Measurement of surface topography

Industry

CPC
H01J2237/2814

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/2814Measurement of surface topography

Industries

Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam apparatus and image acquiring method
- Patent number 12,148,594
- Issue date Nov 19, 2024
- Jeol Ltd.
- Takeshi Otsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detection of probabilistic process windows
- Patent number 12,142,454
- Issue date Nov 12, 2024
- Fractilla, LLC
- Chris Mack
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspection apparatus and method
- Patent number 12,072,181
- Issue date Aug 27, 2024
- ASML Netherlands B.V.
- Yan Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 12,046,446
- Issue date Jul 23, 2024
- HITACHI HIGH-TECH CORPORATION
- Hiroyuki Chiba
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Analyzing a sidewall of hole milled in a sample to determine thickn...
- Patent number 12,033,831
- Issue date Jul 9, 2024
- Applied Materials Israel Ltd.
- Ilya Blayvas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam probing techniques and related structures
- Patent number 11,996,336
- Issue date May 28, 2024
- Micron Technology, Inc.
- Amitava Majumdar
- G11 - INFORMATION STORAGE
Information Patent Grant
System and method for generating and analyzing roughness measuremen...
- Patent number 11,996,265
- Issue date May 28, 2024
- Fractilla, LLC
- Chris Mack
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and methods for thermally conditioning a wafer in a charged...
- Patent number 11,804,358
- Issue date Oct 31, 2023
- ASML Netherlands B.V.
- Martijn Petrus Christianus Van Heumen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for analyzing a defect of a photolithographic mas...
- Patent number 11,733,186
- Issue date Aug 22, 2023
- Carl Zeiss SMT GmbH
- Gabriel Baralia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for generating and analyzing roughness measurements
- Patent number 11,670,480
- Issue date Jun 6, 2023
- Fractilia, LLC
- Chris Mack
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Edge detection system
- Patent number 11,664,188
- Issue date May 30, 2023
- Fractilia, LLC
- Chris Mack
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Enabling scanning electron microscope imaging while preventing samp...
- Patent number 11,631,602
- Issue date Apr 18, 2023
- KLA Corporation
- Hari Sriraman Pathangi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for predicting stochastic-aware process window an...
- Patent number 11,521,825
- Issue date Dec 6, 2022
- Fractilia, LLC
- Chris Mack
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for low-noise edge detection and its use for proc...
- Patent number 11,508,546
- Issue date Nov 22, 2022
- Fractilia, LLC
- Chris Mack
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for generating and analyzing roughness measuremen...
- Patent number 11,380,516
- Issue date Jul 5, 2022
- Fractilia, LLC
- Chris Mack
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for generating and analyzing roughness measuremen...
- Patent number 11,361,937
- Issue date Jun 14, 2022
- Fractilia, LLC
- Chris Mack
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for generating and analyzing roughness measuremen...
- Patent number 11,355,306
- Issue date Jun 7, 2022
- Fractilia, LLC
- Chris Mack
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Fiducial design for tilted or glancing mill operations with a charg...
- Patent number 11,315,756
- Issue date Apr 26, 2022
- FEI Company
- Stacey Stone
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam probing techniques and related structures
- Patent number 11,302,589
- Issue date Apr 12, 2022
- Micron Technology, Inc.
- Amitava Majumdar
- G11 - INFORMATION STORAGE
Information Patent Grant
Holes tilt angle measurement using FIB diagonal cut
- Patent number 11,280,749
- Issue date Mar 22, 2022
- Applied Materials Israel Ltd.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection tool, lithographic apparatus, electron beam source and a...
- Patent number 11,243,179
- Issue date Feb 8, 2022
- ASML Netherlands B.V.
- Erwin Paul Smakman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for SEM-guided AFM scan with dynamically varied scan speed
- Patent number 11,158,486
- Issue date Oct 26, 2021
- JIANGSU JITRI MICRO-NANO AUTOMATION INSTITUTE CO., LTD.
- Yu Sun
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for thermally conditioning a wafer in a charged...
- Patent number 11,139,141
- Issue date Oct 5, 2021
- ASML Netherlands B.V.
- Martijn Petrus Christianus Van Heumen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for performing profile metrology on semicondu...
- Patent number 11,133,152
- Issue date Sep 28, 2021
- Applied Materials, Inc.
- Regina Freed
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for backside planar view lamella preparation
- Patent number 11,069,509
- Issue date Jul 20, 2021
- FEI Company
- James Clarke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge detection system
- Patent number 11,004,653
- Issue date May 11, 2021
- Fractilia, LLC
- Chris Mack
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for generating and analyzing roughness measurements
- Patent number 11,004,654
- Issue date May 11, 2021
- Fractilia, LLC
- Chris Mack
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for analysing a defect of a photolithographic mas...
- Patent number 10,983,075
- Issue date Apr 20, 2021
- Carl Zeiss SMT GmbH
- Gabriel Baralia
- G01 - MEASURING TESTING
Information Patent Grant
Image-forming device, and dimension measurement device
- Patent number 10,976,536
- Issue date Apr 13, 2021
- HITACHI HIGH-TECH CORPORATION
- Yasunori Takasugi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Use of electron beam scanning electron microscopy for characterizat...
- Patent number 10,943,763
- Issue date Mar 9, 2021
- Applied Materials, Inc.
