Lenses

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H01J2237/10

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/10Lenses

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method and system of image-forming multi-electron beams
- Patent number 12,165,831
- Issue date Dec 10, 2024
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for real time stereo imaging using multiple ele...
- Patent number 11,942,303
- Issue date Mar 26, 2024
- ASML Netherlands B.V.
- Yan Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,887,807
- Issue date Jan 30, 2024
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Height measuring device, charged particle beam apparatus, and heigh...
- Patent number 11,754,388
- Issue date Sep 12, 2023
- Jeol Ltd.
- Yukinori Aida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming plasma processing apparatus, related apparatus, a...
- Patent number 11,715,628
- Issue date Aug 1, 2023
- Samsung Electronics Co., Ltd.
- Jeongil Mun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,587,758
- Issue date Feb 21, 2023
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic field free sample plane for charged particle microscope
- Patent number 11,450,505
- Issue date Sep 20, 2022
- FEI Company
- Alexander Henstra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor lens optimization of fabrication
- Patent number 11,187,831
- Issue date Nov 30, 2021
- Lumentum Operations LLC
- Richard F. Carson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope with composite detection system and sp...
- Patent number 11,145,487
- Issue date Oct 12, 2021
- Focus-eBeam Technology (Beijing) Co., Ltd.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transmission electron microscope and method of controlling same
- Patent number 11,133,151
- Issue date Sep 28, 2021
- Jeol Ltd.
- Hirofumi Iijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
- Patent number 10,930,469
- Issue date Feb 23, 2021
- NuFlare Technology, Inc.
- Takahito Nakayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 10,879,031
- Issue date Dec 29, 2020
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aberration corrector and charged particle beam device
- Patent number 10,755,888
- Issue date Aug 25, 2020
- Jeol Ltd.
- Shigeyuki Morishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for operating a charged particle device with mult...
- Patent number 10,748,743
- Issue date Aug 18, 2020
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Benjamin John Cook
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image capture assembly and method for electron back scatter diffrac...
- Patent number 10,692,689
- Issue date Jun 23, 2020
- VG Systems Limited
- Zoran Pesic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Monochromator and charged particle beam apparatus comprising the same
- Patent number 10,622,183
- Issue date Apr 14, 2020
- Korea Research Institute of Standards and Science
- Takashi Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
- Patent number 10,553,396
- Issue date Feb 4, 2020
- NuFlare Technology, Inc.
- Takahito Nakayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Secondary particle detection system of scanning electron microscope
- Patent number 10,515,778
- Issue date Dec 24, 2019
- NGR Inc.
- Sumio Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for charge control for imaging floating metal str...
- Patent number 10,460,903
- Issue date Oct 29, 2019
- KLA-Tencor Corporation
- Arjun Hegde
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for inspecting a specimen and charged particle multi-beam de...
- Patent number 10,453,645
- Issue date Oct 22, 2019
- Applied Materials Israel Ltd.
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 10,395,886
- Issue date Aug 27, 2019
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 10,319,558
- Issue date Jun 11, 2019
- Hitachi High-Technologies Corporation
- Yuko Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for inspection of scattered hot spot areas on...
- Patent number 10,217,605
- Issue date Feb 26, 2019
- KLA-Tencor Corporation
- Sean X. Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focused ion beam apparatus
- Patent number 10,176,964
- Issue date Jan 8, 2019
- Hitachi High-Tech Science Corporation
- Yasuhiko Sugiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 10,121,632
- Issue date Nov 6, 2018
- Hitachi High-Technologies Corporation
- Nobuhiro Okai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 10,037,866
- Issue date Jul 31, 2018
- Hitachi High-Technologies Corporation
- Momoyo Enyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam apparatus and method for operating a particle beam ap...
- Patent number 9,947,504
- Issue date Apr 17, 2018
- Carl Zeiss Microscopy GmbH
- Klaus Hegele
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor lens optimization of fabrication
- Patent number 9,927,558
- Issue date Mar 27, 2018
- Trilumina Corp.
- Richard F. Carson
- G02 - OPTICS
Information Patent Grant
In-situ spatially resolved plasma monitoring by using optical emiss...
- Patent number 9,874,524
- Issue date Jan 23, 2018
- Applied Materials, Inc.
- Tae Seung Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Micro stage for particle beam column using piezo elements as actuator
- Patent number 9,837,245
- Issue date Dec 5, 2017
- CEBT CO., LTD.
- Ho Seob Kim
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
MAGNETIC LENSES, CHARGED PARTICLE MICROSCOPE SYSTEMS INCLUDING THE...
- Publication number 20250006453
