Manipulators transporting wafers

Industry

CPC
B25J11/0095

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B25Hand tools B25JMANIPULATORS CHAMBERS PROVIDED WITH MANIPULATION DEVICES B25J11/00Manipulators not otherwise provided for

Current Industry

B25J11/0095Manipulators transporting wafers

Industries

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 12,142,511
- Issue date Nov 12, 2024
- BROOKS AUTOMATION US, LLC
- Alexander Krupyshev
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Automated transfer of edge ring requiring rotational alignment
- Patent number 12,142,466
- Issue date Nov 12, 2024
- Lam Research Corporation
- Damon Tyrone Genetti
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Vacuum transfer device and method for controlling vacuum transfer d...
- Patent number 12,128,550
- Issue date Oct 29, 2024
- Tokyo Electron Limited
- Seiji Ishibashi
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Robot
- Patent number 12,128,545
- Issue date Oct 29, 2024
- Kawasaki Jukogyo Kabushiki Kaisha
- Ippei Shimizu
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate transfer robot for transferring substrate in vacuum chamber
- Patent number 12,131,939
- Issue date Oct 29, 2024
- T-Robotics Co., Ltd.
- Soo Jong Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High speed substrate sorter
- Patent number 12,128,446
- Issue date Oct 29, 2024
- Applied Materials, Inc.
- Asaf Schlezinger
- B07 - SEPARATING SOLIDS FROM SOLIDS SORTING
Information Patent Grant
Compact traversing robot
- Patent number 12,128,558
- Issue date Oct 29, 2024
- Persimmon Technologies Corporation
- Martin Hosek
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate mapping device, method of mapping by the device, and meth...
- Patent number 12,131,925
- Issue date Oct 29, 2024
- Kawasaki Jukogyo Kabushiki Kaisha
- Masaya Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer system, transfer device, and transfer method
- Patent number 12,131,937
- Issue date Oct 29, 2024
- Tokyo Electron Limited
- Norihiko Amikura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece transfer hand
- Patent number 12,122,042
- Issue date Oct 22, 2024
- Daihen Corporation
- Daisuke Sado
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
End effector for slab formed substrates
- Patent number 12,115,654
- Issue date Oct 15, 2024
- Atotech Deutschland GmbH
- Steffen Pollack
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Calibration of an electronics processing system
- Patent number 12,115,683
- Issue date Oct 15, 2024
- Applied Materials, Inc.
- Nicholas Michael Bergantz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate handling device and processing chamber
- Patent number 12,109,681
- Issue date Oct 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- You-Hua Chou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Robot for high-temperature applications
- Patent number 12,090,645
- Issue date Sep 17, 2024
- Persimmon Technologies Corporation
- Martin Hosek
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Traversing robot with multiple end effectors
- Patent number 12,083,666
- Issue date Sep 10, 2024
- Persimmon Technologies Corporation
- Martin Hosek
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Method for PUF generation using variations in transistor threshold...
- Patent number 12,080,581
- Issue date Sep 3, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih-Lien Linus Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transferring robot and method of controlling the substrat...
- Patent number 12,064,878
- Issue date Aug 20, 2024
- Kawasaki Jukogyo Kabushiki Kaisha
- Hiroyuki Yoshida
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Apparatus, system and method for providing an end effector
- Patent number 12,042,930
- Issue date Jul 23, 2024
- JABIL INC.
- Jeroen Bosboom
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Robot blade tilt determination by evaluating grayscale in images
- Patent number 12,046,492
- Issue date Jul 23, 2024
- Winbond Electronics Corp.
- Yi-Ta Chen
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate handling apparatus and method of handling substrate
- Patent number 12,046,501
- Issue date Jul 23, 2024
- Kawasaki Jukogyo Kabushiki Kaisha
- Haruhiko Tan
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate transfer robot and method of controlling the same
- Patent number 12,036,680
- Issue date Jul 16, 2024
- Kawasaki Jukogyo Kabushiki Kaisha
- Masaya Yoshida
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,036,662
- Issue date Jul 16, 2024
- SCREEN Holdings Co., Ltd.
- Tomoyuki Shinohara
- B08 - CLEANING
Information Patent Grant
Substrate transfer apparatus and substrate processing system
- Patent number 12,033,878
- Issue date Jul 9, 2024
- Tokyo Electron Limited
- Tatsuo Hatano
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Method and apparatus for measuring displacement of an end effector
- Patent number 12,027,395
- Issue date Jul 2, 2024
- SK ENPULSE CO., LTD.
- Nam In Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Robot gripper for moving wafer carriers and packing materials and m...
- Patent number 12,017,342
- Issue date Jun 25, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chien-Fa Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transport with unequal number of drive shafts and arm links
- Patent number 12,011,829
- Issue date Jun 18, 2024
- Persimmon Technologies Corporation
- Scott Wilkas
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Apparatus for treating substrate and method for detecting state of...
- Patent number 11,986,967
- Issue date May 21, 2024
- Semes Co., Ltd.
- Tae Kyung Kong
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Teaching method
- Patent number 11,984,340
- Issue date May 14, 2024
- Tokyo Electron Limited
- Takehiro Shindo
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,978,654
- Issue date May 7, 2024
- Semes Co., Ltd.
- Min Sung Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for wafer pod alignment
- Patent number 11,978,653
- Issue date May 7, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chao-Hsiang Liu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TRANSFER DEVICE
- Publication number 20240383127
- Publication date Nov 21, 2024
- NISSIN ION EQUIPMENT CO., LTD.
- Masatoshi ONODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER ROBOT, SUBSTRATE TRANSFER SYSTEM, AND SUBSTRATE...
- Publication number 20240383157
- Publication date Nov 21, 2024
- Kabushiki Kaisha Yaskawa Denki
- Koji NAGAFUCHI
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
METHOD FOR PUF GENERATION USING VARIATIONS IN TRANSISTOR THRESHOLD...
- Publication number 20240371674
- Publication date Nov 7, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Shih-Lien Linus Lu
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE TRANSFER ROBOT AND METHOD OF CONTROLLING THE SAME
- Publication number 20240359330
- Publication date Oct 31, 2024
- KAWASAKI JUKOGYO KABUSHIKI KAISHA
- Masaya YOSHIDA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
PROCESSING SYSTEM
- Publication number 20240342922
- Publication date Oct 17, 2024
- TOKYO ELECTRON LIMITED
- Kento TOKAIRIN
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE TRANSPORT APPARATUS AND ABNORMALITY DETECTION METHOD
- Publication number 20240342911
- Publication date Oct 17, 2024
- Panasonic Intellectual Property Management Co., Ltd.
- Takashi SASASHIGE
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
END EFFECTOR PAD DESIGN FOR BOWED WAFERS
- Publication number 20240335954
- Publication date Oct 10, 2024
- LAM RESEARCH CORPORATION
- Melinda P. Chen
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
ROBOT GRIPPER FOR MOVING WAFER CARRIERS AND PACKING MATERIALS AND M...
- Publication number 20240308085
- Publication date Sep 19, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- CHIEN-FA LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE POSITIONING DEVICE, SUBSTRATE POSITIONING METHOD, AND BON...
- Publication number 20240300113
- Publication date Sep 12, 2024
- TOKYO ELECTRON LIMITED
- Tetsuya Maki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
TRANSFER ROBOT AND STOCKER SYSTEM INCLUDING THE SAME
- Publication number 20240304484
- Publication date Sep 12, 2024
- SEMES CO., LTD.
- Hyeon Uk KIM
