Liquid Source Chemical Depostion

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CPC
Y10S427/101

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YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10USPC classification Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10S427/00Coating processes

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Y10S427/101Liquid Source Chemical Depostion

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Patents Grantslast 30 patents

Information Patent Grant
Carbon nanopipes and ductwork with nanometric walls and methods of...
- Patent number 9,017,780
- Issue date Apr 28, 2015
- The United States of America, as represented by the Secretary of the Navy
- Justin C Lytle
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Method for producing conducting and transparent films from combined...
- Patent number 8,871,296
- Issue date Oct 28, 2014
- Nanotek Instruments, Inc.
- Aruna Zhamu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Methods of making carbon nanopipes and ductwork with nanometric walls
- Patent number 8,475,698
- Issue date Jul 2, 2013
- The United States of America, as represented by the Secretary of the Navy
- Justin C Lytle
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Methods of depositing materials over substrates, and methods of for...
- Patent number 7,794,787
- Issue date Sep 14, 2010
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of depositing materials over substrates, and methods of for...
- Patent number 7,544,388
- Issue date Jun 9, 2009
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporizing fluidized organic materials
- Patent number 7,238,389
- Issue date Jul 3, 2007
- Eastman Kodak Company
- Michael Long
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of depositing materials over substrates, and methods of for...
- Patent number 7,048,968
- Issue date May 23, 2006
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composition and method for forming doped A-site deficient thin-film...
- Patent number 7,029,724
- Issue date Apr 18, 2006
- Advanced Technology Materials, Inc.
- Thomas H. Baum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming ruthenium and ruthenium oxide films on a semicond...
- Patent number 6,844,261
- Issue date Jan 18, 2005
- Micron Technology, Inc.
- Eugene P. Marsh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Forming ferroelectric Pb(Zr,Ti)O3 films
- Patent number 6,730,354
- Issue date May 4, 2004
- Agilent Technologies, Inc.
- Stephen R. Gilbert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
MOCVD of SBT using toluene-based solvent system for precursor delivery
- Patent number 6,660,331
- Issue date Dec 9, 2003
- Advanced Technology Materials, Inc.
- Bryan C. Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Indium source reagent composition, and use thereof for deposition o...
- Patent number 6,602,549
- Issue date Aug 5, 2003
- Advanced Technology Materials, Inc.
- Thomas H. Baum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dielectric films with low dielectric constants
- Patent number 6,576,345
- Issue date Jun 10, 2003
- Patrick A. Van Cleemput
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Indium source reagent compositions, and use thereof for deposition...
- Patent number 6,559,328
- Issue date May 6, 2003
- Advanced Technology Materials, Inc.
- Thomas H. Baum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solvated ruthenium precursors for direct liquid injection of ruthen...
- Patent number 6,541,067
- Issue date Apr 1, 2003
- Micron Technology, Inc.
- Eugene P. Marsh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Misted precursor deposition apparatus and method with improved mist...
- Patent number 6,383,555
- Issue date May 7, 2002
- Symetrix Corporation
- Shinichiro Hayashi
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for making an optical recording medium and an optical record...
- Patent number 6,355,311
- Issue date Mar 12, 2002
- Victor Company of Japan Ltd.
- Kouji Tsujita
- G11 - INFORMATION STORAGE
Information Patent Grant
MOCVD of SBT using toluene based solvent system for precursor delivery
- Patent number 6,340,386
- Issue date Jan 22, 2002
- Advanced Technology Materials, Inc.
- Bryan C. Hendrix
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Indium source reagent compositions, and use thereof for deposition...
- Patent number 6,204,402
- Issue date Mar 20, 2001
- Advanced Technology Materials, Inc.
- Thomas H. Baum
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Fluidized bed coating process with liquid reagent
- Patent number 6,187,379
- Issue date Feb 13, 2001
- Georgia Tech Research Corporation
- Walter J. Lackey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition for titanium metal thin film
- Patent number 6,169,031
- Issue date Jan 2, 2001
- National Science Council
- Chi-Young Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High dielectric constant thin film structure, method for forming hi...
- Patent number 6,165,556
- Issue date Dec 26, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Takaaki Kawahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Misted precursor deposition apparatus and method with improved mist...
- Patent number 6,143,063
- Issue date Nov 7, 2000
- Symetrix Corporation
- Shinichiro Hayashi
- C30 - CRYSTAL GROWTH
Information Patent Grant
Liquid material supply apparatus and method
- Patent number 6,126,994
- Issue date Oct 3, 2000
- Tokyo Electron Limited
- Seishi Murakami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions and method for forming doped A-site deficient thin-fil...
- Patent number 6,117,571
- Issue date Sep 12, 2000
- Advanced Technology Materials, Inc.
- Thomas H. Baum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lewis base adducts of anhydrous mononuclear tris(.beta.-diketonate)...
- Patent number 6,111,124
- Issue date Aug 29, 2000
- Advanced Technology Materials, Inc.
- Thomas H. Baum
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
High dielectric constant thin film structure, method for forming hi...
- Patent number 6,101,085
- Issue date Aug 8, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Takaaki Kawahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High dielectric constant thin film structure, method for forming hi...
- Patent number 5,989,635
- Issue date Nov 23, 1999
- Mitsubishi Denki Kabushiki Kaisha
- Takaaki Kawahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Misted deposition method of fabricating integrated circuits
- Patent number 5,888,583
- Issue date Mar 30, 1999
- Symetrix Corporation
- Larry D. McMillan
- C30 - CRYSTAL GROWTH
Information Patent Grant
High dielectric constant thin film structure method for forming hig...
- Patent number 5,834,060
- Issue date Nov 10, 1998
- Mitsubishi Denki Kabushiki Kaisha
- Takaaki Kawahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method for producing conducting and transparent films from combined...
- Publication number 20140272172
- Publication date Sep 18, 2014
- Aruna Zhamu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Carbon nanopipes and ductwork with nanometric walls and methods of...
- Publication number 20130115840
- Publication date May 9, 2013
- The Government of the United States of America as represented by the Secretar...
- Justin C. Lytle
- B82 - NANO-TECHNOLOGY
Information Patent Application
Methods of Depositing Materials Over Substrates, and Methods of For...
- Publication number 20090215252
- Publication date Aug 27, 2009
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Carbon nanopipes and ductwork with nanometric walls and methods of...
- Publication number 20090047452
- Publication date Feb 19, 2009
- THE GOVERNMENT OF THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETA...
- Justin C. Lytle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods of depositing materials over substrates, and methods of for...
- Publication number 20060222770
- Publication date Oct 5, 2006
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vaporizing fluidized organic materials
- Publication number 20050208220
- Publication date Sep 22, 2005
- Eastman Kodak Company
- Michael Long
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods of depositing materials over substrates, and methods of for...
- Publication number 20050042374
- Publication date Feb 24, 2005
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Forming ferroelectric Pb (Zr, Ti)O3 films
- Publication number 20030091740
- Publication date May 15, 2003
- Stephen R. Gilbert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Solvated ruthenium precursors for direct liquid injection of ruthen...
- Publication number 20030092262
- Publication date May 15, 2003
- Eugene P. Marsh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOCVD of SBT using toluene-based solvent system for precursor delivery
- Publication number 20020068129
- Publication date Jun 6, 2002
- Bryan C. Hendrix
- C07 - ORGANIC CHEMISTRY
Information Patent Application
Indium source reagent compositions, and use thereof for deposition...
- Publication number 20010021785
- Publication date Sep 13, 2001
- Advanced Technology Materials, Inc.
- Thomas H. Baum
- C07 - ORGANIC CHEMISTRY

Liquid Source Chemical Depostion

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Carbon nanopipes and ductwork with nanometric walls and methods of...

Method for producing conducting and transparent films from combined...

Methods of making carbon nanopipes and ductwork with nanometric walls

Methods of depositing materials over substrates, and methods of for...

Methods of depositing materials over substrates, and methods of for...

Vaporizing fluidized organic materials

Methods of depositing materials over substrates, and methods of for...

Composition and method for forming doped A-site deficient thin-film...

Method of forming ruthenium and ruthenium oxide films on a semicond...

Forming ferroelectric Pb(Zr,Ti)O3 films

MOCVD of SBT using toluene-based solvent system for precursor delivery

Indium source reagent composition, and use thereof for deposition o...

Dielectric films with low dielectric constants

Indium source reagent compositions, and use thereof for deposition...

Solvated ruthenium precursors for direct liquid injection of ruthen...

Misted precursor deposition apparatus and method with improved mist...

Method for making an optical recording medium and an optical record...

MOCVD of SBT using toluene based solvent system for precursor delivery

Indium source reagent compositions, and use thereof for deposition...

Fluidized bed coating process with liquid reagent

Chemical vapor deposition for titanium metal thin film

High dielectric constant thin film structure, method for forming hi...

Misted precursor deposition apparatus and method with improved mist...

Liquid material supply apparatus and method

Compositions and method for forming doped A-site deficient thin-fil...

Lewis base adducts of anhydrous mononuclear tris(.beta.-diketonate)...

High dielectric constant thin film structure, method for forming hi...

High dielectric constant thin film structure, method for forming hi...

Misted deposition method of fabricating integrated circuits

High dielectric constant thin film structure method for forming hig...

Patents Applicationslast 30 patents

Method for producing conducting and transparent films from combined...

Carbon nanopipes and ductwork with nanometric walls and methods of...

Methods of Depositing Materials Over Substrates, and Methods of For...

Carbon nanopipes and ductwork with nanometric walls and methods of...

Methods of depositing materials over substrates, and methods of for...

Vaporizing fluidized organic materials

Methods of depositing materials over substrates, and methods of for...

Forming ferroelectric Pb (Zr, Ti)O3 films

Solvated ruthenium precursors for direct liquid injection of ruthen...

MOCVD of SBT using toluene-based solvent system for precursor delivery

Indium source reagent compositions, and use thereof for deposition...