Ion beam bombardment sputtering

Industry

CPC
H01J2237/3146

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/3146Ion beam bombardment sputtering

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Single beam plasma source
- Patent number 12,165,829
- Issue date Dec 10, 2024
- Board of Trustees of Michigan State University
- Qi Hua Fan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal plating of grids for ion beam sputtering
- Patent number 11,581,164
- Issue date Feb 14, 2023
- Excelitas Technologies Corp.
- Eric Baltz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam sample preparation and coating apparatus and methods
- Patent number 10,731,246
- Issue date Aug 4, 2020
- Gatan, Inc.
- John Andrew Hunt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Formation of an alignment film for a liquid crystal on a substrate
- Patent number 9,869,014
- Issue date Jan 16, 2018
- International Business Machines Corporation
- Shoichi Doi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Specimen preparation device
- Patent number 9,773,638
- Issue date Sep 26, 2017
- Jeol Ltd.
- Yusuke Sakuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for increased target utilization in ion beam deposition tools
- Patent number 9,478,394
- Issue date Oct 25, 2016
- Veeco Instruments, Inc.
- Mario B. Roque
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for surface processing of a substrate using an...
- Patent number 9,206,500
- Issue date Dec 8, 2015
- Boris Druz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alignment film forming apparatus and method
- Patent number 9,034,151
- Issue date May 19, 2015
- International Business Machines Corporation
- Shoichi Doi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion deposition apparatus having rotatable carousel for supporting a...
- Patent number 8,425,741
- Issue date Apr 23, 2013
- Aviza Technology Limited
- Gary Proudfoot
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mask for increased uniformity in ion beam deposition
- Patent number 8,308,921
- Issue date Nov 13, 2012
- Western Digital (Fremont), LLC
- Hugh C. Hiner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Closed drift ion source
- Patent number 8,304,744
- Issue date Nov 6, 2012
- General Plasma, Inc.
- John Eric Madocks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for increasing throughput during location specifi...
- Patent number 7,917,241
- Issue date Mar 29, 2011
- TEL Epion Inc.
- Nicolaus J. Hofmeester
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming coated article using sputtering target(s) and ion...
- Patent number 7,563,347
- Issue date Jul 21, 2009
- Centre Luxembourgeois de Recherches pour le Verre et la Ceramique S.A. (C.R.V...
- Uwe Kriltz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion source and ion beam device
- Patent number 6,967,334
- Issue date Nov 22, 2005
- Shimadzu Corporation
- Masayasu Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for obtaining symmetrical junctions between a...
- Patent number 6,878,240
- Issue date Apr 12, 2005
- International Business Machines Corporation
- Raymond Bus-Kwofie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing a halftone phase shift mask blank, a halftone...
- Patent number 6,844,119
- Issue date Jan 18, 2005
- Hoya Corporation
- Osamu Nozawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for sputter deposition
- Patent number 6,843,891
- Issue date Jan 18, 2005
- Kaufman & Robinson, Inc.
- James R. Kahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Particle implantation apparatus and particle implantation method
- Patent number 6,835,289
- Issue date Dec 28, 2004
- Nissin Electric Co., Ltd.
- Takatoshi Yamashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for sputter deposition
- Patent number 6,682,634
- Issue date Jan 27, 2004
- Kaufman & Robinson, Inc.
- James R. Kahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for producing a first electrode and a second electrode, ele...
- Patent number 6,548,341
- Issue date Apr 15, 2003
- Infineon Technologies, AG
- Margit Sarstedt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for performing sputter deposition using a diverge...
- Patent number 6,488,821
- Issue date Dec 3, 2002
- 4 Wave Inc.
- David Alan Baldwin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for producing a first electrode and a second electrode, ele...
- Patent number 6,486,019
- Issue date Nov 26, 2002
- Margit Sarstedt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for performing sputter deposition using a spheric...
- Patent number 6,402,901
- Issue date Jun 11, 2002
- 4 Wave, Inc.
- David Alan Baldwin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion-beam source with channeling sputterable targets and a method fo...
- Patent number 6,238,526
- Issue date May 29, 2001
- Advanced Ion Technology, Inc.
- Yuri Maishev
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus to improve the properties of ion beam deposite...
- Patent number 6,238,531
- Issue date May 29, 2001
- International Business Machines Corporation
- Mustafa Pinarbasi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus to improve the properties of ion beam deposite...
- Patent number 6,086,727
- Issue date Jul 11, 2000
- International Business Machines Corporation
- Mustafa Pinarbasi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate with low secondary emissions
- Patent number 6,071,595
- Issue date Jun 6, 2000
- The United States of America as represented by the National Aeronautics and S...
- Kenneth A. Jensen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a highly pure thin film and apparatus therefor
- Patent number 6,039,847
- Issue date Mar 21, 2000
- Agency of Industrial Science and Technology
- Akiyoshi Chayahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Emissive flat panel display with improved regenerative cathode
- Patent number 5,967,873
- Issue date Oct 19, 1999
- Mario Rabinowitz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Emissive flat panel display with improved regenerative cathode
- Patent number 5,764,004
- Issue date Jun 9, 1998
- Mario Rabinowitz
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SINGLE BEAM PLASMA SOURCE
- Publication number 20220013324
- Publication date Jan 13, 2022
- Board of Trustees of Michigan State University
- Qi Hua FAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM SPUTTERING APPARATUS AND METHOD
- Publication number 20210104380
- Publication date Apr 8, 2021
- Institute Of Geological And Nuclear Sciences Limited
- Richard John Futter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Metal Plating of Grids for Ion Beam Sputtering
- Publication number 20200051783
- Publication date Feb 13, 2020
- Research Electro-Optics Inc.
- Eric Baltz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR INCREASED TARGET UTILIZATION IN ION BEAM DEPOSITION TOOLS
- Publication number 20150262789
- Publication date Sep 17, 2015
- VEECO INSTRUMENTS, INC.
- Mario B. Roque
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM DISTRIBUTION
- Publication number 20120080307
- Publication date Apr 5, 2012
- VEECO INSTRUMENTS, INC.
- Ikuya Kameyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLUME STEERING
- Publication number 20120080308
- Publication date Apr 5, 2012
- VEECO INSTRUMENTS, INC.
- Ikuya Kameyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLOSED DRIFT ION SOURCE
- Publication number 20100207529
- Publication date Aug 19, 2010
- General Plasma, Inc.
- John Eric Madocks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION DEPOSITION APPARATUS
- Publication number 20100084569
- Publication date Apr 8, 2010
- Gary Proudfoot
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA GENERATING APPARATUS AND FILM FORMING APPARATUS USING PLASMA...
- Publication number 20100003423
- Publication date Jan 7, 2010
- Canon ANELVA Corporation
- Hitoshi Nakagawara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA GENERATING APPARATUS, DEPOSITION APPARATUS, AND DEPOSITION M...
- Publication number 20090255803
- Publication date Oct 15, 2009
- Canon ANELVA Corporation
- Hitoshi NAKAGAWARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process for manufacturing single-wall carbon nanotubes
- Publication number 20090246116
- Publication date Oct 1, 2009
- Valentin Dediu
- B82 - NANO-TECHNOLOGY
Information Patent Application
DIAMOND ELECTRON SOURCE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20090160307
- Publication date Jun 25, 2009
- Akihiko Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Surface Processing of a Substrate Using an...
- Publication number 20090098306
- Publication date Apr 16, 2009
- Veeco Instruments Inc.
- Boris Druz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALIGNMENT FILM FORMING APPARATUS AND METHOS
- Publication number 20090050469
- Publication date Feb 26, 2009
- International Business Machines Corporation
- Shoichi Doi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR INCREASING THROUGHPUT DURING LOCATION SPECIFI...
- Publication number 20090037015
- Publication date Feb 5, 2009
- TOKYO ELECTRON LIMITED
- Nicolaus J. Hofmeester
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
"Iontron" ion beam deposition source and a method for sputter depos...
- Publication number 20090020415
- Publication date Jan 22, 2009
- Michael Gutkin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM FORMING APPARATUS
- Publication number 20080179186
- Publication date Jul 31, 2008
- Kazuhiro Shimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR REACTIVE SPUTTERING
- Publication number 20070151842
- Publication date Jul 5, 2007
- FLUENS CORPORATION
- Richard DeVito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Deposition on charge sensitive materials with ion beam deposition
- Publication number 20070114123
- Publication date May 24, 2007
- Jeffrey Bender
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of forming coated article using sputtering target(s) and ion...
- Publication number 20060008657
- Publication date Jan 12, 2006
- C.R.V.C., Grand Duche de Luxembourg
- Uwe Kriltz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ion source and ion beam device
- Publication number 20040173758
- Publication date Sep 9, 2004
- SHIMADZU CORPORATION
- Masayasu Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Use of ion beams for protecting substrates from particulate defect...
- Publication number 20040055871
- Publication date Mar 25, 2004
- The Regents of the University of California.
- Christopher C. Walton
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and method of forming thin film from negatively charged s...
- Publication number 20040045810
- Publication date Mar 11, 2004
- Plasmion Corporation
- Steven Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for producing a halftone phase shift mask blank, a halftone...
- Publication number 20040023125
- Publication date Feb 5, 2004
- Hoya Corporation
- Osamu Nozawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and method for obtaining symmetrical junctions between a...
- Publication number 20040000477
- Publication date Jan 1, 2004
- International Business Machines Corporation
- Raymond Bus-Kwofie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Particle implantation apparatus and particle implantation method
- Publication number 20030164287
- Publication date Sep 4, 2003
- NISSIN ELECTRIC CO., LTD.
- Takatoshi Yamashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR PERFORMING SPUTTER DEPOSITION USING A DIVERGE...
- Publication number 20020130031
- Publication date Sep 19, 2002
- 4Wave, Inc.
- David Alan Baldwin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process for producing a first electrode and a second electrode, ele...
- Publication number 20020132420
- Publication date Sep 19, 2002
- Margit Sarstedt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
System and method for performing sputter deposition using a deverge...
- Publication number 20020130040
- Publication date Sep 19, 2002
- 4 Wave, Inc.
- David Alan Baldwin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sputter deposition using multiple targets
- Publication number 20010045352
- Publication date Nov 29, 2001
- Raymond S. Robinson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Ion beam bombardment sputtering

