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G05B2219/45031
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PHYSICS
G05
Controlling systems
G05B
CONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
G05B2219/00
Program-control systems
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G05B2219/45031
Manufacturing semiconductor wafers
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Patents Grants
last 30 patents
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Patent Grant
Substrate with cut semiconductor pieces having measurement test str...
Patent number
11,978,679
Issue date
May 7, 2024
KLA Corporation
Chen Dror
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, device management controller, and r...
Patent number
11,966,210
Issue date
Apr 23, 2024
Kokusai Electric Corporation
Kazuhide Asai
G05 - CONTROLLING REGULATING
Information
Patent Grant
Spectrographic monitoring using a neural network
Patent number
11,966,212
Issue date
Apr 23, 2024
Applied Materials, Inc.
Benjamin Cherian
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Deep auto-encoder for equipment health monitoring and fault detecti...
Patent number
11,948,061
Issue date
Apr 2, 2024
Applied Materials, Inc.
Heng Hao
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Conveying system and method for operating the same
Patent number
11,942,342
Issue date
Mar 26, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Fu-Hsien Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for mounting components on a substrate
Patent number
11,924,974
Issue date
Mar 5, 2024
Besi Switzerland AG
Norbert Bilewicz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for controlling directionality of fast-wet etchin...
Patent number
11,906,946
Issue date
Feb 20, 2024
National University of Singapore
Utkur Mirsaidov
G05 - CONTROLLING REGULATING
Information
Patent Grant
Controlling apparatus for controlling operation of substrate proces...
Patent number
11,899,429
Issue date
Feb 13, 2024
Semes Co., Ltd.
Sang Bo Seo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for rendering SEM images and predicting defect im...
Patent number
11,880,193
Issue date
Jan 23, 2024
KLA Corporation
Arpit Yati
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Methods and systems for cleaning process sequence management
Patent number
11,874,649
Issue date
Jan 16, 2024
Applied Materials, Inc.
Chongyang C. Wang
G05 - CONTROLLING REGULATING
Information
Patent Grant
Test circuit and test method
Patent number
11,876,021
Issue date
Jan 16, 2024
Kabushiki Kaisha Toshiba
Daiki Kiribuchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process data detection method, computer readable medium, and electr...
Patent number
11,869,784
Issue date
Jan 9, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Dandan Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor manufacturing system, behavior recognition device and...
Patent number
11,860,607
Issue date
Jan 2, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Kai-Ting Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Teaching method for industrial robot
Patent number
11,858,131
Issue date
Jan 2, 2024
NIDEC SANKYO CORPORATION
Tamotsu Kuribayashi
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
System for a semiconductor fabrication facility and method for oper...
Patent number
11,854,846
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Fu-Hsien Li
B66 - HOISTING LIFTING HAULING
Information
Patent Grant
Part, sensor, and metrology data integration
Patent number
11,853,042
Issue date
Dec 26, 2023
Applied Materials, Inc.
Garrett Ho-Yee Sin
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
RFID part authentication and tracking of processing components
Patent number
11,848,220
Issue date
Dec 19, 2023
Applied Materials, Inc.
Earl Hunter
B24 - GRINDING POLISHING
Information
Patent Grant
Systems and methods for enhanced wafer manufacturing
Patent number
11,846,917
Issue date
Dec 19, 2023
GlobalWafers Co., Ltd.
Sumeet S. Bhagavat
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method for predicting occurrence of tool processing event and virtu...
Patent number
11,829,124
Issue date
Nov 28, 2023
National Cheng Kung University
Fan-Tien Cheng
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Substrate processing apparatus, substrate processing system, and su...
Patent number
11,822,318
Issue date
Nov 21, 2023
SCREEN Holdings Co., Ltd.
Koji Hashimoto
G05 - CONTROLLING REGULATING
Information
Patent Grant
Real-time control of temperature in a plasma chamber
Patent number
11,823,875
Issue date
Nov 21, 2023
Lam Research Corporation
Changyou Jing
G05 - CONTROLLING REGULATING
Information
Patent Grant
System for inserting a wire into a semiconductor chip
Patent number
11,822,309
Issue date
Nov 21, 2023
PRIMO1D
Emmanuel Arene
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Machine and deep learning methods for spectra-based metrology and p...
