TREA

Means for avoiding target poisoning

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Industry

  • CPC
  • H01J37/3485
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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/3485Means for avoiding target poisoning
Industries

Patents Grantslast 30 patents

  • Information Patent Grant

    Method and apparatus for controlling stress variation in a material...
    • Patent number 11,961,722
    • Issue date Apr 16, 2024
    • SPTS Technologies Limited
    • Anthony Wilby
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Sputtering method
    • Patent number 11,710,624
    • Issue date Jul 25, 2023
    • BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
    • Bingliang Guo
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method and apparatus for controlling stress variation in a material...
    • Patent number 11,521,840
    • Issue date Dec 6, 2022
    • SPTS Technologies Limited
    • Anthony Wilby
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Methods and apparatus for co-sputtering multiple targets
    • Patent number 11,101,117
    • Issue date Aug 24, 2021
    • Applied Materials, Inc.
    • Anantha K. Subramani
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Thin film forming method
    • Patent number 10,494,709
    • Issue date Dec 3, 2019
    • Murata Manufacturing Co., Ltd.
    • Munehito Chatani
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Methods and apparatus for co-sputtering multiple targets
    • Patent number 10,468,238
    • Issue date Nov 5, 2019
    • Applied Materials, Inc.
    • Anantha K. Subramani
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Reactive sputtering process
    • Patent number 10,458,015
    • Issue date Oct 29, 2019
    • OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
    • Siegfried Krassnitzer
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sputtering apparatus
    • Patent number 9,928,998
    • Issue date Mar 27, 2018
    • Canon Anelva Corporation
    • Yohsuke Shibuya
    • B08 - CLEANING
  • Information Patent Grant

    Substrate holding apparatus, mask alignment method, and vacuum proc...
    • Patent number 9,082,803
    • Issue date Jul 14, 2015
    • Canon Anelva Corporation
    • Yoshimitu Shimane
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Reactive sputtering method
    • Patent number 7,575,661
    • Issue date Aug 18, 2009
    • Canon Kabushiki Kaisha
    • Yasuyuki Suzuki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents