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H01J37/1475
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
Current Industry
H01J37/1475
magnetic
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Patents Grants
last 30 patents
Information
Patent Grant
Dual source injector with switchable analyzing magnet
Patent number
12,112,918
Issue date
Oct 8, 2024
Axcelis Technologies, Inc.
Wilhelm Platow
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Beam deflection device, aberration corrector, monochromator, and ch...
Patent number
12,062,519
Issue date
Aug 13, 2024
HITACHI HIGH-TECH CORPORATION
Pieter Kruit
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
11,967,482
Issue date
Apr 23, 2024
HITACHI HIGH-TECH CORPORATION
Wen Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dual source injector with switchable analyzing magnet
Patent number
11,823,858
Issue date
Nov 21, 2023
Axcelis Technologies, Inc.
Wilhelm Platow
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Wien filter and charged particle beam imaging apparatus
Patent number
11,756,761
Issue date
Sep 12, 2023
Zhongke Jingyuan Electron Limited, Beijing (CN)
Qinglang Meng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Supported X-ray horn for controlling e-beams
Patent number
11,717,584
Issue date
Aug 8, 2023
Fermi Research Alliance, LLC
Thomas Kroc
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Examining, analyzing and/or processing an object using an object re...
Patent number
11,721,518
Issue date
Aug 8, 2023
Carl Zeiss Microscopy GmbH
Andreas Schertel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implantation method and ion implanter for performing the same
Patent number
11,482,401
Issue date
Oct 25, 2022
Shanghai Huali Integrated Circuit Mfg. Co. Ltd.
Chaorong Lai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus of charged-particle beam such as electron microscope comp...
Patent number
11,295,927
Issue date
Apr 5, 2022
BORRIES PTE. LTD.
Zhongwei Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wien filter and charged particle beam imaging apparatus
Patent number
11,239,044
Issue date
Feb 1, 2022
Zhongke Jingyuan Electron Limited, Beijing (CN)
Qinglang Meng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and electrostatic lens
Patent number
11,201,033
Issue date
Dec 14, 2021
HITACHI HIGH-TECH CORPORATION
Yuta Kawamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam application apparatus
Patent number
11,177,108
Issue date
Nov 16, 2021
HITACHI HIGH-TECH CORPORATION
Yasuhiro Shirasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle scanners
Patent number
11,152,190
Issue date
Oct 19, 2021
Decision Sciences International Corporation
Robert D. Penny
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam vaporizer and method for vaporizing a vaporization ma...
Patent number
11,133,154
Issue date
Sep 28, 2021
VON ARDENNE Asset GmbH & Co. KG
Carsten Deus
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Scanning electron microscope with objective lens below sample stage
Patent number
11,127,564
Issue date
Sep 21, 2021
KKT HOLDINGS SYNDICATE
Tzu-Yi Kuo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning magnet design with enhanced efficiency
Patent number
11,114,270
Issue date
Sep 7, 2021
Axcelis Technologies, Inc.
Bo Vanderberg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Imaging apparatus and related control unit
Patent number
11,062,875
Issue date
Jul 13, 2021
City University of Hong Kong
Fu-Rong Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scan and corrector magnet designs for high throughput scanned beam...
Patent number
11,037,754
Issue date
Jun 15, 2021
Axcelis Technologies, Inc.
Edward Eisner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device, and observation method and elemental...
Patent number
11,031,211
Issue date
Jun 8, 2021
HITACHI HIGH-TECH CORPORATION
Naoto Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
10,971,332
Issue date
Apr 6, 2021
Canon Anelva Corporation
Hiroshi Yakushiji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Control method for multi-phase winding deflection scanning device
Patent number
10,950,411
Issue date
Mar 16, 2021
Xiaodong Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and optical-axis adjusting method thereof
Patent number
10,910,194
Issue date
Feb 2, 2021
HITACHI HIGH-TECH CORPORATION
Shuhei Yabu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam axial alignment device, charged particle beam...
Patent number
10,903,038
Issue date
Jan 26, 2021
Shimadzu Corporation
Takehiro Ishikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple electron beam image acquisition apparatus, and alignment m...
Patent number
10,896,801
Issue date
Jan 19, 2021
NuFlare Technology, Inc.
Kazuhiko Inoue
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Charged particle beam steering arrangement
Patent number
10,854,422
Issue date
Dec 1, 2020
RELIANCE PRECISION LIMITED
Nigel Crosland
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Charged particle beam control device
Patent number
10,847,344
Issue date
Nov 24, 2020
HITACHI HIGH-TECH CORPORATION
Shinichi Murakami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
10,818,470
Issue date
Oct 27, 2020
HITACHI HIGH-TECH CORPORATION
Kazuki Ikeda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deflection scanning device with multi-phase winding and deflection...
Patent number
10,804,070
Issue date
Oct 13, 2020
Xiaodong Huang
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Low voltage scanning electron microscope and method for specimen ob...
Patent number
10,777,382
Issue date
Sep 15, 2020
Focus-eBeam Technology (Beijing) Co., Ltd.
Shuai Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reflection-mode electron-beam inspection using ptychographic imaging
Patent number
10,755,892
Issue date
Aug 25, 2020
KLA-Tencor Corporation
Weijie Huang
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
COMPACT 2D SCANNER MAGNET WITH TRAPEZOIDAL COILS
Publication number
20240395495
Publication date
Nov 28, 2024
UChicago Argonne, LLC
Brahim Mustapha
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MAGNETIC MULTIPOLE DEVICE, CHARGED PARTICLE BEAM APPARATUS, AND MET...
Publication number
20240087837
Publication date
Mar 14, 2024
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
Benjamin Cook
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DUAL SOURCE INJECTOR WITH SWITCHABLE ANALYZING MAGNET
Publication number
20240029998
Publication date
Jan 25, 2024
Axcelis Technologies, Inc.
Wilhelm Platow
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS
Publication number
20240014002
Publication date
Jan 11, 2024
HITACHI HIGH-TECH CORPORATION
Takayasu IWATSUKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam System and Control Method Therefor
Publication number
20230343550
Publication date
Oct 26, 2023
JEOL Ltd.
Takamitsu Saito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROMAGNETIC LENS AND ELECTRON SOURCE MECHANISM
Publication number
20230335368
Publication date
Oct 19, 2023
NuFlare Technology, Inc.
Munehiro OGASAWARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXAMINING, ANALYZING AND/OR PROCESSING AN OBJECT USING AN OBJECT RE...
Publication number
20230326707
Publication date
Oct 12, 2023
CARL ZEISS MICROSCOPY GMBH
Andreas Schertel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DUAL SOURCE INJECTOR WITH SWITCHABLE ANALYZING MAGNET
Publication number
20230307210
Publication date
Sep 28, 2023
Axcelis Technologies, Inc.
Wilhelm Platow
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
ION IMPLANTER AND ION IMPLANTATION METHOD
Publication number
20230260741
Publication date
Aug 17, 2023
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Tetsuya Kudo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PRODUCING A SAMPLE ON AN OBJECT, COMPUTER PROGRAM PRODUC...
Publication number
20230260744
Publication date
Aug 17, 2023
CARL ZEISS MICROSCOPY GMBH
Heiko Stegmann
G01 - MEASURING TESTING
Information
Patent Application
Compact 2D Scanner Magnet with Double-Helix Coils
Publication number
20230238206
Publication date
Jul 27, 2023
UChicago Argonne, LLC
Brahim Mustapha
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
A DETECTOR SUBSTRATE FOR USE IN A CHARGED PARTICLE MULTI-BEAM ASSES...
Publication number
20230238211
Publication date
Jul 27, 2023
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE, AND METHOD FOR CONTROLLING CHARGED PA...
Publication number
20230113759
Publication date
Apr 13, 2023
Hitachi High-Tech Corporation
Shingo HAYASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR INSPECTING A SPECIMEN AND CHARGED PARTICLE BEAM DEVICE
Publication number
20220392735
Publication date
Dec 8, 2022
Pieter Kruit
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CATHODOLUMINESCENCE ELECTRON MICROSCOPE
Publication number
20220216028
Publication date
Jul 7, 2022
ATTOLIGHT AG
BERNEY Jean
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUPPORTED X-RAY HORN FOR CONTROLLING E-BEAMS
Publication number
20220175981
Publication date
Jun 9, 2022
FERMI RESEARCH ALLIANCE, LLC
Thomas Kroc
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Beam Deflection Device, Aberration Corrector, Monochromator, and Ch...
Publication number
20220172920
Publication date
Jun 2, 2022
Hitachi High-Tech Corporation
Pieter KRUIT
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WIEN FILTER AND CHARGED PARTICLE BEAM IMAGING APPARATUS
Publication number
20220157556
Publication date
May 19, 2022
Zhongke Jingyuan Electron Limited, Beijing (CN)
Qinglang MENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS OF CHARGED-PARTICLE BEAM SUCH AS ELECTRON MICROSCOPE COMP...
Publication number
20220108865
Publication date
Apr 7, 2022
BORRIES PTE. LTD.
Zhongwei Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE BEAM SYSTEM FOR AZIMUTHAL DEFLECTION OF INDIVIDUAL PARTICL...
Publication number
20220102104
Publication date
Mar 31, 2022
Carl Zeiss MultiSEM GmbH
Hans Fritz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE
Publication number
20220102105
Publication date
Mar 31, 2022
Hitachi High-Tech Corporation
Wen Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WIDE FIELD-OF-VIEW CHARGED PARTICLE FILTER
Publication number
20210310348
Publication date
Oct 7, 2021
Thermo Electron Scientific Instruments LLC
Justin Morrow
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXAMINING, ANALYZING AND/OR PROCESSING AN OBJECT USING AN OBJECT RE...
Publication number
20210241992
Publication date
Aug 5, 2021
CARL ZEISS MICROSCOPY GMBH
Andreas Schertel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron Beam Apparatus
Publication number
20210233737
Publication date
Jul 29, 2021
Hitachi High-Tech Corporation
Yu YAMAZAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-BEAM PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING SAME
Publication number
20210217577
Publication date
Jul 15, 2021
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMAGING APPARATUS AND RELATED CONTROL UNIT
Publication number
20210110990
Publication date
Apr 15, 2021
City University of Hong Kong
Fu-Rong Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WIEN FILTER AND CHARGED PARTICLE BEAM IMAGING APPARATUS
Publication number
20210066022
Publication date
Mar 4, 2021
Zhongke Jingyuan Electron Limited, Beijing (CN)
Qinglang MENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM APPLICATION APPARATUS
Publication number
20210005417
Publication date
Jan 7, 2021
Hitachi High-Tech Corporation
Yasuhiro Shirasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTER FOR PERFORMING THE SAME
Publication number
20200388465
Publication date
Dec 10, 2020
Shanghai Huali Integrated Circuit Mfg. Co., Ltd.
Chaorong Lai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE SCANNERS
Publication number
20200335299
Publication date
Oct 22, 2020
DECISION SCIENCES INTERNATIONAL CORPORATION
Robert D. Penny
H01 - BASIC ELECTRIC ELEMENTS