mainly by conduction

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CPC
H01L21/67103

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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H01L21/67103mainly by conduction

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Heater and heating base
- Patent number 12,191,170
- Issue date Jan 7, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Dongdong Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing chamber, substrate processing system including...
- Patent number 12,191,190
- Issue date Jan 7, 2025
- Samsung Electronics Co., Ltd.
- Yongmyung Jun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for faceplate temperature control
- Patent number 12,191,169
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structural body and heating apparatus
- Patent number 12,183,601
- Issue date Dec 31, 2024
- Kyocera Corporation
- Yasunori Kawanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for adjusting surface topography of a substrate support app...
- Patent number 12,183,621
- Issue date Dec 31, 2024
- Micron Technology, Inc.
- Paul D. Shirley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pressure regulated semiconductor wafer cooling apparatus and method...
- Patent number 12,181,191
- Issue date Dec 31, 2024
- Edwards Vacuum LLC
- Kaustubh Kale
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of determination of pretreatment conditions of heat treatmen...
- Patent number 12,183,600
- Issue date Dec 31, 2024
- Sumco Corporation
- Yoshihiro Kuwano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing system and method for manufactur...
- Patent number 12,170,214
- Issue date Dec 17, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Kai-Chih Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature measurement unit, heat treatment apparatus, and tempera...
- Patent number 12,154,798
- Issue date Nov 26, 2024
- Tokyo Electron Limited
- Yutaka Mizobe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Susceptor for high-temperature use having shaft with low thermal co...
- Patent number 12,154,799
- Issue date Nov 26, 2024
- MiCo Ceramics Ltd.
- Jung Chul Jin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support
- Patent number 12,148,636
- Issue date Nov 19, 2024
- Tokyo Electron Limited
- Masanori Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and temperature control method
- Patent number 12,142,501
- Issue date Nov 12, 2024
- Tokyo Electron Limited
- Kenichiro Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heating platform, thermal treatment and manufacturing method
- Patent number 12,142,497
- Issue date Nov 12, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsiao-Hua Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic structure and wafer system
- Patent number 12,142,498
- Issue date Nov 12, 2024
- Kyocera Corporation
- Yasunori Kawanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic heater
- Patent number 12,144,067
- Issue date Nov 12, 2024
- NGK Insulators, Ltd.
- Masaki Ishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor substrate support leveling apparatus
- Patent number 12,131,934
- Issue date Oct 29, 2024
- Applied Materials, Inc.
- Katherine Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated epitaxy and preclean system
- Patent number 12,125,698
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Lara Hawrylchak
- B08 - CLEANING
Information Patent Grant
Method and device for etching silicon oxide
- Patent number 12,125,709
- Issue date Oct 22, 2024
- Central Glass Company, Limited
- Shoi Suzuki
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Chip-transferring system and chip-transferring method
- Patent number 12,125,719
- Issue date Oct 22, 2024
- Skilleux Electricity Inc.
- Chien-Shou Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate fixing device, electrostatic chuck and method of manufact...
- Patent number 12,125,733
- Issue date Oct 22, 2024
- Shinko Electric Industries Co., Ltd.
- Aya Uchiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-zone pedestal heater without vias
- Patent number 12,127,310
- Issue date Oct 22, 2024
- Watlow Electric Manufacturing Company
- Kevin Ptasienski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hot plate cooling system
- Patent number 12,119,245
- Issue date Oct 15, 2024
- Winbond Electronics Corp.
- Yao-Huang Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rotating substrate support
- Patent number 12,106,944
- Issue date Oct 1, 2024
- ASM IP Holding B.V.
- Yukihiro Mori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-zone azimuthal heater
- Patent number 12,100,603
- Issue date Sep 24, 2024
- Watlow Electric Manufacturing Company
- Kevin Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tape heating methods
- Patent number 12,094,750
- Issue date Sep 17, 2024
- SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Michael J. Seddon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermocouple guide and ceramic heater
- Patent number 12,087,600
- Issue date Sep 10, 2024
- NGK Insulators, Ltd.
- Ryohei Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus, temperature control method, and temper...
- Patent number 12,087,559
- Issue date Sep 10, 2024
- Tokyo Electron Limited
- Shinsuke Oka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Connector for substrate support with embedded temperature sensors
- Patent number 12,077,862
- Issue date Sep 3, 2024
- Lam Research Corporation
- Siyuan Tian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature offset and zone control tuning
- Patent number 12,080,573
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Ole Luckner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat shield for chamber door and devices manufactured using same
- Patent number 12,074,032
- Issue date Aug 27, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Meng-Je Chuang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND DEVICE FOR ETCHING SILICON OXIDE
- Publication number 20250014906
