low pressure

Industry

CPC
F16C2300/62

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

FMECHANICAL ENGINEERING LIGHTING HEATING WEAPONS BLASTING ENGINES OR PUMPS F16Engineering elements F16CSHAFTS FLEXIBLE SHAFTS ELEMENTS OR CRANKSHAFT MECHANISMS ROTARY BODIES OTHER THAN GEARING ELEMENTS BEARINGS F16C2300/00Application independent of particular apparatuses

Current Industry

F16C2300/62low pressure

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Device and vacuum chamber
- Patent number 11,384,791
- Issue date Jul 12, 2022
- Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V.
- Wolfgang Braun
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Lubrication system and a method for lubricating a transmission syst...
- Patent number 10,837,540
- Issue date Nov 17, 2020
- Applied Materials Israel Ltd.
- Erez Admoni
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Vacuum nose roll
- Patent number 10,781,046
- Issue date Sep 22, 2020
- Kimberly-Clark Worldwide, Inc.
- Richard M. Konetzke
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Solid lubricant and solid-lubrication rolling bearing
- Patent number 10,760,616
- Issue date Sep 1, 2020
- NTN Corporation
- Hisanori Aiga
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Device for improving the vacuum in the housing of a machine
- Patent number 10,563,644
- Issue date Feb 18, 2020
- Messer Industriegase GmbH
- Thomas Kutz
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Method and a device for depositing a film of material or otherwise...
- Patent number 10,501,850
- Issue date Dec 10, 2019
- New Way Machine Components, Inc.
- Andrew J. Devitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetic fluid seal
- Patent number 10,378,587
- Issue date Aug 13, 2019
- EAGLEBURGMANN JAPAN CO., LTD.
- Kazuhiko Sato
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Bearing testing apparatus and method
- Patent number 10,288,525
- Issue date May 14, 2019
- HYPERLOOP TECHNOLOGIES, INC.
- Jett Ferm
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Vacuum apparatus of rotary motion entry
- Patent number 8,146,923
- Issue date Apr 3, 2012
- Industrial Technology Research Institute
- Kuan-Chou Chen
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Method and apparatus for in-line processing and immediately sequent...
- Patent number 8,123,868
- Issue date Feb 28, 2012
- New Way Machine Components, Inc.
- Andrew J. Devitt
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Positioning apparatus
- Patent number 8,021,485
- Issue date Sep 20, 2011
- NSK Ltd.
- Tsuyoshi Nakamura
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Straight conveying device for vacuum
- Patent number 7,891,932
- Issue date Feb 22, 2011
- SMC Corporation
- Soichi Sato
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Apparatus comprising a rotating contaminant trap
- Patent number 7,889,312
- Issue date Feb 15, 2011
- ASML Netherlands B.V.
- Johannes Christiaan Leonardus Franken
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Supporting apparatus, exposure apparatus, and device manufacturing...
- Patent number 7,817,251
- Issue date Oct 19, 2010
- Canon Kabushiki Kaisha
- Atsushi Kimura
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Static-pressure gas bearing mechanism
- Patent number 7,802,920
- Issue date Sep 28, 2010
- SMC Corporation
- Soichi Sato
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Moving vacuum chamber stage with air bearing and differentially pum...
- Patent number 7,394,076
- Issue date Jul 1, 2008
- New Way Machine Components, Inc.
- Andrew J. Devitt
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Exhaust apparatus and control method for same, and vacuum-use hydro...
- Patent number 7,284,906
- Issue date Oct 23, 2007
- Canon Kabushiki Kaisha
- Keiji Emoto
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Hydrostatic bearing and stage apparatus using same
- Patent number 7,232,257
- Issue date Jun 19, 2007
- Canon Kabushiki Kaisha
- Choshoku Sai
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Static gas bearing system, stage mechanism, exposure apparatus, and...
- Patent number 7,207,720
- Issue date Apr 24, 2007
- Canon Kabushiki Kaisha
- Choshoku Sai
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Hydrostatic gas bearing, hydrostatic gas bearing device for use in...
- Patent number 7,189,002
- Issue date Mar 13, 2007
- Toto Ltd.
- Shinji Shinohara
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Liner motion device, rolling device and separator for rolling device
- Patent number 7,188,542
- Issue date Mar 13, 2007
- NSK Ltd.
- Toshikazu Yabe
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Alignment apparatus and exposure apparatus
- Patent number 7,154,588
- Issue date Dec 26, 2006
- Canon Kabushiki Kaisha
- Keiji Emoto
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Differential pumping seal apparatus
- Patent number 7,134,668
- Issue date Nov 14, 2006
- Ebara Corporation
- Hiroyuki Shinozaki
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Chamber, exposure apparatus, and device manufacturing method
- Patent number 7,078,706
- Issue date Jul 18, 2006
- Canon Kabushiki Kaisha
- Eiji Sakamoto
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Positioning apparatus
- Patent number 7,059,607
- Issue date Jun 13, 2006
- NSK Ltd.
- Tsuyoshi Nakamura
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Alignment apparatus and exposure apparatus
- Patent number 7,053,982
- Issue date May 30, 2006
- Canon Kabushiki Kaisha
- Keiji Emoto
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Hydrostatic gas bearing, hydrostatic gas bearing device for use in...
- Patent number 7,052,182
- Issue date May 30, 2006
- Toto Ltd.
- Shinji Shinohara
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Stage system, exposure apparatus, and device manufacturing method
- Patent number 6,989,888
- Issue date Jan 24, 2006
- Canon Kabushiki Kaisha
- Kotaro Akutsu
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Positioning apparatus
- Patent number 6,954,009
- Issue date Oct 11, 2005
- NSK Ltd.
- Tsuyoshi Nakamura
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Positioning device
- Patent number 6,888,619
