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H01J37/3491
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
Current Industry
H01J37/3491
Manufacturing of targets
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Patents Grants
last 30 patents
Information
Patent Grant
Sputtering target, manufacturing method therefor, and manufacturing...
Patent number
12,091,743
Issue date
Sep 17, 2024
JX Advanced Metals Corporation
Yasuyuki Iwabuchi
C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information
Patent Grant
Sputter trap having a thin high purity coating layer and method of...
Patent number
11,981,991
Issue date
May 14, 2024
Honeywell International Inc.
Jaeyeon Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vacuum processing apparatus and operating method of vacuum processi...
Patent number
11,600,472
Issue date
Mar 7, 2023
HITACHI HIGH-TECH CORPORATION
Ryoichi Isomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sputter trap having a thin high purity coating layer and method of...
Patent number
11,584,985
Issue date
Feb 21, 2023
Honeywell International Inc.
Jaeyeon Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering target
Patent number
11,569,075
Issue date
Jan 31, 2023
Plansee SE
Michael Eidenberger-Schober
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Large-grain tin sputtering target
Patent number
11,450,516
Issue date
Sep 20, 2022
Honeywell International Inc.
Marc D. Ruggiero
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-block sputtering target and associated methods and articles
Patent number
11,328,912
Issue date
May 10, 2022
H.C. Starck Inc.
Gary Alan Rozak
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Structure and method to fabricate highly reactive physical vapor de...
Patent number
11,299,801
Issue date
Apr 12, 2022
International Business Machines Corporation
Stephen L. Brown
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Profiled sputtering target and method of making the same
Patent number
11,244,815
Issue date
Feb 8, 2022
Honeywell International Inc.
Shih-Yao Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mn—Zn—O sputtering target and production method therefor
Patent number
11,225,709
Issue date
Jan 18, 2022
Dexerials Corporation
Junichi Sugawara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing sputtering target and sputtering target
Patent number
11,220,740
Issue date
Jan 11, 2022
Kabushiki Kaisha Toshiba
Tooru Komatsu
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Method of manufacturing sputtering target and sputtering target
Patent number
11,198,933
Issue date
Dec 14, 2021
Kabushiki Kaisha Toshiba
Tooru Komatsu
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Sputtering target capable of stabilizing ignition
Patent number
11,193,199
Issue date
Dec 7, 2021
JX Nippon Mining & Metals Corporation
Shuhei Murata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Processes for refurbishing a spent sputtering target
Patent number
11,149,343
Issue date
Oct 19, 2021
Materion Corporation
Longzhou Ma
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Sputtering target
Patent number
11,142,819
Issue date
Oct 12, 2021
Sumitomo Chemical Company, Limited
Hiroyuki Tsukada
B24 - GRINDING POLISHING
Information
Patent Grant
Sputtering target
Patent number
11,072,851
Issue date
Jul 27, 2021
Tanaka Kikinzoku Kogyo K.K.
Kim Kong Tham
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Sputtering target with backside cooling grooves
Patent number
11,011,356
Issue date
May 18, 2021
Applied Materials, Inc.
Brian T. West
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processes for low pressure, cold bonding of solid lithium to metal...
Patent number
11,001,921
Issue date
May 11, 2021
ALBEMARLE CORPORATION
Mark J. Hintze
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Tubular target having a protective device
Patent number
10,978,279
Issue date
Apr 13, 2021
Plansee SE
Christian Linke
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputter trap having multimodal particle size distribution
Patent number
10,968,510
Issue date
Apr 6, 2021
Honeywell International Inc.
Jaeyeon Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sputtering target having RFID information
Patent number
10,896,812
Issue date
Jan 19, 2021
Materion Corporation
Michael V. Pasquariello
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Mn—Zn—W—O sputtering target and production method therefor
Patent number
10,886,112
Issue date
Jan 5, 2021
Dexerials Corporation
Junichi Sugawara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cylindrical compact, manufacturing method of cylindrical sputtering...
