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ELECTRICITY
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Electric elements
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ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/04
Means for controlling the discharge
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Patents Grants
last 30 patents
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Patent Grant
RFSOI semiconductor structures including a nitrogen-doped charge-tr...
Patent number
11,984,477
Issue date
May 14, 2024
Taiwan Semiconductor Manufacturing Company Limited
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle assessment tool, inspection method
Patent number
11,984,295
Issue date
May 14, 2024
ASML Netherlands B.V.
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Linear accelerator coil including multiple fluid channels
Patent number
11,985,756
Issue date
May 14, 2024
Applied Materials, Inc.
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron-beam irradiation apparatus and maintenance method for elec...
Patent number
11,984,293
Issue date
May 14, 2024
NHV CORPORATION
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Beam grid layout
Patent number
RE49952
Issue date
Apr 30, 2024
ASML Netherlands B.V.
Vincent Sylvester Kuiper
Information
Patent Grant
Apparatus using charged particle beams
Patent number
11,961,697
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Xuerang Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device for inspection of a specimen with a pl...
Patent number
11,961,709
Issue date
Apr 16, 2024
FEI Company
Ali Mohammadi-Gheidari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for real time stereo imaging using multiple ele...
Patent number
11,942,303
Issue date
Mar 26, 2024
ASML Netherlands B.V.
Yan Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for charged particle flooding to enhance voltag...
Patent number
11,929,232
Issue date
Mar 12, 2024
ASML Netherlands B.V.
Frank Nan Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implanter and ion implantation method
Patent number
11,923,167
Issue date
Mar 5, 2024
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Hiroshi Matsushita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for operating a particle beam microscope
Patent number
11,915,907
Issue date
Feb 27, 2024
Carl Zeiss Microscopy GmbH
Dirk Preikszas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stage apparatus suitable for a particle beam apparatus
Patent number
11,908,656
Issue date
Feb 20, 2024
ASML Netherlands B.V.
Han Willem Hendrik Severt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam writing apparatus
Patent number
11,908,659
Issue date
Feb 20, 2024
NuFlare Technology, Inc.
Toshiki Kimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-charged-particle-beam writing apparatus and multi-charged-par...
Patent number
11,901,156
Issue date
Feb 13, 2024
NuFlare Technology, Inc.
Ryosuke Ueba
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus of plural charged-particle beams
Patent number
11,887,807
Issue date
Jan 30, 2024
ASML Netherlands B.V.
Weiming Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High throughput multi-electron beam system
Patent number
11,869,743
Issue date
Jan 9, 2024
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple charged-particle beam apparatus and methods
Patent number
11,854,765
Issue date
Dec 26, 2023
ASML Netherlands B.V.
Weiming Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Blanking aperture array unit
Patent number
11,837,429
Issue date
Dec 5, 2023
NuFlare Technology, Inc.
Shuji Yoshino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Energy filter element for ion implantation systems for the use in t...
Patent number
11,837,430
Issue date
Dec 5, 2023
MI2-FACTORY GMBH
Florian Krippendorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
11,823,861
Issue date
Nov 21, 2023
HITACHI HIGH-TECH CORPORATION
Yuta Imai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
RF quadrupole particle accelerator
Patent number
11,818,830
Issue date
Nov 14, 2023
Applied Materials, Inc.
Frank Sinclair
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
11,817,289
Issue date
Nov 14, 2023
HITACHI HIGH-TECH CORPORATION
Tsunenori Nomaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and power supply device
Patent number
11,810,752
Issue date
Nov 7, 2023
HITACHI HIGH-TECH CORPORATION
Wen Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Distributed ground single antenna ion source
Patent number
11,810,763
Issue date
Nov 7, 2023
Schlumberger Technology Corporation
Benjamin Levitt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Variable thickness ion source extraction plate
Patent number
11,810,746
Issue date
Nov 7, 2023
Applied Materials, Inc.
Alexandre Likhanskii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for multiple charged-particle beams
Patent number
11,804,355
Issue date
Oct 31, 2023
ASML Netherlands B.V.
Yan Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus using multiple beams of charged particles
Patent number
11,804,356
Issue date
Oct 31, 2023
ASML Netherlands B.V.
Xuerang Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron optical module for providing an off-axial electron beam wi...
Patent number
11,804,357
Issue date
Oct 31, 2023
FEI Company
Ali Mohammadi-Gheidari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam adjustment method, multi charged partic...
Patent number
11,804,360
Issue date
Oct 31, 2023
NuFlare Technology, Inc.
Tsubasa Nanao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Charged particle beam apparatus, and systems and methods for operat...
Patent number
11,798,777
Issue date
Oct 24, 2023
ASML Netherlands B.V.
Martinus Gerardus Maria Johannes Maassen
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ELECTRON BEAM WELDING SYSTEMS EMPLOYING A PLASMA CATHODE
Publication number
20240153739
Publication date
May 9, 2024
US Electron, Inc.
John Noonan
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
MULTIPLE CHARGED-PARTICLE BEAM APPARATUS AND METHODS
Publication number
20240145214
Publication date
May 2, 2024
ASML NETHERLANDS B.V.
Weiming REN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BEAM DETECTOR, MULTI-CHARGED-PARTICLE-BEAM IRRADIATION APPARATUS, A...
Publication number
20240136148
Publication date
Apr 25, 2024
NuFlare Technology, Inc.
Yasutaka SATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CREATING A SMOOTH DIAGONAL SURFACE USING A FOCUSED ION B...
