Manufacturing semiconductor wafers

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CPC
G05B2219/45031

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GPHYSICS G05Controlling systems G05BCONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS G05B2219/00Program-control systems

Current Industry

G05B2219/45031Manufacturing semiconductor wafers

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Information processing apparatus, information processing method, ar...
- Patent number 12,362,209
- Issue date Jul 15, 2025
- Canon Kabushiki Kaisha
- Hiroaki Fujiwara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Large spot spectral sensing to control spatial setpoints
- Patent number 12,360,510
- Issue date Jul 15, 2025
- Lam Research Corporation
- Ye Feng
- G05 - CONTROLLING REGULATING
Information Patent Grant
Wafer positioning and correction method, system, and device
- Patent number 12,347,714
- Issue date Jul 1, 2025
- Rongsheng Lyu
- G05 - CONTROLLING REGULATING
Information Patent Grant
Equipment front end module and destructive analysis automation appa...
- Patent number 12,343,881
- Issue date Jul 1, 2025
- Samsung Electronics Co., Ltd.
- Youn Gon Oh
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Estimation of chamber component conditions using substrate measurem...
- Patent number 12,339,645
- Issue date Jun 24, 2025
- Applied Materials, Inc.
- Chunlei Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optimizing semiconductor manufacturing processes using machine lear...
- Patent number 12,339,637
- Issue date Jun 24, 2025
- Delta Design, Inc.
- Ryan Stoddard
- G05 - CONTROLLING REGULATING
Information Patent Grant
Information processing apparatus and substrate processing method
- Patent number 12,332,630
- Issue date Jun 17, 2025
- Tokyo Electron Limited
- Hiroshi Ogino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for correcting position of wafer and storage m...
- Patent number 12,332,625
- Issue date Jun 17, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Zhiling Guo
- G08 - SIGNALLING
Information Patent Grant
Method and computing device for manufacturing semiconductor device
- Patent number 12,326,711
- Issue date Jun 10, 2025
- Samsung Electronics Co., Ltd.
- Sooyong Lee
- G05 - CONTROLLING REGULATING
Information Patent Grant
Machine and deep learning methods for spectra-based metrology and p...
- Patent number 12,321,102
- Issue date Jun 3, 2025
- Nova Ltd.
- Barak Bringoltz
- G05 - CONTROLLING REGULATING
Information Patent Grant
State monitoring method, state monitoring apparatus and state monit...
- Patent number 12,321,157
- Issue date Jun 3, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Xiaojun Liu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for controlling deposition tool
- Patent number 12,314,032
- Issue date May 27, 2025
- NANYA TECHNOLOGY CORPORATION
- Tzu-Ching Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bayesian decomposition for mismatched performances in semiconductor...
- Patent number 12,314,043
- Issue date May 27, 2025
- Applied Materials, Inc.
- Liem Ferryanto
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Semiconductor turbine reset
- Patent number 12,313,290
- Issue date May 27, 2025
- Texas Capitol Semiconductor, Inc.
- Roger L. Bottomfield
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus of controlling semiconductor manufacturing dev...
- Patent number 12,300,513
- Issue date May 13, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Tzu-Hsuan Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Differentiable model for manufacturability
- Patent number 12,287,614
- Issue date Apr 29, 2025
- X Development LLC
- Raj Apte
- G05 - CONTROLLING REGULATING
Information Patent Grant
Wafer defect test apparatus, wafer defect test system, wafer test m...
- Patent number 12,282,317
- Issue date Apr 22, 2025
- Samsung Electronics Co., Ltd.
- Sung Hee Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Semiconductor wafer cooling
- Patent number 12,282,318
- Issue date Apr 22, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yung-Yao Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Process recipe, method and system for generating same, and semicond...
- Patent number 12,276,965
- Issue date Apr 15, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Shaowen Qiu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Autonomous substrate processing system