Patent number
10,865,471
Issue date
Dec 15, 2020
JX Nippon Mining & Metals Corporation
Yohei Yamaguchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Fluoro-based polymer composite target for sputtering
Patent number
10,861,685
Issue date
Dec 8, 2020
Korea Research Institute of Chemical Technology
Sang Jin Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Lithium-containing transition metal oxide target
Patent number
10,822,690
Issue date
Nov 3, 2020
Umicore
Jong-Won Shin
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Oxide sintered body and method for manufacturing the same, sputteri...
Patent number
10,811,238
Issue date
Oct 20, 2020
Sumitomo Electric Industries, Ltd
Miki Miyanaga
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Optimized textured surfaces and methods of optimizing
Patent number
10,792,788
Issue date
Oct 6, 2020
Tosoh SMD, Inc.
David B. Smathers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coating source
Patent number
10,787,735
Issue date
Sep 29, 2020
Plansee Composite Materials GmbH
Peter Polcik
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Coating source for producing doped carbon layers
Patent number
10,781,102
Issue date
Sep 22, 2020
Plansee Composite Materials GmbH
Peter Polcik
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Copper alloy sputtering target and manufacturing method of copper a...
Patent number
10,770,274
Issue date
Sep 8, 2020
Mitsubishi Materials Corporation
Satoru Mori
B22 - CASTING POWDER METALLURGY
Patents Applications
last 30 patents
Information
Patent Application
Sputtering Target, Manufacturing Method Therefor, And Manufacturing...
Publication number
20230272521
Publication date
Aug 31, 2023
JX Nippon Mining & Metals Corporation
Yasuyuki Iwabuchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MANUFACTURE AND REFILL OF SPUTTERING TARGETS
Publication number
20230272520
Publication date
Aug 31, 2023
SOLERAS ADVANCED COATINGS BV
Wilmert DE BOSSCHER
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HIGH PURITY SULFUR-DOPED COPPER SPUTTERING TARGET ASSEMBLY AND METH...
Publication number
20230260769
Publication date
Aug 17, 2023
Tosoh SMD, Inc.
Eduardo Del-Rio Perez
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
YTTRIUM INGOT AND SPUTTERING TARGET IN WHICH THE YTTRIUM INGOT IS USED
Publication number
20230212734
Publication date
Jul 6, 2023
TOSOH CORPORATION
Yuya TSUCHIDA
B22 - CASTING POWDER METALLURGY
Information
Patent Application
SPUTTER TRAP HAVING A THIN HIGH PURITY COATING LAYER AND METHOD OF...
Publication number
20230143320
Publication date
May 11, 2023
Honeywell International Inc.
Jaeyeon Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
RUTHENIUM-BASED SPUTTERING TARGET AND METHOD FOR MANUFACTURING SAME
Publication number
20220319824
Publication date
Oct 6, 2022
FURUYA METAL CO., LTD.
Tomohiro MARUKO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PARTIAL SPRAY REFURBISHMENT OF SPUTTERING TARGETS
Publication number
20220148864
Publication date
May 12, 2022
Steven A. MILLER
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROFILED SPUTTERING TARGET AND METHOD OF MAKING THE SAME
Publication number
20220139685
Publication date
May 5, 2022
Honeywell International Inc.
Shih-Yao Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SPUTTERING TARGET
Publication number
20210269911
Publication date
Sep 2, 2021
Tanaka Kikinzoku Kogyo K.K.
Kim Kong Tham
G11 - INFORMATION STORAGE
Information
Patent Application
Joined Body of Target Material and Backing Plate, and Method for Pr...
Publication number
20210172057
Publication date
Jun 10, 2021
JX NIPPON MINING & METALS CORPORATION
Kotaro Nagatsu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROCESS FOR PREPARING A TUBULAR ARTICLE
Publication number
20210071293
Publication date
Mar 11, 2021
Materion Advanced Materials Germany GmbH
Christoph Simons
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LARGE-GRAIN TIN SPUTTERING TARGET
Publication number
20210050194
Publication date
Feb 18, 2021
HONEYWELL INTERNATIONAL INC.
Marc D. Ruggiero
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MULTI-BLOCK SPUTTERING TARGET AND ASSOCIATED METHODS AND ARTICLES
Publication number
20200381225
Publication date
Dec 3, 2020
H.C. Starck Inc.
