Magnetic means

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CPC
H01J2237/152

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/152Magnetic means

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Ribbon beam angle adjustment in an ion implantation system
- Patent number 12,170,182
- Issue date Dec 17, 2024
- Advanced Ion Beam Technology, Inc.
- Zhimin Wan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system of image-forming multi-electron beams
- Patent number 12,165,831
- Issue date Dec 10, 2024
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multipactor plasma ignition devices and techniques
- Patent number 11,915,916
- Issue date Feb 27, 2024
- Eric Benjamin Frederick Gilbert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Permeance magnetic assembly
- Patent number 11,854,776
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsung-Jen Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion gun and vacuum processing apparatus
- Patent number 11,810,748
- Issue date Nov 7, 2023
- Canon Anelva Corporation
- Tsutomu Hiroishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Supported X-ray horn for controlling e-beams
- Patent number 11,717,584
- Issue date Aug 8, 2023
- Fermi Research Alliance, LLC
- Thomas Kroc
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Arc source with confined magnetic field
- Patent number 11,578,401
- Issue date Feb 14, 2023
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Siegfried Krassnitzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion gun and vacuum processing apparatus
- Patent number 11,521,822
- Issue date Dec 6, 2022
- Canon Anelva Corporation
- Tsutomu Hiroishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Permeance magnetic assembly
- Patent number 11,488,814
- Issue date Nov 1, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsung-Jen Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electron beam system for inspection and review of 3D devices
- Patent number 11,335,608
- Issue date May 17, 2022
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for compensating dispersion of a beam separator...
- Patent number 11,328,894
- Issue date May 10, 2022
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
ARC source
- Patent number 11,306,390
- Issue date Apr 19, 2022
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Siegfried Krassnitzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus of charged-particle beam such as electron microscope comp...
- Patent number 11,295,927
- Issue date Apr 5, 2022
- BORRIES PTE. LTD.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coil-integrated-type yoke and manufacturing method of the same
- Patent number 11,164,697
- Issue date Nov 2, 2021
- Ebara Corporation
- Keisuke Matsushima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam vaporizer and method for vaporizing a vaporization ma...
- Patent number 11,133,154
- Issue date Sep 28, 2021
- VON ARDENNE Asset GmbH & Co. KG
- Carsten Deus
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Scanning magnet design with enhanced efficiency
- Patent number 11,114,270
- Issue date Sep 7, 2021
- Axcelis Technologies, Inc.
- Bo Vanderberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System combination of a particle beam system and a light-optical sy...
- Patent number 11,087,955
- Issue date Aug 10, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interchangeable magnet pack
- Patent number 11,043,365
- Issue date Jun 22, 2021
- Seagate Technology LLC
- Toon Hai Foo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Scan and corrector magnet designs for high throughput scanned beam...
- Patent number 11,037,754
- Issue date Jun 15, 2021
- Axcelis Technologies, Inc.
- Edward Eisner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of ion implantation and an apparatus for the same
- Patent number 11,017,979
- Issue date May 25, 2021
- Shanghai Huali Microelectronics Corporation
- Yi Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control method for multi-phase winding deflection scanning device
- Patent number 10,950,411
- Issue date Mar 16, 2021
- Xiaodong Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic lens and exciting current control method
- Patent number 10,923,312
- Issue date Feb 16, 2021
- Focus-eBeam Technology (Beijing) Co., Ltd.
- Wei He
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and optical-axis adjusting method thereof
- Patent number 10,910,194
- Issue date Feb 2, 2021
- HITACHI HIGH-TECH CORPORATION
- Shuhei Yabu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for plasma deposition and treatment
- Patent number 10,861,669
- Issue date Dec 8, 2020
- Peter F. Vandermeulen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Charged particle beam device
- Patent number 10,818,470
- Issue date Oct 27, 2020
- HITACHI HIGH-TECH CORPORATION
- Kazuki Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for electron beam etching process
- Patent number 10,790,153
- Issue date Sep 29, 2020
- Applied Materials, Inc.
- Yue Guo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus and measurement device
- Patent number 10,790,117
- Issue date Sep 29, 2020
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Yoshiaki Inda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 10,763,087
- Issue date Sep 1, 2020
- Tokyo Electron Limited
- Shuichi Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aberration correcting device for an electron microscope and an elec...
- Patent number 10,679,819
- Issue date Jun 9, 2020
- HITACHI HIGH-TECH CORPORATION
- Pieter Kruit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interchangeable magnet pack
- Patent number 10,573,500
- Issue date Feb 25, 2020
- Seagate Technology LLC
- Toon Hai Foo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF DETERMINING AN ENERGY SPECTRUM OR ENERGY WIDTH OF A CHARG...
- Publication number 20240371600
