Localised processing

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CPC
H01J37/32366

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/32366Localised processing

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Programmable plasma ignition profiles
- Patent number 12,074,008
- Issue date Aug 27, 2024
- Advanced Energy Industries, Inc.
- Mike Armstrong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Digital control of plasma processing
- Patent number 12,068,134
- Issue date Aug 20, 2024
- Applied Materials, Inc.
- Vladimir Nagorny
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching method and plasma etching apparatus
- Patent number 12,062,522
- Issue date Aug 13, 2024
- Tokyo Electron Limited
- Keiji Kitagaito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Faceplate with localized flow control
- Patent number 12,020,907
- Issue date Jun 25, 2024
- Applied Materials, Inc.
- Arun Thottappayil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for analyzing a defect of a photolithographic mas...
- Patent number 11,733,186
- Issue date Aug 22, 2023
- Carl Zeiss SMT GmbH
- Gabriel Baralia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for a plasma enhanced deposition of material on...
- Patent number 11,725,278
- Issue date Aug 15, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kun-Mo Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Programmable ignition profiles for enhanced plasma ignition
- Patent number 11,688,584
- Issue date Jun 27, 2023
- Advanced Energy Industries, Inc.
- Mike Armstrong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for sterilising an instrument channel of a surgical scopi...
- Patent number 11,541,140
- Issue date Jan 3, 2023
- Creo Medical Limited
- Christopher Paul Hancock
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Low temperature atmospheric pressure plasma for cleaning and activa...
- Patent number 11,518,082
- Issue date Dec 6, 2022
- Surfx Technologies LLC
- Siu Fai Cheng
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Radio frequency ground system and method
- Patent number 11,443,921
- Issue date Sep 13, 2022
- Applied Materials, Inc.
- Gaosheng Fu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 11,398,372
- Issue date Jul 26, 2022
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Shogo Okita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Container, apparatus and method for handling an implant
- Patent number 11,382,732
- Issue date Jul 12, 2022
- NOVA PLASMA LTD.
- Amnon Lam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching method and plasma etching apparatus
- Patent number 11,355,352
- Issue date Jun 7, 2022
- Tokyo Electron Limited
- Keiji Kitagaito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma source and surface treatment method
- Patent number 11,352,696
- Issue date Jun 7, 2022
- Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Yves Lodewijk Maria Creyghton
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam etching utilizing cryogenic wafer temperatures
- Patent number 11,289,306
- Issue date Mar 29, 2022
- Lam Research Corporation
- Thorsten Lill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Proximity contact cover ring for plasma dicing
- Patent number 11,195,756
- Issue date Dec 7, 2021
- Applied Materials, Inc.
- James M. Holden
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Support unit, apparatus and method for treating a substrate
- Patent number 11,127,573
- Issue date Sep 21, 2021
- Semes Co., Ltd.
- Doo Ho Lim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for treating an object with plasma
- Patent number 11,075,057
- Issue date Jul 27, 2021
- Plasma-Therm LLC
- Gilles Baujon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Loadlock integrated bevel etcher system
- Patent number 11,031,262
- Issue date Jun 8, 2021
- Applied Materials, Inc.
- Saptarshi Basu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for analysing a defect of a photolithographic mas...
- Patent number 10,983,075
- Issue date Apr 20, 2021
- Carl Zeiss SMT GmbH
- Gabriel Baralia
- G01 - MEASURING TESTING
Information Patent Grant
Plasma etching method
- Patent number 10,854,430
- Issue date Dec 1, 2020
- Tokyo Electron Limited
- Takayuki Katsunuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film deposition method and film deposition apparatus
- Patent number 10,844,487
- Issue date Nov 24, 2020
- Tokyo Electron Limited
- Yutaka Takahashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stand alone microfluidic analytical chip device
- Patent number 10,832,895
- Issue date Nov 10, 2020
- Plasmotica, LLC
- Nedal Saleh
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Systems and methods for controlling directionality of ions in an ed...
- Patent number 10,825,656
- Issue date Nov 3, 2020
- Lam Research Corporation
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Directional treatment for multi-dimensional device processing
- Patent number 10,825,665
- Issue date Nov 3, 2020
- Applied Materials, Inc.
- Ludovic Godet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low temperature atmospheric pressure plasma for cleaning and activa...
- Patent number 10,800,092
- Issue date Oct 13, 2020
- Surfx Technologies LLC
- Siu Fai Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma-activated saline solutions and method of making plasma activ...
- Patent number 10,770,271
- Issue date Sep 8, 2020
- U.S. Patent Innovations LLC
- Jerome Canady
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching method and plasma etching apparatus
- Patent number 10,707,091
- Issue date Jul 7, 2020
- Tokyo Electron Limited
- Keiji Kitagaito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing method
- Patent number 10,665,431
- Issue date May 26, 2020
- Tokyo Electron Limited
- Kazuyuki Tezuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Optical element
- Patent number 10,656,307
- Issue date May 19, 2020
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Ulrike Schulz
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF PATTERNING A TARGET LAYER, APPARATUS FOR PATTERNING A TAR...
- Publication number 20250046577
- Publication date Feb 6, 2025
- ASML NETHERLANDS B.V.
- Syam Parayil VENUGOPALAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REMOVABLE MASK LAYER TO REDUCE OVERHANG DURING RE-SPUTTER PROCESS I...
- Publication number 20240249920
- Publication date Jul 25, 2024
- Applied Materials, Inc.
- Wenting HOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESIN SURFACE HYDROPHILIZATION METHOD, PLASMA PROCESSING DEVICE, LA...
- Publication number 20230365769
- Publication date Nov 16, 2023
- komiyama electron corp.
- Haruo HASHIGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTICELL OR MULTIARRAY PLASMA AND METHOD FOR SURFACE TREATMENT USI...
- Publication number 20230360888
- Publication date Nov 9, 2023
- INSTITUT SYSTÉMES INDUSTRIELS, HAUTE ECOLE DE SUISSE OCCIDENTALE, VALAIS-WALL...
- Fritz BIRCHER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAINTENANCE FOR REMOTE PLASMA SOURCES
- Publication number 20230360887
- Publication date Nov 9, 2023
- Advanced Energy Industries, Inc.
- Scott Polak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Programmable Plasma Ignition Profiles
- Publication number 20230290612
- Publication date Sep 14, 2023
- Advanced Energy Industries, Inc.
- Mike Armstrong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR PRODUCING LAYERS WITH IMPROVED UNIFORMITY IN...
- Publication number 20230067917
- Publication date Mar 2, 2023
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Michael VERGÖHL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WIDE-GAP SEMICONDUCTOR SUBSTRATE, APPARATUS FOR MANUFACTURING WIDE-...
- Publication number 20220416021
- Publication date Dec 29, 2022
- SPP TECHNOLOGIES CO., LTD.
- Takashi YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESIN SURFACE HYDROPHILIZATION METHOD, PLASMA PROCESSING DEVICE, LA...
- Publication number 20220315721
- Publication date Oct 6, 2022
- komiyama electron corp.
- Haruo HASHIGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
- Publication number 20220262646
- Publication date Aug 18, 2022
- TOKYO ELECTRON LIMITED
- Keiji KITAGAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RADIO FREQUENCY GROUND SYSTEM AND METHOD
- Publication number 20210391147
- Publication date Dec 16, 2021
- Applied Materials, Inc.
- Gaosheng FU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROGRAMMABLE IGNITION PROFILES FOR ENHANCED PLASMA IGNITION
- Publication number 20210343505
- Publication date Nov 4, 2021
- Advanced Energy Industries, Inc.
- Mike Armstrong
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
VISIBLE IMAGE UNIT IDENTIFICATION CODE STRUCTURE
- Publication number 20210265133
- Publication date Aug 26, 2021
- BURTON INC.
- Hidei KIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR ANALYSING A DEFECT OF A PHOTOLITHOGRAPHIC MAS...
- Publication number 20210247336
- Publication date Aug 12, 2021
- Carl Zeiss SMT GMBH
- Gabriel Baralia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM OF SENSITIZING CANCER CELLS TO CHEMICAL TREATMENT...
- Publication number 20210213297
- Publication date Jul 15, 2021
- THE GEORGE WASHINGTON UNIVERSITY
- Dayun Yan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200312681
- Publication date Oct 1, 2020
- ASM IP HOLDING B.V.
- Koji TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
- Publication number 20200294812
- Publication date Sep 17, 2020
- TOKYO ELECTRON LIMITED
- Keiji KITAGAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAINTENANCE FOR REMOTE PLASMA SOURCES
- Publication number 20200266037
- Publication date Aug 20, 2020
- Advanced Energy Industries, Inc.
- Scott Polak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOADLOCK INTEGRATED BEVEL ETCHER SYSTEM
- Publication number 20200234982
- Publication date Jul 23, 2020
- Applied Materials, Inc.
- Saptarshi BASU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems And Methods For Controlling Directionality Of Ions In An Ed...
- Publication number 20200227238
- Publication date Jul 16, 2020
- LAM RESEARCH CORPORATION
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORT UNIT, APPARATUS AND METHOD FOR TREATING A SUBSTRATE
- Publication number 20200194241
- Publication date Jun 18, 2020
- SEMES CO., LTD.
- DOO HO LIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR A PLASMA ENHANCED DEPOSITION OF MATERIAL ON...
- Publication number 20200123656
- Publication date Apr 23, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kun-Mo LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTAINER, APPARATUS AND METHOD FOR HANDLING AN IMPLANT
- Publication number 20190374327
- Publication date Dec 12, 2019
- NOVA PLASMA LTD.
- Amnon LAM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING SYSTEM, ELECTRON BEAM GENERATOR, AND METHOD OF FA...
- Publication number 20190279846
- Publication date Sep 12, 2019
- Samsung Electronics Co., Ltd.
- YEONGKWANG LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma-Activated Saline Solutions And Method of Making Plasma Activ...
- Publication number 20190279849
- Publication date Sep 12, 2019
- U.S. Patent Innovations LLC
- Jerome Canady
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
Optical Element
- Publication number 20190179056
- Publication date Jun 13, 2019
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Ulrike Schulz
- G02 - OPTICS
Information Patent Application
PLASMA PROCESSING SYSTEM, ELECTRON BEAM GENERATOR, AND METHOD OF FA...
- Publication number 20190122860
- Publication date Apr 25, 2019
- Samsung Electronics Co., Ltd.
- YEONGKWANG LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
- Publication number 20190088497
- Publication date Mar 21, 2019
- TOKYO ELECTRON LIMITED
- Keiji KITAGAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems And Methods For Controlling Directionality Of Ions In An Ed...
- Publication number 20190057839
- Publication date Feb 21, 2019
- LAM RESEARCH CORPORATION
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLING A PLASMA PROCESS
- Publication number 20180342375
- Publication date Nov 29, 2018
- Applied Materials, Inc.
- Andrew NGUYEN
- H01 - BASIC ELECTRIC ELEMENTS