Gary Alan Rozak
B22 - CASTING POWDER METALLURGY
Information
Patent Application
SPUTTERING TARGET WITH BACKSIDE COOLING GROOVES
Publication number
20200294778
Publication date
Sep 17, 2020
Applied Materials, Inc.
Brian T. WEST
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SPUTTER TRAP HAVING MULTIMODAL PARTICLE SIZE DISTRIBUTION
Publication number
20200240004
Publication date
Jul 30, 2020
HONEYWELL INTERNATIONAL INC.
Jaeyeon Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF MANUFACTURING SPUTTERING TARGET AND SPUTTERING TARGET
Publication number
20200115790
Publication date
Apr 16, 2020
Kabushiki Kaisha Toshiba
Tooru KOMATSU
B22 - CASTING POWDER METALLURGY
Information
Patent Application
METHOD OF MANUFACTURING SPUTTERING TARGET AND SPUTTERING TARGET
Publication number
20200115791
Publication date
Apr 16, 2020
Kabushiki Kaisha Toshiba
Tooru KOMATSU
B22 - CASTING POWDER METALLURGY
Information
Patent Application
STRUCTURE AND METHOD TO FABRICATE HIGHLY REACTIVE PHYSICAL VAPOR DE...
Publication number
20200080191
Publication date
Mar 12, 2020
International Business Machines Corporation
Stephen L. Brown
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SPUTTER TRAP HAVING A THIN HIGH PURITY COATING LAYER AND METHOD OF...
Publication number
20200048761
Publication date
Feb 13, 2020
HONEYWELL INTERNATIONAL INC.
Jaeyeon Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CYLINDRICAL SPUTTERING TARGET AND METHOD FOR PRODUCING SAME
Publication number
20190360090
Publication date
Nov 28, 2019
JX NIPPON MINING & METALS CORPORATION
Yoshitaka Tsuruta
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
OXIDE SINTERED BODY AND METHOD FOR MANUFACTURING THE SAME, SPUTTERI...
Publication number
20190259588
Publication date
Aug 22, 2019
SUMITOMO ELECTRIC INDUSTRIES, LTD.
Miki Miyanaga
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SPUTTERING TARGET
Publication number
20190221408
Publication date
Jul 18, 2019
PLANSEE SE
MICHAEL EIDENBERGER-SCHOBER
B22 - CASTING POWDER METALLURGY
Information
Patent Application
MULTI-BLOCK SPUTTERING TARGET AND ASSOCIATED METHODS AND ARTICLES
Publication number
20190214237
Publication date
Jul 11, 2019
H.C. Starck Inc.
Gary Alan Rozak
B22 - CASTING POWDER METALLURGY
Information
Patent Application
VACUUM PROCESSING APPARATUS AND OPERATING METHOD OF VACUUM PROCESSI...
Publication number
20190157053
Publication date
May 23, 2019
Hitachi High-Technologies Corporation
Ryoichi ISOMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SPUTTERING TARGET CAPABLE OF STABILIZING IGNITION
Publication number
20190078195
Publication date
Mar 14, 2019
JX NIPPON MINING & METALS CORPORATION
Shuhei MURATA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SPUTTERING TARGET WITH BACKSIDE COOLING GROOVES
Publication number
20180342378
Publication date
Nov 29, 2018
Applied Materials, Inc.
Brian T. WEST
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF MAKING LOW RESISTIVITY TUNGSTEN SPUTTER TARGETS AND TARGE...
Publication number
20180312960
Publication date
Nov 1, 2018
Tosoh SMD, Inc.
Eugene Y. Ivanov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROFILED SPUTTERING TARGET AND METHOD OF MAKING THE SAME
Publication number
20180308671
Publication date
Oct 25, 2018
HONEYWELL INTERNATIONAL INC.
Shih-Yao Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MULTI-BLOCK SPUTTERING TARGET AND ASSOCIATED METHODS AND ARTICLES
Publication number
20180190476
Publication date
Jul 5, 2018
H.C. Starck, Inc.
Gary Alan Rozak
C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information
Patent Application
PROCESS FOR PREPARING A TUBULAR ARTICLE
Publication number
20180105925
Publication date
Apr 19, 2018
Materion Advanced Materials Germany GmbH
Christoph Simons
C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...