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Single beam plasma source

Metal plating of grids for ion beam sputtering

Ion beam sample preparation and coating apparatus and methods

Formation of an alignment film for a liquid crystal on a substrate

Specimen preparation device

Method for increased target utilization in ion beam deposition tools

Method and apparatus for surface processing of a substrate using an...

Alignment film forming apparatus and method

Ion deposition apparatus having rotatable carousel for supporting a...

Mask for increased uniformity in ion beam deposition

Closed drift ion source

Method and system for increasing throughput during location specifi...

Method of forming coated article using sputtering target(s) and ion...

Ion source and ion beam device

Apparatus and method for obtaining symmetrical junctions between a...

Method for producing a halftone phase shift mask blank, a halftone...

Apparatus for sputter deposition

Particle implantation apparatus and particle implantation method

Apparatus for sputter deposition

Process for producing a first electrode and a second electrode, ele...

System and method for performing sputter deposition using a diverge...

Process for producing a first electrode and a second electrode, ele...

System and method for performing sputter deposition using a spheric...

Ion-beam source with channeling sputterable targets and a method fo...

Method and apparatus to improve the properties of ion beam deposite...

Method and apparatus to improve the properties of ion beam deposite...

Substrate with low secondary emissions

Method of forming a highly pure thin film and apparatus therefor

Emissive flat panel display with improved regenerative cathode

Emissive flat panel display with improved regenerative cathode

Patents Applicationslast 30 patents

SINGLE BEAM PLASMA SOURCE

ION BEAM SPUTTERING APPARATUS AND METHOD

Metal Plating of Grids for Ion Beam Sputtering

METHOD FOR INCREASED TARGET UTILIZATION IN ION BEAM DEPOSITION TOOLS

ION BEAM DISTRIBUTION

PLUME STEERING

CLOSED DRIFT ION SOURCE

ION DEPOSITION APPARATUS

PLASMA GENERATING APPARATUS AND FILM FORMING APPARATUS USING PLASMA...

PLASMA GENERATING APPARATUS, DEPOSITION APPARATUS, AND DEPOSITION M...

Process for manufacturing single-wall carbon nanotubes

DIAMOND ELECTRON SOURCE AND METHOD FOR MANUFACTURING THE SAME

Method and Apparatus for Surface Processing of a Substrate Using an...

ALIGNMENT FILM FORMING APPARATUS AND METHOS

METHOD AND SYSTEM FOR INCREASING THROUGHPUT DURING LOCATION SPECIFI...

"Iontron" ion beam deposition source and a method for sputter depos...

THIN FILM FORMING APPARATUS

APPARATUS FOR REACTIVE SPUTTERING

Deposition on charge sensitive materials with ion beam deposition

Method of forming coated article using sputtering target(s) and ion...

Ion source and ion beam device

Use of ion beams for protecting substrates from particulate defect...

Apparatus and method of forming thin film from negatively charged s...

Method for producing a halftone phase shift mask blank, a halftone...

Apparatus and method for obtaining symmetrical junctions between a...

Particle implantation apparatus and particle implantation method

SYSTEM AND METHOD FOR PERFORMING SPUTTER DEPOSITION USING A DIVERGE...

Process for producing a first electrode and a second electrode, ele...

System and method for performing sputter deposition using a deverge...

Sputter deposition using multiple targets