Publication number
20240136150
Publication date
Apr 25, 2024
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
Publication number
20240128044
Publication date
Apr 18, 2024
ASML NETHERLANDS B.V.
Weiming REN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR OPERATING A MULTI-BEAM PARTICLE MICROSCOPE WITH FAST CLO...
Publication number
20240128048
Publication date
Apr 18, 2024
Carl Zeiss MultiSEM GmbH
Ingo Mueller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-BEAM CHARGED PARTICLE BEAM SYSTEM WITH ANISOTROPIC FILTERING...
Publication number
20240128051
Publication date
Apr 18, 2024
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR PROCESSING PLASMA AND METHOD OF PROCESSING PLASMA AND...
Publication number
20240128055
Publication date
Apr 18, 2024
Samsung Electronics Co., Ltd.
Hyunbae Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND DEVICE FOR SPATIAL CHARGED PARTICLE BUNCHING
Publication number
20240112882
Publication date
Apr 4, 2024
NEXGEN SEMI HOLDING, INC.
Mark Joseph Bennahmias
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THIN FILM FORMING APPARATUS AND METHOD
Publication number
20240112897
Publication date
Apr 4, 2024
SEMES CO., LTD.
Sun Il KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM OF IMAGE-FORMING MULTI-ELECTRON BEAMS
Publication number
20240096586
Publication date
Mar 21, 2024
KLA Corporation
Xinrong JIANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON-BEAM IRRADIATION APPARATUS AND MAINTENANCE METHOD FOR ELEC...
Publication number
20240087836
Publication date
Mar 14, 2024
NHV CORPORATION
Masahiro NAGAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE DEVICE AND METHOD
Publication number
20240087835
Publication date
Mar 14, 2024
ASML NETHERLANDS B.V.
Albertus Victor Gerardus MANGNUS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-BEAM CHARGED PARTICLE SYSTEM AND METHOD OF CONTROLLING THE WO...
Publication number
20240079207
Publication date
Mar 7, 2024
Carl Zeiss MultiSEM GmbH
Michael Behnke
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS USING MULTIPLE BEAMS OF CHARGED PARTICLES
Publication number
20240071711
Publication date
Feb 29, 2024
ASML NETHERLANDS B.V.
Xuerang HU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BEAM DETECTOR, MULTI CHARGED PARTICLE BEAM IRRADIATION APPARATUS, A...
Publication number
20240071714
Publication date
Feb 29, 2024
NuFlare Technology, Inc.
Yasutaka SATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ENERGY FILTER ELEMENT FOR ION IMPLANTATION SYSTEMS FOR THE USE IN T...
Publication number
20240055217
Publication date
Feb 15, 2024
mi2-factory GmbH
Florian KRIPPENDORF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON-OPTICAL DEVICE
Publication number
20240038485
Publication date
Feb 1, 2024
ASML NETHERLANDS B.V.
Stijn Wilem Herman Karel STEENBRINK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR ELECTRON BEAM-INDUCED PROCESSING OF A DEFECT OF A MICROL...
Publication number
20240036456
Publication date
Feb 1, 2024
Carl Zeiss SMT GMBH
Gilles Tabbone
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240030005
Publication date
Jan 25, 2024
TOKYO ELECTRON LIMITED
Tetsuma YAGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BLANKING APERTURE ARRAY SYSTEM AND MULTI CHARGED PARTICLE BEAM WRIT...
Publication number
20240029999
Publication date
Jan 25, 2024
NuFlare Technology, Inc.
Hiroshi Yamashita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON-OPTICAL SYSTEM AND METHOD OF OPERATING AN ELECTRON-OPTICAL...
Publication number
20240029995
Publication date
Jan 25, 2024
ASML NETHERLANDS B.V.
Stijn Wilem Herman Karel STEENBRINK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR THE REMOVAL AND/OR AVOIDANCE OF CONTAMINATION...
Publication number
20240017301
Publication date
Jan 18, 2024
ASML NETHERLANDS B.V.
Marc SMITS
B08 - CLEANING
Information
Patent Application
MOUNTING SUBSTRATE, BLANKING APERTURE ARRAY CHIP, BLANKING APERTURE...
Publication number
20240013999
Publication date
Jan 11, 2024
NuFlare Technology, Inc.
Toshiki KIMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FLOOD COLUMN AND CHARGED PARTICLE APPARATUS
Publication number
20240006147
Publication date
Jan 4, 2024
ASML NETHERLANDS B.V.
Christiaan OTTEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE FOR INSPECTION OF A SPECIMEN WITH A PL...
Publication number
20240006149
Publication date
Jan 4, 2024
FEI Company
Ali Mohammadi-Gheidari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR DETERMINING THE VIRTUAL SOURCE LOCATION OF A LIQUID MET...
Publication number
20230411109
Publication date
Dec 21, 2023
FEI Company
Sean M. Kellogg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS USING CHARGED PARTICLE BEAMS
Publication number
20230411110
Publication date
Dec 21, 2023
ASML NETHERLANDS B.V.
Xuerang HU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM EVALUATION METHOD, MULTI CHARGED PARTIC...
Publication number
20230402253
Publication date
Dec 14, 2023
NuFlare Technology, Inc.
Hirofumi MORITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Creating Multiple Electron Beams with a Photocathode Film
Publication number
20230395349
Publication date
Dec 7, 2023
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS