Means for avoiding or correcting vibration effects

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H01J2237/0216

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/0216Means for avoiding or correcting vibration effects

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Ion beam device
- Patent number 12,148,593
- Issue date Nov 19, 2024
- HITACHI HIGH-TECH CORPORATION
- Shinichi Matsubara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum chamber arrangement for charged particle beam generator
- Patent number 11,961,627
- Issue date Apr 16, 2024
- ASML Netherlands B.V.
- Alexander Hendrik Vincent Van Veen
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Cryotransfer holder and workstation
- Patent number 11,908,655
- Issue date Feb 20, 2024
- Gatan, Inc.
- Alexander Jozef Gubbens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum chamber arrangement for charged particle beam generator
- Patent number 11,705,252
- Issue date Jul 18, 2023
- ASML Netherlands B.V.
- Alexander Hendrik Vincent Van Veen
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Coupling for connecting analytical systems with vibrational isolation
- Patent number 11,699,582
- Issue date Jul 11, 2023
- FEI Company
- Alexander Makarov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vibration damping system for charged particle beam apparatus
- Patent number 11,664,185
- Issue date May 30, 2023
- HITACHI HIGH-TECH CORPORATION
- Jun Etoh
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Grant
Charged particle beam optical apparatus, exposure apparatus, exposu...
- Patent number 11,387,074
- Issue date Jul 12, 2022
- Nikon Corporation
- Hiroyuki Nagasaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage driving system and apparatus or device such as apparatus of c...
- Patent number 11,355,312
- Issue date Jun 7, 2022
- BORRIES PTE. LTD.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,181,833
- Issue date Nov 23, 2021
- ASML Netherlands B.V.
- Jerry Johannes Martinus Peijster
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Vacuum chamber arrangement for charged particle beam generator
- Patent number 11,094,426
- Issue date Aug 17, 2021
- ASML Netherlands B.V.
- Alexander Hendrik Vincent Van Veen
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Charged particle beam optical apparatus, exposure apparatus, exposu...
- Patent number 10,984,982
- Issue date Apr 20, 2021
- Nikon Corporation
- Hiroyuki Nagasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cryotransfer holder and workstation
- Patent number 10,832,887
- Issue date Nov 10, 2020
- Gatan, Inc.
- Alexander Jozef Gubbens
- G01 - MEASURING TESTING
Information Patent Grant
Vibration control system and optical equipment equipped therewith
- Patent number 10,607,810
- Issue date Mar 31, 2020
- NuFlare Technology, Inc.
- Michihiro Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum chamber arrangement for charged particle beam generator
- Patent number 10,586,625
- Issue date Mar 10, 2020
- ASML Netherlands B.V.
- Alexander Hendrik Vincent Van Veen
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method and system for noise mitigation in a multi-beam scanning ele...
- Patent number 10,366,862
- Issue date Jul 30, 2019
- KLA-Tencor Corporaton
- Doug K. Masnaghetti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,324,385
- Issue date Jun 18, 2019
- Mapper Lithography IP B.V.
- Jerry Johannes Martinus Peijster
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Ion beam device
- Patent number 10,304,656
- Issue date May 28, 2019
- Hitachi High-Technologies Corporation
- Hiroyuki Muto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 10,192,713
- Issue date Jan 29, 2019
- Hitachi High-Technologies Corporation
- Kiyoshi Yabata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage apparatus with braking system for lens, beam, or vibration co...
- Patent number 9,905,393
- Issue date Feb 27, 2018
- Hitachi High-Technologies Corporation
- Hironori Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-electrode electron optics
- Patent number 9,905,322
- Issue date Feb 27, 2018
- Mapper Lithography IP B.V.
- Marco Jan-Jaco Wieland
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Charged particle microscope with vibration detection / correction
- Patent number 9,875,879
- Issue date Jan 23, 2018
- FEI Company
- Jeroen De Boeij
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image generation apparatus
- Patent number 9,793,091
- Issue date Oct 17, 2017
- NGR Inc.
- Hideaki Teshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle radiation apparatus
- Patent number 9,734,983
- Issue date Aug 15, 2017
- Hitachi High-Technologies Corporation
- Daisuke Mutou
- G10 - MUSICAL INSTRUMENTS ACOUSTICS
Information Patent Grant
Substrate processing apparatus
- Patent number 9,703,213
- Issue date Jul 11, 2017
- Mapper Lithography IP B.V.
- Jerry Johannes Martinus Peijster
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Ion source and ion beam device using same
- Patent number 9,640,360
- Issue date May 2, 2017
- Hitachi High-Technologies Corporation
- Hiroyasu Shichi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Actuator, sample positioning device, and charged particle beam system
- Patent number 9,618,101
- Issue date Apr 11, 2017
- Jeol Ltd.
- Shuichi Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transmission electron microscope micro-grid
- Patent number 9,406,481
- Issue date Aug 2, 2016
- Tsinghua University
- Yang Wei
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Projection system with flexible coupling
- Patent number 9,268,216
- Issue date Feb 23, 2016
- Mapper Lithography IP B.V.
- Jerry Johannes Martinus Peijster
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam device, and image analysis device
- Patent number 9,129,353
- Issue date Sep 8, 2015
- Hitachi High-Technologies Corporation
- Masumi Shirai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Vibration control apparatus, lithography apparatus, and method of m...
