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ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
Current Industry
H01J2237/14
magnetic
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Patents Grants
last 30 patents
Information
Patent Grant
Linear accelerator coil including multiple fluid channels
Patent number
11,985,756
Issue date
May 14, 2024
Applied Materials, Inc.
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for examining a beam of charged particles
Patent number
11,961,705
Issue date
Apr 16, 2024
Carl Zeiss SMT GmbH
Daniel Rhinow
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam application apparatus
Patent number
11,915,903
Issue date
Feb 27, 2024
HITACHI HIGH-TECH CORPORATION
Momoyo Enyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope device and electron beam inspection ap...
Patent number
11,908,657
Issue date
Feb 20, 2024
Zhongke Jingyuan Electron Limited
Qinglang Meng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for electron beam focusing in electron beam add...
Patent number
11,837,428
Issue date
Dec 5, 2023
General Electric Company
John Scott Price
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Axial alignment assembly, and charged particle microscope comprisin...
Patent number
11,773,905
Issue date
Oct 3, 2023
FEI Company
Pleun Dona
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multipole unit and charged particle beam device
Patent number
11,769,649
Issue date
Sep 26, 2023
HITACHI HIGH-TECH CORPORATION
Masanori Mita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam manipulation device and method for manipulati...
Patent number
11,705,301
Issue date
Jul 18, 2023
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
Benjamin John Cook
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
11,640,897
Issue date
May 2, 2023
Hitachi High-Technologies Corporation
Ryo Hirano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus and control method of charged parti...
Patent number
11,640,894
Issue date
May 2, 2023
Jeol Ltd.
Toshikatsu Kaneyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Current source apparatus and method
Patent number
11,562,884
Issue date
Jan 24, 2023
ASML Netherlands B.V.
Yixiang Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-charged particle beam writing apparatus, and multi-charged pa...
Patent number
11,545,339
Issue date
Jan 3, 2023
NuFlare Technology, Inc.
Hiroshi Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Objective lens arrangement usable in particle-optical systems
Patent number
11,527,379
Issue date
Dec 13, 2022
Carl Zeiss Microscopy GmbH
Rainer Knippelmeyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-charged particle beam writing apparatus, and multi-charged pa...
Patent number
11,508,553
Issue date
Nov 22, 2022
NuFlare Technology, Inc.
Hiroshi Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
11,456,150
Issue date
Sep 27, 2022
HITACHI HIGH-TECH CORPORATION
Kaori Bizen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetic field free sample plane for charged particle microscope
Patent number
11,450,505
Issue date
Sep 20, 2022
FEI Company
Alexander Henstra
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus
Patent number
11,430,630
Issue date
Aug 30, 2022
Hitachi High-Technologies Corporation
Ryo Hirano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam system for inspection and review of 3D devices
Patent number
11,335,608
Issue date
May 17, 2022
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for compensating dispersion of a beam separator...
Patent number
11,328,894
Issue date
May 10, 2022
ASML Netherlands B.V.
Weiming Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam optical system, exposure apparatus, exposure...
Patent number
11,276,546
Issue date
Mar 15, 2022
Nikon Corporation
Takehisa Yahiro
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deflector and charged particle beam system
Patent number
11,251,013
Issue date
Feb 15, 2022
Jeol Ltd.
Yuji Kohno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Beam irradiation device
Patent number
11,239,042
Issue date
Feb 1, 2022
HITACHI HIGH-TECH CORPORATION
Akira Ikegami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle beam apparatus having an aperture unit and method for sett...
Patent number
11,139,140
Issue date
Oct 5, 2021
Carl Zeiss Microscopy GmbH
Dirk Preikszas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning magnet design with enhanced efficiency
Patent number
11,114,270
Issue date
Sep 7, 2021
Axcelis Technologies, Inc.
Bo Vanderberg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle-optical apparatus and particle beam system
Patent number
11,087,949
Issue date
Aug 10, 2021
Carl Zeiss Microscopy GmbH
Dirk Preikszas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle source
Patent number
11,075,053
Issue date
Jul 27, 2021
ASML Netherlands B.V.
Shuai Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion source
Patent number
11,017,974
Issue date
May 25, 2021
Nissin Ion Equipment Co., Ltd.
Sami K. Hahto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple electron beam inspection apparatus with through-hole with...
Patent number
10,950,410
Issue date
Mar 16, 2021
NuFlare Technology, Inc.
Kazuhiko Inoue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetic lens and exciting current control method
Patent number
10,923,312
Issue date
Feb 16, 2021
Focus-eBeam Technology (Beijing) Co., Ltd.
Wei He
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Adaptive pencil beam scanning
Patent number
10,912,953
Issue date
Feb 9, 2021
Varian Medical Systems Particle Therapy GMBH
Joerg Wulff
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Patents Applications
last 30 patents
Information
Patent Application
Adjustable Permanent Magnetic Lens Having Thermal Control Device
Publication number
20240021403
Publication date
Jan 18, 2024
IMS Nanofabrication GmbH
Dietmar Puchberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Adjustable Permanent Magnetic Lens Having Shunting Device
Publication number
20230360878
Publication date
Nov 9, 2023
IMS Nanofabrication GmbH
Dietmar Puchberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MINIATURE HYBRID ELECTRON BEAM COLUMN
Publication number
20230326704
Publication date
Oct 12, 2023
KLA Corporation
Lawrence Muray
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND METHOD FOR USING PLASMA PROCESSING...