- Publication date Jan 2, 2025
- FEI Company
- Jan Stopka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20240128044
- Publication date Apr 18, 2024
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM OF IMAGE-FORMING MULTI-ELECTRON BEAMS
- Publication number 20240096586
- Publication date Mar 21, 2024
- KLA Corporation
- Xinrong JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20230411108
- Publication date Dec 21, 2023
- HITACHI HIGH-TECH CORPORATION
- Hideyuki Kotsuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Creating Multiple Electron Beams with a Photocathode Film
- Publication number 20230395349
- Publication date Dec 7, 2023
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20230282441
- Publication date Sep 7, 2023
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-ELECTRON BEAM WRITING APPARATUS AND MULTI-ELECTRON BEAM WRITI...
- Publication number 20230260748
- Publication date Aug 17, 2023
- NuFlare Technology, Inc.
- Kota IWASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE PARTICLE BEAM SYSTEM WITH A CONTRAST CORRECTION LENS SYSTEM
- Publication number 20230207251
- Publication date Jun 29, 2023
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE PARTICLE BEAM SYSTEM WITH A MIRROR MODE OF OPERATION, METH...
- Publication number 20230170181
- Publication date Jun 1, 2023
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR REAL TIME STEREO IMAGING USING MULTIPLE ELE...
- Publication number 20230154723
- Publication date May 18, 2023
- ASML NETHERLANDS B.V.
- Yan REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM DEVICE HAVING A DEFLECTION UNIT
- Publication number 20220367142
- Publication date Nov 17, 2022
- CARL ZEISS MICROSCOPY GMBH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC FIELD FREE SAMPLE PLANE FOR CHARGED PARTICLE MICROSCOPE
- Publication number 20220199353
- Publication date Jun 23, 2022
- FEI Company
- Alexander Henstra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR LENS OPTIMIZATION OF FABRICATION
- Publication number 20220082733
- Publication date Mar 17, 2022
- Lumentum Operations LLC
- Richard F. CARSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING PLASMA PROCESSING APPARATUS, RELATED APPARATUS, A...
- Publication number 20220044912
- Publication date Feb 10, 2022
- Samsung Electronics Co., Ltd.
- Jeongil MUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20210233736
- Publication date Jul 29, 2021
- ASML Netherlands B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Height Measuring Device, Charged Particle Beam Apparatus, and Heigh...
- Publication number 20210207945
- Publication date Jul 8, 2021
- JEOL Ltd.
- Yukinori Aida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transmission Electron Microscope and Method of Controlling Same
- Publication number 20210151286
- Publication date May 20, 2021
- JEOL Ltd.
- Hirofumi Iijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE WITH COMPOSITE DETECTION SYSTEM AND SP...
- Publication number 20210066031
- Publication date Mar 4, 2021
- Focus-eBeam Technology (Beijing) Co., Ltd.
- Shuai LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR OPERATING A CHARGED PARTICLE DEVICE WITH MULT...
- Publication number 20200258714
- Publication date Aug 13, 2020
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Benjamin John Cook
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20200152412
- Publication date May 14, 2020
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Aberration Corrector and Charged Particle Beam Device
- Publication number 20190304739
- Publication date Oct 3, 2019
- JEOL Ltd.
- Shigeyuki Morishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
- Publication number 20190122858
- Publication date Apr 25, 2019
- NuFlare Technology, Inc.
- Takahito NAKAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
- Publication number 20190122859
- Publication date Apr 25, 2019
- NuFlare Technology, Inc.
- Takahito NAKAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
A CORRECTOR STRUCTURE AND A METHOD FOR CORRECTING ABERRATION OF AN...
- Publication number 20190096629
- Publication date Mar 28, 2019
- National University of Singapore
- Anjam Khursheed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR LENS OPTIMIZATION OF FABRICATION
- Publication number 20180172885
- Publication date Jun 21, 2018
- TriLumina Corp
- Richard F. CARSON
- G02 - OPTICS
Information Patent Application
Image Capture Assembly and Method for Electron Back Scatter Diffrac...
- Publication number 20180166253
- Publication date Jun 14, 2018
- VG Systems Limited
- Zoran PESIC
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MONOCHROMATOR AND CHARGED PARTICLE BEAM APPARATUS COMPRISING THE SAME
- Publication number 20180114672
- Publication date Apr 26, 2018
- Korea Research Institute of Standards and Science
- Takashi OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR LENS OPTIMIZATION OF FABRICATION
- Publication number 20170299781
- Publication date Oct 19, 2017
- TriLumina Corp
- Richard F. CARSON
- G02 - OPTICS
Information Patent Application
Method and System for Charge Control for Imaging Floating Metal Str...
- Publication number 20170287675
- Publication date Oct 5, 2017
- KLA-Tencor Corporation
- Arjun Hegde
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SECONDARY PARTICLE DETECTION SYSTEM OF SCANNING ELECTRON MICROSCOPE
- Publication number 20170271124
- Publication date Sep 21, 2017
- NGR Inc.
- Sumio SASAKI
- H01 - BASIC ELECTRIC ELEMENTS

