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HARDMASK MATERIALS
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Publication date Nov 1, 2012
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Multi-Region Processing System and Heads
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Publication date Sep 1, 2011
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Intermolecular, Inc.
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Rick Endo
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HARDMASK MATERIALS
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Publication date Jun 9, 2011
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Vishwanathan Rangarajan
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LITHOGRAPHY PATTERNING METHOD
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Publication date Mar 31, 2011
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Taiwan Semiconductor Manufacturing Company, Ltd.
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I-Hsiung Huang
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Test Structures and Methods
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Sajan Marokkey
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