- Issue date May 3, 2005
- David Trost
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
JOINT FOR A DEVICE MOVEABLE IN VACUUM, MECHANISM FOR MOVING A DEVIC...
- Publication number 20230323913
- Publication date Oct 12, 2023
- Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
- Wolfang Braun
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
DEVICE AND VACUUM CHAMBER
- Publication number 20210372469
- Publication date Dec 2, 2021
- Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
- Wolfgang Braun
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Vacuum Nose Roll
- Publication number 20190308815
- Publication date Oct 10, 2019
- Richard M. Konetzke
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
DEVICE FOR IMPROVING THE VACUUM IN THE HOUSING OF A MACHINE
- Publication number 20170306940
- Publication date Oct 26, 2017
- Messer Industriegase GmbH
- Thomas Kutz
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
PROTECTIVE BEARING, BEARING UNIT, AND VACUUM PUMP
- Publication number 20160312826
- Publication date Oct 27, 2016
- EDWARDS JAPAN LIMITED
- Toshiaki Kawashima
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
APPARATUS COMPRISING A ROTATING CONTAMINANT TRAP
- Publication number 20110096308
- Publication date Apr 28, 2011
- ASML NETHERLANDS B.V.
- Johannes Christiaan Leonardus FRANKEN
- B82 - NANO-TECHNOLOGY
Information Patent Application
VACUUM APPARATUS OF ROTARY MOTION ENTRY
- Publication number 20110079963
- Publication date Apr 7, 2011
- Industrial Technology Research Institute
- Kuan-Chou Chen
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
METHOD AND APPARATUS FOR IN-LINE PROCESSING AND IMMEDIATELY SEQUENT...
- Publication number 20100282271
- Publication date Nov 11, 2010
- New Way Machine Components, Inc.
- Andrew J. DEVITT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus comprising a rotating contaminant trap
- Publication number 20100259733
- Publication date Oct 14, 2010
- ASML NETHERLANDS B.V.
- Johannes Christiaan Franken
- B82 - NANO-TECHNOLOGY
Information Patent Application
STATIC PRESSURE SLIDER AND TRANSFERRING DEVICE AND PROCESSING DEVIC...
- Publication number 20100092113
- Publication date Apr 15, 2010
- KYOCERA CORPORATION
- Takeshi Muneishi
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Hydrostatic Slider
- Publication number 20090297075
- Publication date Dec 3, 2009
- KYOCERA CORPORATION
- Takeshi Muneishi
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
SUPPORTING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING...
- Publication number 20080074635
- Publication date Mar 27, 2008
- Canon Kabushiki Kaisha
- Atsushi Kimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STRAIGHT CONVEYING DEVICE FOR VACUUM
- Publication number 20070107739
- Publication date May 17, 2007
- SMC Corporation
- Soichi Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTI-MOMENT STATIC-PRESSURE GAS BEARING MECHANISM
- Publication number 20070110347
- Publication date May 17, 2007
- SMC Corporation
- Soichi Sato
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Method and apparatus for in-line processing and immediately sequent...
- Publication number 20070034228
- Publication date Feb 15, 2007
- Andrew J. Devitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and a device for depositing a film of material or otherwise...
- Publication number 20070031600
- Publication date Feb 8, 2007
- Andrew J. Devitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Alignment apparatus and exposure apparatus
- Publication number 20060187437
- Publication date Aug 24, 2006
- Canon Kabushiki Kaisha
- Keiji Emoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Air bearing compatible with operation in a vacuum
- Publication number 20060124864
- Publication date Jun 15, 2006
- Nikon Corporation
- Michael Reid Sogard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Hydrostatic gas bearing, hydrostatic gas bearing device for use in...
- Publication number 20060093244
- Publication date May 4, 2006
- Shinji Shinohara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Positioning apparatus
- Publication number 20060061042
- Publication date Mar 23, 2006
- NSK Ltd
- Tsuyoshi Nakamura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Moving vacuum chamber stage with air bearing and differentially pum...
- Publication number 20060060259
- Publication date Mar 23, 2006
- Andrew J. Devitt
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Liner motion device, rolling device and separator for rolling device
- Publication number 20050166695
- Publication date Aug 4, 2005
- NSK Ltd
- Toshikazu Yabe
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Static gas bearing system, stage mechanism, exposure apparatus, and...
- Publication number 20050129339
- Publication date Jun 16, 2005
- Canon Kabushiki Kaisha
- Choshoku Sai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage system, exposure apparatus, and device manufacturing method
- Publication number 20050018165
- Publication date Jan 27, 2005
- Canon Kabushiki Kaisha
- Kotaro Akutsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Chamber, exposure apparatus, and device manufacturing method
- Publication number 20050011581
- Publication date Jan 20, 2005
- Eiji Sakamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage apparatus, static pressure bearing apparatus, positioning met...
- Publication number 20050002012
- Publication date Jan 6, 2005
- Canon Kabushiki Kaisha
- Shigeo Sakino
- G11 - INFORMATION STORAGE
Information Patent Application
Alignment apparatus and exposure apparatus
- Publication number 20040246455
- Publication date Dec 9, 2004
- Canon Kabushiki Kaisha
- Keiji Emoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Positioning device
- Publication number 20040234361
- Publication date Nov 25, 2004
- NSK Ltd
- Tsuyoshi Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Positioning device
- Publication number 20040184020
- Publication date Sep 23, 2004
- David Trost
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Positioning apparatus
- Publication number 20040145119
- Publication date Jul 29, 2004
- NSK Ltd
- Tsuyoshi Nakamura
- H01 - BASIC ELECTRIC ELEMENTS

low pressure

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Device and vacuum chamber

Lubrication system and a method for lubricating a transmission syst...

Vacuum nose roll

Solid lubricant and solid-lubrication rolling bearing

Device for improving the vacuum in the housing of a machine

Method and a device for depositing a film of material or otherwise...

Magnetic fluid seal

Bearing testing apparatus and method

Vacuum apparatus of rotary motion entry

Method and apparatus for in-line processing and immediately sequent...

Positioning apparatus

Straight conveying device for vacuum

Apparatus comprising a rotating contaminant trap

Supporting apparatus, exposure apparatus, and device manufacturing...

Static-pressure gas bearing mechanism

Moving vacuum chamber stage with air bearing and differentially pum...

Exhaust apparatus and control method for same, and vacuum-use hydro...

Hydrostatic bearing and stage apparatus using same

Static gas bearing system, stage mechanism, exposure apparatus, and...

Hydrostatic gas bearing, hydrostatic gas bearing device for use in...

Liner motion device, rolling device and separator for rolling device

Alignment apparatus and exposure apparatus

Differential pumping seal apparatus

Chamber, exposure apparatus, and device manufacturing method

Positioning apparatus

Alignment apparatus and exposure apparatus

Hydrostatic gas bearing, hydrostatic gas bearing device for use in...

Stage system, exposure apparatus, and device manufacturing method

Positioning apparatus

Positioning device

Patents Applicationslast 30 patents

JOINT FOR A DEVICE MOVEABLE IN VACUUM, MECHANISM FOR MOVING A DEVIC...

DEVICE AND VACUUM CHAMBER

Vacuum Nose Roll

DEVICE FOR IMPROVING THE VACUUM IN THE HOUSING OF A MACHINE

PROTECTIVE BEARING, BEARING UNIT, AND VACUUM PUMP

APPARATUS COMPRISING A ROTATING CONTAMINANT TRAP

VACUUM APPARATUS OF ROTARY MOTION ENTRY

METHOD AND APPARATUS FOR IN-LINE PROCESSING AND IMMEDIATELY SEQUENT...

Apparatus comprising a rotating contaminant trap

STATIC PRESSURE SLIDER AND TRANSFERRING DEVICE AND PROCESSING DEVIC...

Hydrostatic Slider

SUPPORTING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING...

STRAIGHT CONVEYING DEVICE FOR VACUUM

ANTI-MOMENT STATIC-PRESSURE GAS BEARING MECHANISM

Method and apparatus for in-line processing and immediately sequent...

Method and a device for depositing a film of material or otherwise...

Alignment apparatus and exposure apparatus

Air bearing compatible with operation in a vacuum

Hydrostatic gas bearing, hydrostatic gas bearing device for use in...

Positioning apparatus

Moving vacuum chamber stage with air bearing and differentially pum...

Liner motion device, rolling device and separator for rolling device

Static gas bearing system, stage mechanism, exposure apparatus, and...

Stage system, exposure apparatus, and device manufacturing method

Chamber, exposure apparatus, and device manufacturing method

Stage apparatus, static pressure bearing apparatus, positioning met...

Alignment apparatus and exposure apparatus

Positioning device

Positioning device

Positioning apparatus