into and out of processing chamber

Industry

CPC
H01L21/67739

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67739into and out of processing chamber

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Atomic layer etching for smoothing of arbitrary surfaces
- Patent number 12,217,968
- Issue date Feb 4, 2025
- California Institute of Technology
- Harold Frank Greer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems of optical inspection of electronic device manu...
- Patent number 12,215,966
- Issue date Feb 4, 2025
- Applied Materials, Inc.
- Mohsin Waqar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Airborne contaminant management method and system
- Patent number 12,202,015
- Issue date Jan 21, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Ming Tsao
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 12,123,091
- Issue date Oct 22, 2024
- Kokusai Electric Corporation
- Takayuki Nakada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system, substrate processing method, and contr...
- Patent number 12,062,559
- Issue date Aug 13, 2024
- Tokyo Electron Limited
- Takafumi Matsuhashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Contamination control in semiconductor manufacturing systems
- Patent number 12,020,964
- Issue date Jun 25, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Bo Chen Chen
- B08 - CLEANING
Information Patent Grant
Ventilated semiconductor processing apparatus
- Patent number 12,014,897
- Issue date Jun 18, 2024
- HITACHI HIGH-TECH CORPORATION
- Akira Nishioka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Valve structure and substrate processing apparatus including the same
- Patent number 11,948,814
- Issue date Apr 2, 2024
- Samsung Electronics Co., Ltd.
- Kangmin Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Maintenance device and maintenance method for substrate processing...
- Patent number 11,941,105
- Issue date Mar 26, 2024
- SCREEN Holdings Co., Ltd.
- Shinichi Ogasawara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus for processing a substrate
- Patent number 11,935,772
- Issue date Mar 19, 2024
- Samsung Electronics Co., Ltd.
- Seohyun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,921,428
- Issue date Mar 5, 2024
- Kioxia Corporation
- Yoshihiro Uozumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for processing substrate
- Patent number 11,908,710
- Issue date Feb 20, 2024
- Semes Co., Ltd.
- Jin Woo Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicide film nucleation
- Patent number 11,901,182
- Issue date Feb 13, 2024
- Applied Materials, Inc.
- Xuebin Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating treatment apparatus and heating treatment method
- Patent number 11,842,906
- Issue date Dec 12, 2023
- Tokyo Electron Limited
- Hideaki Iwasaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of processing substrate, substrate processing apparatus, met...
- Patent number 11,841,343
- Issue date Dec 12, 2023
- Kokusai Electric Corporation
- Teruo Yoshino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing system and substrate processing apparatus
- Patent number 11,823,932
- Issue date Nov 21, 2023
- Samsung Electronics Co., Ltd.
- Eungjin Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stacker of electronic component test handler, and electronic compon...
- Patent number 11,802,907
- Issue date Oct 31, 2023
- ATECO INC.
- Taek Seon Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer mechanism to reduce back-side substrate contact
- Patent number 11,784,076
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Masato Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for particle abatement in a wafer processing tool
- Patent number 11,772,136
- Issue date Oct 3, 2023
- Eryn Smith
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus with an air curtain in a loading/unl...
- Patent number 11,749,549
- Issue date Sep 5, 2023
- KCTECH CO., LTD.
- Dong Min Kim
- B24 - GRINDING POLISHING
Information Patent Grant
Mainframe-less wafer transfer platform with linear transfer system...
- Patent number 11,721,583
- Issue date Aug 8, 2023
- Applied Materials, Inc.
- Sriskantharajah Thirunavukarasu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Material processing path selection method and device
- Patent number 11,703,839
- Issue date Jul 18, 2023
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Lin Cui
- B08 - CLEANING
Information Patent Grant
Fluid control system
- Patent number 11,682,565
- Issue date Jun 20, 2023
- ICHOR SYSTEMS, INC.
- Philip Ryan Barros
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,630,392
- Issue date Apr 18, 2023
- Tokyo Electron Limited
- Tsunenaga Nakashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for substrate transfer and radical confinement
- Patent number 11,574,831
- Issue date Feb 7, 2023
- Applied Materials, Inc.
- Jared Ahmad Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precision capacitor
- Patent number 11,569,342
- Issue date Jan 31, 2023
- Texas Instruments Incorporated
- Poornika Fernandes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing method of workpiece
- Patent number 11,538,704
- Issue date Dec 27, 2022
- Disco Corporation
- Yoshio Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and recording medium for changing at...
- Patent number 11,521,880
- Issue date Dec 6, 2022
- Kokusai Electric Corporation
- Satoru Takahata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 11,512,392
- Issue date Nov 29, 2022
- Kokusai Electric Corporation
- Takayuki Nakada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treating apparatus
- Patent number 11,495,476
