Manipulators transporting wafers

Industry

CPC
B25J11/0095

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B25Hand tools B25JMANIPULATORS CHAMBERS PROVIDED WITH MANIPULATION DEVICES B25J11/00Manipulators not otherwise provided for

Current Industry

B25J11/0095Manipulators transporting wafers

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Substrate transfer devices, systems and methods of use thereof
- Patent number 12,251,830
- Issue date Mar 18, 2025
- Applied Materials, Inc.
- Alexander Berger
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Method for PUF generation using variations in transistor threshold...
- Patent number 12,237,197
- Issue date Feb 25, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih-Lien Linus Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate position calibration for substrate supports in substrate...
- Patent number 12,228,395
- Issue date Feb 18, 2025
- Applied Materials, Inc.
- Tomoharu Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Operations of robot apparatuses within rectangular mainframes
- Patent number 12,226,896
- Issue date Feb 18, 2025
- Applied Materials, Inc.
- Rajkumar Thanu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Distributed-architecture robot with multiple linkages
- Patent number 12,208,517
- Issue date Jan 28, 2025
- Persimmon Technologies Corporation
- Martin Hosek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate conveying robot
- Patent number 12,202,124
- Issue date Jan 21, 2025
- Kawasaki Jukogyo Kabushiki Kaisha
- Ippei Shimizu
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Suction clamp, object handler, stage apparatus and lithographic app...
- Patent number 12,197,141
- Issue date Jan 14, 2025
- ASML Netherlands B.V.
- Gijs Kramer
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate transfer method and substrate transfer system
- Patent number 12,198,955
- Issue date Jan 14, 2025
- Tokyo Electron Limited
- Wataru Matsumoto
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate cleaning line and substrate cleaning system comprising th...
- Patent number 12,186,900
- Issue date Jan 7, 2025
- KCTECH Co., Ltd.
- Hee Sung Chae
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Industrial robot having a mounting mechanism on which a plurality o...
- Patent number 12,191,189
- Issue date Jan 7, 2025
- NIDEC SANKYO CORPORATION
- Tamotsu Kuribayashi
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Dual arm with opposed dual end effectors and no vertical wafer overlap
- Patent number 12,191,187
- Issue date Jan 7, 2025
- Persimmon Technologies Corporation
- Scott Wilkas
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Transfer device, transfer system, and end effector
- Patent number 12,191,188
- Issue date Jan 7, 2025
- Tokyo Electron Limited
- Norihiko Amikura
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing apparatus and substrate alignment method using...
- Patent number 12,172,313
- Issue date Dec 24, 2024
- Samsung Electronics Co., Ltd.
- Daejung Kim
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Assembly and method for transferring substrate
- Patent number 12,176,234
- Issue date Dec 24, 2024
- Semes Co., Ltd.
- Sung Hyuk Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fixture for automatic calibration of substrate transfer robot
- Patent number 12,168,301
- Issue date Dec 17, 2024
- Lam Research Corporation
- Richard Blank
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate conveying robot and substrate conveying robot system
- Patent number 12,162,145
- Issue date Dec 10, 2024
- Kawasaki Jukogyo Kabushiki Kaisha
- Haruhiko Tan
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus
- Patent number 12,142,511
- Issue date Nov 12, 2024
- BROOKS AUTOMATION US, LLC
- Alexander Krupyshev
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Automated transfer of edge ring requiring rotational alignment
- Patent number 12,142,466
- Issue date Nov 12, 2024
- Lam Research Corporation
- Damon Tyrone Genetti
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Vacuum transfer device and method for controlling vacuum transfer d...
