Ion beam source and generation

Industry

CPC
Y10S438/961

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10USPC classification Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10S438/00Semiconductor device manufacturing: process

Current Industry

Y10S438/961Ion beam source and generation

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Apparatus pertaining to solar cells having nanowire titanium oxide...
- Patent number 9,040,395
- Issue date May 26, 2015
- Dimerond Technologies, LLC
- Dieter M. Gruen
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Reducing wire erosion during damascene processing
- Patent number 8,741,771
- Issue date Jun 3, 2014
- International Business Machines Corporation
- Jeffrey P. Gambino
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method for manufacturing semiconductor substrate, display panel, an...
- Patent number 8,110,478
- Issue date Feb 7, 2012
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Organic electroluminescent display device and method of preparing t...
- Patent number 7,902,087
- Issue date Mar 8, 2011
- Samsung Mobile Display Co., Ltd.
- Dong-Won Han
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Structure and method to form source and drain regions over doped de...
- Patent number 7,888,752
- Issue date Feb 15, 2011
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- King Jien Chui
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Pulsed ultraviolet ion source
- Patent number 7,820,979
- Issue date Oct 26, 2010
- Implant Sciences Corporation
- Vladimir V. Belyakov
- G01 - MEASURING TESTING
Information Patent Grant
Concentric gate nanotube transistor devices
- Patent number 7,776,307
- Issue date Aug 17, 2010
- Etamota Corporation
- Thomas W. Tombler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source
- Patent number 7,767,977
- Issue date Aug 3, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Organic electroluminescent display device and method of preparing t...
- Patent number 7,544,972
- Issue date Jun 9, 2009
- Samsung Mobile Display Co., Ltd.
- Dong-Won Han
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Reducing wire erosion during damascene processing
- Patent number 7,405,152
- Issue date Jul 29, 2008
- International Business Machines Corporation
- Jeffrey P. Gambino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for glitch recovery in stationary-beam ion im...
- Patent number 7,361,913
- Issue date Apr 22, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Russell J. Low
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure and method to form source and drain regions over doped de...
- Patent number 7,202,133
- Issue date Apr 10, 2007
- Chartered Semiconductor Manufacturing, Ltd.
- King Jien Chui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating semiconductor memory device
- Patent number 7,157,325
- Issue date Jan 2, 2007
- Matsushita Electric Industrial Co., Ltd.
- Masatoshi Arai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for cutting wire formed on semiconductor substrate
- Patent number 7,037,732
- Issue date May 2, 2006
- Fujitsu Limited
- Yukio Maruta
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for forming contact plug having double doping distribution i...
- Patent number 6,977,204
- Issue date Dec 20, 2005
- Hynix Semiconductor Inc.
- Sung-Jae Joo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of determining dose uniformity of a scanning ion implanter
- Patent number 6,965,116
- Issue date Nov 15, 2005
- Applied Materials, Inc.
- Dennis W. Wagner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation method and method for manufacturing SOI wafer
- Patent number 6,927,148
- Issue date Aug 9, 2005
- Applied Materials, Inc.
- Hiroyuki Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 6,872,628
- Issue date Mar 29, 2005
- Renesas Technology Corp.
- Masayoshi Shirahata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating semiconductor memory device
- Patent number 6,815,311
- Issue date Nov 9, 2004
- Hynix Semiconductor Inc.
- Ji Suk Hong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nanometer-scale semiconductor devices and method of making
- Patent number 6,762,094
- Issue date Jul 13, 2004
- Hewlett-Packard Development Company, L.P.
- James Stasiak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF powered plasma enhanced chemical vapor deposition reactor and me...
- Patent number 6,705,246
- Issue date Mar 16, 2004
- Micron Technology, Inc.
- Sujit Sharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for making shallow diffusion junctions in semiconductors usi...
- Patent number 6,555,451
- Issue date Apr 29, 2003
- The United States of America as represented by the Secretary of the Navy
- Francis J. Kub
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF powered plasma enhanced chemical vapor deposition reactor and me...
- Patent number 6,533,894
- Issue date Mar 18, 2003
- Micron Technology, Inc.
- Sujit Sharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for reducing critical dimensions of contact holes, vias, an...
- Patent number 6,518,175
- Issue date Feb 11, 2003
- Advanced Micro Devices, Inc.
- Uzodinma Okoroanyanwu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF powered plasma enhanced chemical vapor deposition reactor and me...
- Patent number 6,395,128
- Issue date May 28, 2002
- Micron Technology, Inc.
- Sujit Sharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming an insulating film on semiconductor substrate su...
- Patent number 6,265,327
- Issue date Jul 24, 2001
- Japan Science and Technology Corp.
