Means for mechanically adjusting components not otherwise provided for

Industry

CPC
H01J37/023

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/023Means for mechanically adjusting components not otherwise provided for

Industries

Patents Grantslast 30 patents

Information Patent Grant
Cathode exchange mechanism to improve preventative maintenance time...
- Patent number 12,195,314
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Bhaskar Prasad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods of hysteresis compensation
- Patent number 12,183,537
- Issue date Dec 31, 2024
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods of clamp compensation
- Patent number 12,057,286
- Issue date Aug 6, 2024
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge ring arrangement with moveable edge rings
- Patent number 12,027,410
- Issue date Jul 2, 2024
- Lam Research Corporation
- Haoquan Yan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Replaceable module for a charged particle apparatus
- Patent number 11,961,698
- Issue date Apr 16, 2024
- ASML Netherlands B.V.
- Christiaan Otten
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for inspection
- Patent number 11,875,966
- Issue date Jan 16, 2024
- ASML Netherlands B.V.
- Bernardo Kastrup
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Collision avoidance for particle beam instruments
- Patent number 11,798,774
- Issue date Oct 24, 2023
- Oxford Instruments Nanotechnology Tools Limited
- Stuart Andrew Swan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vibration damping system for charged particle beam apparatus
- Patent number 11,664,185
- Issue date May 30, 2023
- HITACHI HIGH-TECH CORPORATION
- Jun Etoh
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Grant
Dual XY variable aperture in an ion implantation system
- Patent number 11,574,796
- Issue date Feb 7, 2023
- Applied Materials, Inc.
- Jun Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods of clamp compensation
- Patent number 11,562,877
- Issue date Jan 24, 2023
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods of hysteresis compensation
- Patent number 11,538,652
- Issue date Dec 27, 2022
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Linear motor for vacuum and vacuum processing apparatus
- Patent number 11,418,101
- Issue date Aug 16, 2022
- Hitachi High-Technologies Corporation
- Tomotaka Shibazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source device
- Patent number 11,361,934
- Issue date Jun 14, 2022
- Sumitomo Heavy Industries, Ltd.
- Toshikazu Hiasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aberration correction in charged particle system
- Patent number 11,348,756
- Issue date May 31, 2022
- ASML Netherlands B.V.
- Alexander Hendrik Vincent Van Veen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Collision avoidance for particle beam instruments
- Patent number 11,139,137
- Issue date Oct 5, 2021
- Oxford Instruments Nanotechnology Tools Limited
- Stuart Andrew Swan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for inspection
- Patent number 11,094,502
- Issue date Aug 17, 2021
- ASML Netherlands B.V.
- Bernardo Kastrup
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscopy
- Patent number 11,067,486
- Issue date Jul 20, 2021
- United Kingdom Research and Innovation
- Meindert Hugo Lamers
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Charged particle beam irradiation apparatus
- Patent number 11,049,688
- Issue date Jun 29, 2021
- NuFlare Technology, Inc.
- Michihiro Kawaguchi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Anode, and x-ray generating tube, x-ray generating apparatus, and r...
- Patent number 10,998,161
- Issue date May 4, 2021
- Canon Kabushiki Kaisha
- Yasuo Ohashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Radiation analysis apparatus
- Patent number 10,908,104
- Issue date Feb 2, 2021
- Hitachi High-Tech Science Corporation
- Satoshi Nakayama
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Vehicle cabin inspection system and method
- Patent number 10,900,911
- Issue date Jan 26, 2021
- SMITHS HEIMANN SAS
- Agathe Brabant
- G01 - MEASURING TESTING
Information Patent Grant
Ion implantation apparatus and measurement device
- Patent number 10,825,654
- Issue date Nov 3, 2020
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Noriyasu Ido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Robotic arm with X-ray source
- Patent number 10,743,827
- Issue date Aug 18, 2020
- General Electric Company
- G. S. Sampath Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation amount adjustment device and method, ion implantat...
- Patent number 10,734,189
- Issue date Aug 4, 2020
- Chengdu Boe Optoelectronics Technology Co., Ltd.
- Hao Jing
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 10,658,147
- Issue date May 19, 2020
- Hitachi High-Tech Science Corporation
- Makoto Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Moveable edge coupling ring for edge process control during semicon...
- Patent number 10,658,222
- Issue date May 19, 2020
- Lam Research Corporation
- Haoquan Yan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Monochromator and charged particle beam apparatus comprising the same
- Patent number 10,622,183
- Issue date Apr 14, 2020
- Korea Research Institute of Standards and Science
- Takashi Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Medical imaging method varying collimation of emitted radiation beam
- Patent number 10,602,995
- Issue date Mar 31, 2020
- General Electric Company
- Cyril Riddell
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Enhanced FIB-SEM systems for large-volume 3D imaging
- Patent number 10,600,615
- Issue date Mar 24, 2020
- Howard Hughes Medical Institute
- C. Shan Xu
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam system
- Patent number 10,529,530
- Issue date Jan 7, 2020
- Jeol Ltd.
- Shuji Kawai
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
