layers comprising hydrogen silsesquioxane

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H01L21/3124

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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H01L21/3124layers comprising hydrogen silsesquioxane

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method of forming a porous insulation film
- Patent number 8,790,785
- Issue date Jul 29, 2014
- Renesas Electronics Corporation
- Hironori Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device having silicon-diffused metal wiring layer and...
- Patent number 8,642,467
- Issue date Feb 4, 2014
- Renesas Electronics Corporation
- Koichi Ohto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon-based antireflective coating compositions
- Patent number 8,524,441
- Issue date Sep 3, 2013
- AZ Electronic Materials USA Corp.
- Ruzhi Zhang
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Method for manufacturing semiconductor device and NAND-type flash m...
- Patent number 8,329,553
- Issue date Dec 11, 2012
- Kabushiki Kaisha Toshiba
- Shogo Matsuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal capacitor and method of making the same including dielectric...
- Patent number 8,324,712
- Issue date Dec 4, 2012
- United Microelectronics Corp.
- Chin-Sheng Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for preparing nanocrystalline silicon in SiO2 and freestandi...
- Patent number 8,323,731
- Issue date Dec 4, 2012
- The Governors of the University of Alberta
- Jonathan Gordon Conn Veinot
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Metal capacitor and method of making the same including dielectric...
- Patent number 8,324,048
- Issue date Dec 4, 2012
- United Microelectronics Corp.
- Chin-Sheng Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inorganic substrate with a thin silica type glass layer, method of...
- Patent number 8,211,993
- Issue date Jul 3, 2012
- Dow Corning Toray Company, Ltd.
- Yukinari Harimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor device and the semiconductor...
- Patent number 8,187,973
- Issue date May 29, 2012
- Kabushiki Kaisha Toshiba
- Katsuyuki Sekine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Two step post-deposition treatment of ILD layer for a lower dielect...
- Patent number 8,158,521
- Issue date Apr 17, 2012
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hui-Lin Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and devices for forming nanostructure monolayers and device...
- Patent number 8,143,703
- Issue date Mar 27, 2012
- Nanosys, Inc.
- David L. Heald
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Metal capacitor and method of making the same
- Patent number 8,114,734
- Issue date Feb 14, 2012
- United Microelectronics Corp.
- Chin-Sheng Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device having silicon-diffused metal wiring layer and...
- Patent number 8,115,318
- Issue date Feb 14, 2012
- Renesas Electronics Corporation
- Koichi Ohto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment method, heat treatment apparatus and substrate proce...
- Patent number 8,114,786
- Issue date Feb 14, 2012
- Tokyo Electron Limited
- Hidenori Miyoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicone resin and silicone composition
- Patent number 7,989,030
- Issue date Aug 2, 2011
- Dow Corning Corporation
- Ronald Boisvert
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Interlayer dielectric film
- Patent number 7,947,375
- Issue date May 24, 2011
- Panasonic Corporation
- Nobuo Aoi
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Low κ dielectric inorganic/organic hybrid films and method of making
- Patent number 7,901,783
- Issue date Mar 8, 2011
- Applied Materials, Inc.
- Peter Rose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating composition optimization for via fill and photolithography...
- Patent number 7,867,331
- Issue date Jan 11, 2011
- Honeywell International Inc.
- Joseph Kennedy
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Semiconductor device having silicon-diffused metal wiring layer and...
- Patent number 7,842,602
- Issue date Nov 30, 2010
- Renesas Electronics Corporation
- Koichi Ohto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming anti-reflective coating
- Patent number 7,833,696
- Issue date Nov 16, 2010
- Dow Corning Corporation
- Peng-Fei Fu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device, semiconductor wafer, and methods of producing...
- Patent number 7,816,280
- Issue date Oct 19, 2010
- NEC Electronics Corporation
- Tatsuya Usami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method and film forming method
- Patent number 7,771,796
- Issue date Aug 10, 2010
- Tokyo Electron Limited
- Masayuki Kohno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor method having silicon-diffused metal wiring layer
- Patent number 7,737,555
- Issue date Jun 15, 2010
- NEC Electronics Corporation
- Koichi Ohto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Patternable low dielectric constant materials and their use in ULSI...
- Patent number 7,714,079
- Issue date May 11, 2010
- International Business Machines Corporaiton
- Qinghuang Lin
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Single damascene structure semiconductor device having silicon-diff...
- Patent number 7,687,917
- Issue date Mar 30, 2010
- NEC Electronics Corporation
- Koichi Ohto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device, semiconductor wafer, and methods of producing...
- Patent number 7,674,721
- Issue date Mar 9, 2010
- NEC Electronics Corporation
- Tatsuya Usami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reduction of cracking in low-k spin-on dielectric films
- Patent number 7,670,961
- Issue date Mar 2, 2010
- NXP B.V.
- Harbans Singh Sachdev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and semiconductor wafer having a multi-layered...
- Patent number 7,602,048
- Issue date Oct 13, 2009
- NEC Electronics Corporation
- Tatsuya Usami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Insulating layer patterning method, insulating layer formed by the...
- Patent number 7,579,283
- Issue date Aug 25, 2009
- Samsung Electronics Co., Ltd.
- Sang-Jun Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dielectric nanostructure and method for its manufacture
