including means for charging or discharging wafer cassette

Industry

CPC
Y10S414/137

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YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10USPC classification Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10S414/00Material or article handling

Current Industry

Y10S414/137including means for charging or discharging wafer cassette

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Sealed substrate carriers and systems and methods for transporting...
- Patent number 11,990,358
- Issue date May 21, 2024
- Applied Materials, Inc.
- Michael Robert Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for wafer pod alignment
- Patent number 11,978,653
- Issue date May 7, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chao-Hsiang Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transfer apparatus and substrate transfer apparatus
- Patent number RE49671
- Issue date Sep 26, 2023
- Kawasaki Jukogyo Kabushiki Kaisha
- Yasuhiko Hashimoto
Information Patent Grant
Sealed substrate carriers and systems and methods for transporting...
- Patent number 11,631,605
- Issue date Apr 18, 2023
- Applied Materials, Inc.
- Michael Robert Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transfer apparatus and substrate transfer apparatus
- Patent number RE48792
- Issue date Oct 26, 2021
- Kawasaki Jukogyo Kabushiki Kaisha
- Yasuhiko Hashimoto
Information Patent Grant
Workpiece stocker with circular configuration
- Patent number 10,930,536
- Issue date Feb 23, 2021
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transfer apparatus and substrate transfer apparatus
- Patent number RE48031
- Issue date Jun 2, 2020
- Kawasaki Jukogyo Kabushiki Kaisha
- Yasuhiko Hashimoto
Information Patent Grant
Wafer transfer apparatus and substrate transfer apparatus
- Patent number RE47909
- Issue date Mar 17, 2020
- Kawasaki Jukogyo Kabushiki Kaisha
- Yasuhiko Hashimoto
Information Patent Grant
Sealed substrate carriers and systems and methods for transporting...
- Patent number 10,553,469
- Issue date Feb 4, 2020
- Applied Materials, Inc.
- Michael Robert Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transfer apparatus and substrate transfer apparatus
- Patent number RE47145
- Issue date Nov 27, 2018
- Kawasaki Jukogyo Kabushiki Kaisha
- Yasuhiko Hashimoto
Information Patent Grant
Semiconductor manufacturing systems
- Patent number 10,086,511
- Issue date Oct 2, 2018
- Brooks Automation, Inc.
- Peter van der Meulen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece stocker with circular configuration
- Patent number 9,947,565
- Issue date Apr 17, 2018
- Brooks Automation, Inc.
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sealed substrate carriers and systems and methods for transporting...
- Patent number 9,905,447
- Issue date Feb 27, 2018
- Applied Materials, Inc.
- Michael Robert Rice
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Apparatus, system, and methods for weighing and positioning wafers
- Patent number 9,791,309
- Issue date Oct 17, 2017
- Microtronic, Inc.
- Reiner G. Fenske
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transfer apparatus and substrate transfer apparatus
- Patent number RE46465
- Issue date Jul 4, 2017
- Kawasaki Jukogyo Kabushiki Kaisha
- Yasuhiko Hashimoto
Information Patent Grant
Robot having end effector and method of operating the same
- Patent number 9,616,577
- Issue date Apr 11, 2017
- Kawasaki Jukogyo Kabushiki Kaisha
- Yasuhiko Hashimoto
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate transfer system, substrate processing system, and substra...
- Patent number 9,620,405
- Issue date Apr 11, 2017
- Kabushiki Kaisha Yaskawa Denki
- Masatoshi Furuichi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer system and substrate processing system
- Patent number 9,570,336
- Issue date Feb 14, 2017
- Kabushiki Kaisha Yaskawa Denki
- Masatoshi Furuichi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer system and substrate processing system
- Patent number 9,293,355
- Issue date Mar 22, 2016
- Kabushiki Kaisha Yaskawa Denki
- Masatoshi Furuichi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Robot having end effector and method of operating the same
- Patent number 9,254,566
- Issue date Feb 9, 2016
- Kawasaki Jukogyo Kabushiki Kaisha
- Yasuhiko Hashimoto
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Systems and methods for handling wafers
- Patent number 9,184,079
- Issue date Nov 10, 2015
- ATS Automation Tooling Systems Inc.
- Frederic Rivollier
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Wafer transfer apparatus and substrate transfer apparatus
- Patent number RE45772
- Issue date Oct 20, 2015
- Kawasaki Jukogyo Kabushiki Kaisha
- Yasuhiko Hashimoto
- 001 -
Information Patent Grant
Substrate alignment system
- Patent number 9,033,647
- Issue date May 19, 2015
- Brooks Automation, Inc.
- Christopher A. Hofmeister
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing method
- Patent number 9,011,075
- Issue date Apr 21, 2015
- Tokyo Electron Limited
- Hiromitsu Sakaue
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Apparatus, system, and methods for weighing and positioning wafers
- Patent number 9,004,838
- Issue date Apr 14, 2015
- Microtronic, Inc.
- Reiner G. Fenske
- G01 - MEASURING TESTING
Information Patent Grant
Anodizing apparatus
- Patent number 8,992,746
- Issue date Mar 31, 2015
- Dainippon Screen Mfg. Co., Ltd.
- Yasuyoshi Miyaji
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Transfer system
- Patent number 8,989,901
- Issue date Mar 24, 2015
- Kabushiki Kaisha Yaskawa Denki
- Takashi Minami
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing apparatus, substrate processing method and sto...
- Patent number 8,985,929
- Issue date Mar 24, 2015
- Tokyo Electron Limited
- Suguru Enokida
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Heat treatment apparatus and method of transferring substrates to t...
- Patent number 8,979,469
- Issue date Mar 17, 2015
- Tokyo Electron Limited
- Kiichi Takahashi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Frame feeding system and frame feeding method
