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C23C16/4551

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

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C23C16/4551Jet streams

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Patents Grantslast 30 patents

Information Patent Grant
Increased deposition efficiency via dual reactor system
- Patent number 12,209,199
- Issue date Jan 28, 2025
- Robert Eugene Askin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas transport system
- Patent number 12,173,736
- Issue date Dec 24, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jheng-Syun Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ex situ coating of chamber components for semiconductor processing
- Patent number 12,163,219
- Issue date Dec 10, 2024
- Lam Research Corporation
- Damodar Rajaram Shanbhag
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Treatment unit for a facility for treating the surface of a substra...
- Patent number 12,165,847
- Issue date Dec 10, 2024
- Coating Plasma Innovation
- Julien Vallade
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursor container
- Patent number 12,146,218
- Issue date Nov 19, 2024
- Picosun Oy
- Tom Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing system and method of delivering a reactant gas
- Patent number 12,139,790
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Vishwas Kumar Pandey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 12,142,515
- Issue date Nov 12, 2024
- Jusung Engineering Co., Ltd.
- DongHyuk Oh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multilayer encapsulation thin-film
- Patent number 12,134,821
- Issue date Nov 5, 2024
- Research & Business Foundation Sungkyunkwan University
- Choelmin Jang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for making a fabric based substrate bearing a carbon based...
- Patent number 12,134,820
- Issue date Nov 5, 2024
- AGC Glass Europe
- Grégory Arnoult
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for controlling a processing system
- Patent number 12,134,823
- Issue date Nov 5, 2024
- Applied Materials, Inc.
- Andreas Neuber
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process chamber and exhaust liner system therefor
- Patent number 12,110,585
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Naman Apurva
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 12,080,572
- Issue date Sep 3, 2024
- Tokyo Electron Limited
- Masahiro Dogome
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating of fluid-permeable materials
- Patent number 12,065,730
- Issue date Aug 20, 2024
- Picosun Oy
- Marko Pudas
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Plasma processing apparatus
- Patent number 12,068,139
- Issue date Aug 20, 2024
- Tokyo Electron Limited
- Shin Matsuura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for prefixing of substrates
- Patent number 12,062,521
- Issue date Aug 13, 2024
- EV Group E. Thallner GmbH
- Friedrich Paul Lindner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for silicon germanium uniformity control using multiple pre...
- Patent number 12,057,314
- Issue date Aug 6, 2024
- ASM IP Holding B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for manufacturing hexagonal silicon crystal
- Patent number 12,054,849
- Issue date Aug 6, 2024
- Hyung Soo Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Transport apparatus and substrate processing apparatus
- Patent number 12,046,500
- Issue date Jul 23, 2024
- Ebara Corporation
- Hao Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nozzle exit contours for pattern composition
- Patent number 11,981,987
- Issue date May 14, 2024
- Universal Display Corporation
- Edwin van den Tillaart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organic vapor jet printing system
- Patent number 11,976,360
- Issue date May 7, 2024
- Universal Display Corporation
- Gregory McGraw
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas transport system
- Patent number 11,971,057
- Issue date Apr 30, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jheng-Syun Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Asymmetric injection for better wafer uniformity
- Patent number 11,959,169
- Issue date Apr 16, 2024
- Applied Materials, Inc.
- Eric Kihara Shono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for modulating film uniformity
- Patent number 11,913,113
- Issue date Feb 27, 2024
- Lam Research Corporation
- Pulkit Agarwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High pressure spatial chemical vapor deposition system and related...
- Patent number 11,885,018
- Issue date Jan 30, 2024
- Lehigh University
- Siddha Pimputkar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for manufacturing semiconductor layer
- Patent number 11,876,001
- Issue date Jan 16, 2024
- NEXCHIP SEMICONDUCTOR CORPORATION
- Baoyou Gong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursor container
- Patent number 11,873,558
- Issue date Jan 16, 2024
- Picosun Oy
- Tom Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heteroalkylcyclopentadienyl indium-containing precursors and proces...
- Patent number 11,859,283
- Issue date Jan 2, 2024
- L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Geo...
- Antoine Bruneau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD deposition system for deposition on selective side of the sub...
- Patent number 11,851,760
- Issue date Dec 26, 2023
- Lam Research Corporation
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas separation control in spatial atomic layer deposition
- Patent number 11,821,083
- Issue date Nov 21, 2023
- Applied Materials, Inc.
- Ning Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition radial and edge profile tunability through independent c...
- Patent number 11,791,136
- Issue date Oct 17, 2023
- Applied Materials, Inc.
- Sanjeev Baluja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ORGANIC VAPOR JET PRINTING SYSTEM
- Publication number 20250024746
- Publication date Jan 16, 2025
- THE REGENTS OF THE UNIVERSITY OF MICHIGAN, INNOVATION PARTNERSHIPS
- Stephen R. FORREST
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, GAS NOZZLE, METHOD OF PROCESSING SU...
- Publication number 20250003066
- Publication date Jan 2, 2025
- Kokusai Electric Corporation
- Yusaku OKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DRY PROCESS TOOL WITH ADJUSTABLE FLOW VALVE
- Publication number 20250003069
- Publication date Jan 2, 2025
- LAM RESEARCH CORPORATION
- Jon Garret JUDGE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE-PROCESSING APPARATUS AND FILM-FORMING METHOD
- Publication number 20250003070
- Publication date Jan 2, 2025
- TOKYO ELECTRON LIMITED
- Akira MATSUBARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD ASSEMBLY FOR CYCLIC VAPOR DEPOSITION WITH ENHANCED GAS M...
- Publication number 20240384413
- Publication date Nov 21, 2024
- EUGENUS, INC.
- Martin J. Salinas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20240371609
- Publication date Nov 7, 2024
- TOKYO ELECTRON LIMITED
- Shin MATSUURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLENUM DRIVEN HYDROXYL COMBUSTION OXIDATION
- Publication number 20240360559
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Christopher S. OLSEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION HEAD FOR TUBULAR/NON-PLANAR COATINGS
- Publication number 20240360556
- Publication date Oct 31, 2024
- Centre National de la Recherche Scientifique
- David MUNOZ ROJAS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PREFIXING OF SUBSTRATES
- Publication number 20240355582
- Publication date Oct 24, 2024
- EV GROUP E. THALLNER GMBH
- Friedrich Paul Lindner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20240337022
- Publication date Oct 10, 2024
- TOKYO ELECTRON LIMITED
- Kensaku NARUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FURNACE TUBE STRUCTURE, FURNACE REAR SEALING DEVICE, AND FURNACE
- Publication number 20240328714
- Publication date Oct 3, 2024
- LAPLACE RENEWABLE ENERGY TECHNOLOGY CO., LTD.
- Tairong Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR SILICON GERMANIUM UNIFORMITY CONTROL USING MULTIPLE PRE...
- Publication number 20240332016
- Publication date Oct 3, 2024
- ASM IP HOLDING B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE AND SEMICONDUCTOR...
- Publication number 20240327980
- Publication date Oct 3, 2024
- Suzhou Everbright Photonics Co., Ltd.
- Yang CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UPSTREAM PROCESS MONITORING FOR DEPOSITION AND ETCH CHAMBERS
- Publication number 20240312812
- Publication date Sep 19, 2024
- Inficon, Inc.
- Matan Lapidot
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...
- Publication number 20240309507
- Publication date Sep 19, 2024
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ORGANIC ELECTROLUMINESCENT DEVICES
- Publication number 20240279789
- Publication date Aug 22, 2024
- UNIVERSAL DISPLAY CORPORATION
- Edwin van den Tillaart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT APPARATUS, AND COMP...
- Publication number 20240249951
- Publication date Jul 25, 2024
- TOKYO ELECTRON LIMITED
- Kosuke YOSHIHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ORGANIC VAPOR JET PRINTING SYSTEM
- Publication number 20240247375
- Publication date Jul 25, 2024
- UNIVERSAL DISPLAY CORPORATION
- Gregory MCGRAW
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADJUSTABLE CROSS-FLOW PROCESS CHAMBER LID
- Publication number 20240247373
- Publication date Jul 25, 2024
- Applied Materials, Inc.
- Muhannad Mustafa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOUR DEPOSITION (CVD) REACTOR
- Publication number 20240240312
- Publication date Jul 18, 2024
- SICONA BATTERY TECHNOLOGIES PTY LTD
- John Winter
- C01 - INORGANIC CHEMISTRY
Information Patent Application
FILM FORMING APPARATUS AND METHOD OF FORMING CRYSTALLINE SEMICONDUC...
- Publication number 20240234140
- Publication date Jul 11, 2024
- Shin-Etsu Chemical Co., Ltd.
- Hiroshi HASHIGAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH PRESSURE SPATIAL CHEMICAL VAPOR DEPOSITION SYSTEM AND RELATED...
- Publication number 20240209502
- Publication date Jun 27, 2024
- LEHIGH UNIVERSITY
- Siddha PIMPUTKAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND MIXING INLET DEVICE
- Publication number 20240183032
- Publication date Jun 6, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Jingfeng WEI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR MODULATING FILM UNIFORMITY
- Publication number 20240183034
- Publication date Jun 6, 2024
- LAM RESEARCH CORPORATION
- Pulkit Agarwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING LAMINATE, PRODUCING APPARATUS FOR LAMINATE, LA...
- Publication number 20240177993
- Publication date May 30, 2024
- Shin-Etsu Chemical Co., Ltd.
- Hiroshi HASHIGAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU FILM ANNEALING IN SUBSTRATE PROCESSING
- Publication number 20240167153
- Publication date May 23, 2024
- LAM RESEARCH CORPORATION
- Awnish Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PROVIDING A GAS MIXTURE TO A REACTION CHAMBER AND MET...
- Publication number 20240141486
- Publication date May 2, 2024
- ASM IP HOLDING B.V.
- Hannu Huotari
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EPI OVERLAPPING DISK AND RING
- Publication number 20240141487
- Publication date May 2, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITING A TRANSITION METAL DICHALCOGENIDE
- Publication number 20240124975
- Publication date Apr 18, 2024
- IMEC vzw
- Benjamin GROVEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gapfill methods and processing assemblies
- Publication number 20240117494
- Publication date Apr 11, 2024
- ASM IP HOLDING B.V.
- Tommi Tynell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Jet streams

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Increased deposition efficiency via dual reactor system

Gas transport system

Ex situ coating of chamber components for semiconductor processing

Treatment unit for a facility for treating the surface of a substra...

Precursor container

Processing system and method of delivering a reactant gas

Substrate processing apparatus

Multilayer encapsulation thin-film

Process for making a fabric based substrate bearing a carbon based...

Method for controlling a processing system

Process chamber and exhaust liner system therefor

Substrate processing apparatus

Coating of fluid-permeable materials

Plasma processing apparatus

Method for prefixing of substrates

Methods for silicon germanium uniformity control using multiple pre...

Apparatus and method for manufacturing hexagonal silicon crystal

Transport apparatus and substrate processing apparatus

Nozzle exit contours for pattern composition

Organic vapor jet printing system

Gas transport system

Asymmetric injection for better wafer uniformity

Method and apparatus for modulating film uniformity

High pressure spatial chemical vapor deposition system and related...

Method and system for manufacturing semiconductor layer

Precursor container

Heteroalkylcyclopentadienyl indium-containing precursors and proces...

PECVD deposition system for deposition on selective side of the sub...

Gas separation control in spatial atomic layer deposition

Deposition radial and edge profile tunability through independent c...

Patents Applicationslast 30 patents

ORGANIC VAPOR JET PRINTING SYSTEM

SUBSTRATE PROCESSING APPARATUS, GAS NOZZLE, METHOD OF PROCESSING SU...

DRY PROCESS TOOL WITH ADJUSTABLE FLOW VALVE

SUBSTRATE-PROCESSING APPARATUS AND FILM-FORMING METHOD

SHOWERHEAD ASSEMBLY FOR CYCLIC VAPOR DEPOSITION WITH ENHANCED GAS M...

PLASMA PROCESSING APPARATUS

PLENUM DRIVEN HYDROXYL COMBUSTION OXIDATION

DEPOSITION HEAD FOR TUBULAR/NON-PLANAR COATINGS

METHOD FOR PREFIXING OF SUBSTRATES

FILM FORMING APPARATUS AND FILM FORMING METHOD

FURNACE TUBE STRUCTURE, FURNACE REAR SEALING DEVICE, AND FURNACE

METHODS FOR SILICON GERMANIUM UNIFORMITY CONTROL USING MULTIPLE PRE...

METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE AND SEMICONDUCTOR...

UPSTREAM PROCESS MONITORING FOR DEPOSITION AND ETCH CHAMBERS

PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...

ORGANIC ELECTROLUMINESCENT DEVICES

SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT APPARATUS, AND COMP...

ORGANIC VAPOR JET PRINTING SYSTEM

ADJUSTABLE CROSS-FLOW PROCESS CHAMBER LID

CHEMICAL VAPOUR DEPOSITION (CVD) REACTOR

FILM FORMING APPARATUS AND METHOD OF FORMING CRYSTALLINE SEMICONDUC...

HIGH PRESSURE SPATIAL CHEMICAL VAPOR DEPOSITION SYSTEM AND RELATED...

SEMICONDUCTOR PROCESSING APPARATUS AND MIXING INLET DEVICE

METHOD AND APPARATUS FOR MODULATING FILM UNIFORMITY

METHOD FOR PRODUCING LAMINATE, PRODUCING APPARATUS FOR LAMINATE, LA...

IN-SITU FILM ANNEALING IN SUBSTRATE PROCESSING

APPARATUS FOR PROVIDING A GAS MIXTURE TO A REACTION CHAMBER AND MET...

EPI OVERLAPPING DISK AND RING

METHOD OF DEPOSITING A TRANSITION METAL DICHALCOGENIDE

Gapfill methods and processing assemblies