- Ofer Yuli
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
INSPECTION APPARATUS AND METHOD
- Publication number 20240369356
- Publication date Nov 7, 2024
- ASML NETHERLANDS B.V.
- Yan WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM PROBING TECHNIQUES AND RELATED STRUCTURES
- Publication number 20240355685
- Publication date Oct 24, 2024
- Micron Technology, Inc.
- Amitava Majumdar
- G11 - INFORMATION STORAGE
Information Patent Application
ANALYSIS METHOD, COMPUTER-READABLE MEDIUM, AND MANUFACTURING METHOD...
- Publication number 20240347315
- Publication date Oct 17, 2024
- Fuji Electric Co., Ltd.
- Yusuke SHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMEN...
- Publication number 20240312757
- Publication date Sep 19, 2024
- FRACTILIA, LLC
- Chris MACK
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
HIGH RESOLUTION, LOW ENERGY ELECTRON MICROSCOPE FOR PROVIDING TOPOG...
- Publication number 20240272099
- Publication date Aug 15, 2024
- Carl Zeiss SMT GMBH
- Daniel Schwarz
- G01 - MEASURING TESTING
Information Patent Application
Method of Dispositioning and Control of a Semiconductor Manufacturi...
- Publication number 20240258066
- Publication date Aug 1, 2024
- FRACTILIA, LLC
- Chris Mack
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF AUTOMATED DATA ACQUISITION FOR A TRANSMISSION ELECTRON MI...
- Publication number 20240128050
- Publication date Apr 18, 2024
- FEI Company
- Yuchen DENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR THERMALLY CONDITIONING A WAFER IN A CHARGED...
- Publication number 20240079202
- Publication date Mar 7, 2024
- ASML NETHERLANDS B.V.
- Martijn Petrus, Christianus VAN HEUMEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMENTS
- Publication number 20230326711
- Publication date Oct 12, 2023
- FRACTILIA, LLC
- Chris MACK
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SCREENING EDGE PLACEMENT UNIFORMITY WAFER STOCHASTICS
- Publication number 20230326710
- Publication date Oct 12, 2023
- KLA Corporation
- Stefan Eyring
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STROBOSCOPIC ELECTRON-BEAM SIGNAL IMAGE MAPPING
- Publication number 20230317408
- Publication date Oct 5, 2023
- Intel Corporation
- Xianghong Tong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR DETERMINING AND/OR PREDICTING UNBIASED PARAME...
- Publication number 20230134093
- Publication date May 4, 2023
- FRACTILIA, LLC
- Chris MACK
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ANALYZING A SIDEWALL OF HOLE MILLED IN A SAMPLE TO DETERMINE THICKN...
- Publication number 20230057148
- Publication date Feb 23, 2023
- APPLIED MATERIALS ISRAEL LTD.
- Ilya Blayvas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Microscope and Image Generation Method
- Publication number 20230015400
- Publication date Jan 19, 2023
- JEOL Ltd.
- Motohiro Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus and Image Acquiring Method
- Publication number 20220392738
- Publication date Dec 8, 2022
- JEOL Ltd.
- Takeshi Otsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scanning Electron Microscope and Image Generation Method Using Scan...
- Publication number 20220392737
- Publication date Dec 8, 2022
- JEOL Ltd.
- Takeshi Otsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20220344124
- Publication date Oct 27, 2022
- Hitachi High-Tech Corporation
- Hiroyuki CHIBA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN MEASUREMENT SYSTEM AND PATTERN MEASUREMENT METHOD
- Publication number 20220230842
- Publication date Jul 21, 2022
- HITACHI HIGH-TECH CORPORATION
- Wei SUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHODS FOR THERMALLY CONDITIONING A WAFER IN A CHARGED...
- Publication number 20220102106
- Publication date Mar 31, 2022
- ASML NETHERLANDS B.V.
- Martijn Petrus, Christianus VAN HEUMEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETECTION OF PROBABILISTIC PROCESS WINDOWS
- Publication number 20220068594
- Publication date Mar 3, 2022
- FRACTILIA, LLC
- Chris MACK
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ENABLING SCANNING ELECTRON MICROSCOPE IMAGING WHILE PREVENTING SAMP...
- Publication number 20210407834
- Publication date Dec 30, 2021
- KLA Corporation
- Hari Pathangi Sriraman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMENTS
- Publication number 20210327675
- Publication date Oct 21, 2021
- FRACTILIA, LLC
- Chris MACK
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
EDGE DETECTION SYSTEM
- Publication number 20210265131
- Publication date Aug 26, 2021
- FRACTILIA, LLC
- Chris MACK
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM AND METHOD FOR PREDICTING STOCHASTIC-AWARE PROCESS WINDOW AN...
- Publication number 20210225609
- Publication date Jul 22, 2021
- FRACTILIA, LLC
- Chris MACK
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM AND METHOD FOR LOW-NOISE EDGE DETECTION AND ITS USE FOR PROC...
- Publication number 20210202204
- Publication date Jul 1, 2021
- FRACTILIA, LLC
- Chris MACK
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMEN...
- Publication number 20210142977
- Publication date May 13, 2021
- FRACTILIA, LLC
- Chris MACK
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
A METHOD FOR SEM-GUIDED AFM SCAN WITH DYNAMICALLY VARIED SCAN SPEED
- Publication number 20210125809
- Publication date Apr 29, 2021
- JIANGSU JITRI MICRO-NANO AUTOMATION INSTITUTE CO., LTD.
- Yu SUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
USE OF ELECTRON BEAM SCANNING ELECTRON MICROSCOPY FOR CHARACTERIZAT...
- Publication number 20210090852
- Publication date Mar 25, 2021
- Applied Materials, Inc.
- Ofer YULI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMEN...
- Publication number 20210082658
- Publication date Mar 18, 2021
- FRACTILIA, LLC
- Chris MACK
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMEN...
- Publication number 20210066027
- Publication date Mar 4, 2021
- FRACTILIA, LLC
- Chris MACK
- G06 - COMPUTING CALCULATING COUNTING

