involving loading and unloading of waers

Industry

CPC
H01L21/67778

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67778involving loading and unloading of waers

Industries

Patents Grantslast 30 patents

Information Patent Grant
System with substrate carrier deterioration detection and repair
- Patent number 12,162,134
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jen-Ti Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Automated semiconductor substrate polishing and cleaning
- Patent number 12,154,810
- Issue date Nov 26, 2024
- GlobalWafers Co., Ltd.
- ShinBae Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Factory interface robots usable with integrated load locks
- Patent number 12,142,508
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Sushant S. Koshti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load port
- Patent number 12,131,933
- Issue date Oct 29, 2024
- Sinfonia Technology Co., Ltd.
- Tatsuru Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for determining wafer characters
- Patent number 12,125,730
- Issue date Oct 22, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wei-Da Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple semiconductor die container load port
- Patent number 12,119,251
- Issue date Oct 15, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Hung Huang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing system, load port and method
- Patent number 12,112,961
- Issue date Oct 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chuang Li
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for treating substrate
- Patent number 12,087,560
- Issue date Sep 10, 2024
- Semes Co., Ltd.
- Dukhyun Son
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Multi-depth film for optical devices
- Patent number 12,084,761
- Issue date Sep 10, 2024
- Applied Materials, Inc.
- Karl J. Armstrong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Air curtain for defect reduction
- Patent number 12,062,562
- Issue date Aug 13, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wei-Chih Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system for processing substrates with an elect...
- Patent number 12,051,602
- Issue date Jul 30, 2024
- ASM IP Holding B.V.
- Jeroen de Jonge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus for processing substrates
- Patent number 12,040,199
- Issue date Jul 16, 2024
- ASM IP Holding B.V.
- Jeroen Fluit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport system and determination method
- Patent number 12,002,695
- Issue date Jun 4, 2024
- Kawasaki Jukogyo Kabushiki Kaisha
- Haruhiko Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate mapping apparatus and method therefor
- Patent number 12,002,696
- Issue date Jun 4, 2024
- BROOKS AUTOMATION US, LLC
- Radik Sunugatov
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,990,359
- Issue date May 21, 2024
- Kokusai Electric Corporation
- Takatomo Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
FOUP or cassette storage for hybrid substrate bonding system
- Patent number 11,984,335
- Issue date May 14, 2024
- Applied Materials, Inc.
- Coby Scott Grove
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus
- Patent number 11,948,823
- Issue date Apr 2, 2024
- SCREEN Holdings Co., Ltd.
- Yuichi Takayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer hand and substrate processing apparatus with conductive ri...
- Patent number 11,935,779
- Issue date Mar 19, 2024
- Semes Co., Ltd.
- Tae Hoon Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing method
- Patent number 11,915,965
- Issue date Feb 27, 2024
- ZEUS CO., LTD.
- Seung Dae Baek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple semiconductor die container load port
- Patent number 11,915,957
- Issue date Feb 27, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Hung Huang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Tool auto-teach method and apparatus
- Patent number 11,908,721
- Issue date Feb 20, 2024
- BROOKS AUTOMATION US, LLC
- Jairo T. Moura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated guided vehicle with multistage loading structure
- Patent number 11,891,254
- Issue date Feb 6, 2024
- Samsung Electronics Co., Ltd.
- Bosung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device and non-transitory com...
- Patent number 11,869,785
- Issue date Jan 9, 2024
- Kokusai Electric Corporation
- Tomoyuki Miyada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Interface tool
- Patent number 11,854,851
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jyh-Shiou Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,854,850
- Issue date Dec 26, 2023
- Kokusai Electric Corporation
- Yukinao Kaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer stocker
- Patent number 11,823,934
- Issue date Nov 21, 2023
- Sinfonia Technology Co., Ltd.
- Yasushi Taniyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Indexable side storage pod apparatus, heated side storage pod appar...
- Patent number 11,823,933
- Issue date Nov 21, 2023
- Applied Materials, Inc.
- Patrick Pannese
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and arrangement for handling and processing substrates
- Patent number RE49725
- Issue date Nov 14, 2023
- ASML Netherlands B.V.
- Hendrik Jan De Jong
Information Patent Grant
Processing apparatus configured for processing wafers continuously...
- Patent number 11,810,807
- Issue date Nov 7, 2023
- Disco Corporation
- Akiko Kigawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport apparatus and control method
- Patent number 11,791,188
- Issue date Oct 17, 2023
- HIRATA CORPORATION
- Hirofumi Nakamura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SAMPLE MEASURING APPARATUS
- Publication number 20250014926