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and system of image-forming multi-electron beams

Systems and methods for real time stereo imaging using multiple ele...

Apparatus of plural charged-particle beams

Height measuring device, charged particle beam apparatus, and heigh...

Method of forming plasma processing apparatus, related apparatus, a...

Apparatus of plural charged-particle beams

Magnetic field free sample plane for charged particle microscope

Semiconductor lens optimization of fabrication

Scanning electron microscope with composite detection system and sp...

Transmission electron microscope and method of controlling same

Charged particle beam writing apparatus and charged particle beam w...

Apparatus of plural charged-particle beams

Aberration corrector and charged particle beam device

Device and method for operating a charged particle device with mult...

Image capture assembly and method for electron back scatter diffrac...

Monochromator and charged particle beam apparatus comprising the same

Charged particle beam writing apparatus and charged particle beam w...

Secondary particle detection system of scanning electron microscope

Method and system for charge control for imaging floating metal str...

Method for inspecting a specimen and charged particle multi-beam de...

Apparatus of plural charged-particle beams

Charged particle beam device

Method and apparatus for inspection of scattered hot spot areas on...

Focused ion beam apparatus

Charged particle beam apparatus

Charged particle beam apparatus

Particle beam apparatus and method for operating a particle beam ap...

Semiconductor lens optimization of fabrication

In-situ spatially resolved plasma monitoring by using optical emiss...

Micro stage for particle beam column using piezo elements as actuator

Patents Applicationslast 30 patents

MAGNETIC LENSES, CHARGED PARTICLE MICROSCOPE SYSTEMS INCLUDING THE...

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

METHOD AND SYSTEM OF IMAGE-FORMING MULTI-ELECTRON BEAMS

CHARGED PARTICLE BEAM DEVICE

Creating Multiple Electron Beams with a Photocathode Film

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

MULTI-ELECTRON BEAM WRITING APPARATUS AND MULTI-ELECTRON BEAM WRITI...

MULTIPLE PARTICLE BEAM SYSTEM WITH A CONTRAST CORRECTION LENS SYSTEM

MULTIPLE PARTICLE BEAM SYSTEM WITH A MIRROR MODE OF OPERATION, METH...

SYSTEMS AND METHODS FOR REAL TIME STEREO IMAGING USING MULTIPLE ELE...

PARTICLE BEAM DEVICE HAVING A DEFLECTION UNIT

MAGNETIC FIELD FREE SAMPLE PLANE FOR CHARGED PARTICLE MICROSCOPE

SEMICONDUCTOR LENS OPTIMIZATION OF FABRICATION

METHOD OF FORMING PLASMA PROCESSING APPARATUS, RELATED APPARATUS, A...

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

Height Measuring Device, Charged Particle Beam Apparatus, and Heigh...

Transmission Electron Microscope and Method of Controlling Same

SCANNING ELECTRON MICROSCOPE WITH COMPOSITE DETECTION SYSTEM AND SP...

DEVICE AND METHOD FOR OPERATING A CHARGED PARTICLE DEVICE WITH MULT...

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

Aberration Corrector and Charged Particle Beam Device

CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...

CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...

A CORRECTOR STRUCTURE AND A METHOD FOR CORRECTING ABERRATION OF AN...

SEMICONDUCTOR LENS OPTIMIZATION OF FABRICATION

Image Capture Assembly and Method for Electron Back Scatter Diffrac...

MONOCHROMATOR AND CHARGED PARTICLE BEAM APPARATUS COMPRISING THE SAME

SEMICONDUCTOR LENS OPTIMIZATION OF FABRICATION

Method and System for Charge Control for Imaging Floating Metal Str...

SECONDARY PARTICLE DETECTION SYSTEM OF SCANNING ELECTRON MICROSCOPE