- Hikaru Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF powered plasma enhanced chemical vapor deposition reactor and me...
- Patent number 6,235,646
- Issue date May 22, 2001
- Micron Technology, Inc.
- Sujit Sharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
RF powered plasma enhanced chemical vapor deposition reactor and me...
- Patent number 6,159,867
- Issue date Dec 12, 2000
- Micron Technology, Inc.
- Sujit Sharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a silicon nitride layer
- Patent number 5,907,792
- Issue date May 25, 1999
- Motorola,Inc.
- Ravi Droopad
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
IC wiring connecting method using focused energy beams
- Patent number 5,824,598
- Issue date Oct 20, 1998
- Hitachi, Ltd.
- Hiroshi Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Apparatus Pertaining to Solar Cells Having Nanowire Titanium Oxide...
- Publication number 20140041711
- Publication date Feb 13, 2014
- Dimerond Technologies, LLC
- Dieter M. Gruen
- B82 - NANO-TECHNOLOGY
Information Patent Application
Concentric Gate Nanotube Transistor Devices
- Publication number 20100270536
- Publication date Oct 28, 2010
- ETAMOTA CORPORATION
- Thomas W. Tombler, JR.
- B82 - NANO-TECHNOLOGY
Information Patent Application
CONCENTRIC GATE NANOTUBE TRANSISTOR DEVICES
- Publication number 20100173478
- Publication date Jul 8, 2010
- ATOMATE CORPORATION
- Thomas W. Tombler
- B82 - NANO-TECHNOLOGY
Information Patent Application
Pulsed ultraviolet ion source
- Publication number 20090272896
- Publication date Nov 5, 2009
- Vladimir V. Belyakov
- G01 - MEASURING TESTING
Information Patent Application
ORGANIC ELECTROLUMINESCENT DISPLAY DEVICE AND METHOD OF PREPARING T...
- Publication number 20090238999
- Publication date Sep 24, 2009
- Samsung Mobile Display Co., Ltd.
- Dong-Won HAN
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE, DISPLAY PANEL, AN...
- Publication number 20090104750
- Publication date Apr 23, 2009
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCING WIRE EROSION DURING DAMASCENE PROCESSING
- Publication number 20080261393
- Publication date Oct 23, 2008
- International Business Machines Corporation
- Jeffrey P. Gambino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Structure and method to form source and drain regions over doped de...
- Publication number 20070178652
- Publication date Aug 2, 2007
- King Jien Chui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for fabricating semiconductor memory device
- Publication number 20070004122
- Publication date Jan 4, 2007
- Matsushita Electric Industrial Co., Ltd.
- Masatoshi Arai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and apparatus for glitch recovery in stationary-beam ion im...
- Publication number 20060219954
- Publication date Oct 5, 2006
- Russell J. Low
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCING WIRE EROSION DURING DAMASCENE PROCESSING
- Publication number 20060172514
- Publication date Aug 3, 2006
- International Business Machines Corporation
- Jeffrey P. Gambino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Organic electroluminescent display device and method of preparing t...
- Publication number 20050277222
- Publication date Dec 15, 2005
- Dong-Won Han
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Structure and method to form source and drain regions over doped de...
- Publication number 20050156253
- Publication date Jul 21, 2005
- King Jien Chui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for fabricating semiconductor memory device
- Publication number 20050085041
- Publication date Apr 21, 2005
- MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- Masatoshi Arai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR CUTTING WIRE FORMED ON SEMICONDUCTOR SUBSTRATE
- Publication number 20050085088
- Publication date Apr 21, 2005
- FUJITSU LIMITED
- Yukio MARUTA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
NANOMETER-SCALE SEMICONDUCTOR DEVICES AND METHOD OF MAKING
- Publication number 20040061151
- Publication date Apr 1, 2004
- James Stasiak
- B82 - NANO-TECHNOLOGY
Information Patent Application
Nanometer-scale semiconductor devices and method of making
- Publication number 20040063282
- Publication date Apr 1, 2004
- James Stasiak
- B82 - NANO-TECHNOLOGY
Information Patent Application
Ion implantation method and method for manufacturing SOI wafer
- Publication number 20040038504
- Publication date Feb 26, 2004
- Hiroyuki Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of manufacturing semiconductor device
- Publication number 20030100173
- Publication date May 29, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Masayoshi Shirahata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for fabricating semiconductor memory device
- Publication number 20030045071
- Publication date Mar 6, 2003
- Ji Suk Hong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF powered plasma enhanced chemical vapor deposition reactor and me...
- Publication number 20020061656
- Publication date May 23, 2002
- Sujit Sharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RF powered plasma enhanced chemical vapor deposition reactor and me...
- Publication number 20020056416
- Publication date May 16, 2002
- Sujit Sharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RF POWERED PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION REACTOR AND ME...
- Publication number 20010003270
- Publication date Jun 14, 2001
- SUJIT SHARAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Ion beam source and generation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus pertaining to solar cells having nanowire titanium oxide...

