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B24B37/11
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PERFORMING OPERATIONS TRANSPORTING
B24
Grinding technology
B24B
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
B24B37/00
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B24B37/11
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Patents Grants
last 30 patents
Information
Patent Grant
Atmospheric plasma in wafer processing system optimization
Patent number
12,198,935
Issue date
Jan 14, 2025
Axus Technology, LLC
Daniel Ray Trojan
B24 - GRINDING POLISHING
Information
Patent Grant
Roller for location-specific wafer polishing
Patent number
12,194,591
Issue date
Jan 14, 2025
Applied Materials, Inc.
Ekaterina A. Mikhaylichenko
B24 - GRINDING POLISHING
Information
Patent Grant
Methods of forming an adhesive layer, and related adhesive films an...
Patent number
12,157,847
Issue date
Dec 3, 2024
Seagate Technology LLC
Zubair Ahmed Khan
B24 - GRINDING POLISHING
Information
Patent Grant
Roller for location-specific wafer polishing
Patent number
12,138,733
Issue date
Nov 12, 2024
Applied Materials, Inc.
Ekaterina A. Mikhaylichenko
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing platens and polishing platen manufacturing methods
Patent number
12,076,877
Issue date
Sep 3, 2024
Applied Materials, Inc.
Bum Jick Kim
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Chemical mechanical polishing apparatus for controlling polishing u...
Patent number
11,676,824
Issue date
Jun 13, 2023
Samsung Electronics Co., Ltd.
In-kwon Kim
B24 - GRINDING POLISHING
Information
Patent Grant
Method for polishing silicon substrate and polishing composition set
Patent number
11,648,641
Issue date
May 16, 2023
FUJIMI INCORPORATED
Makoto Tabata
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Substrate adsorption method, substrate holding apparatus, substrate...
Patent number
11,472,000
Issue date
Oct 18, 2022
Ebara Corporation
Hiroyuki Shinozaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemical mechanical polishing apparatus and methods
Patent number
11,453,097
Issue date
Sep 27, 2022
Applied Materials, Inc.
Rajeev Bajaj
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate cleaning apparatus, substrate cleaning method, and substr...
Patent number
11,285,517
Issue date
Mar 29, 2022
Ebara Corporation
Hideaki Tanaka
B08 - CLEANING
Information
Patent Grant
Wafer grinding apparatus and wafer grinding method
Patent number
11,101,150
Issue date
Aug 24, 2021
Mitsubishi Electric Corporation
Naoyuki Takeda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Polishing pad having arc-shaped configuration
Patent number
11,072,049
Issue date
Jul 27, 2021
Applied Materials, Inc.
Hung Chih Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Flattening method and flattening apparatus
Patent number
10,916,455
Issue date
Feb 9, 2021
Ebara Corporation
Kazuto Yamauchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Abrasives, polishing composition, and polishing method
Patent number
10,669,462
Issue date
Jun 2, 2020
Fujimi Incorporated
Eiichi Yamada
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for nanolapping
Patent number
10,610,995
Issue date
Apr 7, 2020
Victor B. Kley
G01 - MEASURING TESTING
Information
Patent Grant
Substrate cleaning apparatus, substrate cleaning method, and substr...
Patent number
10,562,076
Issue date
Feb 18, 2020
Ebara Corporation
Hideaki Tanaka
B08 - CLEANING
Information
Patent Grant
Substrate adsorption method, substrate holding apparatus, substrate...
Patent number
10,537,975
Issue date
Jan 21, 2020
Ebara Corporation
Hiroyuki Shinozaki
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing tool and polishing method for member having curved surfac...
Patent number
10,434,622
Issue date
Oct 8, 2019
Fujimi Incorporated
Yutaka Niwano
B24 - GRINDING POLISHING
Information
Patent Grant
Molds and methods to control mold surface quality
Patent number
10,351,459
Issue date
Jul 16, 2019
Corning Incorporated
Yi-Chun Chiang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Flattening method and flattening apparatus
Patent number
10,297,475
Issue date
May 21, 2019
Ebara Corporation
Kazuto Yamauchi
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing pad configuration and chemical mechanical polishing system
Patent number
10,207,389
Issue date
Feb 19, 2019
Applied Materials, Inc.
Hung Chih Chen
B24 - GRINDING POLISHING
Information
Patent Grant
Automated polishing system and method
Patent number
10,144,108
Issue date
Dec 4, 2018
Guangdong Institute of Intelligent Manufacturing
Xuefeng Zhou
B24 - GRINDING POLISHING
Information
Patent Grant
Buffing apparatus and substrate processing apparatus
Patent number
10,131,030
Issue date
Nov 20, 2018
Ebara Corporation
Kuniaki Yamaguchi
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing pad configuration and polishing pad support
Patent number
10,105,812
Issue date
Oct 23, 2018
Applied Materials, Inc.
Hung Chih Chen
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing liquid and method of polishing SiC substrate
Patent number
9,994,739
Issue date
Jun 12, 2018
Disco Corporation
Katsuyoshi Kojima
B24 - GRINDING POLISHING
Information
Patent Grant
Systems and methods for performing chemical mechanical planarization
Patent number
9,962,801
Issue date
May 8, 2018
Taiwan Semiconductor Manufacturing Company Limited
Shen-Nan Lee
B24 - GRINDING POLISHING
Information
Patent Grant
Processing apparatus and processing method
Patent number
9,865,470
Issue date
Jan 9, 2018
Panasonic Corporation
Yoshifumi Takasu
B24 - GRINDING POLISHING
Information
Patent Grant
Bore finishing tool
Patent number
9,789,581
Issue date
Oct 17, 2017
Sunnen Products Company
Daniel R. Cloutier
B24 - GRINDING POLISHING
Information
Patent Grant
Configurable pressure design for multizone chemical mechanical plan...
Patent number
9,610,672
Issue date
Apr 4, 2017
Applied Materials, Inc.
Jeonghoon Oh
B24 - GRINDING POLISHING
Information
Patent Grant
Nickel phosphorous CMP compositions and methods
Patent number
9,469,787
Issue date
Oct 18, 2016
Cabot Microelectronics Corporation
Ke Zhang
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20250010421
Publication date
Jan 9, 2025
EBARA CORPORATION
Masayuki NAKANISHI
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING HEAD AND POLISHING SYSTEM
Publication number
20240399526
Publication date
Dec 5, 2024
EBARA CORPORATION
Yuichi KATO
B24 - GRINDING POLISHING
Information
Patent Application
APPARATUS AND METHODS FOR CHEMICAL MECHANICAL POLISHING
Publication number
20240383093
Publication date
Nov 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Te-Chien HOU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPOSITE SUBSTRATE FOR FABRICATION OF BETA GALLIUM OXIDE DEVICES
Publication number
20240347339
Publication date
Oct 17, 2024
Syrnatec, Inc.
Yash Suresh Mirchandani
B24 - GRINDING POLISHING
Information
Patent Application
ELECTROCHEMICAL-MECHANICAL THINNING METHOD AND APPARATUS FOR LARGE-...
Publication number
20240266178
Publication date
Aug 8, 2024
XI'AN JIAOTONG UNIVERSITY
Xu YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CMP POLISHING PAD WITH PROTRUDING STRUCTURES HAVING ENGINEERED OPEN...
Publication number
20230311269
Publication date
Oct 5, 2023
Rohm and Haas Electronic Materials CMP Holdings, INC.
John R. McCormick
B24 - GRINDING POLISHING
Information
Patent Application
ROLLER FOR LOCATION-SPECIFIC WAFER POLISHING
Publication number
20220281062
Publication date
Sep 8, 2022
Applied Materials, Inc.
Ekaterina A. Mikhaylichenko
B24 - GRINDING POLISHING
Information
Patent Application
Lapping Tool
Publication number
20210060724
Publication date
Mar 4, 2021
Sunnen Products Co.
Daniel R. Cloutier
B24 - GRINDING POLISHING
Information
Patent Application
CHEMICAL MECHANICAL POLISHING APPARATUS FOR CONTROLLING POLISHING U...
Publication number
20200185231
Publication date
Jun 11, 2020
Samsung Electronics Co., Ltd.
In-kwon Kim
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND SUBSTR...
Publication number
20200147654
Publication date
May 14, 2020
EBARA CORPORATION
Hideaki TANAKA
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE ADSORPTION METHOD, SUBSTRATE HOLDING APPARATUS, SUBSTRATE...
Publication number
20200094372
Publication date
Mar 26, 2020
EBARA CORPORATION
Hiroyuki SHINOZAKI
B24 - GRINDING POLISHING
Information
Patent Application
MOLDS AND METHODS TO CONTROL MOLD SURFACE QUALITY
Publication number
20190330096
Publication date
Oct 31, 2019
Corning Incorporated
Yi-Chun Chiang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FLATTENING METHOD AND FLATTENING APPARATUS
Publication number
20190228994
Publication date
Jul 25, 2019
EBARA CORPORATION
Kazuto Yamauchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POLISHING PAD HAVING ARC-SHAPED CONFIGURATION
Publication number
20190047110
Publication date
Feb 14, 2019
Applied Materials, Inc.
Hung Chih Chen
B24 - GRINDING POLISHING
Information
Patent Application
METHOD FOR POLISHING SILICON SUBSTRATE AND POLISHING COMPOSITION SET
Publication number
20190022821
Publication date
Jan 24, 2019
FUJIMI INCORPORATED
Makoto TABATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ABRASIVES, POLISHING COMPOSITION, AND POLISHING METHOD
Publication number
20170260436
Publication date
Sep 14, 2017
FUJIMI INCORPORATED
Eiichi YAMADA
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
POLISHING PAD
Publication number
20170252892
Publication date
Sep 7, 2017
FUJIMI INCORPORATED
Koji KATAYAMA
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING TOOL AND POLISHING METHOD FOR MEMBER HAVING CURVED SURFAC...
Publication number
20170252890
Publication date
Sep 7, 2017
FUJIMI INCORPORATED
Yutaka NIWANO
B24 - GRINDING POLISHING
Information
Patent Application
Methods and Apparatus for Nanolapping
Publication number
20170225290
Publication date
Aug 10, 2017
Victor B. Kley
G01 - MEASURING TESTING
Information
Patent Application
CMP POLISHING LIQUID, AND POLISHING METHOD
Publication number
20170210958
Publication date
Jul 27, 2017
Hitachi Chemical Company, Ltd.
Takashi SHINODA
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
SUBSTRATE ADSORPTION METHOD, SUBSTRATE HOLDING APPARATUS, SUBSTRATE...
Publication number
20170050289
Publication date
Feb 23, 2017
EBARA CORPORATION
Hiroyuki SHINOZAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MOLDS AND METHODS TO CONTROL MOLD SURFACE QUALITY
Publication number
20170044045
Publication date
Feb 16, 2017
Corning Incorporated
Yi-Chun Chiang
C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information
Patent Application
PROCESSING APPARATUS AND PROCESSING METHOD
Publication number
20160379838
Publication date
Dec 29, 2016
PANASONIC CORPORATION
YOSHIFUMI TAKASU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods and Apparatus for Nanolapping
Publication number
20160325397
Publication date
Nov 10, 2016
Victor B. Kley
G01 - MEASURING TESTING
Information
Patent Application
AUTOMATED POLISHING SYSTEM AND METHOD
Publication number
20160250734
Publication date
Sep 1, 2016
Guangdong Institute Of Automation
Xuefeng Zhou
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE CLEANING APPARATUS,SUBSTRATE CLEANING METHOD, AND SUBSTRA...
Publication number
20160243593
Publication date
Aug 25, 2016
EBARA CORPORATION
Hideaki TANAKA
B08 - CLEANING
Information
Patent Application
POLISHING LIQUID AND METHOD OF POLISHING SiC SUBSTRATE
Publication number
20160130475
Publication date
May 12, 2016
Disco Corporation
Katsuyoshi Kojima
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
NICKEL PHOSPHOROUS CMP COMPOSITIONS AND METHODS
Publication number
20160102227
Publication date
Apr 14, 2016
Cabot Microelectronics Corporation
Ke ZHANG
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
BUFFING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
Publication number
20160101498
Publication date
Apr 14, 2016
EBARA CORPORATION
Kuniaki YAMAGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LAPPING TOOL
Publication number
20160059374
Publication date
Mar 3, 2016
SIEMENS ENERGY, INC.
Harald W. Breitkopf
B24 - GRINDING POLISHING