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CPC
H01L21/67103

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67103mainly by conduction

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Friction stir welding in semiconductor manufacturing applications
- Patent number 12,272,591
- Issue date Apr 8, 2025
- Lam Research Corporation
- Nick Ray Linebarger
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Advanced temperature control for wafer carrier in plasma processing...
- Patent number 12,272,575
- Issue date Apr 8, 2025
- Applied Materials, Inc.
- Fernando M. Silveira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Holding device and method of manufacturing holding device
- Patent number 12,273,965
- Issue date Apr 8, 2025
- NITERRA CO., LTD.
- Ryunosuke Sakamaki
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Unit for supplying liquid, apparatus and method for treating substr...
- Patent number 12,266,546
- Issue date Apr 1, 2025
- Semes Co., Ltd.
- Do Gyeong Ha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for thermal control of devices in electronics tester
- Patent number 12,265,136
- Issue date Apr 1, 2025
- AEHR Test Systems
- Jovan Jovanovic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Annealing method
- Patent number 12,266,553
- Issue date Apr 1, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yung-Chang Huang
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Pressing group for a sintering press for sintering electronic compo...
- Patent number 12,257,801
- Issue date Mar 25, 2025
- AMX—AUTOMATRIX S.R.L.
- Nicola Schivalocchi
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Substrate processing apparatus
- Patent number 12,255,092
- Issue date Mar 18, 2025
- Tokyo Electron Limited
- Junnosuke Taguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature control unit
- Patent number 12,249,521
- Issue date Mar 11, 2025
- TOMOEGAWA CORPORATION
- Shuhei Hatano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and ceiling heater
- Patent number 12,241,159
- Issue date Mar 4, 2025
- Kokusai Electric Corporation
- Tetsuya Kosugi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature controlled substrate support assembly
- Patent number 12,243,756
- Issue date Mar 4, 2025
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing system including temperature controller
- Patent number 12,237,183
- Issue date Feb 25, 2025
- Samsung Electronics Co., Ltd.
- Kyoungsik Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating structure and wafer test device
- Patent number 12,237,184
- Issue date Feb 25, 2025
- SEMIGHT INSTRUMENTS CO., LTD
- Zhe Lian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus and filler member provided therein
- Patent number 12,234,555
- Issue date Feb 25, 2025
- Semes Co., Ltd.
- Jin Mo Jae
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and substrate fixing device
- Patent number 12,230,527
- Issue date Feb 18, 2025
- Shinko Electric Industries Co., Ltd.
- Yusuke Muramatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exhaust system and process equipment
- Patent number 12,230,517
- Issue date Feb 18, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsien-Chang Hsieh
- F23 - COMBUSTION APPARATUS COMBUSTION PROCESSES
Information Patent Grant
Electrostatic chuck heater
- Patent number 12,230,526
- Issue date Feb 18, 2025
- NGK Insulators, Ltd.
- Tatsuya Kuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low temperature manifold assembly for substrate processing systems
- Patent number 12,224,161
- Issue date Feb 11, 2025
- Lam Research Corporation
- Gabriel De Jesus Soto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 12,224,157
- Issue date Feb 11, 2025
- HITACHI HIGH-TECH CORPORATION
- Yuki Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature controlled substrate carrier and polishing components
- Patent number 12,217,979
- Issue date Feb 4, 2025
- Axus Technology, LLC
- Daniel Ray Trojan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High power cable for heated components in RF environment
- Patent number 12,217,944
- Issue date Feb 4, 2025
- Lam Research Corporation
- Seyed Jafar Jafarian-Tehrani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
AlN joined body
- Patent number 12,208,595
- Issue date Jan 28, 2025
- NGK Insulators, Ltd.
- Keita Yamana
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning chamber for metal oxide removal
- Patent number 12,211,737
- Issue date Jan 28, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Liang Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage, film-forming apparatus, and film-processing apparatus
- Patent number 12,211,710
- Issue date Jan 28, 2025
- NHK Spring Co., Ltd.
- Toshihiko Hanamachi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Time-varying frequency powered heat source
- Patent number 12,208,033
- Issue date Jan 28, 2025
- Anand Deo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ground electrode formed in an electrostatic chuck for a plasma proc...
- Patent number 12,205,843
- Issue date Jan 21, 2025
- Applied Materials, Inc.
- Michael R. Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rating substrate support assemblies based on impedance circuit elec...
- Patent number 12,205,791
- Issue date Jan 21, 2025
- Applied Materials, Inc.
- Arvind Shankar Raman
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Treatment machine, drive unit for a treatment machine and use of th...
- Patent number 12,196,260
- Issue date Jan 14, 2025
- Singulus Technologies AG
- Frank Hofmann
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Bonding system
- Patent number 12,198,963
- Issue date Jan 14, 2025
- Tokyo Electron Limited
- Yoshitaka Otsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning method and substrate cleaning device
- Patent number 12,198,947
- Issue date Jan 14, 2025
- Tokyo Electron Limited
- Hiroki Ohno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20250118541
- Publication date Apr 10, 2025
- Hitachi High-Tech Corporation
- Tomoaki HYODO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inspection Method
- Publication number 20250112096
- Publication date Apr 3, 2025
- TOKYO ELECTRON LIMITED
- Hiroyuki NAKAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GROUND ELECTRODE FORMED IN AN ELECTROSTATIC CHUCK FOR A PLASMA PROC...
- Publication number 20250112076
- Publication date Apr 3, 2025
- Applied Materials, Inc.
- Michael R. RICE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL BONDED ESC WITH OUTER CERAMIC VACUUM ISOLATION RING FOR CRYOG...
- Publication number 20250112075
- Publication date Apr 3, 2025
- Applied Materials, Inc.
- Alexander SULYMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PEDESTAL HEATER
- Publication number 20250105034
- Publication date Mar 27, 2025
- Applied Materials, Inc.
- Justin GAU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE OFFSET AND ZONE CONTROL TUNING
- Publication number 20250105035
- Publication date Mar 27, 2025
- Applied Materials, Inc.
- Ole LUCKNER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR SUBSTRATE SUPPORT ASSEMBLY
- Publication number 20250105051
- Publication date Mar 27, 2025
- Applied Materials, Inc.
- Arvinder Manmohan Singh Chadha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND HEATING UNIT
- Publication number 20250096028
- Publication date Mar 20, 2025
- SEMES CO., LTD.
- Ju Mi LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PLACEMENT TABLE AND METHOD OF USING THE SAME
- Publication number 20250079230
- Publication date Mar 6, 2025
- NGK Insulators, Ltd.
- Ikuhisa MORIOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING DEVICE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250069912
- Publication date Feb 27, 2025
- TOKYO ELECTRON LIMITED
- Einosuke TSUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
- Publication number 20250068080
- Publication date Feb 27, 2025
- SEMES CO., LTD.
- Kyung Taek IM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING DEVICE
- Publication number 20250069907
- Publication date Feb 27, 2025
- TOKYO ELECTRON LIMITED
- Hiroki OHNO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR SUBSTRATE SUPPORT LEVELING APPARATUS
- Publication number 20250054797
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- Katherine Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL DEVICE AND WAFER PROCESSING SYSTEM
- Publication number 20250054784
- Publication date Feb 13, 2025
- KELK LTD.
- Atsushi Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING CHAMBER, SUBSTRATE PROCESSING SYSTEM INCLUDING...
- Publication number 20250054805
- Publication date Feb 13, 2025
- SAMSUNG ELECTRONICS CoO., LTD.
- Yongmyung JUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNABLE ESC FOR RAPID ALTERNATING PROCESS APPLICATIONS
- Publication number 20250054738
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Dan MAROHL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE MEASUREMENT UNIT AND HEAT TREATMENT APPARATUS
- Publication number 20250046630
- Publication date Feb 6, 2025
- TOKYO ELECTRON LIMITED
- Yutaka MIZOBE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED EPITAXY AND PRECLEAN SYSTEM
- Publication number 20250046596
- Publication date Feb 6, 2025
- Applied Materials, Inc.
- Lara HAWRYLCHAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING SYSTEM AND METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20250038019
- Publication date Jan 30, 2025
- Hitachi High-Tech Corporation
- Makoto SATAKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHAPED FACEPLATE FOR EXTREME EDGE FILM UNIFORMITY
- Publication number 20250029849
- Publication date Jan 23, 2025
- Applied Materials, Inc.
- Anish Janakiraman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT
- Publication number 20250022724
- Publication date Jan 16, 2025
- TOKYO ELECTRON LIMITED
- Masanori TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS SYSTEM, METHOD, AND SUBSTRATE CHUCK
- Publication number 20250022739
- Publication date Jan 16, 2025
- TOKYO ELECTRON LIMITED
- Matthew Charles Gwinn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR ETCHING SILICON OXIDE
- Publication number 20250014906
- Publication date Jan 9, 2025
- Central Glass Company, Limited
- Shoi SUZUKI
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
CORRECTION APPARATUS, EXPOSURE APPARATUS, COATER AND DEVELOPER APPA...
- Publication number 20250014918
- Publication date Jan 9, 2025
- Nikon Corporation
- Go ICHINOSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METROLOGY SLOT PLATES
- Publication number 20250014922
- Publication date Jan 9, 2025
- Applied Materials Inc.
- Kenneth Brian Doering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20250014939
- Publication date Jan 9, 2025
- NGK Insulators, Ltd.
- Tatsuya KUNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL LEVELER BLANK FOR INTEGRATION WITH THERMAL MANAGEMENT
- Publication number 20240429071
- Publication date Dec 26, 2024
- Momentive Performance Materials Quartz, Inc.
- Matthew Peter Gallaugher
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
METHOD AND SYSTEM FOR THERMAL CONTROL OF DEVICS IN ELECTRONICS TESTER
- Publication number 20240426938
- Publication date Dec 26, 2024
- Aehr Test Systems
- Jovan Jovanovic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR THERMAL CONTROL OF DEVICES IN AN ELECTRONICS...
- Publication number 20240426939
- Publication date Dec 26, 2024
- Aehr Test Systems
- Jovan Jovanovic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONNECTOR FOR SUBSTRATE SUPPORT WITH EMBEDDED TEMPERATURE SENSORS
- Publication number 20240417857
- Publication date Dec 19, 2024
- LAM RESEARCH CORPORATION
- Siyuan TIAN
- H01 - BASIC ELECTRIC ELEMENTS

mainly by conduction

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Friction stir welding in semiconductor manufacturing applications

Advanced temperature control for wafer carrier in plasma processing...

Holding device and method of manufacturing holding device

Unit for supplying liquid, apparatus and method for treating substr...

Method and system for thermal control of devices in electronics tester

Annealing method

Pressing group for a sintering press for sintering electronic compo...

Substrate processing apparatus

Temperature control unit

Substrate processing apparatus and ceiling heater

Temperature controlled substrate support assembly

Semiconductor processing system including temperature controller

Heating structure and wafer test device

Substrate treating apparatus and filler member provided therein

Electrostatic chuck and substrate fixing device

Exhaust system and process equipment

Electrostatic chuck heater

Low temperature manifold assembly for substrate processing systems

Plasma processing apparatus and plasma processing method

Temperature controlled substrate carrier and polishing components

High power cable for heated components in RF environment

AlN joined body

Cleaning chamber for metal oxide removal

Stage, film-forming apparatus, and film-processing apparatus

Time-varying frequency powered heat source

Ground electrode formed in an electrostatic chuck for a plasma proc...

Rating substrate support assemblies based on impedance circuit elec...

Treatment machine, drive unit for a treatment machine and use of th...

Bonding system

Substrate cleaning method and substrate cleaning device

Patents Applicationslast 30 patents

PLASMA PROCESSING APPARATUS

Inspection Method

GROUND ELECTRODE FORMED IN AN ELECTROSTATIC CHUCK FOR A PLASMA PROC...

METAL BONDED ESC WITH OUTER CERAMIC VACUUM ISOLATION RING FOR CRYOG...

PEDESTAL HEATER

TEMPERATURE OFFSET AND ZONE CONTROL TUNING

MODULAR SUBSTRATE SUPPORT ASSEMBLY

SUBSTRATE TREATING APPARATUS AND HEATING UNIT

WAFER PLACEMENT TABLE AND METHOD OF USING THE SAME

HEATING DEVICE AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD

SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING DEVICE

SEMICONDUCTOR SUBSTRATE SUPPORT LEVELING APPARATUS

TEMPERATURE CONTROL DEVICE AND WAFER PROCESSING SYSTEM

SUBSTRATE PROCESSING CHAMBER, SUBSTRATE PROCESSING SYSTEM INCLUDING...

TUNABLE ESC FOR RAPID ALTERNATING PROCESS APPLICATIONS

TEMPERATURE MEASUREMENT UNIT AND HEAT TREATMENT APPARATUS

INTEGRATED EPITAXY AND PRECLEAN SYSTEM

MANUFACTURING SYSTEM AND METHOD OF SEMICONDUCTOR DEVICE

SHAPED FACEPLATE FOR EXTREME EDGE FILM UNIFORMITY

SUBSTRATE SUPPORT

PROCESS SYSTEM, METHOD, AND SUBSTRATE CHUCK

METHOD AND DEVICE FOR ETCHING SILICON OXIDE

CORRECTION APPARATUS, EXPOSURE APPARATUS, COATER AND DEVELOPER APPA...

METROLOGY SLOT PLATES

MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS

THERMAL LEVELER BLANK FOR INTEGRATION WITH THERMAL MANAGEMENT

METHOD AND SYSTEM FOR THERMAL CONTROL OF DEVICS IN ELECTRONICS TESTER

METHOD AND SYSTEM FOR THERMAL CONTROL OF DEVICES IN AN ELECTRONICS...

CONNECTOR FOR SUBSTRATE SUPPORT WITH EMBEDDED TEMPERATURE SENSORS