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
METHOD AND APPARATUS FOR CONTROLLING WAFER TRANSFER ROBOT USING STA...
- Publication number 20240304483
- Publication date Sep 12, 2024
- GSF Solution Co.,Ltd.
- Dong Hyun KIM
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
STOCKER AND STOCKER SYSTEM
- Publication number 20240300738
- Publication date Sep 12, 2024
- SEMES CO., LTD.
- Sang Min YOON
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240278437
- Publication date Aug 22, 2024
- Samsung Electronics Co., Ltd.
- Hyeon Dong SONG
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
METHOD FOR CARRYING WAFER AND WAFER-CARRYING APPARATUS
- Publication number 20240282609
- Publication date Aug 22, 2024
- Shin-Etsu Handotai Co., Ltd.
- Seiji SATOH
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
IN-LINE MACHINE VISION SYSTEM FOR PART TRACKING OF SUBSTRATE PROCES...
- Publication number 20240278991
- Publication date Aug 22, 2024
- LAM RESEARCH CORPORATION
- Hossein Sadeghi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240269862
- Publication date Aug 15, 2024
- TOKYO ELECTRON LIMITED
- Takayuki HATANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR WAFER PROCESSING SYSTEM AND METHOD
- Publication number 20240258145
- Publication date Aug 1, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Kai-Hung HSIAO
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE CONVEYING ROBOT AND CONTROL METHOD FOR SUBSTRATE CONVEYIN...
- Publication number 20240253233
- Publication date Aug 1, 2024
- KAWASAKI JUKOGYO KABUSHIKI KAISHA
- Satoshi HASHIZAKI
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
GRIPPER MODULE INCLUDING VIBRATION ABSORBER AND SUBSTRATE TRANSPORT...
- Publication number 20240217118
- Publication date Jul 4, 2024
- SEMES CO., LTD.
- Jaehyun LEE
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
ENHANCED SUBSTRATE TRANSFER ARM (STA) AND PEDESTAL OF THERMAL COMPR...
- Publication number 20240217122
- Publication date Jul 4, 2024
- Intel Corporation
- Long Thanh NGUYEN
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE TRANSFER SYSTEM
- Publication number 20240222185
- Publication date Jul 4, 2024
- TOKYO ELECTRON LIMITED
- Tatsuru OKAMURA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
ROBOT FOR TRANSFERRING SUBSTRATE AND APPARATUS FOR TREATING SUBSTRATE
- Publication number 20240217114
- Publication date Jul 4, 2024
- Semes Co., Ltd.
- Hee Jun YOUN
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
VIBRATION SENSOR ASSEMBLY
- Publication number 20240203767
- Publication date Jun 20, 2024
- Applied Materials, Inc.
- Venkata Raghavaiah Chowdhary Kode
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
APPARATUS FOR TRANSFERRING SUBSTRATE
- Publication number 20240203774
- Publication date Jun 20, 2024
- SEMES CO., LTD.
- Kyo Bong KIM
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
TRANSFER UNIT AND SUBSTRATE TREATMENT APPARATUS INCLUDING THE SAME
- Publication number 20240203776
- Publication date Jun 20, 2024
- SEMES CO., LTD.
- Duk Hyun SON
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
END EFFECTOR AND SUBSTRATE PROCESSING APPARATUS INCLUDING END EFFECTOR
- Publication number 20240198538
- Publication date Jun 20, 2024
- ASM IP HOLDING B.V.
- Taira Okabe
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Application
WAFER-HANDLING END EFFECTORS CONFIGURED TO SELECTIVELY LIFT A WAFER...
- Publication number 20240190019
- Publication date Jun 13, 2024
- FormFactor, Inc.
- Benedikt Marx
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
AUTOMATED SUBSTRATE PLACEMENT TO CHAMBER CENTER
- Publication number 20240194508
- Publication date Jun 13, 2024
- Applied Materials, Inc.
- WOLFGANG ADERHOLD
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
TRANSFER ROBOT SYSTEM AND THE TRANSFER ROBOT SYSTEM DRIVING METHOD
- Publication number 20240190018
- Publication date Jun 13, 2024
- SEMES CO., LTD.
- Jung Woo KIM
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
CARRIER WITH ROTATION PREVENTION FEATURE
- Publication number 20240190026
- Publication date Jun 13, 2024
- Applied Materials, Inc.
- Damon K. Cox
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

