layers comprising polysiloxane compounds

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CPC
H01L21/3122

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/3122layers comprising polysiloxane compounds

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Patternable dielectric film structure with improved lithography and...
- Patent number 9,484,248
- Issue date Nov 1, 2016
- GLOBALFOUNDRIES Inc.
- Qinghuang Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alkali-developable curable composition, insulating thin film using...
- Patent number 9,464,172
- Issue date Oct 11, 2016
- Kaneka Corporation
- Masahito Ide
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Gas barrier thin film, electronic device comprising the same, and m...
- Patent number 9,368,746
- Issue date Jun 14, 2016
- Samsung Electronics Co., Ltd.
- Kwang-hee Lee
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Patterning process
- Patent number 9,248,693
- Issue date Feb 2, 2016
- Shin-Etsu Chemical Co., Ltd.
- Tsutomu Ogihara
- B44 - DECORATIVE ARTS
Information Patent Grant
Gate insulating material, gate insulating film and organic field-ef...
- Patent number 9,048,445
- Issue date Jun 2, 2015
- Toray Industries, Inc.
- Seiichiro Murase
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Photo-patternable dielectric materials and formulations and methods...
- Patent number 9,012,587
- Issue date Apr 21, 2015
- International Business Machines Corporation
- Robert David Allen
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Compositions, layers and films for optoelectronic devices, methods...
- Patent number 8,901,268
- Issue date Dec 2, 2014
- Ahila Krishnamoorthy
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Flowable film dielectric gap fill process
- Patent number 8,809,161
- Issue date Aug 19, 2014
- Novellus Systems, Inc.
- Vishal Gauri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming circuit pattern forming region in an insulating...
- Patent number 8,796,158
- Issue date Aug 5, 2014
- Samsung Electronics Co., Ltd.
- Kyoung-sei Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and materials for reverse patterning
- Patent number 8,785,113
- Issue date Jul 22, 2014
- Dow Corning Corporation
- Michael L. Bradford
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Method and materials for double patterning
- Patent number 8,728,335
- Issue date May 20, 2014
- Dow Corning Corporation
- Peng-Fei Fu
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Method for forming porous insulating film and semiconductor device
- Patent number 8,715,791
- Issue date May 6, 2014
- Renesas Electronics Corporation
- Munehiro Tada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating liquid for forming low dielectric constant amorphous silica...
- Patent number 8,686,101
- Issue date Apr 1, 2014
- JGC Catalysts and Chemicals Ltd.
- Miki Egami
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Airgap-containing interconnect structure with improved patternable...
- Patent number 8,659,115
- Issue date Feb 25, 2014
- International Business Machines Corporation
- Qinghuang Lin
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Method for preparing an oriented-porosity dielectric material on a...
- Patent number 8,623,466
- Issue date Jan 7, 2014
- Commissariat a l'Energie Atomique
- Aziz Zenasni
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Patternable dielectric film structure with improved lithography and...
- Patent number 8,618,663
- Issue date Dec 31, 2013
- International Business Machines Corporation
- Qinghuang Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Composition and method for production thereof, porous material and...
- Patent number 8,603,588
- Issue date Dec 10, 2013
- Mitsui Chemicals, Inc.
- Kazuo Kohmura
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Method for forming interlayer dielectric film, interlayer dielectri...
- Patent number 8,598,706
- Issue date Dec 3, 2013
- Renesas Electronics Corporation
- Hironori Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermo- and/or photo-sensitive material and insulator film made the...
- Patent number 8,530,583
- Issue date Sep 10, 2013
- FUJIFILM Corporation
- Kenji Wada
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Silicon-based hardmask composition and process of producing semicon...
- Patent number 8,524,851
- Issue date Sep 3, 2013
- Cheil Industries, Inc.
- Sang Kyun Kim
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Flowable film dielectric gap fill process
- Patent number 8,481,403
- Issue date Jul 9, 2013
- Novellus Systems, Inc.
- Vishal Gauri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Molding material comprising polysilsesquioxane compound, sealing ma...
- Patent number 8,481,669
- Issue date Jul 9, 2013
- Lintec Corporation
- Mikihiro Kashio
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Interconnect structures with patternable low-k dielectrics and meth...
- Patent number 8,450,854
- Issue date May 28, 2013
- International Business Machines Corporation
- Qinghuang Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to minimize wet etch undercuts and provide pore sealing of e...
- Patent number 8,445,075
- Issue date May 21, 2013
- Applied Materials, Inc.
- Huiwen Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Curable liquid composition, method of coating, inorganic substrate,...
- Patent number 8,440,775
- Issue date May 14, 2013
- Dow Corning Corporation
- Yukinari Harimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method to restore hydrophobicity in dielectric films and materials
- Patent number 8,440,388
- Issue date May 14, 2013
- Honeywell International Inc.
- Nigel P. Hacker
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Photo-patternable dielectric materials and formulations and methods...
- Patent number 8,431,670
- Issue date Apr 30, 2013
- International Business Machines Corporation
- Robert David Allen
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Polymer and process for producing the same, composition for forming...
- Patent number 8,404,786
- Issue date Mar 26, 2013
- JSR Corporation
- Masahiro Akiyama
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Precursor composition for porous thin film, method for preparation...
- Patent number 8,394,457
- Issue date Mar 12, 2013
- Ulvac, Inc.
- Nobutoshi Fujii
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 8,367,559
- Issue date Feb 5, 2013
- Renesas Electronics Corporation
- Hironori Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR OPTOELECTRONICS DEVICES
- Publication number 20140217539
- Publication date Aug 7, 2014
- SILECS OY
- Juha T. Rantala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLOWABLE FILM DIELECTRIC GAP FILL PROCESS
- Publication number 20140017904
- Publication date Jan 16, 2014
- Vishal GAURI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHOTO-PATTERNABLE DIELECTRIC MATERIALS AND FORMULATIONS AND METHODS...
- Publication number 20130292163
- Publication date Nov 7, 2013
- International Business Machines Corporation
- Robert David Allen
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
PATTERNING PROCESS
- Publication number 20130284698
- Publication date Oct 31, 2013
- Shin-Etsu Chemical Co., Ltd.
- Tsutomu OGIHARA
- B44 - DECORATIVE ARTS
Information Patent Application
SEMICONDUCTOR OPTOELECTRONICS DEVICES
- Publication number 20130193543
- Publication date Aug 1, 2013
- SILECS OY
- Juha T. Rantala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PREPARING AN ORIENTED-POROSITY DIELECTRIC MATERIAL ON A...
- Publication number 20120135161
- Publication date May 31, 2012
- COMMISSARIAT A L'ENERGIE ATOMIQUE
- Aziz ZENASNI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method And Materials For Double Patterning
- Publication number 20120118856
- Publication date May 17, 2012
- Peng-Fei Fu
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Method And Materials For Reverse Patterning
- Publication number 20120122037
- Publication date May 17, 2012
- Michael L. Bradford
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
METAL CAPACITOR AND METHOD OF MAKING THE SAME
- Publication number 20120115301
- Publication date May 10, 2012
- Chin-Sheng Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FORMING CIRCUIT PATTERN FORMING REGION IN AN INSULATING...
- Publication number 20120102734
- Publication date May 3, 2012
- Kyoung-sei Choi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METAL CAPACITOR AND METHOD OF MAKING THE SAME
- Publication number 20120098094
- Publication date Apr 26, 2012
- Chin-Sheng Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERNABLE DIELECTRIC FILM STRUCTURE WITH IMPROVED LITHOGRAPHY AND...
- Publication number 20110312177
- Publication date Dec 22, 2011
- International Business Machines Corporation
- Qinghuang Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLYHEDRAL OLIGOMERIC SILSESQUIOXANE BASED IMPRINT MATERIALS AND IM...
- Publication number 20110256713
- Publication date Oct 20, 2011
- International Business Machines Corporation
- Robert David Allen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
COMPOSITION
- Publication number 20110245416
- Publication date Oct 6, 2011
- FUJIFILM Corporation
- Kenji Wada
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Method of Providing a Semiconductor Device With a Dielectric Layer...
- Publication number 20110227203
- Publication date Sep 22, 2011
- Arizona Board of Regents, for and on behalf of Arizona State University
- Michael Marrs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20110183526
- Publication date Jul 28, 2011
- RENESAS ELECTRONICS CORPORATION
- Hironori YAMAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS, LAYERS AND FILMS FOR OPTOELECTRONIC DEVICES, METHODS...
- Publication number 20110171447
- Publication date Jul 14, 2011
- Ahila Krishnamoorthy
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
COMPOSITION FOR INSULATING LAYER
- Publication number 20110136992
- Publication date Jun 9, 2011
- Sumitomo Chemical Company, Limited
- Isao Yahagi
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
COATING COMPOSITION AND PATTERN FORMING METHOD
- Publication number 20110117746
- Publication date May 19, 2011
- Nissan Chemical Industries, Ltd.
- Daisuke Maruyama
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
METHOD TO MINIMIZE WET ETCH UNDERCUTS AND PROVIDE PORE SEALING OF E...
- Publication number 20110092077
- Publication date Apr 21, 2011
- Huiwen Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GATE INSULATING MATERIAL, GATE INSULATING FILM AND ORGANIC FIELD-EF...
- Publication number 20110068417
- Publication date Mar 24, 2011
- TORAY INDUSTRIES, INC.
- Seiichiro Murase
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
PHOTO-PATTERNABLE DIELECTRIC MATERIALS AND FORMULATIONS AND METHODS...
- Publication number 20110048787
- Publication date Mar 3, 2011
- International Business Machines Corporation
- Robert David Allen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SACRIFICIAL INORGANIC POLYMER INTERMETAL DIELECTRIC DAMASCENE WIRE...
- Publication number 20110042826
- Publication date Feb 24, 2011
- International Business Machines Corporation
- Jeffrey P. Gambino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITION AND METHOD FOR PRODUCTON THEREOF, POROUS MATERIAL AND M...
- Publication number 20110018108
- Publication date Jan 27, 2011
- Mitsui Chemicals ,Inc.
- Kazuo Kohmura
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Method of Forming A Ceramic Silicon Oxide Type Coating, Method of P...
- Publication number 20110011447
- Publication date Jan 20, 2011
- Yukinari Harimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALKALI-DEVELOPABLE CURABLE COMPOSITION, INSULATING THIN FILM USING...
- Publication number 20110001190
- Publication date Jan 6, 2011
- KANEKA CORPORATION
- Masahito Ide
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
MODIFIER FOR LOW DIELECTRIC CONSTANT FILM, AND METHOD FOR PRODUCTIO...
- Publication number 20100323530
- Publication date Dec 23, 2010
- Central Glass Company, Limited
- Tsuyoshi Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AIRGAP-CONTAINING INTERCONNECT STRUCTURE WITH IMPROVED PATTERNABLE...
- Publication number 20100319971
- Publication date Dec 23, 2010
- International Business Machines Corporation
- Qinghuang Lin
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
METHOD FOR MAKING INTEGRATED CIRCUIT DEVICE
- Publication number 20100317179
- Publication date Dec 16, 2010
- Juha T. RANTALA
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
FILM-FORMING COMPOSITION, INSULATING FILM WITH LOW DIELECTRIC CONST...
- Publication number 20100283133
- Publication date Nov 11, 2010
- Yoshitaka Hamada
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...

layers comprising polysiloxane compounds

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Patternable dielectric film structure with improved lithography and...

Alkali-developable curable composition, insulating thin film using...

Gas barrier thin film, electronic device comprising the same, and m...

Patterning process

Gate insulating material, gate insulating film and organic field-ef...

Photo-patternable dielectric materials and formulations and methods...

Compositions, layers and films for optoelectronic devices, methods...

Flowable film dielectric gap fill process

Methods for forming circuit pattern forming region in an insulating...

Method and materials for reverse patterning

Method and materials for double patterning

Method for forming porous insulating film and semiconductor device

Coating liquid for forming low dielectric constant amorphous silica...

Airgap-containing interconnect structure with improved patternable...

Method for preparing an oriented-porosity dielectric material on a...

Patternable dielectric film structure with improved lithography and...

Composition and method for production thereof, porous material and...

Method for forming interlayer dielectric film, interlayer dielectri...

Thermo- and/or photo-sensitive material and insulator film made the...

Silicon-based hardmask composition and process of producing semicon...

Flowable film dielectric gap fill process

Molding material comprising polysilsesquioxane compound, sealing ma...

Interconnect structures with patternable low-k dielectrics and meth...

Method to minimize wet etch undercuts and provide pore sealing of e...

Curable liquid composition, method of coating, inorganic substrate,...

Method to restore hydrophobicity in dielectric films and materials

Photo-patternable dielectric materials and formulations and methods...

Polymer and process for producing the same, composition for forming...

Precursor composition for porous thin film, method for preparation...

Method of manufacturing a semiconductor device

Patents Applicationslast 30 patents

SEMICONDUCTOR OPTOELECTRONICS DEVICES

FLOWABLE FILM DIELECTRIC GAP FILL PROCESS

PHOTO-PATTERNABLE DIELECTRIC MATERIALS AND FORMULATIONS AND METHODS...

PATTERNING PROCESS

SEMICONDUCTOR OPTOELECTRONICS DEVICES

METHOD FOR PREPARING AN ORIENTED-POROSITY DIELECTRIC MATERIAL ON A...

Method And Materials For Double Patterning

Method And Materials For Reverse Patterning

METAL CAPACITOR AND METHOD OF MAKING THE SAME

METHODS FOR FORMING CIRCUIT PATTERN FORMING REGION IN AN INSULATING...

METAL CAPACITOR AND METHOD OF MAKING THE SAME

PATTERNABLE DIELECTRIC FILM STRUCTURE WITH IMPROVED LITHOGRAPHY AND...

POLYHEDRAL OLIGOMERIC SILSESQUIOXANE BASED IMPRINT MATERIALS AND IM...

COMPOSITION

Method of Providing a Semiconductor Device With a Dielectric Layer...

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

COMPOSITIONS, LAYERS AND FILMS FOR OPTOELECTRONIC DEVICES, METHODS...

COMPOSITION FOR INSULATING LAYER

COATING COMPOSITION AND PATTERN FORMING METHOD

METHOD TO MINIMIZE WET ETCH UNDERCUTS AND PROVIDE PORE SEALING OF E...

GATE INSULATING MATERIAL, GATE INSULATING FILM AND ORGANIC FIELD-EF...

PHOTO-PATTERNABLE DIELECTRIC MATERIALS AND FORMULATIONS AND METHODS...

SACRIFICIAL INORGANIC POLYMER INTERMETAL DIELECTRIC DAMASCENE WIRE...

COMPOSITION AND METHOD FOR PRODUCTON THEREOF, POROUS MATERIAL AND M...

Method of Forming A Ceramic Silicon Oxide Type Coating, Method of P...

ALKALI-DEVELOPABLE CURABLE COMPOSITION, INSULATING THIN FILM USING...

MODIFIER FOR LOW DIELECTRIC CONSTANT FILM, AND METHOD FOR PRODUCTIO...

AIRGAP-CONTAINING INTERCONNECT STRUCTURE WITH IMPROVED PATTERNABLE...

METHOD FOR MAKING INTEGRATED CIRCUIT DEVICE

FILM-FORMING COMPOSITION, INSULATING FILM WITH LOW DIELECTRIC CONST...