- Patent number 12,265,377
- Issue date Apr 1, 2025
- Applied Materials, Inc.
- Priyadarshi Panda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and mechanisms for adjusting film deposition parameters dur...
- Patent number 12,265,379
- Issue date Apr 1, 2025
- Applied Materials, Inc.
- Mitesh Sanghvi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Matching process controllers for improved matching of process
- Patent number 12,265,380
- Issue date Apr 1, 2025
- Applied Materials, Inc.
- James Robert Moyne
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate temperature correction...
- Patent number 12,266,514
- Issue date Apr 1, 2025
- Tokyo Electron Limited
- Rei Ibuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Annealing method
- Patent number 12,266,553
- Issue date Apr 1, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yung-Chang Huang
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Semiconductor manufacturing system, behavior recognition device and...
- Patent number 12,259,709
- Issue date Mar 25, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Kai-Ting Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and mechanisms for generating a data collection plan for a...
- Patent number 12,242,237
- Issue date Mar 4, 2025
- Applied Materials, Inc.
- William Kazmierski
- G05 - CONTROLLING REGULATING
Information Patent Grant
Monitoring system for a sealing apparatus having a substrate treatm...
- Patent number 12,243,758
- Issue date Mar 4, 2025
- Tokyo Electron Limited
- Shota Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system of operating overlay measuring
- Patent number 12,242,246
- Issue date Mar 4, 2025
- NANYA TECHNOLOGY CORPORATION
- Chien-Hsien Liu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Machine learning on overlay management
- Patent number 12,237,188
- Issue date Feb 25, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tzu-Cheng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control method, apparatus, system, device and medium for production...
- Patent number 12,228,910
- Issue date Feb 18, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Huan-Cheng Li
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, AN...
- Publication number 20250238025
- Publication date Jul 24, 2025
- TOKYO ELECTRON LIMITED
- Ryota AOI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INFORMATION PROCESSING APPARATUS, SEMICONDUCTOR MANUFACTURING APPAR...
- Publication number 20250231553
- Publication date Jul 17, 2025
- TOKYO ELECTRON LIMITED
- Yusuke TSUCHIYA
- G05 - CONTROLLING REGULATING
Information Patent Application
DIFFERENTIABLE MODEL FOR MANUFACTURABILITY
- Publication number 20250231544
- Publication date Jul 17, 2025
- X Development LLC
- Raj Apte
- G05 - CONTROLLING REGULATING
Information Patent Application
WAFER POSITIONING AND CORRECTION METHOD, SYSTEM, AND DEVICE
- Publication number 20250232999
- Publication date Jul 17, 2025
- Hito Robotic System Inc.
- RONGSHENG LYU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODEL BASED DEVELOPMENT OF ZONE BASED FLOW OR THERMAL DISTRIBUTION...
- Publication number 20250231547
- Publication date Jul 17, 2025
- Applied Materials, Inc.
- DEVI RAGHAVEE VEERAPPAN
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD OF EXTRACTING SUB-RESOLUTION ASSIST FEATURE (SRAF) PRINTING...
- Publication number 20250224665
- Publication date Jul 10, 2025
- Samsung Electronics Co., Ltd.
- Mijin KWON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ELECTRONIC DEVICE AND OPERATION METHOD THEREOF
- Publication number 20250224715
- Publication date Jul 10, 2025
- Samsung Electronics Co., Ltd.
- Minseok KIM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250224704
- Publication date Jul 10, 2025
- Kokusai Electric Corporation
- Hiroyuki KITAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR WAFER COOLING
- Publication number 20250216841
- Publication date Jul 3, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yung-Yao LEE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
AUTONOMOUS EVALUATION METHOD AND AUTONOMOUS EVALUATION DEVICE FOR S...
- Publication number 20250216833
- Publication date Jul 3, 2025
- United Microelectronics Corp.
- Yung-Chien KUNG
- G05 - CONTROLLING REGULATING
Information Patent Application
COMPUTER IMPLEMENTED METHOD FOR DEFECT DETECTION IN AN IMAGING DATA...
- Publication number 20250216842
- Publication date Jul 3, 2025
- Carl Zeiss SMT GMBH
- Abhilash SRIKANTHA
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250208610
- Publication date Jun 26, 2025
- TOKYO ELECTRON LIMITED
- Takashi NAGAI
- G05 - CONTROLLING REGULATING
Information Patent Application
ENDPOINT DETECTION BY GENERATING SYNTHETIC SENSOR DATA
- Publication number 20250208597
- Publication date Jun 26, 2025
- Applied Materials, Inc.
- Lei Lian
- G05 - CONTROLLING REGULATING
Information Patent Application
MATCHING PROCESS CONTROLLERS FOR IMPROVED MATCHING OF PROCESS
- Publication number 20250199521
- Publication date Jun 19, 2025
- Applied Materials, Inc.
- James Robert Moyne
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANNEALING APPARATUS AND METHOD THEREOF
- Publication number 20250201604
- Publication date Jun 19, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yung-Chang HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ECO-EFFICIENCY MONITORING AND EXPLORATION PLATFORM FOR SEMICONDUCTO...
- Publication number 20250189946
- Publication date Jun 12, 2025
- Applied Materials, Inc.
- Ala Moradian
- G05 - CONTROLLING REGULATING
Information Patent Application
SEMICONDUCTOR MANUFACTURING SYSTEM, BEHAVIOR RECOGNITION DEVICE AND...
- Publication number 20250189950
- Publication date Jun 12, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- KAI-TING YANG
- G05 - CONTROLLING REGULATING
Information Patent Application
METHODS AND MECHANISMS FOR GENERATING A DATA COLLECTION PLAN FOR A...
- Publication number 20250181049
- Publication date Jun 5, 2025
- Applied Materials, Inc.
- William Kazmierski
- G05 - CONTROLLING REGULATING
Information Patent Application
SCALABLE PAIRINGS OF CHIPLETS OF A DISPLAY CONTROL CIRCUIT
- Publication number 20250181390
- Publication date Jun 5, 2025
- ADVANCED MICRO DEVICES, INC.
- Gia Tung Phan
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ASSISTANCE DEVICE, ASSISTANCE METHOD AND NON-TRANSITORY COMPUTER-RE...
- Publication number 20250172926
- Publication date May 29, 2025
- SCREEN Holdings Co., Ltd.
- Hiroakira MATSUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INFORMATION PROCESSING METHOD, RECORDING MEDIUM, AND INFORMATION PR...
- Publication number 20250164975
- Publication date May 22, 2025
- TOKYO ELECTRON LIMITED
- Masaki KITSUNEZUKA
- G05 - CONTROLLING REGULATING
Information Patent Application
OPTIMIZATION METHOD FOR VACUUM PLATING PROCESS
- Publication number 20250164981
- Publication date May 22, 2025
- Industrial Technology Research Institute
- Shih-Chin Lin
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD FOR DETERMINING ABERRATION SENSITIVITY OF PATTERNS
- Publication number 20250155824
- Publication date May 15, 2025
- ASML NETHERLANDS B.V.
- Jingjing LIU
- G05 - CONTROLLING REGULATING
Information Patent Application
SYSTEM FOR PROCESS DEVELOPMENT ASSISTANCE
- Publication number 20250155879
- Publication date May 15, 2025
- TOKYO ELECTRON LIMITED
- Sergey AVERKIN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PROCESS MODELING PLATFORM FOR SUBSTRATE MANUFACTURING SYSTEMS
- Publication number 20250155883
- Publication date May 15, 2025
- Applied Materials, Inc.
- Prashanth Kothnur
- G05 - CONTROLLING REGULATING
Information Patent Application
CONTROL ASSISTANCE DEVICE AND CONTROL ASSISTANCE METHOD
- Publication number 20250147493
- Publication date May 8, 2025
- SCREEN Holdings Co., Ltd.
- Koki YOSHIHARA
- G05 - CONTROLLING REGULATING
Information Patent Application
INFORMATION PROCESSING METHOD, INFORMATION PROCESSING SYSTEM, AND R...
- Publication number 20250147498
- Publication date May 8, 2025
- TOKYO ELECTRON LIMITED
- Jun TAMURA
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250140581
- Publication date May 1, 2025
- TOKYO ELECTRON LIMITED
- Masami YAMASHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sequenced Approach for Determining Wafer Path Quality
- Publication number 20250138505
- Publication date May 1, 2025
- PDF Solutions, Inc.
- Tomonori Honda
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD OF IMPROVING SECURITY OF ON-CHIP SYSTEMS AND CORRESPONDING S...
- Publication number 20250130550
- Publication date Apr 24, 2025
- STMicroelectronics International N.V.
- Donato Carpentieri
- G05 - CONTROLLING REGULATING

Manufacturing semiconductor wafers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Information processing apparatus, information processing method, ar...

Large spot spectral sensing to control spatial setpoints

Wafer positioning and correction method, system, and device

Equipment front end module and destructive analysis automation appa...

Estimation of chamber component conditions using substrate measurem...

Optimizing semiconductor manufacturing processes using machine lear...

Information processing apparatus and substrate processing method

Method and apparatus for correcting position of wafer and storage m...

Method and computing device for manufacturing semiconductor device

Machine and deep learning methods for spectra-based metrology and p...

State monitoring method, state monitoring apparatus and state monit...

Method for controlling deposition tool

Bayesian decomposition for mismatched performances in semiconductor...

Semiconductor turbine reset

Method and apparatus of controlling semiconductor manufacturing dev...

Differentiable model for manufacturability

Wafer defect test apparatus, wafer defect test system, wafer test m...

Semiconductor wafer cooling

Process recipe, method and system for generating same, and semicond...

Autonomous substrate processing system

Methods and mechanisms for adjusting film deposition parameters dur...

Matching process controllers for improved matching of process

Substrate processing apparatus and substrate temperature correction...

Annealing method

Semiconductor manufacturing system, behavior recognition device and...

Methods and mechanisms for generating a data collection plan for a...

Monitoring system for a sealing apparatus having a substrate treatm...

Method and system of operating overlay measuring

Machine learning on overlay management

Control method, apparatus, system, device and medium for production...

Patents Applicationslast 30 patents

INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, AN...

INFORMATION PROCESSING APPARATUS, SEMICONDUCTOR MANUFACTURING APPAR...

DIFFERENTIABLE MODEL FOR MANUFACTURABILITY

WAFER POSITIONING AND CORRECTION METHOD, SYSTEM, AND DEVICE

MODEL BASED DEVELOPMENT OF ZONE BASED FLOW OR THERMAL DISTRIBUTION...

METHOD OF EXTRACTING SUB-RESOLUTION ASSIST FEATURE (SRAF) PRINTING...

ELECTRONIC DEVICE AND OPERATION METHOD THEREOF

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SEMICONDUCTOR WAFER COOLING

AUTONOMOUS EVALUATION METHOD AND AUTONOMOUS EVALUATION DEVICE FOR S...

COMPUTER IMPLEMENTED METHOD FOR DEFECT DETECTION IN AN IMAGING DATA...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

ENDPOINT DETECTION BY GENERATING SYNTHETIC SENSOR DATA

MATCHING PROCESS CONTROLLERS FOR IMPROVED MATCHING OF PROCESS

ANNEALING APPARATUS AND METHOD THEREOF

ECO-EFFICIENCY MONITORING AND EXPLORATION PLATFORM FOR SEMICONDUCTO...

SEMICONDUCTOR MANUFACTURING SYSTEM, BEHAVIOR RECOGNITION DEVICE AND...

METHODS AND MECHANISMS FOR GENERATING A DATA COLLECTION PLAN FOR A...

SCALABLE PAIRINGS OF CHIPLETS OF A DISPLAY CONTROL CIRCUIT

ASSISTANCE DEVICE, ASSISTANCE METHOD AND NON-TRANSITORY COMPUTER-RE...

INFORMATION PROCESSING METHOD, RECORDING MEDIUM, AND INFORMATION PR...

OPTIMIZATION METHOD FOR VACUUM PLATING PROCESS

METHOD FOR DETERMINING ABERRATION SENSITIVITY OF PATTERNS

SYSTEM FOR PROCESS DEVELOPMENT ASSISTANCE

PROCESS MODELING PLATFORM FOR SUBSTRATE MANUFACTURING SYSTEMS

CONTROL ASSISTANCE DEVICE AND CONTROL ASSISTANCE METHOD

INFORMATION PROCESSING METHOD, INFORMATION PROCESSING SYSTEM, AND R...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Sequenced Approach for Determining Wafer Path Quality

METHOD OF IMPROVING SECURITY OF ON-CHIP SYSTEMS AND CORRESPONDING S...