Patent number
11,815,819
Issue date
Nov 14, 2023
Nova Ltd.
Barak Bringoltz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for determining root cause affecting yield in a semiconducto...
Patent number
11,803,127
Issue date
Oct 31, 2023
ASML Netherlands B.V.
Chenxi Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for semiconductor adaptive testing using inline...
Patent number
11,798,827
Issue date
Oct 24, 2023
KLA Corporation
Robert J. Rathert
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor fabrication process and method of optimizing the same
Patent number
11,791,184
Issue date
Oct 17, 2023
Samsung Electronics Co., Ltd.
Jiho Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Data processing device, data processing method, and non-transitory...
Patent number
11,789,981
Issue date
Oct 17, 2023
Tokyo Electron Limited
Atsushi Suzuki
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Value-independent situation identification and matching
Patent number
11,789,427
Issue date
Oct 17, 2023
Applied Materials, Inc.
James Robert Moyne
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Transport control apparatus and transport control system including...
Patent number
11,789,425
Issue date
Oct 17, 2023
Semes Co., Ltd.
Su Jong Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for mitigating overlay distortion patterns caused...
Patent number
11,782,411
Issue date
Oct 10, 2023
KLA Corporation
Franz Zach
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHODS AND SYSTEMS FOR CLEANING PROCESS SEQUENCE MANAGEMENT
Publication number
20240152127
Publication date
May 9, 2024
Applied Materials Israel Ltd.
Chongyang C. Wang
G05 - CONTROLLING REGULATING
Information
Patent Application
RADIO FREQUENCY IMPEDANCE MATCHING NETWORK WITH FLEXIBLE TUNING ALG...
Publication number
20240152114
Publication date
May 9, 2024
Applied Materials, Inc.
Yue GUO
G05 - CONTROLLING REGULATING
Information
Patent Application
AUTONOMOUS MOBILE ROBOT AND SEMICONDUCTOR MANUFACTURING EQUIPMENT I...
Publication number
20240152131
Publication date
May 9, 2024
SEMES CO., LTD.
Hoyoung LEE
G05 - CONTROLLING REGULATING
Information
Patent Application
ANOMALY DETECTION METHOD, ELECTRONIC DEVICE, NON-TRANSITORY COMPUTE...
Publication number
20240142936
Publication date
May 2, 2024
SEMES CO., LTD.
Dong Hyun Jun
G05 - CONTROLLING REGULATING
Information
Patent Application
METHOD FOR DECOUPLING SOURCES OF VARIATION RELATED TO SEMICONDUCTOR...
Publication number
20240142959
Publication date
May 2, 2024
ASML NETHERLANDS B.V.
Jill Elizabeth FREEMAN
G05 - CONTROLLING REGULATING
Information
Patent Application
PROCESSING CONDITION SETTING APPARATUS, PROCESSING CONDITION SETTIN...
Publication number
20240123566
Publication date
Apr 18, 2024
SUMCO CORPORATION
Yuji MIYAZAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE CONTROL METHOD
Publication number
20240103482
Publication date
Mar 28, 2024
TOKYO ELECTRON LIMITED
Takari Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR SETTING SEMICONDUCTOR DEVICE MANUFACTURING...
Publication number
20240094704
Publication date
Mar 21, 2024
SK Hynik Inc.
Choong Ki KIM
G05 - CONTROLLING REGULATING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240096666
Publication date
Mar 21, 2024
Kokusai Electric Corporation
Yuri TAKEBAYASHI
G05 - CONTROLLING REGULATING
Information
Patent Application
INFORMATION PROCESSING DEVICE AND INFORMATION PROCESSING METHOD
Publication number
20240069519
Publication date
Feb 29, 2024
Ulvac, Inc.
Yoshinori FUJII
G05 - CONTROLLING REGULATING
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM AND ITS CONTROL METHOD
Publication number
20240055283
Publication date
Feb 15, 2024
Canon Kabushiki Kaisha
TAICHI YOSHIOKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR MITIGATING OVERLAY DISTORTION PATTERNS CAUSED...
