Insulating

Industry

CPC
H01J2237/038

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/038Insulating

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Active gas generation apparatus
- Patent number 12,074,012
- Issue date Aug 27, 2024
- TMEIC Corporation
- Kensuke Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Insulator for an ion implantation source
- Patent number 12,020,896
- Issue date Jun 25, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tsung-Min Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems, devices, and methods for contaminant resistant insulative...
- Patent number 11,894,212
- Issue date Feb 6, 2024
- TAE TECHNOLOGIES, INC.
- Christopher J. Killer
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Corona/plasma treatment machine
- Patent number 11,848,175
- Issue date Dec 19, 2023
- 3DT LLC
- Donald J. Weyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus using multiple beams of charged particles
- Patent number 11,804,356
- Issue date Oct 31, 2023
- ASML Netherlands B.V.
- Xuerang Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 11,664,198
- Issue date May 30, 2023
- Tokyo Electron Limited
- Hirofumi Ohta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aberration corrector and multiple electron beam irradiation apparatus
- Patent number 11,605,523
- Issue date Mar 14, 2023
- NuFlare Technology, Inc.
- Kazuhiko Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for treating substrate
- Patent number 11,587,770
- Issue date Feb 21, 2023
- Semes Co., Ltd.
- Jamyung Gu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aberration corrector and multiple electron beam irradiation apparatus
- Patent number 11,574,793
- Issue date Feb 7, 2023
- NuFlare Technology, Inc.
- Kazuhiko Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems, devices, and methods for contaminant resistant insulative...
- Patent number 11,355,303
- Issue date Jun 7, 2022
- TAE TECHNOLOGIES, INC.
- Christopher J. Killer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus using multiple beams of charged particles
- Patent number 11,289,304
- Issue date Mar 29, 2022
- ASML Netherlands B.V.
- Xuerang Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low conductance self-shielding insulator for ion implantation systems
- Patent number 10,679,818
- Issue date Jun 9, 2020
- Axcelis Technologies, Inc.
- John F. Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid treatment apparatus including flow channel, first and second...
- Patent number 10,562,797
- Issue date Feb 18, 2020
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Tatsushi Ohyama
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information Patent Grant
Insulating structure
- Patent number 10,497,546
- Issue date Dec 3, 2019
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Hiroshi Kawaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid processing apparatus including container, first and second e...
- Patent number 10,446,375
- Issue date Oct 15, 2019
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Minoru Egawa
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,290,496
- Issue date May 14, 2019
- Tokyo Electron Limited
- Jun Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating insulating materials for improved life
- Patent number 10,221,476
- Issue date Mar 5, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Craig R. Chaney
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Inspection device
- Patent number 10,157,722
- Issue date Dec 18, 2018
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low conductance self-shielding insulator for ion implantation systems
- Patent number 10,074,508
- Issue date Sep 11, 2018
- Axcelis Technologies, Inc.
- John F. Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for fragmenting and/or weakening material by mean...
- Patent number 10,046,331
- Issue date Aug 14, 2018
- selFrag AG
- Reinhard Müller-Siebert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cathode filament assembly
- Patent number 9,916,959
- Issue date Mar 13, 2018
- Koninklijke Philips N.V.
- Marcus Walter Foellmer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron gun supporting member and electron gun apparatus
- Patent number 9,601,298
- Issue date Mar 21, 2017
- NuFlare Technology, Inc.
- Nobuo Miyamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Insulation structure and insulation method
- Patent number 9,281,160
- Issue date Mar 8, 2016
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Masateru Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma source for charged particle beam system
- Patent number 9,196,451
- Issue date Nov 24, 2015
- FEI Company
- Shouyin Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Insulation structure of high voltage electrodes for ion implantatio...
- Patent number 9,117,630
- Issue date Aug 25, 2015
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Masateru Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-voltage insulation device for charged-particle optical apparatus
- Patent number 9,093,201
- Issue date Jul 28, 2015
- IMS Nanofabrication AG
- Elmar Platzgummer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Source bushing shielding
- Patent number 9,006,689
- Issue date Apr 14, 2015
- Ion Technology Solutions, LLC
- Manuel A. Jerez
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Compact high-voltage electron gun
- Patent number 8,957,394
- Issue date Feb 17, 2015
- KLA-Tencor Corporation
- Alan D. Brodie
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Substrate plasma-processing apparatus
- Patent number 8,901,008
- Issue date Dec 2, 2014
- Samsung Display Co., Ltd.
- Tae-Wook Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged-particle beam lens
- Patent number 8,710,455
- Issue date Apr 29, 2014
- Canon Kabushiki Kaisha
- Takashi Shiozawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS, DEVICES, AND METHODS FOR CONTAMINANT RESISTANT INSULATIVE...
