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H01J2237/0653

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/0653Intensity

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle source
- Patent number 11,075,053
- Issue date Jul 27, 2021
- ASML Netherlands B.V.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system and method
- Patent number 10,854,421
- Issue date Dec 1, 2020
- Carl Zeiss Microscopy GmbH
- Daniela Donhauser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle source
- Patent number 10,468,227
- Issue date Nov 5, 2019
- Hermes-Microvision, Inc.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope and method of operating same
- Patent number 10,224,176
- Issue date Mar 5, 2019
- Jeol Ltd.
- Takashi Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron gun, control method and control program thereof, and three...
- Patent number 10,217,599
- Issue date Feb 26, 2019
- TECHNOLOGY RESEARCH ASSOCIATION FOR FUTURE ADDITIVE MANUFACTURING
- Takashi Sato
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
- Patent number 9,673,018
- Issue date Jun 6, 2017
- NuFlare Technology, Inc.
- Haruyuki Nomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system and method of operating a charged part...
- Patent number 9,536,699
- Issue date Jan 3, 2017
- Carl Zeiss Microscopy, LLC
- John A. Notte
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Current regulation method of multiple beams
- Patent number 9,455,123
- Issue date Sep 27, 2016
- NuFlare Technology, Inc.
- Kenichi Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system and method of operating a charged part...
- Patent number 9,218,935
- Issue date Dec 22, 2015
- Carl Zeiss Microscopy, LLC
- John A. Notte
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Charged particle beam system and method of operating a charged part...
- Patent number 9,218,934
- Issue date Dec 22, 2015
- Carl Zeiss Microscopy, LLC
- John A. Notte
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Cathode operating temperature adjusting method, and writing apparatus
- Patent number 9,082,586
- Issue date Jul 14, 2015
- NuFlare Technology, Inc.
- Nobuo Miyamoto
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Field-emission electron gun and method for controlling same
- Patent number 8,766,542
- Issue date Jul 1, 2014
- Hitachi High-Technologies Corporation
- Boklae Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Feedback loop for emitter flashing
- Patent number 8,674,300
- Issue date Mar 18, 2014
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron generation and delivery system for contamination sensitive...
- Patent number 8,530,867
- Issue date Sep 10, 2013
- KLA-Tencor Corporation
- Mehran Nasser-Ghodsi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas field ion microscopes having multiple operation modes
- Patent number 8,455,840
- Issue date Jun 4, 2013
- Carl Zeiss Microscopy, LLC
- Lawrence Scipioni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus, and method of controlling the same
- Patent number 8,319,193
- Issue date Nov 27, 2012
- Hitachi High-Technologies Corporation
- Keigo Kasuya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron generation and delivery system for contamination sensitive...
- Patent number 8,188,451
- Issue date May 29, 2012
- KLA-Tencor Corporation
- Mehran Nasser-Ghodsi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion-implanting apparatus, ion-implanting method, and device manufac...
- Patent number 7,365,346
- Issue date Apr 29, 2008
- Matsushita Electric Industrial Co., Ltd.
- Yuichiro Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adjusting device of an apparatus for generating a beam of charged p...
- Patent number 7,365,348
- Issue date Apr 29, 2008
- Centre National de la Recherche Scientifique
- Jacques Gierak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-speed electron beam inspection
- Patent number 7,315,022
- Issue date Jan 1, 2008
- KLA-Tencor Technologies Corporation
- David L. Adler
- G01 - MEASURING TESTING
Information Patent Grant
Device for controlling an apparatus generating a charged particle beam
- Patent number 7,238,956
- Issue date Jul 3, 2007
- Centre National de la Recherche Scientifique
- Jacques Gierak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Field emission gun and electron beam instruments
- Patent number 7,151,268
- Issue date Dec 19, 2006
- Hitachi High-Technologies Corporation
- Tadashi Fujieda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Suppression of emission noise for microcolumn applications in elect...
- Patent number 6,555,830
- Issue date Apr 29, 2003
- Applied Materials, Inc.
- Marian Mankos
- G01 - MEASURING TESTING
Information Patent Grant
Compensation of within-subfield linewidth variation in e-beam proje...
