Making n or p doped regions or layers

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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H01L21/0455Making n or p doped regions or layers

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor device and method
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- Issue date Oct 15, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shahaji B. More
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser radiation system
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- Issue date Aug 27, 2024
- Gigaphoton Inc.
- Osamu Wakabayashi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for forming a semiconductor device and a semiconductor device
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- Issue date Jul 2, 2024
- Infineon Technologies AG
- Hans-Joachim Schulze
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a semiconductor device
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- Issue date Jan 30, 2024
- Infineon Technologies AG
- Reinhard Ploss
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method
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- Issue date Nov 14, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shahaji B. More
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for thermally processing a substrate and associated system
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- Issue date May 30, 2023
- LASER SYSTEMS & SOLUTIONS OF EUROPE
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- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for making a bipolar junction transistor having an integrate...
- Patent number 11,621,200
- Issue date Apr 4, 2023
- Diodes Incorporated
- Peter Hugh Blair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device including junction material in a trench and ma...
- Patent number 11,322,596
- Issue date May 3, 2022
- Infineon Technologies AG
- Jens Peter Konrath
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method
- Patent number 11,222,963
- Issue date Jan 11, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shahaji B. More
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a semiconductor device
- Patent number 11,139,369
- Issue date Oct 5, 2021
- Infineon Technologies AG
- Reinhard Ploss
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming a semiconductor device and a semiconductor device
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- Issue date Aug 31, 2021
- Infineon Technologies AG
- Hans-Joachim Schulze
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device including silicon carbide body and method of m...
- Patent number 11,063,142
- Issue date Jul 13, 2021
- Infineon Technologies AG
- Jens Peter Konrath
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon carbide semiconductor device and method of manufacturing a...
- Patent number 10,930,741
- Issue date Feb 23, 2021
- Fuji Electric Co., Ltd.
- Makoto Utsumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Implanted dopant activation for wide bandgap semiconductor electronics
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- Issue date Dec 1, 2020
- The Government of the United States of America, as represented by the Secreta...
- Boris N. Feigelson
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of producing differently doped zones in a silicon substrate,...
- Patent number 10,825,945
- Issue date Nov 3, 2020
- Universitat Konstanz
- Sebastian Gloger
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Semiconductor device and manufacture thereof
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- Issue date Oct 13, 2020
- Semiconductor Manufacturing International (Shanghai) Corporation
- Dae Sub Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical insulated gate turn-off thyristor with intermediate p+ lay...
- Patent number 10,777,670
- Issue date Sep 15, 2020
- Pakal Technologies, Inc.
- Hidenori Akiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Doping system, doping method and method for manufacturing silicon c...
- Patent number 10,727,060
- Issue date Jul 28, 2020
- Fuji Electric Co., Ltd.
- Kenichi Iguchi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Impurity adding apparatus, impurity adding method, and semiconducto...
- Patent number 10,658,183
- Issue date May 19, 2020
- Fuji Electric Co., Ltd.
- Kenichi Iguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser doping apparatus and laser doping method
- Patent number 10,629,438
- Issue date Apr 21, 2020
- Kyushu University
- Tomoyuki Ohkubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacture thereof
- Patent number 10,600,650
- Issue date Mar 24, 2020
- Semiconductor Manufacturing International (Shanghai) Corporation
- Dae Sub Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of reducing a sheet resistance in an electronic device, and...
- Patent number 10,573,533
- Issue date Feb 25, 2020
- Infineon Technologies AG
- Edward Fuergut
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method
- Patent number 10,510,871
- Issue date Dec 17, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shahaji B. More
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,453,687
- Issue date Oct 22, 2019
- Fuji Electric Co., Ltd.
- Kenichi Iguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method for manufacturing semiconductor device
- Patent number 10,411,093
- Issue date Sep 10, 2019
- Mitsubishi Electric Corporation
- Katsumi Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon-carbide trench gate MOSFETs and methods of manufacture
- Patent number 10,355,123
- Issue date Jul 16, 2019
- FAIRCHILD SEMICONDUCTOR CORPORATION
- Andrei Konstantinov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a semiconductor device
- Patent number 10,340,335
- Issue date Jul 2, 2019
- Infineon Technologies AG
- Reinhard Ploss
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 10,236,399
- Issue date Mar 19, 2019
- ABLIC INC.
- Tatsuya Aso
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing silicon carbide semiconductor device and s...
- Patent number 10,217,813
- Issue date Feb 26, 2019
- Sumitomo Electric Industries, Ltd