- Publication date Jan 9, 2025
- Central Glass Company, Limited
- Shoi SUZUKI
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
CORRECTION APPARATUS, EXPOSURE APPARATUS, COATER AND DEVELOPER APPA...
- Publication number 20250014918
- Publication date Jan 9, 2025
- Nikon Corporation
- Go ICHINOSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METROLOGY SLOT PLATES
- Publication number 20250014922
- Publication date Jan 9, 2025
- Applied Materials Inc.
- Kenneth Brian Doering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20250014939
- Publication date Jan 9, 2025
- NGK Insulators, Ltd.
- Tatsuya KUNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL LEVELER BLANK FOR INTEGRATION WITH THERMAL MANAGEMENT
- Publication number 20240429071
- Publication date Dec 26, 2024
- Momentive Performance Materials Quartz, Inc.
- Matthew Peter Gallaugher
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
METHOD AND SYSTEM FOR THERMAL CONTROL OF DEVICS IN ELECTRONICS TESTER
- Publication number 20240426938
- Publication date Dec 26, 2024
- Aehr Test Systems
- Jovan Jovanovic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR THERMAL CONTROL OF DEVICES IN AN ELECTRONICS...
- Publication number 20240426939
- Publication date Dec 26, 2024
- Aehr Test Systems
- Jovan Jovanovic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONNECTOR FOR SUBSTRATE SUPPORT WITH EMBEDDED TEMPERATURE SENSORS
- Publication number 20240417857
- Publication date Dec 19, 2024
- LAM RESEARCH CORPORATION
- Siyuan TIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROTATING SUBSTRATE SUPPORT
- Publication number 20240420931
- Publication date Dec 19, 2024
- ASM IP HOLDING B.V.
- Yukihiro Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICLE FURNACE FOR PROCESSING A PLURALITY OF SUBSTRATES AND METHO...
- Publication number 20240420971
- Publication date Dec 19, 2024
- ASM IP HOLDING B.V.
- Subir Parui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-ZONE AZIMUTHAL HEATER
- Publication number 20240412988
- Publication date Dec 12, 2024
- WATLOW ELECTRIC MANUFACTURING COMPANY
- Kevin SMITH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TAPE HEATING METHODS
- Publication number 20240395593
- Publication date Nov 28, 2024
- SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Michael J. SEDDON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADAPTIVE BAKING METHOD
- Publication number 20240393051
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tzung-Chen WU
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
FABRICATION OF SUBSTRATE SUPPORT DEVICES USING INORGANIC DIELECTRIC...
- Publication number 20240395591
- Publication date Nov 28, 2024
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROGRESSIVE HEATING OF COMPONENTS OF SUBSTRATE PROCESSING SYSTEMS U...
- Publication number 20240395569
- Publication date Nov 28, 2024
- LAM RESEARCH CORPORATION
- Ramesh CHANDRASEKHARAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FREQUENCY AND PHASE CONTROLLED TRANSDUCERS AND SENSING
- Publication number 20240387204
- Publication date Nov 21, 2024
- Anand Deo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONSTANT-TEMPERATURE LIQUID SUPPLY APPARATUS
- Publication number 20240387210
- Publication date Nov 21, 2024
- Disco Corporation
- Tadaomi MATSUMOTO
- B24 - GRINDING POLISHING
Information Patent Application
HEATING PLATFORM, THERMAL TREATMENT AND MANUFACTURING METHOD
- Publication number 20240387203
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsiao-Hua Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DIELECTRIC MATERIAL FILL AND TREATMENT
- Publication number 20240379420
- Publication date Nov 14, 2024
- Applied Materials, Inc.
- Shi YOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPANDING DEVICE, SEMICONDUCTOR CHIP MANUFACTURING METHOD, AND SEMI...
- Publication number 20240379389
- Publication date Nov 14, 2024
- YAMAHA HATSUDOKI KABUSHIKI KAISHA
- Yoshikuni SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL DYNAMIC RESPONSE SENSING SYSTEMS FOR HEATERS
- Publication number 20240371665
- Publication date Nov 7, 2024
- WATLOW ELECTRIC MANUFACTURING COMPANY
- Louis P. STEINHAUSER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING CHAMBER FOR METAL OXIDE REMOVAL
- Publication number 20240371685
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Liang Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INFRARED REFLOW DEVICE
- Publication number 20240363376
- Publication date Oct 31, 2024
- National Pingtung University of Science and Technology
- Wei-Hua Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH TEMPERATURE ALUMINUM NITRIDE HEATER PEDESTAL WITH MULTI-ZONE C...
- Publication number 20240347353
- Publication date Oct 17, 2024
- Therm-X of California, Inc.
- Annendra Lal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR FABRICATION SYSTEM EMBEDDED WITH EFFECTIVE BAKING MODULE
- Publication number 20240347345
- Publication date Oct 17, 2024
- Taiwan Semiconductor Manufacturing Co., LTD
- Han-Yu Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE FOR CHANGING THE TEMPERATURE OF A WAFER
- Publication number 20240347352
- Publication date Oct 17, 2024
- METRYX LTD.
- Gregor Robert ELLIOTT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATIC CONTROL OF SUBSTRATES
- Publication number 20240339341
- Publication date Oct 10, 2024
- Applied Materials, Inc.
- Mauro Cimino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer Cooling System
- Publication number 20240332044
- Publication date Oct 3, 2024
- Taiwan Semconductor Manufacturing Company, Ltd.
- Otto CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNABLE TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY
- Publication number 20240321620
- Publication date Sep 26, 2024
- Applied Materials, Inc.
- Vijay D. PARKHE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BONDING DEVICE AS WELL AS METHOD FOR BONDING SUBSTRATES
- Publication number 20240312806
- Publication date Sep 19, 2024
- George GREGORY
- H01 - BASIC ELECTRIC ELEMENTS