- Publication date Jan 9, 2025
- Konica Minolta, Inc.
- Yusuke MURAKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS PLATFORM
- Publication number 20250014931
- Publication date Jan 9, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Haiwei LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR ALIGNING A WAFER TO A CHUCK
- Publication number 20240412992
- Publication date Dec 12, 2024
- KLA Corporation
- Jaime Poris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD
- Publication number 20240395585
- Publication date Nov 28, 2024
- TOKYO ELECTRON LIMITED
- Manabu HONMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, LOAD DEVICE AND METHOD
- Publication number 20240387213
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chuang LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR DETERMINING WAFER CHARACTERS
- Publication number 20240387223
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., LTD
- Wei-Da KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EQUIPMENT FRONT END MODULE
- Publication number 20240387217
- Publication date Nov 21, 2024
- ASM IP HOLDING B.V.
- Hsuan Te Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND SU...
- Publication number 20240355644
- Publication date Oct 24, 2024
- TOKYO ELECTRON LIMITED
- Shinsuke TAKAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AIR CURTAIN FOR DEFECT REDUCTION
- Publication number 20240355660
- Publication date Oct 24, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Chih LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES
- Publication number 20240339340
- Publication date Oct 10, 2024
- ASM IP HOLDING B.V.
- Jeroen Fluit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESS DEVICE, CONTROL METHOD AND APPARATUS FOR MOVI...
- Publication number 20240338008
- Publication date Oct 10, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Jinheng ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESSING APPARATUS
- Publication number 20240297058
- Publication date Sep 5, 2024
- Hitachi High-Tech Corporation
- Chen Pin HSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Mapping Apparatus And Method Therefor
- Publication number 20240290642
- Publication date Aug 29, 2024
- BROOKS AUTOMATION US, LLC
- Radik SUNUGATOV
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
POSITION DETERMINATION APPARATUS FOR ROBOT DETECTION LASER SENSOR S...
- Publication number 20240282607
- Publication date Aug 22, 2024
- Samsung Electronics Co., Ltd.
- Kyu Ok LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR INSPECTING VIA HOLE OF WAFER
- Publication number 20240264091
- Publication date Aug 8, 2024
- GOOIL ENGINEERING CO., LTD.
- Seung Gyun Back
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORKING SYSTEM FOR SEMICONDUCTOR PACKAGING PROCESS AND OPERATION ME...
- Publication number 20240266197
- Publication date Aug 8, 2024
- Siliconware Precision Industries Co., Ltd.
- Tang-Hsin KUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORKING SYSTEM FOR SEMICONDUCTOR PACKAGING PROCESS AND OPERATION ME...
- Publication number 20240266193
- Publication date Aug 8, 2024
- Siliconware Precision Industries Co., Ltd.
- Tang-Hsin KUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HANDLING SYSTEM FOR FETCHING A SUBSTRATE
- Publication number 20240242995
- Publication date Jul 18, 2024
- Semsysco GmbH
- Louis Wagner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR HOLDING A SUBSTRATE, METHOD OF HOLDING A SUBSTRATE, AND...
- Publication number 20240186167
- Publication date Jun 6, 2024
- SEMES CO., LTD.
- Kyungsik SHIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE SEMICONDUCTOR DIE CONTAINER LOAD PORT
- Publication number 20240162071
- Publication date May 16, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Hung HUANG
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SOLDER REFLOW APPARATUS AND SOLDER REFLOW METHOD
- Publication number 20240145259
- Publication date May 2, 2024
- Samsung Electronics Co., Ltd.
- Youngja KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERFACE TOOL
- Publication number 20240087935
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jyh-Shiou Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Manufacturing Semiconductor Device and Non-transitory Com...
- Publication number 20240087929
- Publication date Mar 14, 2024
- Kokusai Electric Corporation
- Tomoyuki MIYADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND CONDITION MONITORING METHOD
- Publication number 20240087936
- Publication date Mar 14, 2024
- TOKYO ELECTRON LIMITED
- Toshiaki KODAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT
- Publication number 20230420279
- Publication date Dec 28, 2023
- Applied Materials, Inc.
- Masato ISHII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PLACEMENT TABLE
- Publication number 20230402306
- Publication date Dec 14, 2023
- NGK Insulators, Ltd.
- Reo WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD PORT AND METHOD OF MOVING STAGE OF LOAD PORT
- Publication number 20230395416
- Publication date Dec 7, 2023
- SINFONIA TECHNOLOGY CO., LTD.
- Tatsuru Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WET PROCESSING SYSTEM AND SYSTEM AND METHOD FOR MANUFACTURING SEMIC...
- Publication number 20230386870
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing company Ltd.
- YING-CHIEH MENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Contactless Conveyor Device
- Publication number 20230360943
- Publication date Nov 9, 2023
- ROBERT BOSCH GmbH
- Stefan Teusch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFERRING DEVICE AND METHOD OF OPERATING THE SAME
- Publication number 20230352331
- Publication date Nov 2, 2023
- KAWASAKI JUKOGYO KABUSHIKI KAISHA
- Masayuki SAITO
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