Publication number
20240053721
Publication date
Feb 15, 2024
KLA Corporation
Franz Zach
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and Device for Identifying Variables from a Plurality of Var...
Publication number
20240053735
Publication date
Feb 15, 2024
ROBERT BOSCH GmbH
Mark Herrmann
G05 - CONTROLLING REGULATING
Information
Patent Application
MANAGEMENT SYSTEM, MANAGEMENT METHOD, AND MANAGEMENT PROGRAM
Publication number
20240045401
Publication date
Feb 8, 2024
Tokyo Electron Limited,
Tsuyoshi MORIYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REAL-TIME CONTROL OF TEMPERATURE IN A PLASMA CHAMBER
Publication number
20240047183
Publication date
Feb 8, 2024
LAM RESEARCH CORPORATION
Changyou Jing
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DYNAMIC SAMPLING METHOD AND DEVICE FOR SEMICONDUCTOR MANUFACTURE
Publication number
20240045408
Publication date
Feb 8, 2024
WINBOND ELECTRONICS CORP.
Kazuhiro Segawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ANALYSIS OF MULTI-RUN CYCLIC PROCESSING PROCEDURES
Publication number
20240045399
Publication date
Feb 8, 2024
Applied Materials, Inc.
Qinglin Chai
G05 - CONTROLLING REGULATING
Information
Patent Application
ROBOTIC ASSISTED TOOL AND DIE MAKING SYSTEMS AND METHODS
Publication number
20240036550
Publication date
Feb 1, 2024
FORD GLOBAL TECHNOLOGIES, L.L.C.
Raj Sohmshetty
G05 - CONTROLLING REGULATING
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, METHOD...
Publication number
20240014055
Publication date
Jan 11, 2024
Kokusai Electric Corporation
Kazuyoshi YAMAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FAULT DETECTION METHOD FOR DETECTING BEHAVIOR DEVIATION OF PARAMETERS
Publication number
20240004374
Publication date
Jan 4, 2024
United Microelectronics Corp.
Yung-Yu YANG
G05 - CONTROLLING REGULATING
Information
Patent Application
PROCESSING APPARATUS, RECORDING MEDIUM, AND METHOD OF MANUFACTURING...
Publication number
20240006206
Publication date
Jan 4, 2024
Kokusai Electric Corporation
Masako Sueyoshi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, DISPLAY METHOD, NON-T...
Publication number
20240006184
Publication date
Jan 4, 2024
Kokusai Electric Corporation
Junichi KAWASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD FOR FABRICATING SEMICONDUCTOR DEVICE STRUCTURE
Publication number
20230418259
Publication date
Dec 28, 2023
NANYA TECHNOLOGY CORPORATION
TZU-CHING TSAI
G05 - CONTROLLING REGULATING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...
Publication number
20230418267
Publication date
Dec 28, 2023
SCREEN Holdings Co., Ltd.
Koji HASHIMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MODEL-BASED PARAMETER ADJUSTMENTS FOR DEPOSITION PROCESSES
Publication number
20230411222
Publication date
Dec 21, 2023
Applied Materials, Inc.
Sam K. Lee
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
DATA COLLECTION SYSTEM, DATA COLLECTION APPARATUS, DATA COLLECTION...
Publication number
20230395411
Publication date
Dec 7, 2023
TOKYO ELECTRON LIMITED
Tsuyoshi MORIYA
G01 - MEASURING TESTING
Information
Patent Application
SEMICONDUCTOR WAFER COOLING
Publication number
20230384776
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Yung-Yao LEE
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PHYSICALLY-INFORMED MULTI-SYSTEM HARDWARE OPERATING WINDOWS
Publication number
20230367288
Publication date
Nov 16, 2023
Applied Materials, Inc.
Jeong Jin Hong
G05 - CONTROLLING REGULATING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20230369085
Publication date
Nov 16, 2023
Kokusai Electric Corporation
Taku HISADA
G05 - CONTROLLING REGULATING
Information
Patent Application
METHOD FOR CONTROLLING DEPOSITION TOOL
Publication number
20230359168
Publication date
Nov 9, 2023
NANYA TECHNOLOGY CORPORATION
TZU-CHING TSAI
G05 - CONTROLLING REGULATING