- Publication number 20250006452
- Publication date Jan 2, 2025
- TAE TECHNOLOGIES, INC.
- Christopher J. Killer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACTIVE GAS GENERATION APPARATUS
- Publication number 20240297024
- Publication date Sep 5, 2024
- TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
- Ren ARITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSULATING STRUCTURE, ELECTROSTATIC LENS, AND CHARGED PARTICLE BEAM...
- Publication number 20240274394
- Publication date Aug 15, 2024
- EBARA CORPORATION
- Yasushi TOMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSULATOR FOR AN ION IMPLANTATION SOURCE
- Publication number 20240274405
- Publication date Aug 15, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING COMAPNY, LTD.
- Tsung-Min LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Structure for Particle Acceleration And Charged Particle Beam Appar...
- Publication number 20240242918
- Publication date Jul 18, 2024
- Hitachi High-Tech Corporation
- RYO SUGIYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM IRRADIATION DEVICE
- Publication number 20240186099
- Publication date Jun 6, 2024
- NHV CORPORATION
- Tomonori SHIRAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20240177973
- Publication date May 30, 2024
- TOKYO ELECTRON LIMITED
- Koki HIDAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Lattice Based Voltage Standoff
- Publication number 20240177960
- Publication date May 30, 2024
- Applied Materials, Inc.
- Adam M. McLaughlin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS USING MULTIPLE BEAMS OF CHARGED PARTICLES
- Publication number 20240071711
- Publication date Feb 29, 2024
- ASML NETHERLANDS B.V.
- Xuerang HU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER INSULATION PLATE AND SUBSTRATE PROCESSING APPARATUS INCLUDI...
- Publication number 20230411126
- Publication date Dec 21, 2023
- SEMES CO., LTD.
- Dongmok LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING...
- Publication number 20230335380
- Publication date Oct 19, 2023
- Tokyo Electron Limited
- Takaaki KATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF NUCLEAR REPROGRAMMING
- Publication number 20230282445
- Publication date Sep 7, 2023
- KYOTO UNIVERSITY
- Shinya Yamanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA SOURCE FOR SEMICONDUCTOR PROCESSING
- Publication number 20230238221
- Publication date Jul 27, 2023
- Applied Materials, Inc.
- Vladimir Nagorny
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING DEVICE, AND PLASMA PROCESSING METHOD
- Publication number 20230223239
- Publication date Jul 13, 2023
- Satoru KAWAKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Arcing Reduction in Wafer Bevel Edge Plasma Processing
- Publication number 20230215692
- Publication date Jul 6, 2023
- LAM RESEARCH CORPORATION
- Xuefeng Hua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACTIVE GAS GENERATION APPARATUS
- Publication number 20230013017
- Publication date Jan 19, 2023
- TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
- Ren ARITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Corona/Plasma Treatment Machine
- Publication number 20220310358
- Publication date Sep 29, 2022
- 3DT LLC
- Donald J. Weyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS USING MULTIPLE BEAMS OF CHARGED PARTICLES
- Publication number 20220223366
- Publication date Jul 14, 2022
- ASML NETHERLANDS B.V.
- Xuerang HU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSULATING STRUCTURE, METHOD FOR MANUFACTURING INSULATING STRUCTURE...
- Publication number 20220154328
- Publication date May 19, 2022
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Yuuji Ishida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INSULATOR FOR AN ION IMPLANTATION SOURCE
- Publication number 20220037115
- Publication date Feb 3, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Tsung-Min LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR TREATING SUBSTRATE
- Publication number 20200411292
- Publication date Dec 31, 2020
- SEMES CO., LTD.
- Jamyung GU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ABERRATION CORRECTOR AND MULTIPLE ELECTRON BEAM IRRADIATION APPARATUS
- Publication number 20200395189
- Publication date Dec 17, 2020
- NuFlare Technology, Inc.
- Kazuhiko INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20200312634
- Publication date Oct 1, 2020
- TOKYO ELECTRON LIMITED
- Hirofumi OHTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AN APPARATUS USING MULTIPLE BEAMS OF CHARGED PARTICLES
- Publication number 20200203114
- Publication date Jun 25, 2020
- ASML NETHERLANDS B.V.
- Xuerang HU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW CONDUCTANCE SELF-SHIELDING INSULATOR FOR ION IMPLANTATION SYSTEMS
- Publication number 20180350553
- Publication date Dec 6, 2018
- Axcells Technologies, Inc.
- John F. Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS INCLUDING CONTAINER, FIRST AND SECOND E...
- Publication number 20180269040
- Publication date Sep 20, 2018
- Panasonic Intellectual Property Management Co., Ltd.
- MINORU EGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSULATING STRUCTURE
- Publication number 20180261434
- Publication date Sep 13, 2018
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Hiroshi Kawaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIQUID TREATMENT APPARATUS INCLUDING FLOW CHANNEL, FIRST AND SECOND...
- Publication number 20180261435
- Publication date Sep 13, 2018
- Panasonic Intellectual Property Management Co., Ltd.
- TATSUSHI OHYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW CONDUCTANCE SELF-SHIELDING INSULATOR FOR ION IMPLANTATION SYSTEMS
- Publication number 20180138006
- Publication date May 17, 2018
- Axcelis Technologies, Inc.
- John Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180033618
- Publication date Feb 1, 2018
- TOKYO ELECTRON LIMITED
- Jun OGAWA
- H01 - BASIC ELECTRIC ELEMENTS