Localised processing

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Programmable plasma ignition profiles

Digital control of plasma processing

Plasma etching method and plasma etching apparatus

Faceplate with localized flow control

Device and method for analyzing a defect of a photolithographic mas...

Systems and methods for a plasma enhanced deposition of material on...

Programmable ignition profiles for enhanced plasma ignition

Apparatus for sterilising an instrument channel of a surgical scopi...

Low temperature atmospheric pressure plasma for cleaning and activa...

Radio frequency ground system and method

Plasma processing apparatus and plasma processing method

Container, apparatus and method for handling an implant

Plasma etching method and plasma etching apparatus

Plasma source and surface treatment method

Ion beam etching utilizing cryogenic wafer temperatures

Proximity contact cover ring for plasma dicing

Support unit, apparatus and method for treating a substrate

Device for treating an object with plasma

Loadlock integrated bevel etcher system

Device and method for analysing a defect of a photolithographic mas...

Plasma etching method

Film deposition method and film deposition apparatus

Stand alone microfluidic analytical chip device

Systems and methods for controlling directionality of ions in an ed...

Directional treatment for multi-dimensional device processing

Low temperature atmospheric pressure plasma for cleaning and activa...

Plasma-activated saline solutions and method of making plasma activ...

Plasma etching method and plasma etching apparatus

Processing method

Optical element

Patents Applicationslast 30 patents

METHOD OF PATTERNING A TARGET LAYER, APPARATUS FOR PATTERNING A TAR...

REMOVABLE MASK LAYER TO REDUCE OVERHANG DURING RE-SPUTTER PROCESS I...

RESIN SURFACE HYDROPHILIZATION METHOD, PLASMA PROCESSING DEVICE, LA...

MULTICELL OR MULTIARRAY PLASMA AND METHOD FOR SURFACE TREATMENT USI...

MAINTENANCE FOR REMOTE PLASMA SOURCES

Programmable Plasma Ignition Profiles

DEVICE AND METHOD FOR PRODUCING LAYERS WITH IMPROVED UNIFORMITY IN...

WIDE-GAP SEMICONDUCTOR SUBSTRATE, APPARATUS FOR MANUFACTURING WIDE-...

RESIN SURFACE HYDROPHILIZATION METHOD, PLASMA PROCESSING DEVICE, LA...

PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS

RADIO FREQUENCY GROUND SYSTEM AND METHOD

PROGRAMMABLE IGNITION PROFILES FOR ENHANCED PLASMA IGNITION

VISIBLE IMAGE UNIT IDENTIFICATION CODE STRUCTURE

DEVICE AND METHOD FOR ANALYSING A DEFECT OF A PHOTOLITHOGRAPHIC MAS...

METHOD AND SYSTEM OF SENSITIZING CANCER CELLS TO CHEMICAL TREATMENT...

SUBSTRATE PROCESSING APPARATUS

PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS

MAINTENANCE FOR REMOTE PLASMA SOURCES

LOADLOCK INTEGRATED BEVEL ETCHER SYSTEM

Systems And Methods For Controlling Directionality Of Ions In An Ed...

SUPPORT UNIT, APPARATUS AND METHOD FOR TREATING A SUBSTRATE

SYSTEMS AND METHODS FOR A PLASMA ENHANCED DEPOSITION OF MATERIAL ON...

CONTAINER, APPARATUS AND METHOD FOR HANDLING AN IMPLANT

PLASMA PROCESSING SYSTEM, ELECTRON BEAM GENERATOR, AND METHOD OF FA...

Plasma-Activated Saline Solutions And Method of Making Plasma Activ...

Optical Element

PLASMA PROCESSING SYSTEM, ELECTRON BEAM GENERATOR, AND METHOD OF FA...

PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS

Systems And Methods For Controlling Directionality Of Ions In An Ed...

APPARATUS AND METHOD FOR CONTROLLING A PLASMA PROCESS