- Patent number 6,296,976
- Issue date Oct 2, 2001
- Nikon Corporation
- Timothy R. Groves
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
REPELLER FOR ION GENERATING APPARATUS, ION GENERATING APPARATUS AND...
- Publication number 20240290570
- Publication date Aug 29, 2024
- Samsung Electronics Co., LTD
- Kyoungchul YOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPIN-POLARIZED SCANNING ELECTRON MICROSCOPE
- Publication number 20240249911
- Publication date Jul 25, 2024
- HITACHI HIGH-TECH CORPORATION
- Teruo KOHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON GUN, ELECTRON BEAM APPLICATOR, AND EMISSION METHOD OF ELEC...
- Publication number 20240212967
- Publication date Jun 27, 2024
- PHOTO ELECTRON SOUL INC.
- Tomohiro NISHITANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON GUN, ELECTRON RAY APPLYING DEVICE, AND ELECTRON BEAM PROJE...
- Publication number 20230230794
- Publication date Jul 20, 2023
- PHOTO ELECTRON SOUL INC.
- Tomohiro Nishitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE SOURCE
- Publication number 20220068589
- Publication date Mar 3, 2022
- ASML NETHERLANDS B.V.
- Shuai LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE SOURCE
- Publication number 20200126753
- Publication date Apr 23, 2020
- ASML NETHERLANDS B.V.
- Shuai LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Source
- Publication number 20190057833
- Publication date Feb 21, 2019
- HERMES MICROVISION, INC.
- Shuai LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device for the Extraction of Electrical Charge Carriers from a Char...
- Publication number 20180294135
- Publication date Oct 11, 2018
- MEYER BURGER (GERMANY) AG
- Joachim Mai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM AND METHOD OF OPERATING A CHARGED PART...
- Publication number 20150008332
- Publication date Jan 8, 2015
- Carl Zeiss Microscopy, LLC
- John A. Notte
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CURRENT REGULATION METHOD OF MULTIPLE BEAMS
- Publication number 20140265827
- Publication date Sep 18, 2014
- NuFlare Technology, Inc.
- Kenichi SAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CATHODE OPERATING TEMPERATURE ADJUSTING METHOD, AND WRITING APPARATUS
- Publication number 20140239200
- Publication date Aug 28, 2014
- NuFlare Technology, Inc.
- Nobuo MIYAMOTO
- B82 - NANO-TECHNOLOGY
Information Patent Application
FIELD-EMISSION ELECTRON GUN AND METHOD FOR CONTROLLING SAME
- Publication number 20130200788
- Publication date Aug 8, 2013
- Hitachi High-Technologies Corporation
- Boklae Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS, AND METHOD OF CONTROLLING THE SAME
- Publication number 20130063029
- Publication date Mar 14, 2013
- Keigo Kasuya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS FIELD ION MICROSCOPES HAVING MULTIPLE OPERATION MODES
- Publication number 20120068067
- Publication date Mar 22, 2012
- CARL ZEISS NTS, LLC.
- Lawrence Scipioni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FEEDBACK LOOP FOR EMITTER FLASHING
- Publication number 20110221360
- Publication date Sep 15, 2011
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Pavel ADAMEC
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS, AND METHOD OF CONTROLLING THE SAME
- Publication number 20110089336
- Publication date Apr 21, 2011
- Keigo Kasuya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COLD CATHODE FIELD EMISSION ELECTRON GUN AND ITS APPLICATION TO ELE...
- Publication number 20090218508
- Publication date Sep 3, 2009
- Keiji TAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADJUSTING DEVICE OF AN APPARATUS FOR GENERATING A BEAM OF CHARGED P...
- Publication number 20070228292
- Publication date Oct 4, 2007
- Centre National de la Recherche Scientifique
- Jacques Gierak
- B82 - NANO-TECHNOLOGY
Information Patent Application
Ion-implanting apparatus, ion-implanting method, and device manufac...
- Publication number 20060138353
- Publication date Jun 29, 2006
- Yuichiro Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Adjusting device of an apparatus for generating a beam of charged p...
- Publication number 20060027765
- Publication date Feb 9, 2006
- Centre National de la Recherche Scientifique
- Jacques Gierak
- B82 - NANO-TECHNOLOGY
Information Patent Application
Field emission gun and electron beam instruments
- Publication number 20050212440
- Publication date Sep 29, 2005
- Hitachi High-Technologies Corporation
- Tadashi Fujieda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device for controlling an apparatus generating a charged particle beam
- Publication number 20040256576
- Publication date Dec 23, 2004
- Jacques Gierak
- B82 - NANO-TECHNOLOGY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Charged particle source

