M-I-M cathode

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CPC
H01J2237/31783

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

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H01J2237/31783M-I-M cathode

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Patents Grantslast 30 patents

Information Patent Grant
Manufacturing method for emitter for electron-beam projection litho...
- Patent number 7,091,054
- Issue date Aug 15, 2006
- Samsung Electronics Co., Ltd.
- In-kyeong Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Emitter for electron-beam projection lithography system and manufac...
- Patent number 6,953,946
- Issue date Oct 11, 2005
- Samsung Electronics Co., Ltd.
- In-kyeong Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin-film electron emitter device having a multi-layer top electrod...
- Patent number 5,936,257
- Issue date Aug 10, 1999
- Hitachi, Ltd.
- Toshiaki Kusunoki
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Tunnel cathode mask for electron lithography and method for manufac...
- Patent number 4,601,971
- Issue date Jul 22, 1986
- Siemens Aktiengesellschaft
- Burkhard Lischke
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Emitter for electron-beam projection lithography system and manufac...
- Publication number 20050145835
- Publication date Jul 7, 2005
- SAMSUNG ELECTRONICS CO., LTD.
- In-kyeong Yoo
- B82 - NANO-TECHNOLOGY
Information Patent Application
Emitter for electron-beam projection lithography system and manufac...
- Publication number 20040178405
- Publication date Sep 16, 2004
- SAMSUNG ELECTRONICS CO., LTD.
- In-Keyong Yoo
- B82 - NANO-TECHNOLOGY