- Publication date Nov 7, 2024
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- John Breuer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR ELECTRON ENERGY LOSS SPECTROSCOPY AT HIGH ENERGY
- Publication number 20240347314
- Publication date Oct 17, 2024
- FEI Company
- Peter Christiaan Tiemeijer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE OPTICS, CHARGED PARTICLE BEAM APPARATUS, AND METHO...
- Publication number 20240290571
- Publication date Aug 29, 2024
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Benjamin Cook
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM OF IMAGE-FORMING MULTI-ELECTRON BEAMS
- Publication number 20240096586
- Publication date Mar 21, 2024
- KLA Corporation
- Xinrong JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PERMEANCE MAGNETIC ASSEMBLY
- Publication number 20240087861
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Co., LTD
- Tsung-Jen YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIPLE PARTICLE BEAM SYSTEM WITH A CONTRAST CORRECTION LENS SYSTEM
- Publication number 20230207251
- Publication date Jun 29, 2023
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION GUN AND VACUUM PROCESSING APPARATUS
- Publication number 20230154721
- Publication date May 18, 2023
- CANON ANELVA CORPORATION
- Tsutomu Hiroishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RIBBON BEAM ANGLE ADJUSTMENT IN AN ION IMPLANTATION SYSTEM
- Publication number 20230005701
- Publication date Jan 5, 2023
- ADVANCED ION BEAM TECHNOLOGY, INC.
- Zhimin WAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM DEVICE HAVING A DEFLECTION UNIT
- Publication number 20220367142
- Publication date Nov 17, 2022
- CARL ZEISS MICROSCOPY GMBH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PERMEANCE MAGNETIC ASSEMBLY
- Publication number 20220367160
- Publication date Nov 17, 2022
- Taiwan Semiconductor Manufacturing Co., LTD
- Tsung-Jen YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20220359150
- Publication date Nov 10, 2022
- Hitachi High-Tech Corporation
- Momoyo Enyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION GUN AND VACUUM PROCESSING APPARATUS
- Publication number 20220301807
- Publication date Sep 22, 2022
- Canon ANELVA Corporation
- Tsutomu Hiroishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR COMPENSATING DISPERSION OF A BEAM SEPARATOR...
- Publication number 20220262594
- Publication date Aug 18, 2022
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORTED X-RAY HORN FOR CONTROLLING E-BEAMS
- Publication number 20220175981
- Publication date Jun 9, 2022
- FERMI RESEARCH ALLIANCE, LLC
- Thomas Kroc
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF CHARGED-PARTICLE BEAM SUCH AS ELECTRON MICROSCOPE COMP...
- Publication number 20220108865
- Publication date Apr 7, 2022
- BORRIES PTE. LTD.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM FOR AZIMUTHAL DEFLECTION OF INDIVIDUAL PARTICL...
- Publication number 20220102104
- Publication date Mar 31, 2022
- Carl Zeiss MultiSEM GmbH
- Hans Fritz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM SYSTEM FOR INSPECTION AND REVIEW OF 3D DEVICES
- Publication number 20210327770
- Publication date Oct 21, 2021
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPACTOR PLASMA IGNITION DEVICES AND TECHNIQUES
- Publication number 20210280402
- Publication date Sep 9, 2021
- Eric Benjamin Frederick Gilbert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM COMBINATION OF A PARTICLE BEAM SYSTEM AND A LIGHT-OPTICAL SY...
- Publication number 20210035773
- Publication date Feb 4, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ARC SOURCE WITH CONFINED MAGNETIC FIELD
- Publication number 20200299824
- Publication date Sep 24, 2020
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Siegfried KRASSNITZER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTERCHANGEABLE MAGNET PACK
- Publication number 20200234934
- Publication date Jul 23, 2020
- SEAGATE TECHNOLOGY LLC
- Toon Hai FOO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SCAN AND CORRECTOR MAGNET DESIGNS FOR HIGH THROUGHPUT SCANNED BEAM...
- Publication number 20200194221
- Publication date Jun 18, 2020
- Axcelis Technologies, Inc.
- Edward Eisner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PERMEANCE MAGNETIC ASSEMBLY
- Publication number 20200161108
- Publication date May 21, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Tsung-Jen YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF ION IMPLANTATION AND AN APPARATUS FOR THE SAME
- Publication number 20200152411
- Publication date May 14, 2020
- SHANGHAI HUALI MICROELECTRONICS CORPORATION
- Yi TANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL METHOD FOR MULTI-PHASE WINDING DEFLECTION SCANNING DEVICE
- Publication number 20200152413
- Publication date May 14, 2020
- Guilin THD Technology Co., Ltd.
- Xiaodong Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE AND OPTICAL-AXIS ADJUSTING METHOD THEREOF
- Publication number 20200152419
- Publication date May 14, 2020
- Hitachi High-Technologies Corporation
- Shuhei YABU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING MAGNET DESIGN WITH ENHANCED EFFICIENCY
- Publication number 20200066478
- Publication date Feb 27, 2020
- Axcelis Technologies, Inc.
- Bo Vanderberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR PLASMA DEPOSITION AND TREATMENT
- Publication number 20200058463
- Publication date Feb 20, 2020
- Peter F. Vandermeulen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHODS AND APPARATUS FOR ELECTRON BEAM ETCHING PROCESS
- Publication number 20200006036
- Publication date Jan 2, 2020
- Applied Materials, Inc.
- Yue GUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE ELECTRON BEAM IMAGE ACQUISITION APPARATUS AND MULTIPLE ELE...
- Publication number 20190355546
- Publication date Nov 21, 2019
- NuFlare Technology, Inc.
- Atsushi Ando
- H01 - BASIC ELECTRIC ELEMENTS

Magnetic means

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Ribbon beam angle adjustment in an ion implantation system

Method and system of image-forming multi-electron beams

Multipactor plasma ignition devices and techniques

Permeance magnetic assembly

Ion gun and vacuum processing apparatus

Supported X-ray horn for controlling e-beams

Arc source with confined magnetic field

Ion gun and vacuum processing apparatus

Permeance magnetic assembly

Electron beam system for inspection and review of 3D devices

Systems and methods for compensating dispersion of a beam separator...

ARC source

Apparatus of charged-particle beam such as electron microscope comp...

Coil-integrated-type yoke and manufacturing method of the same

Electron beam vaporizer and method for vaporizing a vaporization ma...

Scanning magnet design with enhanced efficiency

System combination of a particle beam system and a light-optical sy...

Interchangeable magnet pack

Scan and corrector magnet designs for high throughput scanned beam...

Method of ion implantation and an apparatus for the same

Control method for multi-phase winding deflection scanning device

Magnetic lens and exciting current control method

Charged particle beam device and optical-axis adjusting method thereof

Methods and systems for plasma deposition and treatment

Charged particle beam device

Methods and apparatus for electron beam etching process

Ion implantation apparatus and measurement device

Plasma processing apparatus

Aberration correcting device for an electron microscope and an elec...

Interchangeable magnet pack

Patents Applicationslast 30 patents

METHOD OF DETERMINING AN ENERGY SPECTRUM OR ENERGY WIDTH OF A CHARG...

TECHNIQUES FOR ELECTRON ENERGY LOSS SPECTROSCOPY AT HIGH ENERGY

CHARGED PARTICLE OPTICS, CHARGED PARTICLE BEAM APPARATUS, AND METHO...

METHOD AND SYSTEM OF IMAGE-FORMING MULTI-ELECTRON BEAMS

PERMEANCE MAGNETIC ASSEMBLY

MULTIPLE PARTICLE BEAM SYSTEM WITH A CONTRAST CORRECTION LENS SYSTEM

ION GUN AND VACUUM PROCESSING APPARATUS

RIBBON BEAM ANGLE ADJUSTMENT IN AN ION IMPLANTATION SYSTEM

PARTICLE BEAM DEVICE HAVING A DEFLECTION UNIT

PERMEANCE MAGNETIC ASSEMBLY

CHARGED PARTICLE BEAM DEVICE

ION GUN AND VACUUM PROCESSING APPARATUS

SYSTEMS AND METHODS FOR COMPENSATING DISPERSION OF A BEAM SEPARATOR...

SUPPORTED X-RAY HORN FOR CONTROLLING E-BEAMS

APPARATUS OF CHARGED-PARTICLE BEAM SUCH AS ELECTRON MICROSCOPE COMP...

PARTICLE BEAM SYSTEM FOR AZIMUTHAL DEFLECTION OF INDIVIDUAL PARTICL...

ELECTRON BEAM SYSTEM FOR INSPECTION AND REVIEW OF 3D DEVICES

MULTIPACTOR PLASMA IGNITION DEVICES AND TECHNIQUES

SYSTEM COMBINATION OF A PARTICLE BEAM SYSTEM AND A LIGHT-OPTICAL SY...

ARC SOURCE WITH CONFINED MAGNETIC FIELD

INTERCHANGEABLE MAGNET PACK

SCAN AND CORRECTOR MAGNET DESIGNS FOR HIGH THROUGHPUT SCANNED BEAM...

PERMEANCE MAGNETIC ASSEMBLY

METHOD OF ION IMPLANTATION AND AN APPARATUS FOR THE SAME

CONTROL METHOD FOR MULTI-PHASE WINDING DEFLECTION SCANNING DEVICE

CHARGED PARTICLE BEAM DEVICE AND OPTICAL-AXIS ADJUSTING METHOD THEREOF

SCANNING MAGNET DESIGN WITH ENHANCED EFFICIENCY

METHODS AND SYSTEMS FOR PLASMA DEPOSITION AND TREATMENT

METHODS AND APPARATUS FOR ELECTRON BEAM ETCHING PROCESS

MULTIPLE ELECTRON BEAM IMAGE ACQUISITION APPARATUS AND MULTIPLE ELE...