involving loading and unloading of waers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

System with substrate carrier deterioration detection and repair

Automated semiconductor substrate polishing and cleaning

Factory interface robots usable with integrated load locks

Load port

Apparatus and methods for determining wafer characters

Multiple semiconductor die container load port

Substrate processing system, load port and method

Apparatus and method for treating substrate

Multi-depth film for optical devices

Air curtain for defect reduction

Substrate processing system for processing substrates with an elect...

Substrate processing apparatus for processing substrates

Transport system and determination method

Substrate mapping apparatus and method therefor

Method of manufacturing semiconductor device, substrate processing...

FOUP or cassette storage for hybrid substrate bonding system

Substrate treating apparatus

Transfer hand and substrate processing apparatus with conductive ri...

Wafer processing method

Multiple semiconductor die container load port

Tool auto-teach method and apparatus

Automated guided vehicle with multistage loading structure

Method of manufacturing semiconductor device and non-transitory com...

Interface tool

Substrate processing apparatus, method of manufacturing semiconduct...

Wafer stocker

Indexable side storage pod apparatus, heated side storage pod appar...

Method and arrangement for handling and processing substrates

Processing apparatus configured for processing wafers continuously...

Transport apparatus and control method

Patents Applicationslast 30 patents

SAMPLE MEASURING APPARATUS

PROCESS PLATFORM

SYSTEM AND METHOD FOR ALIGNING A WAFER TO A CHUCK

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD

SUBSTRATE PROCESSING SYSTEM, LOAD DEVICE AND METHOD

APPARATUS AND METHODS FOR DETERMINING WAFER CHARACTERS

EQUIPMENT FRONT END MODULE

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND SU...

AIR CURTAIN FOR DEFECT REDUCTION

SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES

SEMICONDUCTOR PROCESS DEVICE, CONTROL METHOD AND APPARATUS FOR MOVI...

VACUUM PROCESSING APPARATUS

Substrate Mapping Apparatus And Method Therefor

POSITION DETERMINATION APPARATUS FOR ROBOT DETECTION LASER SENSOR S...

METHOD FOR INSPECTING VIA HOLE OF WAFER

WORKING SYSTEM FOR SEMICONDUCTOR PACKAGING PROCESS AND OPERATION ME...

WORKING SYSTEM FOR SEMICONDUCTOR PACKAGING PROCESS AND OPERATION ME...

HANDLING SYSTEM FOR FETCHING A SUBSTRATE

DEVICE FOR HOLDING A SUBSTRATE, METHOD OF HOLDING A SUBSTRATE, AND...

MULTIPLE SEMICONDUCTOR DIE CONTAINER LOAD PORT

SOLDER REFLOW APPARATUS AND SOLDER REFLOW METHOD

INTERFACE TOOL

Method of Manufacturing Semiconductor Device and Non-transitory Com...

SUBSTRATE PROCESSING SYSTEM AND CONDITION MONITORING METHOD

SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT

WAFER PLACEMENT TABLE

LOAD PORT AND METHOD OF MOVING STAGE OF LOAD PORT

WET PROCESSING SYSTEM AND SYSTEM AND METHOD FOR MANUFACTURING SEMIC...

Contactless Conveyor Device

SUBSTRATE TRANSFERRING DEVICE AND METHOD OF OPERATING THE SAME