Charged particle beam system and method

Charged particle source

Electron microscope and method of operating same

Electron gun, control method and control program thereof, and three...

Charged particle beam writing apparatus and charged particle beam w...

Charged particle beam system and method of operating a charged part...

Current regulation method of multiple beams

Charged particle beam system and method of operating a charged part...

Charged particle beam system and method of operating a charged part...

Cathode operating temperature adjusting method, and writing apparatus

Field-emission electron gun and method for controlling same

Feedback loop for emitter flashing

Electron generation and delivery system for contamination sensitive...

Gas field ion microscopes having multiple operation modes

Charged particle beam apparatus, and method of controlling the same

Electron generation and delivery system for contamination sensitive...

Ion-implanting apparatus, ion-implanting method, and device manufac...

Adjusting device of an apparatus for generating a beam of charged p...

High-speed electron beam inspection

Device for controlling an apparatus generating a charged particle beam

Field emission gun and electron beam instruments

Suppression of emission noise for microcolumn applications in elect...

Compensation of within-subfield linewidth variation in e-beam proje...

Patents Applicationslast 30 patents

REPELLER FOR ION GENERATING APPARATUS, ION GENERATING APPARATUS AND...

SPIN-POLARIZED SCANNING ELECTRON MICROSCOPE

ELECTRON GUN, ELECTRON BEAM APPLICATOR, AND EMISSION METHOD OF ELEC...

ELECTRON GUN, ELECTRON RAY APPLYING DEVICE, AND ELECTRON BEAM PROJE...

CHARGED PARTICLE SOURCE

CHARGED PARTICLE SOURCE

Charged Particle Source

Device for the Extraction of Electrical Charge Carriers from a Char...

CHARGED PARTICLE BEAM SYSTEM AND METHOD OF OPERATING A CHARGED PART...

CURRENT REGULATION METHOD OF MULTIPLE BEAMS

CATHODE OPERATING TEMPERATURE ADJUSTING METHOD, AND WRITING APPARATUS

FIELD-EMISSION ELECTRON GUN AND METHOD FOR CONTROLLING SAME

CHARGED PARTICLE BEAM APPARATUS, AND METHOD OF CONTROLLING THE SAME

GAS FIELD ION MICROSCOPES HAVING MULTIPLE OPERATION MODES

FEEDBACK LOOP FOR EMITTER FLASHING

CHARGED PARTICLE BEAM APPARATUS, AND METHOD OF CONTROLLING THE SAME

COLD CATHODE FIELD EMISSION ELECTRON GUN AND ITS APPLICATION TO ELE...

ADJUSTING DEVICE OF AN APPARATUS FOR GENERATING A BEAM OF CHARGED P...

Ion-implanting apparatus, ion-implanting method, and device manufac...

Adjusting device of an apparatus for generating a beam of charged p...

Field emission gun and electron beam instruments

Device for controlling an apparatus generating a charged particle beam