introduction of oxygen

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H01L21/02323

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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H01L21/02323introduction of oxygen

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Patents Grantslast 30 patents

Information Patent Grant
Protective passivation layer for magnetic tunnel junctions
- Patent number 12,213,385
- Issue date Jan 28, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jodi Mari Iwata
- G11 - INFORMATION STORAGE
Information Patent Grant
Cyclic spin-on coating process for forming dielectric material
- Patent number 12,170,199
- Issue date Dec 17, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Je-Ming Kuo
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Strained gate semiconductor device having an interlayer dielectric...
- Patent number 12,100,767
- Issue date Sep 24, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Cheng-Ta Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Formation method of semiconductor structure
- Patent number 12,080,589
- Issue date Sep 3, 2024
- Shanghai IC R&D Center Co., Ltd.
- Weijun Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device structure with dielectric layer
- Patent number 12,051,746
- Issue date Jul 30, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chung-Liang Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of dielectric material fill and treatment
- Patent number 12,046,508
- Issue date Jul 23, 2024
- Applied Materials, Inc.
- Shi You
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,040,161
- Issue date Jul 16, 2024
- Kokusai Electric Corporation
- Yasutoshi Tsubota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method for manufacturing semiconductor device
- Patent number 11,961,918
- Issue date Apr 16, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Yasutaka Nakazawa
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Grant
Semiconductor device and display device including the same
- Patent number 11,862,454
- Issue date Jan 2, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device, manufacturing method thereof, display device,...
- Patent number 11,842,901
- Issue date Dec 12, 2023
- Semiconductor Energy Laboratory Co., Ltd.
- Masami Jintyou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, method of processing...
- Patent number 11,823,886
- Issue date Nov 21, 2023
- Kokusai Electric Corporation
- Kazuhiro Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid crystal display device including transistor comprising oxide...
- Patent number 11,824,124
- Issue date Nov 21, 2023
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming semiconductor structure with high aspect ratio
- Patent number 11,823,960
- Issue date Nov 21, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Han-Pin Chung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming insulating film, apparatus for processing substr...
- Patent number 11,823,897
- Issue date Nov 21, 2023
- Tokyo Electron Limited
- Makoto Muramatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dielectric gap fill
- Patent number 11,817,343
- Issue date Nov 14, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Yun Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cyclic spin-on coating process for forming dielectric material
- Patent number 11,791,154
- Issue date Oct 17, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Je-Ming Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Protective passivation layer for magnetic tunnel junctions
- Patent number 11,758,820
- Issue date Sep 12, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jodi Mari Iwata
- G11 - INFORMATION STORAGE
Information Patent Grant
Fin field-effect transistor device and method
- Patent number 11,735,430
- Issue date Aug 22, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of dielectric material fill and treatment
- Patent number 11,615,984
- Issue date Mar 28, 2023
- Applied Materials, Inc.
- Shi You
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method for the same
- Patent number 11,594,455
- Issue date Feb 28, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chih-Nan Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device, manufacturing method thereof, and display dev...
- Patent number 11,557,612
- Issue date Jan 17, 2023
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing an etch stop layer and an inter-layer diele...
- Patent number 11,522,062
- Issue date Dec 6, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shahaji B. More
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition of flowable silicon-containing films
- Patent number 11,515,149
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Lakmal C. Kalutarage
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for enhancing selectivity in SAM-based selective deposition
- Patent number 11,515,155
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Chang Ke
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device structure with dielectric layer
- Patent number 11,476,361
- Issue date Oct 18, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chung-Liang Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method for manufacturing semiconductor device
- Patent number 11,462,645
- Issue date Oct 4, 2022
- Semiconductor Energy Laboratory Co., Ltd.
- Yasutaka Nakazawa
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Grant
Cyclic spin-on coating process for forming dielectric material
- Patent number 11,450,526
- Issue date Sep 20, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Je-Ming Kuo
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Semiconductor device, manufacturing method thereof, display device,...
- Patent number 11,404,285
- Issue date Aug 2, 2022
- Semiconductor Energy Laboratory Co., Ltd.
- Masami Jintyou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming pattern and method of manufacturing semiconductor...
- Patent number 11,393,671
- Issue date Jul 19, 2022
- Kioxia Corporation
- Koji Asakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Homogeneous densification of fill layers for controlled reveal of v...
- Patent number 11,342,230
