introducing gas in vicinity of workpiece

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CPC
H01J2237/31744

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/31744introducing gas in vicinity of workpiece

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method of material deposition
- Patent number 11,798,804
- Issue date Oct 24, 2023
- FEI Company
- Brian Roberts Routh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing system, switching timing creation support devi...
- Patent number 11,587,763
- Issue date Feb 21, 2023
- Tokyo Electron Limited
- Takeshi Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for repairing a photolithographic mask
- Patent number 11,256,168
- Issue date Feb 22, 2022
- Carl Zeiss SMT GmbH
- Michael Budach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of material deposition
- Patent number 11,069,523
- Issue date Jul 20, 2021
- FEI Company
- Brian Roberts Routh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for permanently repairing defects of absent mater...
- Patent number 10,732,501
- Issue date Aug 4, 2020
- Carl Zeiss SMT GmbH
- Jens Oster
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for correlating images of a photolithographic...
- Patent number 9,990,737
- Issue date Jun 5, 2018
- Carl Zeiss SMT GmbH
- Dieter Weber
- G02 - OPTICS
Information Patent Grant
Method of material deposition
- Patent number 9,978,586
- Issue date May 22, 2018
- FEI Company
- Brian Roberts Routh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Beam-induced etching
- Patent number 9,909,218
- Issue date Mar 6, 2018
- Ecole Polytechnique Federales de Lausanne
- Tristan Bret
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas injection system with precursor for planar deprocessing of semi...
- Patent number 9,761,467
- Issue date Sep 12, 2017
- FEI Company
- Chad Rue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing a substrate with a focused part...
- Patent number 9,721,754
- Issue date Aug 1, 2017
- Carl Zeiss SMT GmbH
- Tristan Bret
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of processing a material-specimen
- Patent number 9,543,117
- Issue date Jan 10, 2017
- Carl Zeiss Microscopy GmbH
- Roland Salzer
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Repair apparatus
- Patent number 9,378,858
- Issue date Jun 28, 2016
- Hitachi High-Tech Science Corporation
- Fumio Aramaki
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Endpoint detection for photolithography mask repair
- Patent number 9,312,101
- Issue date Apr 12, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chien-Lin Chen
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method of welding a frozen aqueous sample to a microprobe
- Patent number 9,142,384
- Issue date Sep 22, 2015
- FEI Company
- Rudolf Johannes Peter Gerardus Schampers
- G01 - MEASURING TESTING
Information Patent Grant
Precursor for planar deprocessing of semiconductor devices using a...
- Patent number 9,064,811
- Issue date Jun 23, 2015
- FEI Company
- Chad Rue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Endpoint detection for photolithography mask repair
- Patent number 9,040,212
- Issue date May 26, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chien-Lin Chen
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Processing system
- Patent number 8,939,108
- Issue date Jan 27, 2015
- Carl Zeiss Microscopy GmbH
- Emmerich Bertagnolli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Charged particle-beam processing using a cluster source
- Patent number 8,835,880
- Issue date Sep 16, 2014
- FEI Company
- Clive Chandler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing system
- Patent number 8,415,644
- Issue date Apr 9, 2013
- Carl Zeiss Microscopy GmbH
- Fabian Perez-Willard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing system
- Patent number 8,350,227
- Issue date Jan 8, 2013
- Carl Zeiss Microscopy GmbH
- Holger Doemer
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
High resolution plasma etch
- Patent number 8,303,833
- Issue date Nov 6, 2012
- FEI Company
- Milos Toth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method to direct pattern metals on a substrate
- Patent number 8,278,220
- Issue date Oct 2, 2012
- FEI Company
- Theresa Holtermann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photomask defect correcting method and device
- Patent number 8,257,887
- Issue date Sep 4, 2012
- SII NanoTechnology Inc.
- Osamu Takaoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing system
- Patent number 8,115,180
- Issue date Feb 14, 2012
- Carl Zeiss NTS GmbH
- Holger Doemer
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electron microscope for inspecting and processing of an object with...
- Patent number 8,058,614
- Issue date Nov 15, 2011
- Carl Zeiss NTS GmbH
- Johannes Bihr
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Structural modification using electron beam activated chemical etch
- Patent number 8,052,885
- Issue date Nov 8, 2011
- KLA-Tencor Corporation
- Mehran Naser-Ghodsi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System for processing an object
- Patent number 8,008,639
- Issue date Aug 30, 2011
- Carl Zeiss NTS GmbH
- Wolfram Buhler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Use of ion implantation in chemical etching
- Patent number 8,008,207
- Issue date Aug 30, 2011
- KLA-Tencor Technologies Corporation
- Ming Lun Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for specimen fabrication
- Patent number 7,989,782
- Issue date Aug 2, 2011
- Hitachi High-Technologies Corporation
- Satoshi Tomimatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for processing an object
- Patent number 7,923,702
- Issue date Apr 12, 2011
- Carl Zeiss NTS GmbH
- Wolfram Buhler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
DEVICE FOR IMAGING AND PROCESSING A SAMPLE USING A FOCUSED PARTICLE...
- Publication number 20240062989
- Publication date Feb 22, 2024
- Carl Zeiss SMT GMBH
- Daniel Schwarz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
END POINT DETERMINATION BY MEANS OF CONTRAST GAS
- Publication number 20230341766
- Publication date Oct 26, 2023
- Carl Zeiss SMT GMBH
- Daniel Rhinow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PARTICLE BEAM-INDUCED PROCESSING OF A DEFECT OF A MICROL...
- Publication number 20230081844
- Publication date Mar 16, 2023
- Carl Zeiss SMT GMBH
- Thorsten Hofmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SWITCHING TIMING CREATION SUPPORT DEVI...
- Publication number 20210272772
- Publication date Sep 2, 2021
- TOKYO ELECTRON LIMITED
- Takeshi AKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MATERIAL DEPOSITION
- Publication number 20180277361
- Publication date Sep 27, 2018
- FEI Company
- Brian Roberts Routh
- G01 - MEASURING TESTING
Information Patent Application
Repair Apparatus
- Publication number 20160322123
- Publication date Nov 3, 2016
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Fumio Aramaki
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
METHOD OF WELDING A FROZEN AQUEOUS SAMPLE TO A MICROPROBE
- Publication number 20140367571
- Publication date Dec 18, 2014
- FEI Company
- Rudolf Johannes Peter Gerardus Schampers
- G02 - OPTICS
Information Patent Application
Precursor for Planar Deprocessing of Semiconductor Devices using a...
- Publication number 20140357088
- Publication date Dec 4, 2014
- FEI Company
- Chad Rue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Endpoint Detection for Photolithography Mask Repair
- Publication number 20140255826
- Publication date Sep 11, 2014
- Chien-Lin Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING A MATERIAL-SPECIMEN
- Publication number 20140131315
- Publication date May 15, 2014
- Roland Salzer
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
High Resolution Plasma Etch
- Publication number 20130192758
- Publication date Aug 1, 2013
- FEI Company
- Milos Toth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESSING SYSTEM
- Publication number 20130134328
- Publication date May 30, 2013
- CARL ZEISS MICROSCOPY GMBH
- Holger Doemer
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Processing System
- Publication number 20130098292
- Publication date Apr 25, 2013
- CARL ZEISS NTS GMBH
- Emmerich Bertagnolli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING A SUBSTRATE WITH A FOCUSED PART...
- Publication number 20120273458
- Publication date Nov 1, 2012
- Tristan Bret
- B82 - NANO-TECHNOLOGY
Information Patent Application
PROCESSING SYSTEM
- Publication number 20120267545
- Publication date Oct 25, 2012
- CARL ZEISS NTS GMBH
- Fabian Perez-Willard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING SYSTEM
- Publication number 20120091363
- Publication date Apr 19, 2012
- CARL ZEISS NTS GMBH
- Holger Doemer
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD FOR PROCESSING AN OBJECT WITH MINIATURIZED STRUCTURES
- Publication number 20100297362
- Publication date Nov 25, 2010
- CARL ZEISS SMS GMBH
- Michael Budach
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BEAM-INDUCED ETCHING
- Publication number 20100203431
- Publication date Aug 12, 2010
- Ecole Polytechnique Federales de Lausanne
- Tristan Bret
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHOTOMASK DEFECT CORRECTING METHOD AND DEVICE
- Publication number 20100178601
- Publication date Jul 15, 2010
- Osamu Takaoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Electron microscope for inspecting and processing of an object with...
- Publication number 20100119698
- Publication date May 13, 2010
- Johannes Bihr
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROCESSING SYSTEM
- Publication number 20100051828
- Publication date Mar 4, 2010
- CARL ZEISS NTS GMBH
- Holger Doemer
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD TO DIRECT PATTERN METALS ON A SUBSTRATE
- Publication number 20100032302
- Publication date Feb 11, 2010
- FEI Company
- THERESA HOLTERMANN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing system
- Publication number 20100024730
- Publication date Feb 4, 2010
- Emmerich Bertagnolli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
System for Processing an Object
- Publication number 20090152460
- Publication date Jun 18, 2009
- CARL ZEISS NTS GMBH
- Wolfram Buhler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Processing an Object
- Publication number 20090152459
- Publication date Jun 18, 2009
- CARL ZEISS NTS GMBH
- Wolfram Buhler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR SPECIMEN FABRICATION
- Publication number 20090121158
- Publication date May 14, 2009
- Hitachi High-Technologies Corporation
- Satoshi Tomimatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Material processing system and method
- Publication number 20090121132
- Publication date May 14, 2009
- CARL ZEISS NTS GMBH
- Hans W.P. Koops
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FIB MILLING OF COPPER OVER ORGANIC DIELECTRICS
- Publication number 20090114851
- Publication date May 7, 2009
- Vladimir V. Makarov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH RESOLUTION PLASMA ETCH
- Publication number 20080314871
- Publication date Dec 25, 2008
- FEI Company
- Milos Toth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Charged-particle-beam processing using a cluster source
- Publication number 20080142735
- Publication date Jun 19, 2008
- FEI Company
- Clive Chandler
- H01 - BASIC ELECTRIC ELEMENTS