mainly by conduction

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Heater and heating base

Substrate processing chamber, substrate processing system including...

Systems and methods for faceplate temperature control

Structural body and heating apparatus

Methods for adjusting surface topography of a substrate support app...

Pressure regulated semiconductor wafer cooling apparatus and method...

Method of determination of pretreatment conditions of heat treatmen...

Semiconductor device manufacturing system and method for manufactur...

Temperature measurement unit, heat treatment apparatus, and tempera...

Susceptor for high-temperature use having shaft with low thermal co...

Substrate support

Substrate processing system and temperature control method

Heating platform, thermal treatment and manufacturing method

Ceramic structure and wafer system

Ceramic heater

Semiconductor substrate support leveling apparatus

Integrated epitaxy and preclean system

Method and device for etching silicon oxide

Chip-transferring system and chip-transferring method

Substrate fixing device, electrostatic chuck and method of manufact...

Multi-zone pedestal heater without vias

Hot plate cooling system

Rotating substrate support

Multi-zone azimuthal heater

Tape heating methods

Thermocouple guide and ceramic heater

Plasma processing apparatus, temperature control method, and temper...

Connector for substrate support with embedded temperature sensors

Temperature offset and zone control tuning

Heat shield for chamber door and devices manufactured using same

Patents Applicationslast 30 patents

METHOD AND DEVICE FOR ETCHING SILICON OXIDE

CORRECTION APPARATUS, EXPOSURE APPARATUS, COATER AND DEVELOPER APPA...

METROLOGY SLOT PLATES

MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS

THERMAL LEVELER BLANK FOR INTEGRATION WITH THERMAL MANAGEMENT

METHOD AND SYSTEM FOR THERMAL CONTROL OF DEVICS IN ELECTRONICS TESTER

METHOD AND SYSTEM FOR THERMAL CONTROL OF DEVICES IN AN ELECTRONICS...

CONNECTOR FOR SUBSTRATE SUPPORT WITH EMBEDDED TEMPERATURE SENSORS

ROTATING SUBSTRATE SUPPORT

VERTICLE FURNACE FOR PROCESSING A PLURALITY OF SUBSTRATES AND METHO...

MULTI-ZONE AZIMUTHAL HEATER

TAPE HEATING METHODS

ADAPTIVE BAKING METHOD

FABRICATION OF SUBSTRATE SUPPORT DEVICES USING INORGANIC DIELECTRIC...

PROGRESSIVE HEATING OF COMPONENTS OF SUBSTRATE PROCESSING SYSTEMS U...

FREQUENCY AND PHASE CONTROLLED TRANSDUCERS AND SENSING

CONSTANT-TEMPERATURE LIQUID SUPPLY APPARATUS

HEATING PLATFORM, THERMAL TREATMENT AND MANUFACTURING METHOD

METHOD OF DIELECTRIC MATERIAL FILL AND TREATMENT

EXPANDING DEVICE, SEMICONDUCTOR CHIP MANUFACTURING METHOD, AND SEMI...

THERMAL DYNAMIC RESPONSE SENSING SYSTEMS FOR HEATERS

CLEANING CHAMBER FOR METAL OXIDE REMOVAL

INFRARED REFLOW DEVICE

HIGH TEMPERATURE ALUMINUM NITRIDE HEATER PEDESTAL WITH MULTI-ZONE C...

SEMICONDUCTOR FABRICATION SYSTEM EMBEDDED WITH EFFECTIVE BAKING MODULE

DEVICE FOR CHANGING THE TEMPERATURE OF A WAFER

AUTOMATIC CONTROL OF SUBSTRATES

Wafer Cooling System

TUNABLE TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY

BONDING DEVICE AS WELL AS METHOD FOR BONDING SUBSTRATES