- Issue date May 24, 2022
- Tessera, Inc.
- Kangguo Cheng
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR FORMING SEMICONDUCTOR DEVICE HAVING CRYSTALLINE SEMICOND...
- Publication number 20240387169
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Chieh Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR REDUCING SCRATCH DEFECTS IN CHEMICAL MECHANICAL PLANARI...
- Publication number 20240387187
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wan-Chun Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DIELECTRIC MATERIAL FILL AND TREATMENT
- Publication number 20240379420
- Publication date Nov 14, 2024
- Applied Materials, Inc.
- Shi YOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMING OF AN ELECTRONIC POWER COMPONENT
- Publication number 20240266423
- Publication date Aug 8, 2024
- STMicroelectronics International N.V.
- Benjamin MORILLON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING THIN FILM FOR MINIMIZING INCREASE IN DEFECTS AT I...
- Publication number 20240249935
- Publication date Jul 25, 2024
- EQ TECH PLUS CO., LTD.
- Dong Hwa SHIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SEMICONDUCTOR...
- Publication number 20240162351
- Publication date May 16, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND DISPLAY DEVICE INCLUDING THE SAME
- Publication number 20240154041
- Publication date May 9, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA SURFACE TREATMENT FOR WAFER BONDING METHODS
- Publication number 20240071746
- Publication date Feb 29, 2024
- TOKYO ELECTRON LIMITED
- Yu-Hao Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING TREATED SILICON-CARBON MATERIAL
- Publication number 20240047198
- Publication date Feb 8, 2024
- ASM IP HOLDING B.V.
- Hirotsugu Sugiura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING SEMICONDUCTOR STRUCTURE WITH HIGH ASPECT RATIO
- Publication number 20240047276
- Publication date Feb 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Han-Pin CHUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INERTIAL SENSOR, METHOD OF MANUFACTURING INERTIAL SENSOR, AND INERT...
- Publication number 20240003933
- Publication date Jan 4, 2024
- SEIKO EPSON CORPORATION
- Teruo Takizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cyclic Spin-On Coating Process for Forming Dielectric Material
- Publication number 20230411150
- Publication date Dec 21, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Je-Ming Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dielectric Gap Fill
- Publication number 20230377944
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Yun PENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR REDUCING SCRATCH DEFECTS IN CHEMICAL MECHANICAL PLANARI...
- Publication number 20230377898
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wan-Chun Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROTECTIVE PASSIVATION LAYER FOR MAGNETIC TUNNEL JUNCTIONS
- Publication number 20230371395
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jodi Mari Iwata
- G11 - INFORMATION STORAGE
Information Patent Application
GATE SPACER AND FORMATION METHOD THEREOF
- Publication number 20230299175
- Publication date Sep 21, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Rui CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR SIMULTANEOUS GENERATION OF A TRAP-RICH LAYER AND A BOX...
- Publication number 20230245922
- Publication date Aug 3, 2023
- pSemi Corporation
- Sebastien KOUASSI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF MANUFACTURING INTEGRATED CIRCUIT DEVICES USING CARBONYL...
- Publication number 20230215723
- Publication date Jul 6, 2023
- ADEKA CORPORATION
- EUNHYEA KO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD FOR THE SAME
- Publication number 20230215765
- Publication date Jul 6, 2023
- Taiwan Semiconductor Manufacturing company Ltd.
- CHIH-NAN LO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES AND SEMICONDUCTOR DEV...
- Publication number 20230207381
- Publication date Jun 29, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jun-Nan NIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DIELECTRIC MATERIAL FILL AND TREATMENT
- Publication number 20230187276
- Publication date Jun 15, 2023
- Applied Materials, Inc.
- Shi YOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR SUBSTRATE AND MANUFACTURE THEREOF
- Publication number 20230178366
- Publication date Jun 8, 2023
- ZING SEMICONDUCTOR CORPORATION
- Xing WEI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230080956
- Publication date Mar 16, 2023
- TOKYO ELECTRON LIMITED
- Makoto WADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF RF COMPONENTS
- Publication number 20230048614
- Publication date Feb 16, 2023
- STMicroelectronics (Tours) SAS
- Patrick HAUTTECOEUR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20220406944
- Publication date Dec 22, 2022
- Semiconductor Energy Laboratory Co., Ltd.
- Yasutaka NAKAZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE STRUCTURE
- Publication number 20220384635
- Publication date Dec 1, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chung-Liang CHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inter-Layer Dielectrics and Etch Stop Layers for Transistor Source/...
- Publication number 20220384593
- Publication date Dec 1, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shahaji B. More
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cyclic Spin-On Coating Process for Forming Dielectric Material
- Publication number 20220367180
- Publication date Nov 17, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Je-Ming Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE, MANUFACTURING METHOD THEREOF, DISPLAY DEVICE,...
- Publication number 20220319866
- Publication date Oct 6, 2022
- Semiconductor Energy Laboratory Co., Ltd.
- Masami JINTYOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS FOR HYDROPHILICALLY BONDING SUBSTRATES
- Publication number 20220319910
- Publication date Oct 6, 2022
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Vincent Larrey
- H01 - BASIC ELECTRIC ELEMENTS

introduction of oxygen

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Protective passivation layer for magnetic tunnel junctions