- Issue date Nov 8, 2022
- SCREEN Holdings Co., Ltd.
- Tatsuhisa Tsuji
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ETCHING DEVICE AND ETCHING METHOD THEREOF
- Publication number 20240429069
- Publication date Dec 26, 2024
- ZEUS CO., LTD.
- Seung Hoon LEE
- B08 - CLEANING
Information Patent Application
LOAD PORT AND METHODS OF OPERATION
- Publication number 20240387208
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Fam SHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Contamination Control In Semiconductor Manufacturing Systems
- Publication number 20240304481
- Publication date Sep 12, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Bo Chen CHEN
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF CONTROLLING THE SAME
- Publication number 20240222153
- Publication date Jul 4, 2024
- SEMES CO., LTD.
- Joonhwan Jang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VALVE STRUCTURE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
- Publication number 20240213053
- Publication date Jun 27, 2024
- Samsung Electronics Co., Ltd.
- Kangmin Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR PROCESSING SUBSTRATE
- Publication number 20240170305
- Publication date May 23, 2024
- SEMES CO., LTD.
- Jin Woo JUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, MET...
- Publication number 20240142409
- Publication date May 2, 2024
- Kokusai Electric Corporation
- Teruo YOSHINO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BATCH PROCESSING APPARATUS, SYSTEMS, AND RELATED METHODS AND STRUCT...
- Publication number 20240021444
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- Manjunath SUBBANNA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SENSOR MODULE AND SUBSTRATE PROCESSING APPARATUS USING THE SAME
- Publication number 20240014060
- Publication date Jan 11, 2024
- Samsung Electronics Co., Ltd.
- Daejung Kim
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT
- Publication number 20230420279
- Publication date Dec 28, 2023
- Applied Materials, Inc.
- Masato ISHII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLUID CONTROL SYSTEM
- Publication number 20230317471
- Publication date Oct 5, 2023
- ICHOR SYSTEMS, INC.
- Philip Ryan Barros
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GATE VALVE APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20230317480
- Publication date Oct 5, 2023
- TOKYO ELECTRON LIMITED
- Masahiro DOGOME
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BONDING SYSTEM
- Publication number 20230207331
- Publication date Jun 29, 2023
- TOKYO ELECTRON LIMITED
- Takuo Kawauchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PROCESSING SUBSTRATE, DEVICE OF CONTROLLING APPARATUS...
- Publication number 20230175164
- Publication date Jun 8, 2023
- EBARA CORPORATION
- Shunsuke KAGAYA
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
VALVE STRUCTURE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
- Publication number 20230130512
- Publication date Apr 27, 2023
- Samsung Electronics Co., Ltd.
- Kangmin Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, MET...
- Publication number 20230091846
- Publication date Mar 23, 2023
- Kokusai Electric Corporation
- Teruo YOSHINO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230080956
- Publication date Mar 16, 2023
- TOKYO ELECTRON LIMITED
- Makoto WADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20230042033
- Publication date Feb 9, 2023
- SCREEN Semiconductor Solutions Co., Ltd.
- Yoshiteru Fukutomi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
VAPOR DEPOSITION DEVICE
- Publication number 20230025927
- Publication date Jan 26, 2023
- SUMCO CORPORATION
- Yu MINAMIDE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20230017917
- Publication date Jan 19, 2023
- Kokusai Electric Corporation
- Takayuki NAKADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT
- Publication number 20220351999
- Publication date Nov 3, 2022
- Applied Materials, Inc.
- Masato ISHII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISPLAY METHOD AND CONTROL DEVICE
- Publication number 20220283572
- Publication date Sep 8, 2022
- TOKYO ELECTRON LIMITED
- Ryota AOI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR PROCESSING SUBSTRATE
- Publication number 20220208565
- Publication date Jun 30, 2022
- SEMES CO., LTD.
- Jin Woo JUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTAMINATION CONTROL IN SEMICONDUCTOR MANUFACTURING SYSTEMS
- Publication number 20220208581
- Publication date Jun 30, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Bo Chen Chen
- B08 - CLEANING
Information Patent Application
APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20220199440
- Publication date Jun 23, 2022
- Samsung Electronics Co., Ltd.
- Seohyun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MATERIAL PROCESSING PATH SELECTION METHOD AND DEVICE
- Publication number 20220187807
- Publication date Jun 16, 2022
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Lin CUI
- B08 - CLEANING
Information Patent Application
STACKER OF ELECTRONIC COMPONENT TEST HANDLER, AND ELECTRONIC COMPON...
- Publication number 20220187360
- Publication date Jun 16, 2022
- ATECO INC.
- Taek Seon LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220181171
- Publication date Jun 9, 2022
- KIOXIA Corporation
- Yoshihiro UOZUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, AND CONTR...
- Publication number 20220148898
- Publication date May 12, 2022
- TOKYO ELECTRON LIMITED
- Takafumi Matsuhashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220108913
- Publication date Apr 7, 2022
- TOKYO ELECTRON LIMITED
- Hajime NAITO
- H01 - BASIC ELECTRIC ELEMENTS