- Patent number 7,569,469
- Issue date Aug 4, 2009
- International Business Machines Corporation
- Ho-Cheol Kim
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
NANOCRYSTALLINE SILICON IN SIO2 COMPOSITE AND FREESTANDING SILICON...
- Publication number 20130059121
- Publication date Mar 7, 2013
- The Governors of the University of Alberta
- Jonathan Gordon Conn Veinot
- B82 - NANO-TECHNOLOGY
Information Patent Application
METAL CAPACITOR AND METHOD OF MAKING THE SAME
- Publication number 20120115301
- Publication date May 10, 2012
- Chin-Sheng Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE HAVING SILICON-DIFFUSED METAL WIRING LAYER AND...
- Publication number 20120108060
- Publication date May 3, 2012
- NEC ELECTRONICS CORPORATION
- Koichi Ohto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL CAPACITOR AND METHOD OF MAKING THE SAME
- Publication number 20120098094
- Publication date Apr 26, 2012
- Chin-Sheng Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND NAND-TYPE FLASH M...
- Publication number 20100311220
- Publication date Dec 9, 2010
- Shogo MATSUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE HAVING SILICON-DIFFUSED METAL WIRING LAYER AND...
- Publication number 20100224995
- Publication date Sep 9, 2010
- NEC ELECTRONICS CORPORATION
- Koichi Ohto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE HAVING A PORTION IN WHI...
- Publication number 20100184268
- Publication date Jul 22, 2010
- Elpida Memory, Inc.
- Toshiyuki HIROTA
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
METAL CAPACITOR AND METHOD OF MAKING THE SAME
- Publication number 20100096726
- Publication date Apr 22, 2010
- Chin-Sheng Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON-BASED ANTIREFLECTIVE COATING COMPOSITIONS
- Publication number 20100092895
- Publication date Apr 15, 2010
- Ruzhi Zhang
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
SILICONE RESIN COMPOSITION AND METHOD OF FORMING A TRENCH ISOLATION
- Publication number 20100029057
- Publication date Feb 4, 2010
- JSR CORPORATION
- Haruo Iwasawa
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Inorganic Substrate With A Thin Silica Type Glass Layer, Method of...
- Publication number 20090293942
- Publication date Dec 3, 2009
- Yukinari Harimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND THE SEMICONDUCTOR...
- Publication number 20090256188
- Publication date Oct 15, 2009
- Katsuyuki SEKINE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING A POROUS INSULATION FILM
- Publication number 20090246538
- Publication date Oct 1, 2009
- Hironori Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Silicone Resin and Silicone Composition
- Publication number 20090226609
- Publication date Sep 10, 2009
- Ronald Boisvert
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Silicon-Containing Photosensitive Composition, Method for Forming T...
- Publication number 20090206328
- Publication date Aug 20, 2009
- Sekisui Chemical Co., Ltd.
- Kimihiro Matsukawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DIELECTRIC NANOSTRUCTURE AND METHOD FOR ITS MANUFACTURE
- Publication number 20090170342
- Publication date Jul 2, 2009
- International Business Machines Co
- Ho-Cheol Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT METHOD, HEAT TREATMENT APPARATUS AND SUBSTRATE PROCE...
- Publication number 20090163038
- Publication date Jun 25, 2009
- TOKYO ELECTRON LIMITED
- Hidenori Miyoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device, semiconductor wafer, and methods of producing...
- Publication number 20090137108
- Publication date May 28, 2009
- NEC Electronics Corporation
- Tatsuya Usami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coated Substrates and Methods for their Preparation
- Publication number 20090130463
- Publication date May 21, 2009
- John Dean Albaugh
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Method for Forming Anti-Reflective Coating
- Publication number 20090123701
- Publication date May 14, 2009
- Peng-Fei Fu
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
METHOD FOR PREPARING NANOCRYSTALLINE SILICON IN SIO2 AND FREESTANDI...
- Publication number 20090117392
- Publication date May 7, 2009
- Jonathan Gordon Conn Veinot
- B82 - NANO-TECHNOLOGY
Information Patent Application
Methods and devices for forming nanostructure monolayers and device...
- Publication number 20090065764
- Publication date Mar 12, 2009
- Nanosys, Inc.
- David L. Heald
- G11 - INFORMATION STORAGE
Information Patent Application
Method of curing hydrogen silsesquioxane and densification in nano-...
- Publication number 20090032901
- Publication date Feb 5, 2009
- Wei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING COMPOSITION FOR FORMING OXIDE FILM AND METHOD FOR PRODUCING...
- Publication number 20080305611
- Publication date Dec 11, 2008
- Elpida Memory, Inc.
- Toshiyuki HIROTA
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Compositions, layers and films for optoelectronic devices, methods...
- Publication number 20080157065
- Publication date Jul 3, 2008
- Ahila Krishnamoorthy
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Thin film transistor for liquid crystal display device
- Publication number 20080157069
- Publication date Jul 3, 2008
- LG.Philips LCD Co., LTD
- Jae Seok Heo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Interlayer dielectric film
- Publication number 20080090094
- Publication date Apr 17, 2008
- Matsushita Electric Industrial Co., Ltd.
- Nobuo Aoi
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
PATTERNABLE LOW DIELECTRIC CONSTANT MATERIALS AND THEIR USE IN ULSI...
- Publication number 20080063880
- Publication date Mar 13, 2008
- International Business Machines Corporation
- Qinghuang Lin
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Reduction of Cracking in Low-K Spin-On Dielectric Films
- Publication number 20080026594
- Publication date Jan 31, 2008
- Koninklijke Philips Electronics, N.V.
- Harbans Singh Sachdev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Two Step Post-Deposition Treatment of ILD Layer for a Lower Dielect...
- Publication number 20080014369
- Publication date Jan 17, 2008
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hui-Lin Chang
- H01 - BASIC ELECTRIC ELEMENTS

layers comprising hydrogen silsesquioxane

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of forming a porous insulation film

Semiconductor device having silicon-diffused metal wiring layer and...

Silicon-based antireflective coating compositions

Method for manufacturing semiconductor device and NAND-type flash m...

Metal capacitor and method of making the same including dielectric...

Method for preparing nanocrystalline silicon in SiO2 and freestandi...

Metal capacitor and method of making the same including dielectric...

Inorganic substrate with a thin silica type glass layer, method of...

Method for manufacturing semiconductor device and the semiconductor...

Two step post-deposition treatment of ILD layer for a lower dielect...

Methods and devices for forming nanostructure monolayers and device...

Metal capacitor and method of making the same

Semiconductor device having silicon-diffused metal wiring layer and...

Heat treatment method, heat treatment apparatus and substrate proce...

Silicone resin and silicone composition

Interlayer dielectric film

Low κ dielectric inorganic/organic hybrid films and method of making

Coating composition optimization for via fill and photolithography...

Semiconductor device having silicon-diffused metal wiring layer and...

Method for forming anti-reflective coating

Semiconductor device, semiconductor wafer, and methods of producing...

Plasma processing method and film forming method

Semiconductor method having silicon-diffused metal wiring layer

Patternable low dielectric constant materials and their use in ULSI...

Single damascene structure semiconductor device having silicon-diff...

Semiconductor device, semiconductor wafer, and methods of producing...

Reduction of cracking in low-k spin-on dielectric films

Semiconductor device and semiconductor wafer having a multi-layered...

Insulating layer patterning method, insulating layer formed by the...

Dielectric nanostructure and method for its manufacture

Patents Applicationslast 30 patents

NANOCRYSTALLINE SILICON IN SIO2 COMPOSITE AND FREESTANDING SILICON...

METAL CAPACITOR AND METHOD OF MAKING THE SAME

SEMICONDUCTOR DEVICE HAVING SILICON-DIFFUSED METAL WIRING LAYER AND...

METAL CAPACITOR AND METHOD OF MAKING THE SAME

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND NAND-TYPE FLASH M...

SEMICONDUCTOR DEVICE HAVING SILICON-DIFFUSED METAL WIRING LAYER AND...

METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE HAVING A PORTION IN WHI...

METAL CAPACITOR AND METHOD OF MAKING THE SAME

SILICON-BASED ANTIREFLECTIVE COATING COMPOSITIONS

SILICONE RESIN COMPOSITION AND METHOD OF FORMING A TRENCH ISOLATION

Inorganic Substrate With A Thin Silica Type Glass Layer, Method of...

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND THE SEMICONDUCTOR...

METHOD OF FORMING A POROUS INSULATION FILM

Silicone Resin and Silicone Composition

Silicon-Containing Photosensitive Composition, Method for Forming T...

DIELECTRIC NANOSTRUCTURE AND METHOD FOR ITS MANUFACTURE

HEAT TREATMENT METHOD, HEAT TREATMENT APPARATUS AND SUBSTRATE PROCE...

Semiconductor device, semiconductor wafer, and methods of producing...

Coated Substrates and Methods for their Preparation

Method for Forming Anti-Reflective Coating

METHOD FOR PREPARING NANOCRYSTALLINE SILICON IN SIO2 AND FREESTANDI...

Methods and devices for forming nanostructure monolayers and device...

Method of curing hydrogen silsesquioxane and densification in nano-...

COATING COMPOSITION FOR FORMING OXIDE FILM AND METHOD FOR PRODUCING...

Compositions, layers and films for optoelectronic devices, methods...

Thin film transistor for liquid crystal display device

Interlayer dielectric film

PATTERNABLE LOW DIELECTRIC CONSTANT MATERIALS AND THEIR USE IN ULSI...

Reduction of Cracking in Low-K Spin-On Dielectric Films

Two Step Post-Deposition Treatment of ILD Layer for a Lower Dielect...