Cyclic spin-on coating process for forming dielectric material

Strained gate semiconductor device having an interlayer dielectric...

Formation method of semiconductor structure

Semiconductor device structure with dielectric layer

Method of dielectric material fill and treatment

Method of manufacturing semiconductor device, substrate processing...

Semiconductor device and method for manufacturing semiconductor device

Semiconductor device and display device including the same

Semiconductor device, manufacturing method thereof, display device,...

Method of manufacturing semiconductor device, method of processing...

Liquid crystal display device including transistor comprising oxide...

Method for forming semiconductor structure with high aspect ratio

Method for forming insulating film, apparatus for processing substr...

Dielectric gap fill

Cyclic spin-on coating process for forming dielectric material

Protective passivation layer for magnetic tunnel junctions

Fin field-effect transistor device and method

Method of dielectric material fill and treatment

Semiconductor device and manufacturing method for the same

Semiconductor device, manufacturing method thereof, and display dev...

Method of manufacturing an etch stop layer and an inter-layer diele...

Deposition of flowable silicon-containing films

Methods for enhancing selectivity in SAM-based selective deposition

Semiconductor device structure with dielectric layer

Semiconductor device and method for manufacturing semiconductor device

Cyclic spin-on coating process for forming dielectric material

Semiconductor device, manufacturing method thereof, display device,...

Method of forming pattern and method of manufacturing semiconductor...

Homogeneous densification of fill layers for controlled reveal of v...

Patents Applicationslast 30 patents

METHOD FOR FORMING SEMICONDUCTOR DEVICE HAVING CRYSTALLINE SEMICOND...

METHODS FOR REDUCING SCRATCH DEFECTS IN CHEMICAL MECHANICAL PLANARI...

METHOD OF DIELECTRIC MATERIAL FILL AND TREATMENT

FORMING OF AN ELECTRONIC POWER COMPONENT

METHOD OF FORMING THIN FILM FOR MINIMIZING INCREASE IN DEFECTS AT I...

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SEMICONDUCTOR...

SEMICONDUCTOR DEVICE AND DISPLAY DEVICE INCLUDING THE SAME

PLASMA SURFACE TREATMENT FOR WAFER BONDING METHODS

METHOD OF FORMING TREATED SILICON-CARBON MATERIAL

METHOD FOR FORMING SEMICONDUCTOR STRUCTURE WITH HIGH ASPECT RATIO

INERTIAL SENSOR, METHOD OF MANUFACTURING INERTIAL SENSOR, AND INERT...

Cyclic Spin-On Coating Process for Forming Dielectric Material

Dielectric Gap Fill

METHODS FOR REDUCING SCRATCH DEFECTS IN CHEMICAL MECHANICAL PLANARI...

PROTECTIVE PASSIVATION LAYER FOR MAGNETIC TUNNEL JUNCTIONS

GATE SPACER AND FORMATION METHOD THEREOF

METHODS FOR SIMULTANEOUS GENERATION OF A TRAP-RICH LAYER AND A BOX...

METHODS OF MANUFACTURING INTEGRATED CIRCUIT DEVICES USING CARBONYL...

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD FOR THE SAME

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES AND SEMICONDUCTOR DEV...

METHOD OF DIELECTRIC MATERIAL FILL AND TREATMENT

SEMICONDUCTOR SUBSTRATE AND MANUFACTURE THEREOF

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

MANUFACTURING METHOD OF RF COMPONENTS

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE STRUCTURE

Inter-Layer Dielectrics and Etch Stop Layers for Transistor Source/...

Cyclic Spin-On Coating Process for Forming Dielectric Material

SEMICONDUCTOR DEVICE, MANUFACTURING METHOD THEREOF, DISPLAY DEVICE,...

PROCESS FOR HYDROPHILICALLY BONDING SUBSTRATES