- Patent number 12,128,550
- Issue date Oct 29, 2024
- Tokyo Electron Limited
- Seiji Ishibashi
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Robot
- Patent number 12,128,545
- Issue date Oct 29, 2024
- Kawasaki Jukogyo Kabushiki Kaisha
- Ippei Shimizu
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate transfer robot for transferring substrate in vacuum chamber
- Patent number 12,131,939
- Issue date Oct 29, 2024
- T-Robotics Co., Ltd.
- Soo Jong Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High speed substrate sorter
- Patent number 12,128,446
- Issue date Oct 29, 2024
- Applied Materials, Inc.
- Asaf Schlezinger
- B07 - SEPARATING SOLIDS FROM SOLIDS SORTING
Information Patent Grant
Compact traversing robot
- Patent number 12,128,558
- Issue date Oct 29, 2024
- Persimmon Technologies Corporation
- Martin Hosek
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate mapping device, method of mapping by the device, and meth...
- Patent number 12,131,925
- Issue date Oct 29, 2024
- Kawasaki Jukogyo Kabushiki Kaisha
- Masaya Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer system, transfer device, and transfer method
- Patent number 12,131,937
- Issue date Oct 29, 2024
- Tokyo Electron Limited
- Norihiko Amikura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece transfer hand
- Patent number 12,122,042
- Issue date Oct 22, 2024
- Daihen Corporation
- Daisuke Sado
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
End effector for slab formed substrates
- Patent number 12,115,654
- Issue date Oct 15, 2024
- Atotech Deutschland GmbH
- Steffen Pollack
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Calibration of an electronics processing system
- Patent number 12,115,683
- Issue date Oct 15, 2024
- Applied Materials, Inc.
- Nicholas Michael Bergantz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate handling device and processing chamber
- Patent number 12,109,681
- Issue date Oct 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- You-Hua Chou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Robot for high-temperature applications
- Patent number 12,090,645
- Issue date Sep 17, 2024
- Persimmon Technologies Corporation
- Martin Hosek
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE ALIGNMENT METHOD USING...
- Publication number 20250091203
- Publication date Mar 20, 2025
- Samsung Electronics Co., Ltd.
- Daejung KIM
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
ROBOT, SYSTEM, CONTROL METHOD, AND COMPUTER-READABLE STORAGE MEDIUM
- Publication number 20250087523
- Publication date Mar 13, 2025
- Kabushiki Kaisha Yaskawa Denki
- Hiroki SANEMASA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE HOLDING HAND AND SUBSTRATE CONVEYOR ROBOT
- Publication number 20250083331
- Publication date Mar 13, 2025
- KAWASAKI JUKOGYO KABUSHIKI KAISHA
- Shinya KINOSHITA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
ROBOT AND SYSTEM
- Publication number 20250083332
- Publication date Mar 13, 2025
- Kabushiki Kaisha Yaskawa Denki
- Hiroki SANEMASA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
ROBOT, SYSTEM, CONTROL METHOD, AND COMPUTER-READABLE STORAGE MEDIUM
- Publication number 20250087522
- Publication date Mar 13, 2025
- Kabushiki Kaisha Yaskawa Denki
- Hiroki SANEMASA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SYSTEM AND ROBOT
- Publication number 20250083303
- Publication date Mar 13, 2025
- Kabushiki Kaisha Yaskawa Denki
- Hiroki SANEMASA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE TRANSPORT APPARATUS
- Publication number 20250087514
- Publication date Mar 13, 2025
- BROOKS AUTOMATION US, LLC
- Robert T. Caveney
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SEMICONDUCTOR DEVICE TRANSPORT UNIT AND CHAMBER INCLUDING SEMICONDU...
- Publication number 20250073915
- Publication date Mar 6, 2025
- ATECO INC.
- Taek Seon LEE
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
MAINTENANCE DEVICE
- Publication number 20250073916
- Publication date Mar 6, 2025
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
INTEGRATED SUBSTRATE PROCESSING SYSTEM WITH ADVANCED SUBSTRATE HAND...
- Publication number 20250069926