introducing gas in vicinity of workpiece

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of material deposition

Substrate processing system, switching timing creation support devi...

Apparatus and method for repairing a photolithographic mask

Method of material deposition

Method and device for permanently repairing defects of absent mater...

Apparatus and method for correlating images of a photolithographic...

Method of material deposition

Beam-induced etching

Gas injection system with precursor for planar deprocessing of semi...

Method and apparatus for processing a substrate with a focused part...

Method of processing a material-specimen

Repair apparatus

Endpoint detection for photolithography mask repair

Method of welding a frozen aqueous sample to a microprobe

Precursor for planar deprocessing of semiconductor devices using a...

Endpoint detection for photolithography mask repair

Processing system

Charged particle-beam processing using a cluster source

Processing system

Processing system

High resolution plasma etch

Method to direct pattern metals on a substrate

Photomask defect correcting method and device

Processing system

Electron microscope for inspecting and processing of an object with...

Structural modification using electron beam activated chemical etch

System for processing an object

Use of ion implantation in chemical etching

Apparatus and method for specimen fabrication

System and method for processing an object

Patents Applicationslast 30 patents

DEVICE FOR IMAGING AND PROCESSING A SAMPLE USING A FOCUSED PARTICLE...

END POINT DETERMINATION BY MEANS OF CONTRAST GAS

METHOD FOR PARTICLE BEAM-INDUCED PROCESSING OF A DEFECT OF A MICROL...

SUBSTRATE PROCESSING SYSTEM, SWITCHING TIMING CREATION SUPPORT DEVI...

METHOD OF MATERIAL DEPOSITION

Repair Apparatus

METHOD OF WELDING A FROZEN AQUEOUS SAMPLE TO A MICROPROBE

Precursor for Planar Deprocessing of Semiconductor Devices using a...

Endpoint Detection for Photolithography Mask Repair

METHOD OF PROCESSING A MATERIAL-SPECIMEN

High Resolution Plasma Etch

PROCESSING SYSTEM

Processing System

METHOD AND APPARATUS FOR PROCESSING A SUBSTRATE WITH A FOCUSED PART...

PROCESSING SYSTEM

PROCESSING SYSTEM

METHOD FOR PROCESSING AN OBJECT WITH MINIATURIZED STRUCTURES

BEAM-INDUCED ETCHING

PHOTOMASK DEFECT CORRECTING METHOD AND DEVICE

Electron microscope for inspecting and processing of an object with...

PROCESSING SYSTEM

METHOD TO DIRECT PATTERN METALS ON A SUBSTRATE

Processing system

System for Processing an Object

System and Method for Processing an Object

APPARATUS AND METHOD FOR SPECIMEN FABRICATION

Material processing system and method

FIB MILLING OF COPPER OVER ORGANIC DIELECTRICS

HIGH RESOLUTION PLASMA ETCH

Charged-particle-beam processing using a cluster source