Publication number
20230170186
Publication date
Jun 1, 2023
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
Shogo OKITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LINEAR ACCELERATOR COIL INCLUDING MULTIPLE FLUID CHANNELS
Publication number
20230119010
Publication date
Apr 20, 2023
Applied Materials, Inc.
Robert B. Vopat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE, AND METHOD FOR CONTROLLING CHARGED PA...
Publication number
20230113759
Publication date
Apr 13, 2023
Hitachi High-Tech Corporation
Shingo HAYASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTI-CHARGED PA...
Publication number
20230056463
Publication date
Feb 23, 2023
NuFlare Technology, Inc.
Hiroshi MATSUMOTO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SCANNING ELECTRON MICROSCOPE DEVICE AND ELECTRON BEAM INSPECTION AP...
Publication number
20230005704
Publication date
Jan 5, 2023
Zhongke Jingyuan Electron Limited, Beijing (CN)
Qinglang Meng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON BEAM APPLICATION APPARATUS
Publication number
20220319798
Publication date
Oct 6, 2022
HITACHI HIGH-TECH CORPORATION
Momoyo Enyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multipole Unit and Charged Particle Beam Device
Publication number
20220270844
Publication date
Aug 25, 2022
HITACHI HIGH-TECH CORPORATION
Masanori MITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR COMPENSATING DISPERSION OF A BEAM SEPARATOR...
Publication number
20220262594
Publication date
Aug 18, 2022
ASML NETHERLANDS B.V.
Weiming REN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM MANIPULATION DEVICE AND METHOD FOR MANIPULATI...
Publication number
20220230836
Publication date
Jul 21, 2022
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
Benjamin John Cook
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CATHODOLUMINESCENCE ELECTRON MICROSCOPE
Publication number
20220216028
Publication date
Jul 7, 2022
ATTOLIGHT AG
BERNEY Jean
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA JET SOLID ABLATION-BASED DIRECT ANALYSIS APPARATUS
Publication number
20220208522
Publication date
Jun 30, 2022
CHENGDU ALIEBN SCIENCE AND TECHNOLOGY CO., LTD
Yanting YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MAGNETIC FIELD FREE SAMPLE PLANE FOR CHARGED PARTICLE MICROSCOPE
Publication number
20220199353
Publication date
Jun 23, 2022
FEI Company
Alexander Henstra
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPOSITE SOLENOID MAGNETIC LENS
Publication number
20220148844
Publication date
May 12, 2022
IMATREX, INC.
Roy E. Rand
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE SOURCE
Publication number
20220068589
Publication date
Mar 3, 2022
ASML NETHERLANDS B.V.
Shuai LI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON BEAM SYSTEM FOR INSPECTION AND REVIEW OF 3D DEVICES
Publication number
20210327770
Publication date
Oct 21, 2021
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Device
Publication number
20210313140
Publication date
Oct 7, 2021
Kaori BIZEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTIPOLE LENS, ABERRATION CORRECTOR USING SAME, AND CHARGED PARTIC...
Publication number
20210249218
Publication date
Aug 12, 2021
HITACHI HIGH-TECH CORPORATION
Tomonori NAKANO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Particle Beam System
Publication number
20210142980
Publication date
May 13, 2021
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR EXAMINING A BEAM OF CHARGED PARTICLES
Publication number
20210110996
Publication date
Apr 15, 2021
Carl Zeiss SMT GMBH
Daniel Rhinow
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Beam Irradiation Device
Publication number
20210027976
Publication date
Jan 28, 2021
HITACHI HIGH-TECH CORPORATION
Akira IKEGAMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE-OPTICAL APPARATUS AND PARTICLE BEAM SYSTEM
Publication number
20200381206
Publication date
Dec 3, 2020
CARL ZEISS MICROSCOPY GMBH
Dirk Preikszas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CURRENT SOURCE APPARATUS AND METHOD
Publication number
20200335298
Publication date
Oct 22, 2020
ASML NETHERLANDS B.V.
Yixiang WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Device
Publication number
20200251304
Publication date
Aug 6, 2020
Hitachi High-Technologies Corporation
Ryo HIRANO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS
Publication number
20200251305
Publication date
Aug 6, 2020
ASML NETHERLANDS B.V.
Zhongwei CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Deflector and Charged Particle Beam System
Publication number
20200243297
Publication date
Jul 30, 2020
JEOL Ltd.
Yuji Kohno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OBJECTIVE LENS ARRANGEMENT USABLE IN PARTICLE-OPTICAL SYSTEMS
Publication number
20200243296
Publication date
Jul 30, 2020
CARL ZEISS MICROSCOPY GMBH
Rainer KNIPPELMEYER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Apparatus
Publication number
20200219697
Publication date
Jul 9, 2020
Hitachi High-Technologies Corporation
Ryo HIRANO
H01 - BASIC ELECTRIC ELEMENTS