- Patent number 8,965,572
- Issue date Feb 24, 2015
- Hitachi High-Tech Instruments Co., Ltd.
- Tatsuyuki Ohkubo
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
SEALED SUBSTRATE CARRIERS AND SYSTEMS AND METHODS FOR TRANSPORTING...
- Publication number 20230253228
- Publication date Aug 10, 2023
- Applied Materials, Inc.
- Michael Robert Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEALED SUBSTRATE CARRIERS AND SYSTEMS AND METHODS FOR TRANSPORTING...
- Publication number 20200126832
- Publication date Apr 23, 2020
- Applied Materials, Inc.
- Michael Robert Rice
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
WORKPIECE STOCKER WITH CIRCULAR CONFIGURATION
- Publication number 20190019709
- Publication date Jan 17, 2019
- BROOKS AUTOMATION (GERMANY) GmbH
- Lutz REBSTOCK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEALED SUBSTRATE CARRIERS AND SYSTEMS AND METHODS FOR TRANSPORTING...
- Publication number 20180138068
- Publication date May 17, 2018
- Applied Materials, Inc.
- Michael Robert Rice
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE TRANSFER SYSTEM AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20140133942
- Publication date May 15, 2014
- KABUSHIKI KAISHA YASKAWA DENKI
- Masatoshi FURUICHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROBOT HAND
- Publication number 20130341946
- Publication date Dec 26, 2013
- Satoshi YAMANAKA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SEMICONDUCTOR MANUFACTURING SYSTEMS
- Publication number 20130343841
- Publication date Dec 26, 2013
- Brooks Automation, Inc.
- Peter van der Meulen
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
TRANSFER SYSTEM
- Publication number 20130218337
- Publication date Aug 22, 2013
- Kabushiki Kaisha Yaskawa Denki
- Takashi MINAMI
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20130078059
- Publication date Mar 28, 2013
- TOKYO ELECTRON LIMITED
- Suguru ENOKIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT APPARATUS AND METHOD OF TRANSFERRING SUBSTRATES TO T...
- Publication number 20130028687
- Publication date Jan 31, 2013
- TOKYO ELECTRON LIMITED
- Kiichi TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Frame Feeding System and Frame Feeding Method
- Publication number 20130017040
- Publication date Jan 17, 2013
- Hitachi High-Tech Instruments Co., Ltd.
- Tatsuyuki OHKUBO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND LOADPORT FOR PURGING A SUBSTRATE CARRIER
- Publication number 20120325328
- Publication date Dec 27, 2012
- Applied Materials, Inc.
- Vinay K. Shah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS, SYSTEM, AND METHOD FOR WAFER CHARACTERIZATION
- Publication number 20120255795
- Publication date Oct 11, 2012
- MICROTRONIC, INC.
- Reiner G. FENSKE
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS, SYSTEM, AND METHOD FOR WAFER CHARACTERIZATION
- Publication number 20120255794
- Publication date Oct 11, 2012
- MICROTRONIC, INC.
- Reiner G. FENSKE
- G01 - MEASURING TESTING
Information Patent Application
ROBOT ARM APPARATUS
- Publication number 20120253511
- Publication date Oct 4, 2012
- SINFONIA TECHNOLOGY CO., LTD.
- Toru SAEKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20120201646
- Publication date Aug 9, 2012
- TOKYO ELECTRON LIMITED
- Hiromitsu Sakaue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINEAR SEMICONDUCTOR PROCESSING FACILITIES
- Publication number 20120148374
- Publication date Jun 14, 2012
- Brooks Automation, Inc.
- Peter van der Meulen
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
ANODIZING APPARATUS
- Publication number 20120138455
- Publication date Jun 7, 2012
- Yasuyoshi MIYAJI
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHODS AND LOADPORT APPARATUS FOR PURGING A SUBSTRATE CARRIER
- Publication number 20120060971
- Publication date Mar 15, 2012
- Applied Materials, Inc.
- Vinay K. Shah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STACKED PROCESS MODULES FOR A SEMICONDUCTOR HANDLING SYSTEM
- Publication number 20120014769
- Publication date Jan 19, 2012
- Brooks Automation, Inc.
- Peter van der Meulen
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
PRODUCING METHOD OF SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING A...
- Publication number 20110239936
- Publication date Oct 6, 2011
- Kenichi SUZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS CHARGING APPARATUS, GAS DISCHARGING APPARATUS, GAS CHARGING MET...
- Publication number 20110214778
- Publication date Sep 8, 2011
- SINFONIA TECHNOLOGY CO., LTD.
- Mitsuo NATSUME
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Workpiece stocker with circular configuration
- Publication number 20110129321
- Publication date Jun 2, 2011
- Dynamic Micro Systems, Semiconductor Equipment GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20110111601
- Publication date May 12, 2011
- Shogo Okita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF OBJECT TRANSFER FOR A HEAT TREATMENT SYSTEM
- Publication number 20100316968
- Publication date Dec 16, 2010
- TOKYO ELECTRON LIMITED
- Shinya MOCHIZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM FOR PURGING RETICLE STORAGE
- Publication number 20100294397
- Publication date Nov 25, 2010
- Entegris, Inc.
- Oleg P. Kishkovich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Robot having end effector and method of operating the same
- Publication number 20100290886
- Publication date Nov 18, 2010
- KAWASAKI JUKOGYO KABUSHIKI KAISHA
- Yasuhiko Hashimoto
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SYSTEMS AND METHODS FOR HANDLING WAFERS
- Publication number 20100272544
- Publication date Oct 28, 2010
- ATS Automation Tooling Systems Inc.
- Frederic Rivollier
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20100240200
- Publication date Sep 23, 2010
- TOKYO ELECTRON LIMITED
- Hiromitsu Sakaue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR WAFER ROBOT ALIGNMENT SYSTEM AND METHOD
- Publication number 20100234992
- Publication date Sep 16, 2010
- Taiwan Semiconductor Manufacturing Co., LTD
- Kuo-Shu TSENG
- H01 - BASIC ELECTRIC ELEMENTS