Manipulators transporting wafers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate processing apparatus

Automated transfer of edge ring requiring rotational alignment

Vacuum transfer device and method for controlling vacuum transfer d...

Robot

Substrate transfer robot for transferring substrate in vacuum chamber

High speed substrate sorter

Compact traversing robot

Substrate mapping device, method of mapping by the device, and meth...

Transfer system, transfer device, and transfer method

Workpiece transfer hand

End effector for slab formed substrates

Calibration of an electronics processing system

Substrate handling device and processing chamber

Robot for high-temperature applications

Traversing robot with multiple end effectors

Method for PUF generation using variations in transistor threshold...

Substrate transferring robot and method of controlling the substrat...

Apparatus, system and method for providing an end effector

Robot blade tilt determination by evaluating grayscale in images

Substrate handling apparatus and method of handling substrate

Substrate transfer robot and method of controlling the same

Substrate processing apparatus and substrate processing method

Substrate transfer apparatus and substrate processing system

Method and apparatus for measuring displacement of an end effector

Robot gripper for moving wafer carriers and packing materials and m...

Substrate transport with unequal number of drive shafts and arm links

Apparatus for treating substrate and method for detecting state of...

Teaching method

Substrate processing apparatus

Systems and methods for wafer pod alignment

Patents Applicationslast 30 patents

SUBSTRATE TRANSFER DEVICE

SUBSTRATE TRANSFER ROBOT, SUBSTRATE TRANSFER SYSTEM, AND SUBSTRATE...

METHOD FOR PUF GENERATION USING VARIATIONS IN TRANSISTOR THRESHOLD...

SUBSTRATE TRANSFER ROBOT AND METHOD OF CONTROLLING THE SAME

PROCESSING SYSTEM

SUBSTRATE TRANSPORT APPARATUS AND ABNORMALITY DETECTION METHOD

END EFFECTOR PAD DESIGN FOR BOWED WAFERS

ROBOT GRIPPER FOR MOVING WAFER CARRIERS AND PACKING MATERIALS AND M...

SUBSTRATE POSITIONING DEVICE, SUBSTRATE POSITIONING METHOD, AND BON...

TRANSFER ROBOT AND STOCKER SYSTEM INCLUDING THE SAME

METHOD AND APPARATUS FOR CONTROLLING WAFER TRANSFER ROBOT USING STA...

STOCKER AND STOCKER SYSTEM

SUBSTRATE PROCESSING APPARATUS

METHOD FOR CARRYING WAFER AND WAFER-CARRYING APPARATUS

IN-LINE MACHINE VISION SYSTEM FOR PART TRACKING OF SUBSTRATE PROCES...

SUBSTRATE PROCESSING APPARATUS

SEMICONDUCTOR WAFER PROCESSING SYSTEM AND METHOD

SUBSTRATE CONVEYING ROBOT AND CONTROL METHOD FOR SUBSTRATE CONVEYIN...

GRIPPER MODULE INCLUDING VIBRATION ABSORBER AND SUBSTRATE TRANSPORT...

ENHANCED SUBSTRATE TRANSFER ARM (STA) AND PEDESTAL OF THERMAL COMPR...

SUBSTRATE TRANSFER SYSTEM

ROBOT FOR TRANSFERRING SUBSTRATE AND APPARATUS FOR TREATING SUBSTRATE

VIBRATION SENSOR ASSEMBLY

APPARATUS FOR TRANSFERRING SUBSTRATE

TRANSFER UNIT AND SUBSTRATE TREATMENT APPARATUS INCLUDING THE SAME

END EFFECTOR AND SUBSTRATE PROCESSING APPARATUS INCLUDING END EFFECTOR

WAFER-HANDLING END EFFECTORS CONFIGURED TO SELECTIVELY LIFT A WAFER...

AUTOMATED SUBSTRATE PLACEMENT TO CHAMBER CENTER

TRANSFER ROBOT SYSTEM AND THE TRANSFER ROBOT SYSTEM DRIVING METHOD

CARRIER WITH ROTATION PREVENTION FEATURE