- Toru Hiyoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for preparing layered semiconductor structures
- Patent number 10,068,795
- Issue date Sep 4, 2018
- GlobalWafers Co., Ltd.
- Michael J. Ries
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD
- Publication number 20240395905
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Co, LTD.
- Shahaji B. More
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON CARBIDE SUBSTRATE AND MANUFACTURING METHOD THEREOF
- Publication number 20240371945
- Publication date Nov 7, 2024
- GLOBALWAFERS CO., LTD.
- Ying-Ru Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSISTOR AND METHOD FOR FABRICATING THE SAME
- Publication number 20240170342
- Publication date May 23, 2024
- SK HYNIX INC.
- Jeong Hwan SONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE WITH SELECTIVELY GROWN FIELD OXIDE LAYER IN ED...
- Publication number 20230420577
- Publication date Dec 28, 2023
- Wolfspeed, Inc.
- In-Hwan Ji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD
- Publication number 20230387267
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shahaji B. More
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
- Publication number 20230164973
- Publication date May 25, 2023
- CHANGXIN MEMORY TECHNOLOGIES, INC
- Yutong SHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device and Method
- Publication number 20220109060
- Publication date Apr 7, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shahaji B. More
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Producing or Modifying Silicon Carbide-Containing Articles
- Publication number 20220097256
- Publication date Mar 31, 2022
- PSC Technologies GmbH
- Siegmund GREULICH-WEBER
- C01 - INORGANIC CHEMISTRY
Information Patent Application
OPTICAL MODULATOR
- Publication number 20220066280
- Publication date Mar 3, 2022
- Sumitomo Electric Industries, Ltd.
- Naoya KONO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING A SEMICONDUCTOR DEVICE
- Publication number 20210376068
- Publication date Dec 2, 2021
- INFINEON TECHNOLOGIES AG
- Reinhard PLOSS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Forming a Semiconductor Device and a Semiconductor Device
- Publication number 20210359087
- Publication date Nov 18, 2021
- Hans-Joachim Schulze
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for thermally processing a substrate and associated system
- Publication number 20210225670
- Publication date Jul 22, 2021
- Laser Systems & Solutions of Europe
- Fulvio MAZZAMUTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON CARBIDE SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING A...
- Publication number 20200212183
- Publication date Jul 2, 2020
- Fuji Electric Co., Ltd.
- Makoto UTSUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE INCLUDING SILICON CARBIDE BODY AND METHOD OF M...
- Publication number 20200203513
- Publication date Jun 25, 2020
- INFINEON TECHNOLOGIES AG
- Jens Peter KONRATH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
- Publication number 20200185223
- Publication date Jun 11, 2020
- Semiconductor Manufacturing International (Shanghai) Corporation
- Dae Sub JUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device and Method
- Publication number 20200119167
- Publication date Apr 16, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shahaji B. More
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE INCLUDING JUNCTION MATERIAL IN A TRENCH AND MA...
- Publication number 20200066857
- Publication date Feb 27, 2020
- INFINEON TECHNOLOGIES AG
- Jens Peter Konrath
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Implanted Dopant Activation for Wide Bandgap Semiconductor Electronics
- Publication number 20190341261
- Publication date Nov 7, 2019
- The Government of the United States of America, as represented by the Secreta...
- Boris N. Feigelson
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD OF FORMING A SEMICONDUCTOR DEVICE
- Publication number 20190319091
- Publication date Oct 17, 2019
- INFINEON TECHNOLOGIES AG
- Reinhard PLOSS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER DOPING APPARATUS AND LASER DOPING METHOD
- Publication number 20190252190
- Publication date Aug 15, 2019
- KYUSHU UNIVERSITY
- Tomoyuki OHKUBO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DOPING SYSTEM, DOPING METHOD AND METHOD FOR MANUFACTURING SILICON C...
- Publication number 20190228971
- Publication date Jul 25, 2019
- Fuji Electric Co., Ltd.
- Kenichi IGUCHI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method for Forming a Semiconductor Device and a Semiconductor Device
- Publication number 20190157395
- Publication date May 23, 2019
- Hans-Joachim Schulze
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF REDUCING A SHEET RESISTANCE IN AN ELECTRONIC DEVICE, AND...
- Publication number 20190013210
- Publication date Jan 10, 2019
- INFINEON TECHNOLOGIES AG
- Edward FUERGUT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20180248003
- Publication date Aug 30, 2018
- Mitsubishi Electric Corporation
- Katsumi NAKAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SILICON CARBIDE SEMICONDUCTOR DEVICE AND S...
- Publication number 20180108730
- Publication date Apr 19, 2018
- Sumitomo Electric Industries, Ltd.
- Toru Hiyoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20180047858
- Publication date Feb 15, 2018
- SII Semiconductor Corporation
- Tatsuya ASO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20180040690
- Publication date Feb 8, 2018
- Fuji Electric Co., Ltd.
- Yusuke KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER DOPING APPARATUS AND LASER DOPING METHOD
- Publication number 20170365475
- Publication date Dec 21, 2017
- KYUSHU UNIVERSITY
- Tomoyuki OHKUBO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Carbon Vacancy Defect Reduction Method for SiC
- Publication number 20170309484
- Publication date Oct 26, 2017
- INFINEON TECHNOLOGIES AG
- Mihai Draghici
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON CARBIDE SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SI...
- Publication number 20170047394
- Publication date Feb 16, 2017
- DENSO CORPORATION
- Yuichi Takeuchi
- H01 - BASIC ELECTRIC ELEMENTS