EDGE RING ARRANGEMENT WITH MOVEABLE EDGE RINGS
- Publication number 20240355667
- Publication date Oct 24, 2024
- LAM RESEARCH CORPORATION
- Haoquan Yan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS OF CLAMP COMPENSATION
- Publication number 20240339286
- Publication date Oct 10, 2024
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA MONITORING SYSTEM
- Publication number 20240290590
- Publication date Aug 29, 2024
- SAMSUNG DISPLAY CO., LTD.
- YOUNGGIL PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR INSPECTION
- Publication number 20240186107
- Publication date Jun 6, 2024
- Bernardo KASTRUP
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANAGING BEAM POWER EFFECTS BY VARYING BASE EMISSIVITY
- Publication number 20240087839
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Dawei Sun
- G02 - OPTICS
Information Patent Application
SURFACE PREPARATION
- Publication number 20240021402
- Publication date Jan 18, 2024
- University College Dublin, National University of Ireland
- Denis Dowling
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS OF CLAMP COMPENSATION
- Publication number 20230120177
- Publication date Apr 20, 2023
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS OF HYSTERESIS COMPENSATION
- Publication number 20230101676
- Publication date Mar 30, 2023
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dual XY Variable Aperture In An Ion Implantation System
- Publication number 20230021619
- Publication date Jan 26, 2023
- Applied Materials, Inc.
- Jun Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Linear Motor for Vacuum and Vacuum Processing Apparatus
- Publication number 20220352804
- Publication date Nov 3, 2022
- HITACHI HIGH-TECH CORPORATION
- Tomotaka SHIBAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CATHODE EXCHANGE MECHANISM TO IMPROVE PREVENTATIVE MAINTENANCE TIME...
- Publication number 20220242706
- Publication date Aug 4, 2022
- Applied Materials, Inc.
- Bhaskar PRASAD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VIBRATION DAMPING SYSTEM FOR CHARGED PARTICLE BEAM APPARATUS
- Publication number 20220208505
- Publication date Jun 30, 2022
- HITACHI HIGH-TECH CORPORATION
- Jun ETOH
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Application
COLLISION AVOIDANCE FOR PARTICLE BEAM INSTRUMENTS
- Publication number 20210375577
- Publication date Dec 2, 2021
- OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED
- Stuart Andrew Swan
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR INSPECTION
- Publication number 20210375581
- Publication date Dec 2, 2021
- ASML NETHERLANDS B.V.
- Bernardo KASTRUP
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE RING ARRANGEMENT WITH MOVEABLE EDGE RINGS
- Publication number 20210183687
- Publication date Jun 17, 2021
- LAM RESEARCH CORPORATION
- Haoquan Yan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS OF CLAMP COMPENSATION
- Publication number 20210151276
- Publication date May 20, 2021
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS OF HYSTERESIS COMPENSATION
- Publication number 20210151277
- Publication date May 20, 2021
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE DEVICE
- Publication number 20200219695
- Publication date Jul 9, 2020
- Sumitomo Heavy Industries, Ltd.
- Toshikazu Hiasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COLLISION AVOIDANCE FOR PARTICLE BEAM INSTRUMENTS
- Publication number 20200168429
- Publication date May 28, 2020
- OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED
- Stuart Andrew Swan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD FOR MEASURING SHAPE OF RING...
- Publication number 20200161101
- Publication date May 21, 2020
- TOKYO ELECTRON LIMITED
- Atsushi OGATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Linear Motor for Vacuum and Vacuum Processing Apparatus
- Publication number 20200126749
- Publication date Apr 23, 2020
- Hitachi High-Technologies Corporation
- Tomotaka SHIBAZAKI
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
CHARGED PARTICLE BEAM IRRADIATION APPARATUS
- Publication number 20200105499
- Publication date Apr 2, 2020
- NuFlare Technology, Inc.
- Michihiro KAWAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PVD REACTOR WITH A FUNCTION OF ALIGNMENT IN COVERING AN UPPER COVER...
- Publication number 20190355560
- Publication date Nov 21, 2019
- YING HSIEN CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION IMPLANTATION APPARATUS AND MEASUREMENT DEVICE
- Publication number 20190244785
- Publication date Aug 8, 2019
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Noriyasu Ido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dynamic Temperature Control Of An Ion Source
- Publication number 20190189387
- Publication date Jun 20, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Alexander S. Perel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION AMOUNT ADJUSTMENT DEVICE AND METHOD, ION IMPLANTAT...
- Publication number 20190164718
- Publication date May 30, 2019
- BOE TECHNOLOGY GROUP CO., LTD.
- Hao JING
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOVEABLE EDGE RING DESIGN
- Publication number 20190013232
- Publication date Jan 10, 2019
- LAM RESEARCH CORPORATION
- Haoquan Yan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTER AND ION IMPLANTATION METHOD
- Publication number 20180350559
- Publication date Dec 6, 2018
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Hiroshi Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR ALIGNMENT OF OPTICAL AND CHARGED-PARTICLE...
- Publication number 20180166247
- Publication date Jun 14, 2018
- Waviks, Inc.
- Thomas M. Moore
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Treating Particles
- Publication number 20180127274
- Publication date May 10, 2018
- PERPETUUS RESEARCH & DEVELOPMENT LIMITED
- John Buckland
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Means for mechanically adjusting components not otherwise provided for