Reducing wire erosion during damascene processing

Method for manufacturing semiconductor substrate, display panel, an...

Organic electroluminescent display device and method of preparing t...

Structure and method to form source and drain regions over doped de...

Pulsed ultraviolet ion source

Concentric gate nanotube transistor devices

Ion source

Organic electroluminescent display device and method of preparing t...

Reducing wire erosion during damascene processing

Methods and apparatus for glitch recovery in stationary-beam ion im...

Structure and method to form source and drain regions over doped de...

Method for fabricating semiconductor memory device

Method and device for cutting wire formed on semiconductor substrate

Method for forming contact plug having double doping distribution i...

Method of determining dose uniformity of a scanning ion implanter

Ion implantation method and method for manufacturing SOI wafer

Method of manufacturing semiconductor device

Method for fabricating semiconductor memory device

Nanometer-scale semiconductor devices and method of making

RF powered plasma enhanced chemical vapor deposition reactor and me...

Method for making shallow diffusion junctions in semiconductors usi...

RF powered plasma enhanced chemical vapor deposition reactor and me...

Process for reducing critical dimensions of contact holes, vias, an...

RF powered plasma enhanced chemical vapor deposition reactor and me...

Method for forming an insulating film on semiconductor substrate su...

RF powered plasma enhanced chemical vapor deposition reactor and me...

RF powered plasma enhanced chemical vapor deposition reactor and me...

Method of forming a silicon nitride layer

IC wiring connecting method using focused energy beams

Patents Applicationslast 30 patents

Apparatus Pertaining to Solar Cells Having Nanowire Titanium Oxide...

Concentric Gate Nanotube Transistor Devices

CONCENTRIC GATE NANOTUBE TRANSISTOR DEVICES

Pulsed ultraviolet ion source

ORGANIC ELECTROLUMINESCENT DISPLAY DEVICE AND METHOD OF PREPARING T...

METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE, DISPLAY PANEL, AN...

REDUCING WIRE EROSION DURING DAMASCENE PROCESSING

Structure and method to form source and drain regions over doped de...

Method for fabricating semiconductor memory device

Methods and apparatus for glitch recovery in stationary-beam ion im...

REDUCING WIRE EROSION DURING DAMASCENE PROCESSING

Organic electroluminescent display device and method of preparing t...

Structure and method to form source and drain regions over doped de...

Method for fabricating semiconductor memory device

METHOD AND DEVICE FOR CUTTING WIRE FORMED ON SEMICONDUCTOR SUBSTRATE

NANOMETER-SCALE SEMICONDUCTOR DEVICES AND METHOD OF MAKING

Nanometer-scale semiconductor devices and method of making

Ion implantation method and method for manufacturing SOI wafer

Method of manufacturing semiconductor device

Method for fabricating semiconductor memory device

RF powered plasma enhanced chemical vapor deposition reactor and me...

RF powered plasma enhanced chemical vapor deposition reactor and me...

RF POWERED PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION REACTOR AND ME...