Making n or p doped regions or layers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Semiconductor device and method

Laser radiation system

Method for forming a semiconductor device and a semiconductor device

Method of forming a semiconductor device

Semiconductor device and method

Method for thermally processing a substrate and associated system

Method for making a bipolar junction transistor having an integrate...

Semiconductor device including junction material in a trench and ma...

Semiconductor device and method

Method of forming a semiconductor device

Method for forming a semiconductor device and a semiconductor device

Semiconductor device including silicon carbide body and method of m...

Silicon carbide semiconductor device and method of manufacturing a...

Implanted dopant activation for wide bandgap semiconductor electronics

Method of producing differently doped zones in a silicon substrate,...

Semiconductor device and manufacture thereof

Vertical insulated gate turn-off thyristor with intermediate p+ lay...

Doping system, doping method and method for manufacturing silicon c...

Impurity adding apparatus, impurity adding method, and semiconducto...

Laser doping apparatus and laser doping method

Semiconductor device and manufacture thereof

Method of reducing a sheet resistance in an electronic device, and...

Semiconductor device and method

Method of manufacturing semiconductor device

Semiconductor device and method for manufacturing semiconductor device

Silicon-carbide trench gate MOSFETs and methods of manufacture

Method of forming a semiconductor device

Method of manufacturing a semiconductor device

Method for manufacturing silicon carbide semiconductor device and s...

Methods for preparing layered semiconductor structures

Patents Applicationslast 30 patents

SEMICONDUCTOR DEVICE AND METHOD

SILICON CARBIDE SUBSTRATE AND MANUFACTURING METHOD THEREOF

TRANSISTOR AND METHOD FOR FABRICATING THE SAME

SEMICONDUCTOR DEVICE WITH SELECTIVELY GROWN FIELD OXIDE LAYER IN ED...

SEMICONDUCTOR DEVICE AND METHOD

SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF

Semiconductor Device and Method

Method for Producing or Modifying Silicon Carbide-Containing Articles

OPTICAL MODULATOR

METHOD OF FORMING A SEMICONDUCTOR DEVICE

Method for Forming a Semiconductor Device and a Semiconductor Device

Method for thermally processing a substrate and associated system

SILICON CARBIDE SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING A...

SEMICONDUCTOR DEVICE INCLUDING SILICON CARBIDE BODY AND METHOD OF M...

SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF

Semiconductor Device and Method

SEMICONDUCTOR DEVICE INCLUDING JUNCTION MATERIAL IN A TRENCH AND MA...

Implanted Dopant Activation for Wide Bandgap Semiconductor Electronics

METHOD OF FORMING A SEMICONDUCTOR DEVICE

LASER DOPING APPARATUS AND LASER DOPING METHOD

DOPING SYSTEM, DOPING METHOD AND METHOD FOR MANUFACTURING SILICON C...

Method for Forming a Semiconductor Device and a Semiconductor Device

METHOD OF REDUCING A SHEET RESISTANCE IN AN ELECTRONIC DEVICE, AND...

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

METHOD FOR MANUFACTURING SILICON CARBIDE SEMICONDUCTOR DEVICE AND S...

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

LASER DOPING APPARATUS AND LASER DOPING METHOD

Carbon Vacancy Defect Reduction Method for SiC

SILICON CARBIDE SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SI...