including means for charging or discharging wafer cassette

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Sealed substrate carriers and systems and methods for transporting...

Systems and methods for wafer pod alignment

Wafer transfer apparatus and substrate transfer apparatus

Sealed substrate carriers and systems and methods for transporting...

Wafer transfer apparatus and substrate transfer apparatus

Workpiece stocker with circular configuration

Wafer transfer apparatus and substrate transfer apparatus

Wafer transfer apparatus and substrate transfer apparatus

Sealed substrate carriers and systems and methods for transporting...

Wafer transfer apparatus and substrate transfer apparatus

Semiconductor manufacturing systems

Workpiece stocker with circular configuration

Sealed substrate carriers and systems and methods for transporting...

Apparatus, system, and methods for weighing and positioning wafers

Wafer transfer apparatus and substrate transfer apparatus

Robot having end effector and method of operating the same

Substrate transfer system, substrate processing system, and substra...

Substrate transfer system and substrate processing system

Substrate transfer system and substrate processing system

Robot having end effector and method of operating the same

Systems and methods for handling wafers

Wafer transfer apparatus and substrate transfer apparatus

Substrate alignment system

Substrate processing method

Apparatus, system, and methods for weighing and positioning wafers

Anodizing apparatus

Transfer system

Substrate processing apparatus, substrate processing method and sto...

Heat treatment apparatus and method of transferring substrates to t...

Frame feeding system and frame feeding method

Patents Applicationslast 30 patents

SEALED SUBSTRATE CARRIERS AND SYSTEMS AND METHODS FOR TRANSPORTING...

SEALED SUBSTRATE CARRIERS AND SYSTEMS AND METHODS FOR TRANSPORTING...

WORKPIECE STOCKER WITH CIRCULAR CONFIGURATION

SEALED SUBSTRATE CARRIERS AND SYSTEMS AND METHODS FOR TRANSPORTING...

SUBSTRATE TRANSFER SYSTEM AND SUBSTRATE PROCESSING SYSTEM

ROBOT HAND

SEMICONDUCTOR MANUFACTURING SYSTEMS

TRANSFER SYSTEM

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...

HEAT TREATMENT APPARATUS AND METHOD OF TRANSFERRING SUBSTRATES TO T...

Frame Feeding System and Frame Feeding Method

METHODS AND LOADPORT FOR PURGING A SUBSTRATE CARRIER

APPARATUS, SYSTEM, AND METHOD FOR WAFER CHARACTERIZATION

APPARATUS, SYSTEM, AND METHOD FOR WAFER CHARACTERIZATION

ROBOT ARM APPARATUS

SUBSTRATE PROCESSING METHOD

LINEAR SEMICONDUCTOR PROCESSING FACILITIES

ANODIZING APPARATUS

METHODS AND LOADPORT APPARATUS FOR PURGING A SUBSTRATE CARRIER

STACKED PROCESS MODULES FOR A SEMICONDUCTOR HANDLING SYSTEM

PRODUCING METHOD OF SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING A...

GAS CHARGING APPARATUS, GAS DISCHARGING APPARATUS, GAS CHARGING MET...

Workpiece stocker with circular configuration

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

METHOD OF OBJECT TRANSFER FOR A HEAT TREATMENT SYSTEM

SYSTEM FOR PURGING RETICLE STORAGE

Robot having end effector and method of operating the same

SYSTEMS AND METHODS FOR HANDLING WAFERS

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

SEMICONDUCTOR WAFER ROBOT ALIGNMENT SYSTEM AND METHOD