- Patent number 9,052,614
- Issue date Jun 9, 2015
- Canon Kabushiki Kaisha
- Ryo Nawata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
TRANSMISSION ELECTRON MICROSCOPE
- Publication number 20240373591
- Publication date Nov 7, 2024
- Samsung Electronics Co., Ltd.
- Daesung Moon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR
- Publication number 20230386696
- Publication date Nov 30, 2023
- ASML NETHERLANDS B.V.
- Alexander Hendrik Vincent VAN VEEN
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20230139507
- Publication date May 4, 2023
- HITACHI HIGH-TECH CORPORATION
- Shiano ONO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device and Vibration-Suppressing Mechanism
- Publication number 20230035686
- Publication date Feb 2, 2023
- Hitachi High-Tech Corporation
- Hiroki TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM DEVICE
- Publication number 20220301812
- Publication date Sep 22, 2022
- Shinichi Matsubara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VIBRATION DAMPING SYSTEM FOR CHARGED PARTICLE BEAM APPARATUS
- Publication number 20220208505
- Publication date Jun 30, 2022
- HITACHI HIGH-TECH CORPORATION
- Jun ETOH
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Application
NOVEL STAGE DRIVING SYSTEM AND APPARATUS OR DEVICE SUCH AS APPARATU...
- Publication number 20220108869
- Publication date Apr 7, 2022
- BORRIES PTE. LTD.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COUPLING FOR CONNECTING ANALYTICAL SYSTEMS WITH VIBRATIONAL ISOLATION
- Publication number 20220084806
- Publication date Mar 17, 2022
- Thermo Fisher Scientific (Bremen) GmbH
- Alexander Makarov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR FOCUSING CHARGED -PARTICLE BEAMS
- Publication number 20220068590
- Publication date Mar 3, 2022
- ASML NETHERLANDS B.V.
- Ying LUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR
- Publication number 20210383941
- Publication date Dec 9, 2021
- ASML NETHERLANDS B.V.
- Alexander Hendrik Vincent VAN VEEN
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
CHARGED PARTICLE BEAM OPTICAL APPARATUS, EXPOSURE APPARATUS, EXPOSU...
- Publication number 20210225611
- Publication date Jul 22, 2021
- Nikon Corporation
- Hiroyuki NAGASAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CRYOTRANSFER HOLDER AND WORKSTATION
- Publication number 20210110991
- Publication date Apr 15, 2021
- Gatan, Inc.
- Alexander Jozef Gubbens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR
- Publication number 20200194141
- Publication date Jun 18, 2020
- ASML NETHERLANDS B.V.
- Alexander Hendrik Vincent VAN VEEN
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20190369509
- Publication date Dec 5, 2019
- ASML NETHERLANDS B.V.
- Jerry Johannes Martinus PEIJSTER
- B82 - NANO-TECHNOLOGY
Information Patent Application
VIBRATION CONTROL SYSTEM AND OPTICAL EQUIPMENT EQUIPPED THEREWITH
- Publication number 20190214224
- Publication date Jul 11, 2019
- NuFlare Technology, Inc.
- Michihiro Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20180269027
- Publication date Sep 20, 2018
- Hitachi High-Technologies Corporation
- Kiyoshi YABATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170307987
- Publication date Oct 26, 2017
- MAPPER LITHOGRAPHY IP BV
- Jerry Johannes Martinus PEIJSTER
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE MICROSCOPE WITH VIBRATION DETECTION / CORRECTION
- Publication number 20170125209
- Publication date May 4, 2017
- FEI Company
- Jeroen De Boeij
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Radiation Apparatus
- Publication number 20170061947
- Publication date Mar 2, 2017
- Hitachi High-Technologies Corporation
- Daisuke MUTOU
- G10 - MUSICAL INSTRUMENTS ACOUSTICS
Information Patent Application
Stage Apparatus and Charged Particle Radiation Apparatus Equipped w...
- Publication number 20160284506
- Publication date Sep 29, 2016
- Hitachi High-Technologies Corporation
- Hironori OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID ELECTROSTATIC LENS WITH INCREASED NATURAL FREQUENCY
- Publication number 20150048254
- Publication date Feb 19, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Oliver V. Naumovski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE INSPECTION METHOD AND A SUBSTRATE PROCESSING METHOD
- Publication number 20140367570
- Publication date Dec 18, 2014
- EBARA CORPORATION
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20140347640
- Publication date Nov 27, 2014
- Jerry Johannes Martinus Peijster
- B82 - NANO-TECHNOLOGY
Information Patent Application
SAMPLE POSITIONING APPARATUS, SAMPLE STAGE, AND CHARGED PARTICLE BE...
- Publication number 20140312246
- Publication date Oct 23, 2014
- Hitachi High-Technologies Corporation
- Motohiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE AND ION BEAM DEVICE USING SAME
- Publication number 20140299768
- Publication date Oct 9, 2014
- Hiroyasu Shichi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE DEVICE
- Publication number 20140197331
- Publication date Jul 17, 2014
- Hitachi High-Technologies Corporation
- Hirohisa Enomoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VIBRATION ISOLATION MODULE AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20140197330
- Publication date Jul 17, 2014
- MAPPER LITHOGRAPHY IP BV
- Jerry Johannes Martinus Peijster
- B82 - NANO-TECHNOLOGY
Information Patent Application
Specimen Positioning Device, Charged Particle Beam System, and Spec...
- Publication number 20140158907
- Publication date Jun 12, 2014
- JEOL Ltd.
- Mitsuru Hamochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID ELECTROSTATIC LENS WITH INCREASED NATURAL FREQUENCY
- Publication number 20140034843
- Publication date Feb 6, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Oliver V. Naumovski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE, AND IMAGE ANALYSIS DEVICE
- Publication number 20130301954
- Publication date Nov 14, 2013
- Hitachi High-Technologies Corporation
- Masumi Shirai
- G06 - COMPUTING CALCULATING COUNTING

