Ion plating

Industry

CPC
H01J2237/3142

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/3142Ion plating

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method of extracting and accelerating ions
- Patent number 10,573,499
- Issue date Feb 25, 2020
- AGC FLAT GLASS NORTH AMERICA, INC.
- John Chambers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of extracting and accelerating ions
- Patent number 10,529,546
- Issue date Jan 7, 2020
- AGC FLAT GLASS NORTH AMERICA, INC.
- John Chambers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of extracting and accelerating ions
- Patent number 10,483,095
- Issue date Nov 19, 2019
- AGC FLAT GLASS NORTH AMERICA, INC.
- John Chambers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of extracting and accelerating ions
- Patent number 10,438,780
- Issue date Oct 8, 2019
- AGC FLAT GLASS NORTH AMERICA, INC.
- John Chambers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems for controlling a high power ion beam
- Patent number 9,887,066
- Issue date Feb 6, 2018
- NEUTRON THERAPEUTICS INC.
- Geoffrey Ryding
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer stage for symmetric wafer processing
- Patent number 9,863,036
- Issue date Jan 9, 2018
- Plasma-Therm NES LLC
- Sarpangala H. Hegde
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compact, filtered ion source
- Patent number 9,624,570
- Issue date Apr 18, 2017
- FLUXION INC.
- Paul Erik Sathrum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High-density ion transport measurement biochip devices and methods
- Patent number 9,146,221
- Issue date Sep 29, 2015
- Aviva Biosciences Corporation
- Antonio Guia
- B03 - SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES O...
Information Patent Grant
Charged particle-beam processing using a cluster source
- Patent number 8,835,880
- Issue date Sep 16, 2014
- FEI Company
- Clive Chandler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam generator, and substrate processing apparatus and producti...
- Patent number 8,536,539
- Issue date Sep 17, 2013
- Canon Anelva Corporation
- Hirohisa Hirayanagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas cluster ion beam system with cleaning apparatus
- Patent number 8,173,980
- Issue date May 8, 2012
- TEL Epion Inc.
- Michael Graf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Neutral beam-assisted atomic layer chemical vapor deposition appara...
- Patent number 7,799,706
- Issue date Sep 21, 2010
- Sungkyunkwan University Foundation for Corporate Collaboration
- Geun-young Yeom
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Standard reference component for calibration, fabrication method fo...
- Patent number 7,612,334
- Issue date Nov 3, 2009
- Hitachi High-Technologies Corporation
- Yoshinori Nakayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for treating an interior surface of a workpiece u...
- Patent number 7,566,888
- Issue date Jul 28, 2009
- TEL Epion Inc.
- David Richard Swenson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High throughput ion beam assisted deposition (IBAD)
- Patent number 7,531,205
- Issue date May 12, 2009
- Superpower, Inc.
- Venkat Selvamanickam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion source including magnet and magnet yoke assembly
- Patent number 7,488,951
- Issue date Feb 10, 2009
- Guardian Industries Corp.
- Nestor P. Murphy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Titanium nitride thin film formation on metal substrate by chemical...
- Patent number 7,438,955
- Issue date Oct 21, 2008
- Philippine Council for Advanced Science and Technology Research and Development
- Henry J. Ramos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam source with gas introduced directly into deposition/vacuum...
- Patent number 6,988,463
- Issue date Jan 24, 2006
- Guardian Industries Corp.
- Vijayen S. Veerasamy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Proximity deposition
- Patent number 6,926,935
- Issue date Aug 9, 2005
- FEI Company
- Jason Harrison Arjavac
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cold cathode element
- Patent number 6,414,422
- Issue date Jul 2, 2002
- Honda Giken Kogyo Kabushiki Kaisha
- Takashi Iwasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing system and method
- Patent number 6,368,678
- Issue date Apr 9, 2002
- Terry Bluck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam processing apparatus for processing work piece with ion be...
- Patent number 6,320,321
- Issue date Nov 20, 2001
- Hitachi, Ltd.
- Satoshi Ogura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing systems with dual ion sources
- Patent number 6,203,862
- Issue date Mar 20, 2001
- Intevac, Inc.
- Terry Bluck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam processing apparatus for processing work piece with ion be...
- Patent number 6,184,625
- Issue date Feb 6, 2001
- Hitachi, Ltd.
- Satoshi Ogura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing system and method
- Patent number 6,101,972
- Issue date Aug 15, 2000
- Intevac, Inc.
- Terry Bluck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetic-cusp, cathodic-arc source
- Patent number 5,468,363
- Issue date Nov 21, 1995
- Regents of the University of California
- Steven Falabella
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Negative ion sputtering beam source
- Patent number 5,466,941
- Issue date Nov 14, 1995
- Seong I. Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source based on the cathodic arc