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Arunkumar Ramachandraiah
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250069939
- Publication date Feb 27, 2025
- BROOKS AUTOMATION US, LLC
- Alexander Krupyshev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROBOT BLADE AND WAFER BREAKAGE PREVENTION SYSTEM
- Publication number 20250065509
- Publication date Feb 27, 2025
- APPLIED MATERIALS ISRAEL LTD.
- Hagay Cafri
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
TRANSFER DEVICE, TRANSFER SYSTEM, AND END EFFECTOR
- Publication number 20250069940
- Publication date Feb 27, 2025
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS INCLUDING MULTILAYER EFEM
- Publication number 20250054792
- Publication date Feb 13, 2025
- VM Inc.
- Sang Woo Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROBOTIC ARM WITH VIBRATION DETECTION AND IMAGE RECOGNITION
- Publication number 20250046636
- Publication date Feb 6, 2025
- JUN-FU TECHNOLOGY INC
- Cheng-Hsiang LU
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
WAFER LOADING AND UNLOADING SYSTEM FOR AN EPITAXIAL REACTOR AND AN...
- Publication number 20250038027
- Publication date Jan 30, 2025
- LPE S.p.A.
- Maurilio Giuseppe Meschia
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Transfer Teaching Method and Substrate Processing System
- Publication number 20250033219
- Publication date Jan 30, 2025
- TOKYO ELECTRON LIMITED
- Toshiaki Kodama
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
CONTROL DEVICE FOR SUBSTRATE TRANSFER ROBOT AND CONTROL METHOD FOR...
- Publication number 20250026013
- Publication date Jan 23, 2025
- KAWASAKI JUKOGYO KABUSHIKI KAISHA
- Hiroki IMANISHI
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE TRANSPORT SYSTEM AND TRANSFER ROBOT CONTROL DEVICE
- Publication number 20250022736
- Publication date Jan 16, 2025
- Hirata Corporation
- Itaru MOMOKI
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE TRANSPORT SYSTEM AND TRANSFER ROBOT
- Publication number 20250018578
- Publication date Jan 16, 2025
- Hirata Corporation
- Keiji KANAZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROBOT AND ELECTRONIC SUBSTRATE TRANSFER DEVICE
- Publication number 20250010461
- Publication date Jan 9, 2025
- KABUSHIKI KAISHA YASKAWA DENKI
- Norihisa IWASAKI
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Compact Traversing Robot
- Publication number 20250010462
- Publication date Jan 9, 2025
- PERSIMMON TECHNOLOGIES CORPORATION
- Martin Hosek
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
ROBOT WITH SEALED ACTUATORS
- Publication number 20250010498
- Publication date Jan 9, 2025
- KABUSHIKI KAISHA YASKAWA DENKI
- Norihisa IWASAKI
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS
- Publication number 20250001583
- Publication date Jan 2, 2025
- VM Inc.
- Tae Jin Kwon
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE SAFETY SYSTEM
- Publication number 20240424685
- Publication date Dec 26, 2024
- Applied Materials lsrael Ltd.
- Binyamin Bejell
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Method for Teaching Transfer Robot and Substrate Processing System
- Publication number 20240424666
- Publication date Dec 26, 2024
- TOKYO ELECTRON LIMITED
- Kosuke KINOSHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS, SYSTEM AND METHOD FOR PROVIDING AN END EFFECTOR
- Publication number 20240424688
- Publication date Dec 26, 2024
- Jabil Inc.
- Jeroen Bosboom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Robot for High-Temperature Applications
- Publication number 20240416534
- Publication date Dec 19, 2024
- PERSIMMON TECHNOLOGIES CORPORATION
- Martin HOSEK
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
TRAVERSING ROBOT WITH MULTIPLE END EFFECTORS
- Publication number 20240399593
- Publication date Dec 5, 2024
- PERSIMMON TECHNOLOGIES CORPORATION
- Martin Hosek
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
VACUUM TRANSFER DEVICE AND METHOD FOR CONTROLLING VACUUM TRANSFER D...
- Publication number 20240391115
- Publication date Nov 28, 2024
- TOKYO ELECTRON LIMITED
- Seiji ISHIBASHI
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