into and out of processing chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Atomic layer etching for smoothing of arbitrary surfaces

Methods and systems of optical inspection of electronic device manu...

Airborne contaminant management method and system

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing system, substrate processing method, and contr...

Contamination control in semiconductor manufacturing systems

Ventilated semiconductor processing apparatus

Valve structure and substrate processing apparatus including the same

Maintenance device and maintenance method for substrate processing...

Apparatus for processing a substrate

Substrate processing method and substrate processing apparatus

Apparatus and method for processing substrate

Silicide film nucleation

Heating treatment apparatus and heating treatment method

Method of processing substrate, substrate processing apparatus, met...

Substrate processing system and substrate processing apparatus

Stacker of electronic component test handler, and electronic compon...

Substrate transfer mechanism to reduce back-side substrate contact

System and method for particle abatement in a wafer processing tool

Substrate processing apparatus with an air curtain in a loading/unl...

Mainframe-less wafer transfer platform with linear transfer system...

Material processing path selection method and device

Fluid control system

Substrate processing apparatus

Method and apparatus for substrate transfer and radical confinement

Precision capacitor

Processing method of workpiece

Substrate processing apparatus and recording medium for changing at...

Substrate processing apparatus

Substrate treating apparatus

Patents Applicationslast 30 patents

ETCHING DEVICE AND ETCHING METHOD THEREOF

LOAD PORT AND METHODS OF OPERATION

Contamination Control In Semiconductor Manufacturing Systems

SUBSTRATE PROCESSING APPARATUS AND METHOD OF CONTROLLING THE SAME

VALVE STRUCTURE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

APPARATUS AND METHOD FOR PROCESSING SUBSTRATE

METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, MET...

BATCH PROCESSING APPARATUS, SYSTEMS, AND RELATED METHODS AND STRUCT...

SENSOR MODULE AND SUBSTRATE PROCESSING APPARATUS USING THE SAME

SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT

FLUID CONTROL SYSTEM

GATE VALVE APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS

BONDING SYSTEM

APPARATUS FOR PROCESSING SUBSTRATE, DEVICE OF CONTROLLING APPARATUS...

VALVE STRUCTURE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, MET...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TREATING APPARATUS

VAPOR DEPOSITION DEVICE

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT

DISPLAY METHOD AND CONTROL DEVICE

APPARATUS AND METHOD FOR PROCESSING SUBSTRATE

CONTAMINATION CONTROL IN SEMICONDUCTOR MANUFACTURING SYSTEMS

APPARATUS FOR PROCESSING A SUBSTRATE

MATERIAL PROCESSING PATH SELECTION METHOD AND DEVICE

STACKER OF ELECTRONIC COMPONENT TEST HANDLER, AND ELECTRONIC COMPON...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, AND CONTR...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS