layers comprising silazane compounds

Industry

CPC
H01L21/3125

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/3125layers comprising silazane compounds

Industries

Patents Grantslast 30 patents

Information Patent Grant
Gas barrier thin film, electronic device comprising the same, and m...
- Patent number 9,368,746
- Issue date Jun 14, 2016
- Samsung Electronics Co., Ltd.
- Kwang-hee Lee
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Methods of forming oxides, methods of forming semiconductor constru...
- Patent number 8,962,446
- Issue date Feb 24, 2015
- Micron Technology, Inc.
- Robert J. Hanson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for formation of siliceous film and siliceous film formed by...
- Patent number 8,889,229
- Issue date Nov 18, 2014
- AA Electronics Materials USA Corp.
- Tatsuro Nagahara
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Process for producing silicon oxide thin film or silicon oxynitride...
- Patent number 8,673,070
- Issue date Mar 18, 2014
- National Institute of Advanced Industrial Science and Technology
- Sei Uemura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 8,603,892
- Issue date Dec 10, 2013
- Elpida Memory, Inc.
- Yoh Matsuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature process for polysilazane oxidation/densification
- Patent number 8,575,040
- Issue date Nov 5, 2013
- Micron Technology, Inc.
- Janos Fucsko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polysilazane-containing composition capable of forming a dense sili...
- Patent number 8,557,901
- Issue date Oct 15, 2013
- AZ Electronic Materials USA Corp.
- Yuki Ozaki
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Method for producing ceramic passivation layers on silicon for sola...
- Patent number 8,482,106
- Issue date Jul 9, 2013
- AZ Electronic Materials (Luxembourg) S.A.R.L.
- Klaus Rode
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for producing silicic coating, silicic coating and semicond...
- Patent number 8,431,464
- Issue date Apr 30, 2013
- Fujitsu Limited
- Yasushi Kobayashi
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Semiconductor device and manufacturing method therefor
- Patent number 8,378,489
- Issue date Feb 19, 2013
- Fujitsu Limited
- Shiro Ozaki
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Method for manufacturing semiconductor device and NAND-type flash m...
- Patent number 8,329,553
- Issue date Dec 11, 2012
- Kabushiki Kaisha Toshiba
- Shogo Matsuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polysilazane-containing composition capable of forming a dense sili...
- Patent number 8,263,717
- Issue date Sep 11, 2012
- AZ Electronic Materials USA Corp.
- Yuki Ozaki
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Silicon compound, ultraviolet absorbent, method for manufacturing m...
- Patent number 8,207,059
- Issue date Jun 26, 2012
- Fujitsu Limited
- Shirou Ozaki
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 8,154,102
- Issue date Apr 10, 2012
- Elpida Memory, Inc.
- Yoh Matsuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for processing polysilazane film
- Patent number 8,122,850
- Issue date Feb 28, 2012
- Tokyo Electron Limited
- Shingo Hishiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and computer storage medium
- Patent number 8,084,372
- Issue date Dec 27, 2011
- Tokyo Electron Limited
- Gen You
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hardmask process for forming a reverse tone image using polysilazane
- Patent number 8,084,186
- Issue date Dec 27, 2011
- AZ Electronic Materials USA Corp.
- David Abdallah
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method for forming dielectric film using siloxane-silazane mixture
- Patent number 8,003,174
- Issue date Aug 23, 2011
- ASM Japan K.K.
- Atsuki Fukazawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Polysilazane, method of synthesizing polysilazane, composition for...
- Patent number 7,989,257
- Issue date Aug 2, 2011
- Korea Kumho Petrochemical Co., Ltd.
- Joo Hyeon Park
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 7,972,979
- Issue date Jul 5, 2011
- Hitachi Kokusai Electric, Inc.
- Toru Harada
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Organic thin film transistor
- Patent number 7,968,871
- Issue date Jun 28, 2011
- Xerox Corporation
- Yiliang Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low κ dielectric inorganic/organic hybrid films and method of making
- Patent number 7,901,783
- Issue date Mar 8, 2011
- Applied Materials, Inc.
- Peter Rose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming semiconductor constructions, and methods of form...
- Patent number 7,892,942
- Issue date Feb 22, 2011
- Micron Technology Inc.
- Robert J. Hanson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for processing polysilazane film
- Patent number 7,879,397
- Issue date Feb 1, 2011
- Tokyo Electron Limited
- Masahisa Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Organic transistor and manufacturing method thereof
- Patent number 7,851,788
- Issue date Dec 14, 2010
- Pioneer Corporation
- Satoru Ohta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Material for forming exposure light-blocking film, multilayer inter...
- Patent number 7,830,012
- Issue date Nov 9, 2010
- Fujitsu Limited
- Shirou Ozaki
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Method of forming a semiconductor device having a trapping film for...
- Patent number 7,807,557
- Issue date Oct 5, 2010
- Panasonic Corporation
- Koji Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of manufacturing same
- Patent number 7,803,721
- Issue date Sep 28, 2010
- Kabushiki Kaisha Toshiba
- Kazuaki Iwasawa
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 7,781,341
- Issue date Aug 24, 2010
- Kabushiki Kaisha Toshiba
- Keisuke Nakazawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming device isolation structure of semiconductor devi...
- Patent number 7,763,523
- Issue date Jul 27, 2010
- Hynix Semiconductor Inc.
- Sang Tae Ahn
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
POLYSILAZANE-CONTAINING COMPOSITION CAPABLE OF FORMING A DENSE SILI...
- Publication number 20120296022
- Publication date Nov 22, 2012
- AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.A.R.L.
- Yuki OZAKI
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20120164816
- Publication date Jun 28, 2012
- Elpida Memory, Inc.
- Yoh MATSUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR PRODUCING SILICON OXIDE THIN FILM OR SILICON OXYNITRIDE...
- Publication number 20110185948
- Publication date Aug 4, 2011
- NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Sei Uemura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods of forming oxides, methods of forming semiconductor constru...
- Publication number 20110183492
- Publication date Jul 28, 2011
- Robert J. Hanson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method For Producing Ceramic Passivation Layers on Silicon For Sola...
- Publication number 20110156221
- Publication date Jun 30, 2011
- CLARIANT FINANCE (BVI) LIMITED
- Klaus Rode
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20110065288
- Publication date Mar 17, 2011
- Hitachi Kokusai Electric Inc.
- Toru HARADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMATION OF SILICEOUS FILM AND SILICEOUS FILM FORMED BY...
- Publication number 20100323168
- Publication date Dec 23, 2010
- Tatsuro Nagahara
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND NAND-TYPE FLASH M...
- Publication number 20100311220
- Publication date Dec 9, 2010
- Shogo MATSUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING COATING-TYPE FILM
- Publication number 20100248474
- Publication date Sep 30, 2010
- Kabushiki Kaisha Toshiba
- Katsuhiro SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLYSILAZANE-CONTAINING COMPOSITION CAPABLE OF FORMING A DENSE SILI...
- Publication number 20100234540
- Publication date Sep 16, 2010
- Yuki Ozaki
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Hardmask Process for Forming a Reverse Tone Image Using Polysilazane
- Publication number 20100203299
- Publication date Aug 12, 2010
- David Abdallah
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE HAVING A PORTION IN WHI...
- Publication number 20100184268
- Publication date Jul 22, 2010
- Elpida Memory, Inc.
- Toshiyuki HIROTA
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
MATERIAL FOR FORMING EXPOSURE LIGHT-BLOCKING FILM, MULTILAYER INTER...
- Publication number 20100176496
- Publication date Jul 15, 2010
- Fujitsu Limited
- Shirou Ozaki
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Methods of forming a silicon oxide layer and methods of forming an...
- Publication number 20100173470
- Publication date Jul 8, 2010
- SAMSUNG ELECTRONICS CO., LTD.
- Mong-Sup Lee
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
GAS BARRIER THIN FILM, ELECTRONIC DEVICE COMPRISING THE SAME, AND M...
- Publication number 20100159255
- Publication date Jun 24, 2010
- Samsung Electronics Co., Ltd.
- Kwang-hee Lee
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20100148301
- Publication date Jun 17, 2010
- Elpida Memory, Inc.
- Yoh MATSUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR PRODUCING SILICIC COATING, SILICIC COATING AND SEMICOND...
- Publication number 20100133692
- Publication date Jun 3, 2010
- Fujitsu Limited
- Yasushi Kobayashi
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
POLYSILAZANE, METHOD OF SYNTHESIZING POLYSILAZANE, COMPOSITION FOR...
- Publication number 20100112749
- Publication date May 6, 2010
- Joo Hyeon Park
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
METHOD OF FABRICATING SEMICONDUCTOR MEMORY DEVICE
- Publication number 20100105189
- Publication date Apr 29, 2010
- KABUSHIKI KAISHA TOSHIBA
- Hiroshi KAWAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of forming insulation layer of semiconductor device and meth...
- Publication number 20100055868
- Publication date Mar 4, 2010
- Mi-young Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STI FILM PROPERTY USING SOD POST-TREATMENT
- Publication number 20100022068
- Publication date Jan 28, 2010
- Neng-Kuo Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
- Publication number 20090309221
- Publication date Dec 17, 2009
- Fujitsu Limited
- Shiro Ozaki
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
COMPOSITION FOR FORMING SILICEOUS FILM AND PROCESS FOR PRODUCING SI...
- Publication number 20090305063
- Publication date Dec 10, 2009
- Masanobu Hayashi
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
High shrinkage stress silicon nitride (SiN) layer for NFET improvement
- Publication number 20090289284
- Publication date Nov 26, 2009
- CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
- Luona Goh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Process for Producing Siliceous Film and Substrate With The Siliceo...
- Publication number 20090278223
- Publication date Nov 12, 2009
- Tomonori Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Low Temperature Process for Polysilazane Oxidation/Densification
- Publication number 20090269569
- Publication date Oct 29, 2009
- Janos Fucsko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING POLYSILAZANE FILM
- Publication number 20090263292
- Publication date Oct 22, 2009
- Shingo Hishiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ORGANIC THIN FILM TRANSISTOR
- Publication number 20090256138
- Publication date Oct 15, 2009
- Xerox Corporation
- Yiliang Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Organic Transistor and Manufacturing Method Thereof
- Publication number 20090166611
- Publication date Jul 2, 2009
- Satoru Ohta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIELECTRIC NANOSTRUCTURE AND METHOD FOR ITS MANUFACTURE
- Publication number 20090170342
- Publication date Jul 2, 2009
- International Business Machines Co
- Ho-Cheol Kim
- H01 - BASIC ELECTRIC ELEMENTS

layers comprising silazane compounds

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Gas barrier thin film, electronic device comprising the same, and m...

Methods of forming oxides, methods of forming semiconductor constru...

Method for formation of siliceous film and siliceous film formed by...

Process for producing silicon oxide thin film or silicon oxynitride...

Method of manufacturing a semiconductor device

Low temperature process for polysilazane oxidation/densification

Polysilazane-containing composition capable of forming a dense sili...

Method for producing ceramic passivation layers on silicon for sola...

Process for producing silicic coating, silicic coating and semicond...

Semiconductor device and manufacturing method therefor

Method for manufacturing semiconductor device and NAND-type flash m...

Polysilazane-containing composition capable of forming a dense sili...

Silicon compound, ultraviolet absorbent, method for manufacturing m...

Semiconductor device and manufacturing method thereof

Method and apparatus for processing polysilazane film

Substrate processing method and computer storage medium

Hardmask process for forming a reverse tone image using polysilazane

Method for forming dielectric film using siloxane-silazane mixture

Polysilazane, method of synthesizing polysilazane, composition for...

Substrate processing method and substrate processing apparatus

Organic thin film transistor

Low κ dielectric inorganic/organic hybrid films and method of making

Methods of forming semiconductor constructions, and methods of form...

Method for processing polysilazane film

Organic transistor and manufacturing method thereof

Material for forming exposure light-blocking film, multilayer inter...

Method of forming a semiconductor device having a trapping film for...

Semiconductor device and method of manufacturing same

Method of manufacturing semiconductor device

Method for forming device isolation structure of semiconductor devi...

Patents Applicationslast 30 patents

POLYSILAZANE-CONTAINING COMPOSITION CAPABLE OF FORMING A DENSE SILI...

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

PROCESS FOR PRODUCING SILICON OXIDE THIN FILM OR SILICON OXYNITRIDE...

Methods of forming oxides, methods of forming semiconductor constru...

Method For Producing Ceramic Passivation Layers on Silicon For Sola...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

METHOD FOR FORMATION OF SILICEOUS FILM AND SILICEOUS FILM FORMED BY...

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND NAND-TYPE FLASH M...

METHOD OF FORMING COATING-TYPE FILM

POLYSILAZANE-CONTAINING COMPOSITION CAPABLE OF FORMING A DENSE SILI...

Hardmask Process for Forming a Reverse Tone Image Using Polysilazane

METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE HAVING A PORTION IN WHI...

MATERIAL FOR FORMING EXPOSURE LIGHT-BLOCKING FILM, MULTILAYER INTER...

Methods of forming a silicon oxide layer and methods of forming an...

GAS BARRIER THIN FILM, ELECTRONIC DEVICE COMPRISING THE SAME, AND M...

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

PROCESS FOR PRODUCING SILICIC COATING, SILICIC COATING AND SEMICOND...

POLYSILAZANE, METHOD OF SYNTHESIZING POLYSILAZANE, COMPOSITION FOR...

METHOD OF FABRICATING SEMICONDUCTOR MEMORY DEVICE

Method of forming insulation layer of semiconductor device and meth...

STI FILM PROPERTY USING SOD POST-TREATMENT

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR

COMPOSITION FOR FORMING SILICEOUS FILM AND PROCESS FOR PRODUCING SI...

High shrinkage stress silicon nitride (SiN) layer for NFET improvement

Process for Producing Siliceous Film and Substrate With The Siliceo...

Low Temperature Process for Polysilazane Oxidation/Densification

METHOD AND APPARATUS FOR PROCESSING POLYSILAZANE FILM

ORGANIC THIN FILM TRANSISTOR

Organic Transistor and Manufacturing Method Thereof

DIELECTRIC NANOSTRUCTURE AND METHOD FOR ITS MANUFACTURE