- Patent number 5,282,944
- Issue date Feb 1, 1994
- The United States of America as represented by the United States Department o...
- David M. Sanders
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Filtered cathodic arc source
- Patent number 5,279,723
- Issue date Jan 18, 1994
- as represented by the United States Department of Energy
- Steven Falabella
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS FOR CONTROLLING A HIGH POWER ION BEAM
- Publication number 20170178859
- Publication date Jun 22, 2017
- Geoffrey Ryding
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-DENSITY ION TRANSPORT MEASUREMENT BIOCHIP DEVICES AND METHODS
- Publication number 20130266490
- Publication date Oct 10, 2013
- AVIVA BIOSCIENCES CORPORATION
- Antonio GUIA
- B03 - SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES O...
Information Patent Application
COMPACT, FILTERED ION SOURCE
- Publication number 20130206585
- Publication date Aug 15, 2013
- FLUXION INC.
- Paul Erik Sathrum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS CLUSTER ION BEAM SYSTEM WITH CLEANING APPARATUS
- Publication number 20110272593
- Publication date Nov 10, 2011
- TEL Epion Inc.
- Michael Graf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Beam Generator, and Substrate Processing Apparatus and Producti...
- Publication number 20110147200
- Publication date Jun 23, 2011
- Canon ANELVA Corporation
- Hirohisa Hirayanagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE SEPARATION APPARATUS AND CHARGED PARTICLE BOMBARDM...
- Publication number 20100319545
- Publication date Dec 23, 2010
- TOKYO ELECTRON LIMITED
- MASAKI NARUSHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA GENERATING APPARATUS RENDERED ELECTRICALLY NEUTRAL ON THE PE...
- Publication number 20100059369
- Publication date Mar 11, 2010
- Ferrotec Corporation
- Yuichi Shiina
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS
- Publication number 20100044579
- Publication date Feb 25, 2010
- NORDIKO TECHNICAL SERVICES LIMITED
- Timothy Andrew James Holmes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING TRENCH ISOLATION
- Publication number 20090314963
- Publication date Dec 24, 2009
- TEL Epion Inc.
- John J. Hautala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-DENSITY ION TRANSPORT MEASUREMENT BIOCHIP DEVICES AND METHODS
- Publication number 20090209029
- Publication date Aug 20, 2009
- Antonio Guia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NEUTRAL BEAM-ASSISTED ATOMIC LAYER CHEMICAL VAPOR DEPOSITION APPARA...
- Publication number 20090203226
- Publication date Aug 13, 2009
- SUNGKYUNKWAN UNIVERSITY FOUNDATION FOR CORPORATE COLLABORATION
- Geun-young Yeom
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR TREATING AN INTERIOR SURFACE OF A WORKPIECE U...
- Publication number 20080290298
- Publication date Nov 27, 2008
- TOKYO ELECTRON LIMITED
- David Richard Swenson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Charged-particle-beam processing using a cluster source
- Publication number 20080142735
- Publication date Jun 19, 2008
- FEI Company
- Clive Chandler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STANDARD REFERENCE COMPONENT FOR CALIBRATION, FABRICATION METHOD FO...
- Publication number 20080121791
- Publication date May 29, 2008
- Yoshinori Nakayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion source including magnet and magnet yoke assembly
- Publication number 20080048127
- Publication date Feb 28, 2008
- Guardian Industries Corp.,
- Nestor P. Murphy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pulsed cathodic arc plasma
- Publication number 20070144901
- Publication date Jun 28, 2007
- Terje Asbjorn Skotheim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
High-density ion transport measurement biochip devices and methods
- Publication number 20060029955
- Publication date Feb 9, 2006
- Antonio Guia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for formation of titanium nitride films
- Publication number 20050126903
- Publication date Jun 16, 2005
- Henry J Ramos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Discharge apparatus, plasma processing method and solar cell
- Publication number 20050067934
- Publication date Mar 31, 2005
- Ishikawajima-Harima Heavy Industries Co., Ltd.
- Masashi Ueda
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Proximity deposition
- Publication number 20040261719
- Publication date Dec 30, 2004
- Jason Harrison Arjavac
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for high-throughput ion beam-assisted deposition (IBAD)
- Publication number 20040258851
- Publication date Dec 23, 2004
- Venkat Selvamanickam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ion beam source with gas introduced directly into deposition/vacuum...
- Publication number 20040074444
- Publication date Apr 22, 2004
- Viyayen S. Veerasamy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
System and method for deposition of coatings on a substrate
- Publication number 20030077401
- Publication date Apr 24, 2003
- Alexader Igorevich Dodonov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cold cathode element
- Publication number 20020033674
- Publication date Mar 21, 2002
- Takashi Iwasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion beam processing apparatus for processing work piece with ion be...
- Publication number 20010005119
- Publication date Jun 28, 2001
- Hitachi, Ltd.
- Satoshi Ogura
- H01 - BASIC ELECTRIC ELEMENTS

Ion plating

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of extracting and accelerating ions

Method of extracting and accelerating ions

Method of extracting and accelerating ions

Method of extracting and accelerating ions

Systems for controlling a high power ion beam

Wafer stage for symmetric wafer processing

Compact, filtered ion source

High-density ion transport measurement biochip devices and methods

Charged particle-beam processing using a cluster source

Ion beam generator, and substrate processing apparatus and producti...

Gas cluster ion beam system with cleaning apparatus

Neutral beam-assisted atomic layer chemical vapor deposition appara...

Standard reference component for calibration, fabrication method fo...

Method and system for treating an interior surface of a workpiece u...

High throughput ion beam assisted deposition (IBAD)

Ion source including magnet and magnet yoke assembly

Titanium nitride thin film formation on metal substrate by chemical...

Ion beam source with gas introduced directly into deposition/vacuum...

Proximity deposition

Cold cathode element

Plasma processing system and method

Ion beam processing apparatus for processing work piece with ion be...

Processing systems with dual ion sources

Ion beam processing apparatus for processing work piece with ion be...

Plasma processing system and method

Magnetic-cusp, cathodic-arc source

Negative ion sputtering beam source

Ion source based on the cathodic arc

Filtered cathodic arc source

Patents Applicationslast 30 patents

SYSTEMS FOR CONTROLLING A HIGH POWER ION BEAM

HIGH-DENSITY ION TRANSPORT MEASUREMENT BIOCHIP DEVICES AND METHODS

COMPACT, FILTERED ION SOURCE

GAS CLUSTER ION BEAM SYSTEM WITH CLEANING APPARATUS

Ion Beam Generator, and Substrate Processing Apparatus and Producti...

CHARGED PARTICLE SEPARATION APPARATUS AND CHARGED PARTICLE BOMBARDM...

PLASMA GENERATING APPARATUS RENDERED ELECTRICALLY NEUTRAL ON THE PE...

APPARATUS

METHOD FOR FORMING TRENCH ISOLATION

HIGH-DENSITY ION TRANSPORT MEASUREMENT BIOCHIP DEVICES AND METHODS

NEUTRAL BEAM-ASSISTED ATOMIC LAYER CHEMICAL VAPOR DEPOSITION APPARA...

METHOD AND SYSTEM FOR TREATING AN INTERIOR SURFACE OF A WORKPIECE U...

Charged-particle-beam processing using a cluster source

STANDARD REFERENCE COMPONENT FOR CALIBRATION, FABRICATION METHOD FO...

Ion source including magnet and magnet yoke assembly

Pulsed cathodic arc plasma

High-density ion transport measurement biochip devices and methods

Method for formation of titanium nitride films

Discharge apparatus, plasma processing method and solar cell

Proximity deposition

Apparatus for high-throughput ion beam-assisted deposition (IBAD)

Ion beam source with gas introduced directly into deposition/vacuum...

System and method for deposition of coatings on a substrate

Cold cathode element

Ion beam processing apparatus for processing work piece with ion be...