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Active gas generation apparatus

Insulator for an ion implantation source

Systems, devices, and methods for contaminant resistant insulative...

Corona/plasma treatment machine

Apparatus using multiple beams of charged particles

Plasma processing apparatus

Aberration corrector and multiple electron beam irradiation apparatus

Apparatus and method for treating substrate

Aberration corrector and multiple electron beam irradiation apparatus

Systems, devices, and methods for contaminant resistant insulative...

Apparatus using multiple beams of charged particles

Low conductance self-shielding insulator for ion implantation systems

Liquid treatment apparatus including flow channel, first and second...

Insulating structure

Liquid processing apparatus including container, first and second e...

Substrate processing apparatus and substrate processing method

Coating insulating materials for improved life

Inspection device

Low conductance self-shielding insulator for ion implantation systems

Method and device for fragmenting and/or weakening material by mean...

Cathode filament assembly

Electron gun supporting member and electron gun apparatus

Insulation structure and insulation method

Plasma source for charged particle beam system

Insulation structure of high voltage electrodes for ion implantatio...

High-voltage insulation device for charged-particle optical apparatus

Source bushing shielding

Compact high-voltage electron gun

Substrate plasma-processing apparatus

Charged-particle beam lens

Patents Applicationslast 30 patents

SYSTEMS, DEVICES, AND METHODS FOR CONTAMINANT RESISTANT INSULATIVE...

ACTIVE GAS GENERATION APPARATUS

INSULATING STRUCTURE, ELECTROSTATIC LENS, AND CHARGED PARTICLE BEAM...

INSULATOR FOR AN ION IMPLANTATION SOURCE

Structure for Particle Acceleration And Charged Particle Beam Appar...

ELECTRON BEAM IRRADIATION DEVICE

PLASMA PROCESSING APPARATUS

Lattice Based Voltage Standoff

APPARATUS USING MULTIPLE BEAMS OF CHARGED PARTICLES

CHAMBER INSULATION PLATE AND SUBSTRATE PROCESSING APPARATUS INCLUDI...

PLASMA PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING...

METHOD OF NUCLEAR REPROGRAMMING

PLASMA SOURCE FOR SEMICONDUCTOR PROCESSING

PLASMA PROCESSING DEVICE, AND PLASMA PROCESSING METHOD

Arcing Reduction in Wafer Bevel Edge Plasma Processing

ACTIVE GAS GENERATION APPARATUS

Corona/Plasma Treatment Machine

APPARATUS USING MULTIPLE BEAMS OF CHARGED PARTICLES

INSULATING STRUCTURE, METHOD FOR MANUFACTURING INSULATING STRUCTURE...

INSULATOR FOR AN ION IMPLANTATION SOURCE

APPARATUS AND METHOD FOR TREATING SUBSTRATE

ABERRATION CORRECTOR AND MULTIPLE ELECTRON BEAM IRRADIATION APPARATUS

PLASMA PROCESSING APPARATUS

AN APPARATUS USING MULTIPLE BEAMS OF CHARGED PARTICLES

LOW CONDUCTANCE SELF-SHIELDING INSULATOR FOR ION IMPLANTATION SYSTEMS

LIQUID PROCESSING APPARATUS INCLUDING CONTAINER, FIRST AND SECOND E...

INSULATING STRUCTURE

LIQUID TREATMENT APPARATUS INCLUDING FLOW CHANNEL, FIRST AND SECOND...

LOW CONDUCTANCE SELF-SHIELDING INSULATOR FOR ION IMPLANTATION SYSTEMS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD