Large objects

Industry

CPC
H01J2237/2811

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/2811Large objects

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method and system for cross-sectioning a sample with a preset thick...
- Patent number RE50001
- Issue date Jun 4, 2024
- FIBICS INCORPORATED
- Michael William Phaneuf
Information Patent Grant
Microscopy imaging method for 3D tomography with predictive drift t...
- Patent number 11,923,168
- Issue date Mar 5, 2024
- FIBICS INCORPORATED
- Michael William Phaneuf
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for inspecting an EUV mask
- Patent number 11,662,323
- Issue date May 30, 2023
- ASML Netherlands B.V.
- Guochong Weng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for detector equalization during the imaging of objects with...
- Patent number 11,645,740
- Issue date May 9, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for iteratively cross-sectioning a sample to corr...
- Patent number 11,462,383
- Issue date Oct 4, 2022
- Fibics Incorporated
- Michael William Phaneuf
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for cross-sectioning a sample with a preset thick...
- Patent number 10,886,100
- Issue date Jan 5, 2021
- Fibics Incorporated
- Michael William Phaneuf
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for inspecting an EUV mask
- Patent number 10,775,325
- Issue date Sep 15, 2020
- ASML Netherlands B.V.
- Guochong Weng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical system adjustment method of image acquisition apparatus
- Patent number 10,629,406
- Issue date Apr 21, 2020
- NuFlare Technology, Inc.
- Munehiro Ogasawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microscopy imaging method and system
- Patent number 10,586,680
- Issue date Mar 10, 2020
- Fibics Incorporated
- Michael William Phaneuf
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Wide field atmospheric scanning electron microscope
- Patent number 10,262,832
- Issue date Apr 16, 2019
- Gerasimos Daniel Danilatos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for rapidly fabricating nanopatterns in a paral...
- Patent number 10,207,469
- Issue date Feb 19, 2019
- University of Houston System
- Vincent M. Donnelly
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Cross-section processing-and-observation method and cross-section p...
- Patent number 10,096,449
- Issue date Oct 9, 2018
- Hitachi High-Tech Science Corporation
- Xin Man
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for inspecting an EUV mask
- Patent number 10,088,438
- Issue date Oct 2, 2018
- Hermes-Microvision, Inc.
- Guochong Weng
- G01 - MEASURING TESTING
Information Patent Grant
Structure electron beam inspection system for inspecting extreme ul...
- Patent number 10,054,556
- Issue date Aug 21, 2018
- Hermes Microvision Inc.
- You-Jin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for inspecting and grounding an EUV mask
- Patent number 9,859,089
- Issue date Jan 2, 2018
- Hermes Microvision Inc.
- Guochong Weng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mathematical image assembly in a scanning-type microscope
- Patent number 9,620,330
- Issue date Apr 11, 2017
- FEI Company
- Pavel Potocek
- G02 - OPTICS
Information Patent Grant
Structure electron beam inspection system for inspecting extreme ul...
- Patent number 9,572,237
- Issue date Feb 14, 2017
- Hermes Microvision Inc.
- You-Jin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 9,543,111
- Issue date Jan 10, 2017
- Hitachi High-Technologies Corporation
- Yusuke Ominami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for inspecting an EUV mask
- Patent number 9,485,846
- Issue date Nov 1, 2016
- Hermes Microvision Inc.
- Guochong Weng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cross-section processing-and-observation method and cross-section p...
- Patent number 9,347,896
- Issue date May 24, 2016
- Hitachi High-Tech Science Corporation
- Xin Man
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle instrument
- Patent number 9,230,775
- Issue date Jan 5, 2016
- Hitachi High-Technologies Corporation
- Takeyoshi Ohashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defect inspection method and device therefor
- Patent number 9,148,631
- Issue date Sep 29, 2015
- Hitachi High-Technologies Corporation
- Makoto Ono
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Detection apparatus and operating method
- Patent number 9,136,088
- Issue date Sep 15, 2015
- BOE Technology Group Co., Ltd.
- Zhen Wei
- G02 - OPTICS
Information Patent Grant
Structure electron beam inspection system for inspecting extreme ul...
- Patent number 9,113,538
- Issue date Aug 18, 2015
- Hermes-Microvision, Inc.
- You-Jin Wang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Circuit-pattern inspection device
- Patent number 8,658,987
- Issue date Feb 25, 2014
- Hitachi High-Technologies Corporation
- Takuma Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure for discharging extreme ultraviolet mask
- Patent number 8,575,573
- Issue date Nov 5, 2013
- Hermes-Microvision, Inc.
- You-Jin Wang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Mask inspection apparatus and image generation method
- Patent number 8,559,697
- Issue date Oct 15, 2013
- Advantest Corp.
- Tsutomu Murakawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Three dimensional fiducial
- Patent number 8,502,172
- Issue date Aug 6, 2013
- FEI Company
- Cliff Bugge
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Defect review system and method, and program
- Patent number 8,467,595
- Issue date Jun 18, 2013
- Hitachi High-Technologies Corporation
- Noritsugu Takahashi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam device
- Patent number 8,410,438
- Issue date Apr 2, 2013
- Hitachi, Ltd.
- Tomokazu Shimakura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MICROSCOPY IMAGING METHOD AND SYSTEM
- Publication number 20240177966
- Publication date May 30, 2024
- Fibics Incorporated
- Michael William Phaneuf
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MICROSCOPY IMAGING METHOD AND SYSTEM
- Publication number 20230044598
- Publication date Feb 9, 2023
- Fibics Incorporated
- Michael William Phaneuf
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR DETECTOR EQUALIZATION DURING THE IMGAGING OF OBJECTS WIT...
- Publication number 20210192700
- Publication date Jun 24, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND SYSTEM FOR INSPECTING AN EUV MASK
- Publication number 20210172891
- Publication date Jun 10, 2021
- ASML NETHERLANDS B.V.
- Guochong Weng
- G01 - MEASURING TESTING
Information Patent Application
MICROSCOPY IMAGING METHOD AND SYSTEM
- Publication number 20210159046
- Publication date May 27, 2021
- Fibics Incorporated
- Michael William Phaneuf
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
OPTICAL SYSTEM ADJUSTMENT METHOD OF IMAGE ACQUISITION APPARATUS
- Publication number 20200203121
- Publication date Jun 25, 2020
- NuFlare Technology, Inc.
- Munehiro Ogasawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROSCOPY IMAGING METHOD AND SYSTEM
- Publication number 20200176218
- Publication date Jun 4, 2020
- Fibics Incorporated
- Michael William Phaneuf
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND SYSTEM FOR INSPECTING AN EUV MASK
- Publication number 20190170671
- Publication date Jun 6, 2019
- HERMES MICROVISION, INC.
- Guochong Weng
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR RAPIDLY FABRICATING NANOPATTERNS IN A PARAL...
- Publication number 20170361551
- Publication date Dec 21, 2017
- UNIVERSITY OF HOUSTON SYSTEM
- Vincent M. Donnelly
- B82 - NANO-TECHNOLOGY
Information Patent Application
INSPECTION SYSTEM USING SCANNING ELECTRON MICROSCOPE
- Publication number 20140291514
- Publication date Oct 2, 2014
- SAMSUNG DISPLAY CO., LTD.
- Dong-Hyun GONG
- G01 - MEASURING TESTING
Information Patent Application
STRUCTURE FOR DISCHARGING EXTREME ULTRAVIOLET MASK
- Publication number 20140027634
- Publication date Jan 30, 2014
- HERMES MICROVISION, INC.
- You-Jin WANG
- G01 - MEASURING TESTING
Information Patent Application
Three Dimensional Fiducial
- Publication number 20130344292
- Publication date Dec 26, 2013
- FEI Company
- Cliff Bugge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20130313430
- Publication date Nov 28, 2013
- Hitachi High-Technologies Corporation
- Yusuke Ominami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFECT INSPECTION METHOD AND DEVICE THEREFOR
- Publication number 20130235182
- Publication date Sep 12, 2013
- Makoto Ono
- G01 - MEASURING TESTING
Information Patent Application
IMAGE GENERATING METHOD AND DEVICE USING SCANNING CHARGED PARTICLE...
- Publication number 20130010100
- Publication date Jan 10, 2013
- Go Kotaki
- G01 - MEASURING TESTING
Information Patent Application
Circuit-Pattern Inspection Device
- Publication number 20120305768
- Publication date Dec 6, 2012
- Hitachi High-Technologies Corporation
- Takuma Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STRUCTURE FOR DISCHARGING EXTREME ULTRAVIOLET MASK
- Publication number 20120292509
- Publication date Nov 22, 2012
- You-Jin WANG
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE INSTRUMENT
- Publication number 20120286160
- Publication date Nov 15, 2012
- Hitachi High-Technologies Corporation
- Takeyoshi OHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETECTION APPARATUS AND OPERATING METHOD
- Publication number 20120266700
- Publication date Oct 25, 2012
- HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Zhen WEI
- G02 - OPTICS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20110284746
- Publication date Nov 24, 2011
- Hitachi, Ltd
- Tomokazu SHIMAKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20110260057
- Publication date Oct 27, 2011
- Tadashi Otaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Mask inspection apparatus and image generation method
- Publication number 20110249885
- Publication date Oct 13, 2011
- Tsutomu Murakawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND DEVICE FOR SYNTHESIZING PANORAMA IMAGE USING SCANNING CH...
- Publication number 20110181688
- Publication date Jul 28, 2011
- Atsushi Miyamoto
- G01 - MEASURING TESTING
Information Patent Application
DEFECT REVIEW SYSTEM AND METHOD, AND PROGRAM
- Publication number 20110129142
- Publication date Jun 2, 2011
- Hitachi High-Technologies Corporation
- Noritsugu Takahashi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IN-LINE ELECTRON BEAM TEST SYSTEM
- Publication number 20100327162
- Publication date Dec 30, 2010
- Fayez E. Abboud
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPLICATION APPARATUS
- Publication number 20100264330
- Publication date Oct 21, 2010
- Hitachi High-Technologies Corporation
- Masaki Mizuochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON MICROSCOPE AND OBSERVATION METHOD
- Publication number 20090272902
- Publication date Nov 5, 2009
- Fujitsu Limited
- Takeshi Soeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-LINE ELECTRON BEAM TEST SYSTEM
- Publication number 20090195262
- Publication date Aug 6, 2009
- Fayez E. Abboud
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPLICATION APPARATUS
- Publication number 20080308743
- Publication date Dec 18, 2008
- Hitachi High-Technologies Corporation
- Masaki Mizuochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE AND METHOD FOR INSPECTING SPECIMEN
- Publication number 20080048116
- Publication date Feb 28, 2008
- PAVEL ADAMEC
- H01 - BASIC ELECTRIC ELEMENTS

Large objects

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and system for cross-sectioning a sample with a preset thick...

Microscopy imaging method for 3D tomography with predictive drift t...

Method and system for inspecting an EUV mask

Method for detector equalization during the imaging of objects with...

Method and system for iteratively cross-sectioning a sample to corr...

Method and system for cross-sectioning a sample with a preset thick...

Method and system for inspecting an EUV mask

Optical system adjustment method of image acquisition apparatus

Microscopy imaging method and system

Wide field atmospheric scanning electron microscope

Systems and methods for rapidly fabricating nanopatterns in a paral...

Cross-section processing-and-observation method and cross-section p...

Method and system for inspecting an EUV mask

Structure electron beam inspection system for inspecting extreme ul...

Method and system for inspecting and grounding an EUV mask

Mathematical image assembly in a scanning-type microscope

Structure electron beam inspection system for inspecting extreme ul...

Charged particle beam device

Method and system for inspecting an EUV mask

Cross-section processing-and-observation method and cross-section p...

Charged particle instrument

Defect inspection method and device therefor

Detection apparatus and operating method

Structure electron beam inspection system for inspecting extreme ul...

Circuit-pattern inspection device

Structure for discharging extreme ultraviolet mask

Mask inspection apparatus and image generation method

Three dimensional fiducial

Defect review system and method, and program

Charged particle beam device

Patents Applicationslast 30 patents

MICROSCOPY IMAGING METHOD AND SYSTEM

MICROSCOPY IMAGING METHOD AND SYSTEM

METHOD FOR DETECTOR EQUALIZATION DURING THE IMGAGING OF OBJECTS WIT...

METHOD AND SYSTEM FOR INSPECTING AN EUV MASK

MICROSCOPY IMAGING METHOD AND SYSTEM

OPTICAL SYSTEM ADJUSTMENT METHOD OF IMAGE ACQUISITION APPARATUS

MICROSCOPY IMAGING METHOD AND SYSTEM

METHOD AND SYSTEM FOR INSPECTING AN EUV MASK

SYSTEMS AND METHODS FOR RAPIDLY FABRICATING NANOPATTERNS IN A PARAL...

INSPECTION SYSTEM USING SCANNING ELECTRON MICROSCOPE

STRUCTURE FOR DISCHARGING EXTREME ULTRAVIOLET MASK

Three Dimensional Fiducial

CHARGED PARTICLE BEAM DEVICE

DEFECT INSPECTION METHOD AND DEVICE THEREFOR

IMAGE GENERATING METHOD AND DEVICE USING SCANNING CHARGED PARTICLE...

Circuit-Pattern Inspection Device

STRUCTURE FOR DISCHARGING EXTREME ULTRAVIOLET MASK

CHARGED PARTICLE INSTRUMENT

DETECTION APPARATUS AND OPERATING METHOD

CHARGED PARTICLE BEAM DEVICE

CHARGED PARTICLE BEAM APPARATUS

Mask inspection apparatus and image generation method

METHOD AND DEVICE FOR SYNTHESIZING PANORAMA IMAGE USING SCANNING CH...

DEFECT REVIEW SYSTEM AND METHOD, AND PROGRAM

IN-LINE ELECTRON BEAM TEST SYSTEM

CHARGED PARTICLE BEAM APPLICATION APPARATUS

ELECTRON MICROSCOPE AND OBSERVATION METHOD

IN-LINE ELECTRON BEAM TEST SYSTEM

CHARGED PARTICLE BEAM APPLICATION APPARATUS

CHARGED PARTICLE BEAM DEVICE AND METHOD FOR INSPECTING SPECIMEN