Manipulators transporting wafers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate transfer devices, systems and methods of use thereof

Method for PUF generation using variations in transistor threshold...

Substrate position calibration for substrate supports in substrate...

Operations of robot apparatuses within rectangular mainframes

Distributed-architecture robot with multiple linkages

Substrate conveying robot

Suction clamp, object handler, stage apparatus and lithographic app...

Substrate transfer method and substrate transfer system

Substrate cleaning line and substrate cleaning system comprising th...

Industrial robot having a mounting mechanism on which a plurality o...

Dual arm with opposed dual end effectors and no vertical wafer overlap

Transfer device, transfer system, and end effector

Substrate processing apparatus and substrate alignment method using...

Assembly and method for transferring substrate

Fixture for automatic calibration of substrate transfer robot

Substrate conveying robot and substrate conveying robot system

Substrate processing apparatus

Automated transfer of edge ring requiring rotational alignment

Vacuum transfer device and method for controlling vacuum transfer d...

Robot

Substrate transfer robot for transferring substrate in vacuum chamber

High speed substrate sorter

Compact traversing robot

Substrate mapping device, method of mapping by the device, and meth...

Transfer system, transfer device, and transfer method

Workpiece transfer hand

End effector for slab formed substrates

Calibration of an electronics processing system

Substrate handling device and processing chamber

Robot for high-temperature applications

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE ALIGNMENT METHOD USING...

ROBOT, SYSTEM, CONTROL METHOD, AND COMPUTER-READABLE STORAGE MEDIUM

SUBSTRATE HOLDING HAND AND SUBSTRATE CONVEYOR ROBOT

ROBOT AND SYSTEM

ROBOT, SYSTEM, CONTROL METHOD, AND COMPUTER-READABLE STORAGE MEDIUM

SYSTEM AND ROBOT

SUBSTRATE TRANSPORT APPARATUS

SEMICONDUCTOR DEVICE TRANSPORT UNIT AND CHAMBER INCLUDING SEMICONDU...

MAINTENANCE DEVICE

INTEGRATED SUBSTRATE PROCESSING SYSTEM WITH ADVANCED SUBSTRATE HAND...

SUBSTRATE PROCESSING APPARATUS

ROBOT BLADE AND WAFER BREAKAGE PREVENTION SYSTEM

TRANSFER DEVICE, TRANSFER SYSTEM, AND END EFFECTOR

SUBSTRATE TRANSFER APPARATUS INCLUDING MULTILAYER EFEM

ROBOTIC ARM WITH VIBRATION DETECTION AND IMAGE RECOGNITION

WAFER LOADING AND UNLOADING SYSTEM FOR AN EPITAXIAL REACTOR AND AN...

Transfer Teaching Method and Substrate Processing System

CONTROL DEVICE FOR SUBSTRATE TRANSFER ROBOT AND CONTROL METHOD FOR...

SUBSTRATE TRANSPORT SYSTEM AND TRANSFER ROBOT CONTROL DEVICE

SUBSTRATE TRANSPORT SYSTEM AND TRANSFER ROBOT

ROBOT AND ELECTRONIC SUBSTRATE TRANSFER DEVICE

Compact Traversing Robot

ROBOT WITH SEALED ACTUATORS

SUBSTRATE TRANSFER APPARATUS

SUBSTRATE SAFETY SYSTEM

Method for Teaching Transfer Robot and Substrate Processing System

APPARATUS, SYSTEM AND METHOD FOR PROVIDING AN END EFFECTOR

Robot for High-Temperature Applications

TRAVERSING ROBOT WITH MULTIPLE END EFFECTORS

VACUUM TRANSFER DEVICE AND METHOD FOR CONTROLLING VACUUM TRANSFER D...