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Cathode exchange mechanism to improve preventative maintenance time...

Systems and methods of hysteresis compensation

Systems and methods of clamp compensation

Edge ring arrangement with moveable edge rings

Replaceable module for a charged particle apparatus

Method and apparatus for inspection

Collision avoidance for particle beam instruments

Vibration damping system for charged particle beam apparatus

Dual XY variable aperture in an ion implantation system

Systems and methods of clamp compensation

Systems and methods of hysteresis compensation

Linear motor for vacuum and vacuum processing apparatus

Ion source device

Aberration correction in charged particle system

Collision avoidance for particle beam instruments

Method and apparatus for inspection

Electron microscopy

Charged particle beam irradiation apparatus

Anode, and x-ray generating tube, x-ray generating apparatus, and r...

Radiation analysis apparatus

Vehicle cabin inspection system and method

Ion implantation apparatus and measurement device

Robotic arm with X-ray source

Ion implantation amount adjustment device and method, ion implantat...

Charged particle beam apparatus

Moveable edge coupling ring for edge process control during semicon...

Monochromator and charged particle beam apparatus comprising the same

Medical imaging method varying collimation of emitted radiation beam

Enhanced FIB-SEM systems for large-volume 3D imaging

Charged particle beam system

Patents Applicationslast 30 patents

EDGE RING ARRANGEMENT WITH MOVEABLE EDGE RINGS

SYSTEMS AND METHODS OF CLAMP COMPENSATION

PLASMA MONITORING SYSTEM

METHOD AND APPARATUS FOR INSPECTION

MANAGING BEAM POWER EFFECTS BY VARYING BASE EMISSIVITY

SURFACE PREPARATION

SYSTEMS AND METHODS OF CLAMP COMPENSATION

SYSTEMS AND METHODS OF HYSTERESIS COMPENSATION

Dual XY Variable Aperture In An Ion Implantation System

Linear Motor for Vacuum and Vacuum Processing Apparatus

CATHODE EXCHANGE MECHANISM TO IMPROVE PREVENTATIVE MAINTENANCE TIME...

VIBRATION DAMPING SYSTEM FOR CHARGED PARTICLE BEAM APPARATUS

COLLISION AVOIDANCE FOR PARTICLE BEAM INSTRUMENTS

METHOD AND APPARATUS FOR INSPECTION

EDGE RING ARRANGEMENT WITH MOVEABLE EDGE RINGS

SYSTEMS AND METHODS OF CLAMP COMPENSATION

SYSTEMS AND METHODS OF HYSTERESIS COMPENSATION

ION SOURCE DEVICE

COLLISION AVOIDANCE FOR PARTICLE BEAM INSTRUMENTS

PLASMA PROCESSING APPARATUS AND METHOD FOR MEASURING SHAPE OF RING...

Linear Motor for Vacuum and Vacuum Processing Apparatus

CHARGED PARTICLE BEAM IRRADIATION APPARATUS

PVD REACTOR WITH A FUNCTION OF ALIGNMENT IN COVERING AN UPPER COVER...

ION IMPLANTATION APPARATUS AND MEASUREMENT DEVICE

Dynamic Temperature Control Of An Ion Source

ION IMPLANTATION AMOUNT ADJUSTMENT DEVICE AND METHOD, ION IMPLANTAT...

MOVEABLE EDGE RING DESIGN

ION IMPLANTER AND ION IMPLANTATION METHOD

METHOD AND APPARATUS FOR ALIGNMENT OF OPTICAL AND CHARGED-PARTICLE...

Treating Particles