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H01L21/67103

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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H01L21/67103mainly by conduction

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Heating device and heating method for semiconductor thermal process
- Patent number 12,322,612
- Issue date Jun 3, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Wanzheng Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of heat-treating silicon wafer using lateral heat treatment...
- Patent number 12,320,034
- Issue date Jun 3, 2025
- Sumco Corporation
- Yoshihiro Kuwano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stacked structure and semiconductor manufacturing apparatus member
- Patent number 12,315,757
- Issue date May 27, 2025
- NGK Insulators, Ltd.
- Asumi Nagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus, and method and program for controlling...
- Patent number 12,315,704
- Issue date May 27, 2025
- Tokyo Electron Limited
- Yusuke Saitoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate fixing device
- Patent number 12,315,755
- Issue date May 27, 2025
- Shinko Electric Industries Co., Ltd.
- Yasuhiko Kusama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heater cover plate for uniformity improvement
- Patent number 12,315,745
- Issue date May 27, 2025
- Applied Materials, Inc.
- Muhammad M. Rasheed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heated substrate support
- Patent number 12,309,888
- Issue date May 20, 2025
- Applied Materials, Inc.
- Govinda Raj
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for drying substrate
- Patent number 12,308,255
- Issue date May 20, 2025
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method
- Patent number 12,300,523
- Issue date May 13, 2025
- Picosun Oy
- Väinö Kilpi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment apparatus and heat treatment method
- Patent number 12,298,668
- Issue date May 13, 2025
- Tokyo Electron Limited
- Shinichiro Kawakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus and substrate treating method
- Patent number 12,300,515
- Issue date May 13, 2025
- Semes Co., Ltd.
- Miso Park
- B08 - CLEANING
Information Patent Grant
Electrostatic chuck with multiple heater zones
- Patent number 12,293,933
- Issue date May 6, 2025
- VM INC.
- Woo Hyung Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for thermal control of devices in an electronics...
- Patent number 12,292,484
- Issue date May 6, 2025
- AEHR Test Systems
- Jovan Jovanovic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer mass metrology apparatus and semiconductor wafe...
- Patent number 12,288,702
- Issue date Apr 29, 2025
- Lam Research Corporation
- Gregor Elliott
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mounting table and plasma processing apparatus
- Patent number 12,288,713
- Issue date Apr 29, 2025
- Tokyo Electron Limited
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample holder
- Patent number 12,288,714
- Issue date Apr 29, 2025
- Kyocera Corporation
- Seiya Saisho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heater and stage having the heater
- Patent number 12,284,731
- Issue date Apr 22, 2025
- NHK Spring Co., Ltd.
- Toshihiko Hanamachi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-zone heater
- Patent number 12,283,496
- Issue date Apr 22, 2025
- NGK Insulators, Ltd.
- Keisuke Takashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for temperature control for a substrate
- Patent number 12,283,500
- Issue date Apr 22, 2025
- Applied Materials, Inc.
- Paul Zachary Wirth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Member for semiconductor manufacturing apparatus
- Patent number 12,283,511
- Issue date Apr 22, 2025
- NGK Insulators, Ltd.
- Masaki Ishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment device
- Patent number 12,278,120
- Issue date Apr 15, 2025
- Shibaura Mechatronics Corporation
- Minami Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Anodized titanium material and method for producing the same
- Patent number 12,276,037
- Issue date Apr 15, 2025
- Yamaguchi Prefectural Industrial Technology Institute
- Takehiko Muranaka
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Friction stir welding in semiconductor manufacturing applications
- Patent number 12,272,591
- Issue date Apr 8, 2025
- Lam Research Corporation
- Nick Ray Linebarger
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Advanced temperature control for wafer carrier in plasma processing...
- Patent number 12,272,575
- Issue date Apr 8, 2025
- Applied Materials, Inc.
- Fernando M. Silveira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Holding device and method of manufacturing holding device
- Patent number 12,273,965
- Issue date Apr 8, 2025
- NITERRA CO., LTD.
- Ryunosuke Sakamaki
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Unit for supplying liquid, apparatus and method for treating substr...
- Patent number 12,266,546
- Issue date Apr 1, 2025
- Semes Co., Ltd.
- Do Gyeong Ha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for thermal control of devices in electronics tester
- Patent number 12,265,136
- Issue date Apr 1, 2025
- AEHR Test Systems
- Jovan Jovanovic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Annealing method
- Patent number 12,266,553
- Issue date Apr 1, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yung-Chang Huang
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Pressing group for a sintering press for sintering electronic compo...
- Patent number 12,257,801
- Issue date Mar 25, 2025
- AMX—AUTOMATRIX S.R.L.
- Nicola Schivalocchi
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Substrate processing apparatus
- Patent number 12,255,092
- Issue date Mar 18, 2025
- Tokyo Electron Limited
- Junnosuke Taguchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CERAMIC SUSCEPTOR
- Publication number 20250193971
- Publication date Jun 12, 2025
- NGK Insulators, Ltd.
- Naoki YOSHITAKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATER
- Publication number 20250185125
- Publication date Jun 5, 2025
- Samsung Electronics Co., Ltd.
- Seungjun Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH POWER CABLE FOR HEATED COMPONENTS IN RF ENVIRONMENT
- Publication number 20250183015
- Publication date Jun 5, 2025
- LAM RESEARCH CORPORATION
- Seyed Jafar JAFARIAN-TEHRANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND CEILING HEATER
- Publication number 20250179642
- Publication date Jun 5, 2025
- Kokusai Electric Corporation
- Tetsuya KOSUGI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
- Publication number 20250180996
- Publication date Jun 5, 2025
- TOKYO ELECTRON LIMITED
- Shinichiro KAWAKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE COOLING APPARATUS USING CONDUCTION AND RADIANCE
- Publication number 20250183068
- Publication date Jun 5, 2025
- ASM IP HOLDING B.V.
- Mandar Vijay Deshpande
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR HEAT-TREATING SUBSTRATE AND APPARATUS FOR TREATING SU...
- Publication number 20250183062
- Publication date Jun 5, 2025
- SEMES CO., LTD.
- Kyung Taek IM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR ETCHING SILICON OXIDE
- Publication number 20250174464
- Publication date May 29, 2025
- Central Glass Company, Limited
- Shoi SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR MANUFACTURING SEMICONDUCTOR PACKAGE AND METHOD OF MAN...
- Publication number 20250167015
- Publication date May 22, 2025
- Samsung Electronics Co., Ltd.
- Donguk KWON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC HEATER
- Publication number 20250167019
- Publication date May 22, 2025
- MICO CERAMICS LTD.
- Jung-Chul Jin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF USING EXHAUST SYSTEM AND METHOD OF USING PROCESS EQUIPMENT
- Publication number 20250167014
- Publication date May 22, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsien-Chang HSIEH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RATING SUBSTRATE SUPPORT ASSEMBLIES BASED ON IMPEDANCE CIRCUIT ELEC...
- Publication number 20250157788
- Publication date May 15, 2025
- Applied Materials, Inc.
- Arvind Shankar Raman
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
VACUUM HOLE CONNECTOR, SUBSTRATE SUPPORT, SUBSTRATE TREATMENT APPAR...
- Publication number 20250149374
- Publication date May 8, 2025
- Jae Oh BANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPIN CHUCK AND WAFER CLEANING DEVICE INCLUDING THE SAME
- Publication number 20250140579
- Publication date May 1, 2025
- Samsung Electronics Co., Ltd.
- Sunghwan Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PROCESSING SUBSTRATE
- Publication number 20250140595
- Publication date May 1, 2025
- Samsung Electronics Co., Ltd.
- Yeontae Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUSES FOR RADIATIVE HEATING OF AN EDGE REGION OF A SEMICONDUC...
- Publication number 20250125165
- Publication date Apr 17, 2025
- LAM RESEARCH CORPORATION
- Sivananda Krishnan Kanakasabapathy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUSCEPTOR ASSEMBLY THERMAL BREAK AND METHODS FOR COOLING A SUSCEPTO...
- Publication number 20250125183
- Publication date Apr 17, 2025
- Applied Materials, Inc.
- Vijayabhaskara Venkatagiriyappa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20250118541
- Publication date Apr 10, 2025
- Hitachi High-Tech Corporation
- Tomoaki HYODO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inspection Method
- Publication number 20250112096
- Publication date Apr 3, 2025
- TOKYO ELECTRON LIMITED
- Hiroyuki NAKAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GROUND ELECTRODE FORMED IN AN ELECTROSTATIC CHUCK FOR A PLASMA PROC...
- Publication number 20250112076
- Publication date Apr 3, 2025
- Applied Materials, Inc.
- Michael R. RICE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL BONDED ESC WITH OUTER CERAMIC VACUUM ISOLATION RING FOR CRYOG...
- Publication number 20250112075
- Publication date Apr 3, 2025
- Applied Materials, Inc.
- Alexander SULYMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PEDESTAL HEATER
- Publication number 20250105034
- Publication date Mar 27, 2025
- Applied Materials, Inc.
- Justin GAU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE OFFSET AND ZONE CONTROL TUNING
- Publication number 20250105035
- Publication date Mar 27, 2025
- Applied Materials, Inc.
- Ole LUCKNER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR SUBSTRATE SUPPORT ASSEMBLY
- Publication number 20250105051
- Publication date Mar 27, 2025
- Applied Materials, Inc.
- Arvinder Manmohan Singh Chadha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND HEATING UNIT
- Publication number 20250096028
- Publication date Mar 20, 2025
- SEMES CO., LTD.
- Ju Mi LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PLACEMENT TABLE AND METHOD OF USING THE SAME
- Publication number 20250079230
- Publication date Mar 6, 2025
- NGK Insulators, Ltd.
- Ikuhisa MORIOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING DEVICE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250069912
- Publication date Feb 27, 2025
- TOKYO ELECTRON LIMITED
- Einosuke TSUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
- Publication number 20250068080
- Publication date Feb 27, 2025
- SEMES CO., LTD.
- Kyung Taek IM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING DEVICE
- Publication number 20250069907
- Publication date Feb 27, 2025
- TOKYO ELECTRON LIMITED
- Hiroki OHNO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR SUBSTRATE SUPPORT LEVELING APPARATUS
- Publication number 20250054797
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- Katherine Woo
- H01 - BASIC ELECTRIC ELEMENTS

mainly by conduction

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Heating device and heating method for semiconductor thermal process

Method of heat-treating silicon wafer using lateral heat treatment...

Stacked structure and semiconductor manufacturing apparatus member

Plasma processing apparatus, and method and program for controlling...

Substrate fixing device

Heater cover plate for uniformity improvement

Heated substrate support

Apparatus and method for drying substrate

Substrate processing apparatus and method

Heat treatment apparatus and heat treatment method

Substrate treating apparatus and substrate treating method

Electrostatic chuck with multiple heater zones

Method and system for thermal control of devices in an electronics...

Semiconductor wafer mass metrology apparatus and semiconductor wafe...

Mounting table and plasma processing apparatus

Sample holder

Heater and stage having the heater

Multi-zone heater

Methods and systems for temperature control for a substrate

Member for semiconductor manufacturing apparatus

Substrate treatment device

Anodized titanium material and method for producing the same

Friction stir welding in semiconductor manufacturing applications

Advanced temperature control for wafer carrier in plasma processing...

Holding device and method of manufacturing holding device

Unit for supplying liquid, apparatus and method for treating substr...

Method and system for thermal control of devices in electronics tester

Annealing method

Pressing group for a sintering press for sintering electronic compo...

Substrate processing apparatus

Patents Applicationslast 30 patents

CERAMIC SUSCEPTOR

HEATER

HIGH POWER CABLE FOR HEATED COMPONENTS IN RF ENVIRONMENT

SUBSTRATE PROCESSING APPARATUS AND CEILING HEATER

HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD

SUBSTRATE COOLING APPARATUS USING CONDUCTION AND RADIANCE

APPARATUS FOR HEAT-TREATING SUBSTRATE AND APPARATUS FOR TREATING SU...

METHOD AND DEVICE FOR ETCHING SILICON OXIDE

APPARATUS FOR MANUFACTURING SEMICONDUCTOR PACKAGE AND METHOD OF MAN...

CERAMIC HEATER

METHOD OF USING EXHAUST SYSTEM AND METHOD OF USING PROCESS EQUIPMENT

RATING SUBSTRATE SUPPORT ASSEMBLIES BASED ON IMPEDANCE CIRCUIT ELEC...

VACUUM HOLE CONNECTOR, SUBSTRATE SUPPORT, SUBSTRATE TREATMENT APPAR...

SPIN CHUCK AND WAFER CLEANING DEVICE INCLUDING THE SAME

APPARATUS FOR PROCESSING SUBSTRATE

APPARATUSES FOR RADIATIVE HEATING OF AN EDGE REGION OF A SEMICONDUC...

SUSCEPTOR ASSEMBLY THERMAL BREAK AND METHODS FOR COOLING A SUSCEPTO...

PLASMA PROCESSING APPARATUS

Inspection Method

GROUND ELECTRODE FORMED IN AN ELECTROSTATIC CHUCK FOR A PLASMA PROC...

METAL BONDED ESC WITH OUTER CERAMIC VACUUM ISOLATION RING FOR CRYOG...

PEDESTAL HEATER

TEMPERATURE OFFSET AND ZONE CONTROL TUNING

MODULAR SUBSTRATE SUPPORT ASSEMBLY

SUBSTRATE TREATING APPARATUS AND HEATING UNIT

WAFER PLACEMENT TABLE AND METHOD OF USING THE SAME

HEATING DEVICE AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD

SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING DEVICE

SEMICONDUCTOR SUBSTRATE SUPPORT LEVELING APPARATUS