Means for avoiding or correcting vibration effects

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Ion beam device

Vacuum chamber arrangement for charged particle beam generator

Cryotransfer holder and workstation

Vacuum chamber arrangement for charged particle beam generator

Coupling for connecting analytical systems with vibrational isolation

Vibration damping system for charged particle beam apparatus

Charged particle beam optical apparatus, exposure apparatus, exposu...

Stage driving system and apparatus or device such as apparatus of c...

Substrate processing apparatus

Vacuum chamber arrangement for charged particle beam generator

Charged particle beam optical apparatus, exposure apparatus, exposu...

Cryotransfer holder and workstation

Vibration control system and optical equipment equipped therewith

Vacuum chamber arrangement for charged particle beam generator

Method and system for noise mitigation in a multi-beam scanning ele...

Substrate processing apparatus

Ion beam device

Charged particle beam device

Stage apparatus with braking system for lens, beam, or vibration co...

Multi-electrode electron optics

Charged particle microscope with vibration detection / correction

Image generation apparatus

Charged particle radiation apparatus

Substrate processing apparatus

Ion source and ion beam device using same

Actuator, sample positioning device, and charged particle beam system

Transmission electron microscope micro-grid

Projection system with flexible coupling

Charged particle beam device, and image analysis device

Vibration control apparatus, lithography apparatus, and method of m...

Patents Applicationslast 30 patents

TRANSMISSION ELECTRON MICROSCOPE

VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR

CHARGED PARTICLE BEAM DEVICE

Charged Particle Beam Device and Vibration-Suppressing Mechanism

ION BEAM DEVICE

VIBRATION DAMPING SYSTEM FOR CHARGED PARTICLE BEAM APPARATUS

NOVEL STAGE DRIVING SYSTEM AND APPARATUS OR DEVICE SUCH AS APPARATU...

COUPLING FOR CONNECTING ANALYTICAL SYSTEMS WITH VIBRATIONAL ISOLATION

SYSTEMS AND METHODS FOR FOCUSING CHARGED -PARTICLE BEAMS

VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR

CHARGED PARTICLE BEAM OPTICAL APPARATUS, EXPOSURE APPARATUS, EXPOSU...

CRYOTRANSFER HOLDER AND WORKSTATION

VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR

SUBSTRATE PROCESSING APPARATUS

VIBRATION CONTROL SYSTEM AND OPTICAL EQUIPMENT EQUIPPED THEREWITH

Charged Particle Beam Device

SUBSTRATE PROCESSING APPARATUS

CHARGED PARTICLE MICROSCOPE WITH VIBRATION DETECTION / CORRECTION

Charged Particle Radiation Apparatus

Stage Apparatus and Charged Particle Radiation Apparatus Equipped w...

HYBRID ELECTROSTATIC LENS WITH INCREASED NATURAL FREQUENCY

SUBSTRATE INSPECTION METHOD AND A SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

SAMPLE POSITIONING APPARATUS, SAMPLE STAGE, AND CHARGED PARTICLE BE...

ION SOURCE AND ION BEAM DEVICE USING SAME

CHARGED PARTICLE DEVICE

VIBRATION ISOLATION MODULE AND SUBSTRATE PROCESSING SYSTEM

Specimen Positioning Device, Charged Particle Beam System, and Spec...

HYBRID ELECTROSTATIC LENS WITH INCREASED NATURAL FREQUENCY

CHARGED PARTICLE BEAM DEVICE, AND IMAGE ANALYSIS DEVICE