 2022
- Canon Kabushiki Kaisha
- Kazuhiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIFFRACTIVE OPTICAL ELEMENT, PROJECTION DEVICE, AND MEASUREMENT DEVICE
- Publication number 20210088802
- Publication date Mar 25, 2021
- AGC Inc.
- Ryota MURAKAMI
- G01 - MEASURING TESTING
Information Patent Application
STRUCTURED LIGHT PROJECTOR, THREE-DIMENSIONAL CAMERA MODULE AND TER...
- Publication number 20200192206
- Publication date Jun 18, 2020
- Huawei Technologies Co., Ltd
- An LI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTOR, ELECTRONIC DEVICE HAVING PROJECTOR, AND METHOD FOR OBTAI...
- Publication number 20200103672
- Publication date Apr 2, 2020
- HIMAX TECHNOLOGIES LIMITED
- Biing-Seng Wu
- G02 - OPTICS
Information Patent Application
LIGHT FIELD INTRAORAL 3D SCANNER WITH STRUCTURED LIGHT ILLUMINATION
- Publication number 20190388194
- Publication date Dec 26, 2019
- Yossef Atiya
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
DIFFRACTIVE OPTICAL ELEMENT AND LIGHT IRRADIATION APPARATUS
- Publication number 20190346108
- Publication date Nov 14, 2019
- DAI NIPPON PRINTING CO., LTD.
- Yuichi MIYAZAKI
- G02 - OPTICS
Information Patent Application
DIFFRACTIVE OPTICAL ELEMENT AND LIGHT IRRADIATION APPARATUS
- Publication number 20190178468
- Publication date Jun 13, 2019
- DAI NIPPON PRINTING CO., LTD.
- Yuichi MIYAZAKI
- F21 - LIGHTING
Information Patent Application
OPTICAL LENS AND PROJECTION DEVICE HAVING THE SAME
- Publication number 20190079275
- Publication date Mar 14, 2019
- YOUNG OPTICS INC.
- Sheng-Tang LAI
- G02 - OPTICS
Information Patent Application
WAVELENGTH-BASED OPTICAL FILTERING
- Publication number 20180081280
- Publication date Mar 22, 2018
- ASML NETHERLANDS B.V.
- Alexander Anthony Schafgans
- G02 - OPTICS
Information Patent Application
REAL-TIME VARIABLE PARAMETER MICRO-NANO OPTICAL FIELD MODULATION SY...
- Publication number 20180039183
- Publication date Feb 8, 2018
- SOOCHOW UNIVERSITY
- Yan YE
- G02 - OPTICS
Information Patent Application
COMPOUND IMAGING METROLOGY TARGETS
- Publication number 20160179017
- Publication date Jun 23, 2016
- KLA-Tencor Corporation
- Raviv YOHANAN
- G02 - OPTICS
Information Patent Application
SYSTEMS AND METHODS FOR REDUCING Z-THICKNESS AND ZERO-ORDER EFFECTS...
- Publication number 20160127714
- Publication date May 5, 2016
- Aryan Hazeghi
- G02 - OPTICS
Information Patent Application
PUPIL SHAPING OPTICAL SYSTEM FOR LITHOGRAPHY MACHINE AND METHOD FOR...
- Publication number 20160004074
- Publication date Jan 7, 2016
- Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences
- Fang Zhang
- G02 - OPTICS
Information Patent Application
DIFFRACTIVE OPTICS ELEMENT, METHOD FOR MANUFACTURING DIFFRACTIVE OP...
- Publication number 20140347732
- Publication date Nov 27, 2014
- SEIKO EPSON CORPORATION
- Hidemitsu Sorimachi
- G02 - OPTICS
Information Patent Application
DIFFRACTIVE OPTICAL ELEMENT, DESIGN METHOD THEREOF AND APPLICATION...
- Publication number 20140293422
- Publication date Oct 2, 2014
- Guozhen Yang
- G02 - OPTICS
Information Patent Application
EUV projection lens and optic system having the same
- Publication number 20110042587
- Publication date Feb 24, 2011
- SAMSUNG ELECTRONICS CO., LTD.
- Dong-Gun LEE
- G02 - OPTICS
Information Patent Application
TELECENTRICITY CORRECTOR FOR MICROLITHOGRAPHIC PROJECTION SYSTEM
- Publication number 20090323040
- Publication date Dec 31, 2009
- Jim D. Cornell
- G02 - OPTICS

in projection exposure systems

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Display for augmented reality

Dental scanning system with structured light projection

Diffractive optical element, projection device, and measurement dev...

Intraoral 3D scanner employing multiple miniature cameras and multi...

Intraoral 3D scanner employing light projectors with pattern genera...

Exposure apparatus, exposure method, and method for manufacturing s...

Diffractive optical element, projection device, and measurement device

Intraoral 3D scanner employing multiple miniature cameras and multi...

EUV lithography system with diffraction optics

Light field intraoral 3D scanner with structured light illumination

Structured light projector and method for structured light projecti...

Projector, electronic device having projector, and method for obtai...

Optical device and associated system

Diffractive optical element and light irradiation apparatus

Optical lens and projection device having the same

Unidirectional grating-based backlighting employing an angularly se...

Wavelength-based optical filtering

Diffractive optical element and light irradiation apparatus

Real-time variable parameter micro-nano optical field modulation sy...

Diffractive optics element, method for manufacturing diffractive op...

Diffractive optical element, design method thereof and application...

Defect detection system for extreme ultraviolet lithography mask

Lithography pupil shaping optical system and method for generating...

Optical systems and methods for absorbance modulation

EUV projection lens and optic system having the same

Telecentricity corrector for microlithographic projection system

Apparatus for polarization-specific examination, optical imaging sy...

Blazed diffractive optical element and projection objective for a m...

Optical element and optical system

Achromatic fresnel optics for ultraviolet and x-ray radiation

Patents Applicationslast 30 patents

INTRAORAL 3D SCANNING SYSTEM USING UNIFORM STRUCTURED LIGHT PROJECTION

DISPLAY FOR AUGMENTED REALITY

DENTAL SCANNING SYSTEM WITH STRUCTURED LIGHT PROJECTION

INTRAORAL 3D SCANNING SYSTEM USING STRUCTURED LIGHT PROJECTION

IMAGING OPTICAL UNIT

DEVICE AND METHOD FOR COMPENSATING EFFECTS OF PANTOSCOPIC TILT OR W...

DISPLAY APPARATUS FOR PROVIDING AN ENLARGED DISPLAY AREA

LIGHTGUIDE WITH IMAGE-FORMING DIFFRACTIVE IN-COUPLER

ILLUMINATING SPATIAL LIGHT MODULATOR WITH LED ARRAY

DIFFRACTIVE OPTICAL ELEMENT, PROJECTION DEVICE, AND MEASUREMENT DEV...

INTRAORAL 3D SCANNER EMPLOYING MULTIPLE CAMERAS AND MINIATURE PATTE...

DISPLAY FOR AUGMENTED REALITY

EUV Lithography System with Diffraction Optics

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR MANUFACTURING S...

DIFFRACTIVE OPTICAL ELEMENT, PROJECTION DEVICE, AND MEASUREMENT DEVICE

STRUCTURED LIGHT PROJECTOR, THREE-DIMENSIONAL CAMERA MODULE AND TER...

PROJECTOR, ELECTRONIC DEVICE HAVING PROJECTOR, AND METHOD FOR OBTAI...

LIGHT FIELD INTRAORAL 3D SCANNER WITH STRUCTURED LIGHT ILLUMINATION

DIFFRACTIVE OPTICAL ELEMENT AND LIGHT IRRADIATION APPARATUS

DIFFRACTIVE OPTICAL ELEMENT AND LIGHT IRRADIATION APPARATUS

OPTICAL LENS AND PROJECTION DEVICE HAVING THE SAME

WAVELENGTH-BASED OPTICAL FILTERING

REAL-TIME VARIABLE PARAMETER MICRO-NANO OPTICAL FIELD MODULATION SY...

COMPOUND IMAGING METROLOGY TARGETS

SYSTEMS AND METHODS FOR REDUCING Z-THICKNESS AND ZERO-ORDER EFFECTS...

PUPIL SHAPING OPTICAL SYSTEM FOR LITHOGRAPHY MACHINE AND METHOD FOR...

DIFFRACTIVE OPTICS ELEMENT, METHOD FOR MANUFACTURING DIFFRACTIVE OP...

DIFFRACTIVE OPTICAL ELEMENT, DESIGN METHOD THEREOF AND APPLICATION...

EUV projection lens and optic system having the same

TELECENTRICITY CORRECTOR FOR MICROLITHOGRAPHIC PROJECTION SYSTEM