Measurement of surface topography

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Charged particle beam apparatus and image acquiring method

Detection of probabilistic process windows

Inspection apparatus and method

Charged particle beam device

Analyzing a sidewall of hole milled in a sample to determine thickn...

Electron beam probing techniques and related structures

System and method for generating and analyzing roughness measuremen...

System and methods for thermally conditioning a wafer in a charged...

Device and method for analyzing a defect of a photolithographic mas...

System and method for generating and analyzing roughness measurements

Edge detection system

Enabling scanning electron microscope imaging while preventing samp...

System and method for predicting stochastic-aware process window an...

System and method for low-noise edge detection and its use for proc...

System and method for generating and analyzing roughness measuremen...

System and method for generating and analyzing roughness measuremen...

System and method for generating and analyzing roughness measuremen...

Fiducial design for tilted or glancing mill operations with a charg...

Electron beam probing techniques and related structures

Holes tilt angle measurement using FIB diagonal cut

Inspection tool, lithographic apparatus, electron beam source and a...

Method for SEM-guided AFM scan with dynamically varied scan speed

Systems and methods for thermally conditioning a wafer in a charged...

Methods and apparatus for performing profile metrology on semicondu...

Method and system for backside planar view lamella preparation

Edge detection system

System and method for generating and analyzing roughness measurements

Device and method for analysing a defect of a photolithographic mas...

Image-forming device, and dimension measurement device

Use of electron beam scanning electron microscopy for characterizat...

Patents Applicationslast 30 patents

INSPECTION APPARATUS AND METHOD

ELECTRON BEAM PROBING TECHNIQUES AND RELATED STRUCTURES

ANALYSIS METHOD, COMPUTER-READABLE MEDIUM, AND MANUFACTURING METHOD...

SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMEN...

HIGH RESOLUTION, LOW ENERGY ELECTRON MICROSCOPE FOR PROVIDING TOPOG...

Method of Dispositioning and Control of a Semiconductor Manufacturi...

METHOD OF AUTOMATED DATA ACQUISITION FOR A TRANSMISSION ELECTRON MI...

SYSTEMS AND METHODS FOR THERMALLY CONDITIONING A WAFER IN A CHARGED...

SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMENTS

SCREENING EDGE PLACEMENT UNIFORMITY WAFER STOCHASTICS

STROBOSCOPIC ELECTRON-BEAM SIGNAL IMAGE MAPPING

SYSTEM AND METHOD FOR DETERMINING AND/OR PREDICTING UNBIASED PARAME...

ANALYZING A SIDEWALL OF HOLE MILLED IN A SAMPLE TO DETERMINE THICKN...

Electron Microscope and Image Generation Method

Charged Particle Beam Apparatus and Image Acquiring Method

Scanning Electron Microscope and Image Generation Method Using Scan...

Charged Particle Beam Device

PATTERN MEASUREMENT SYSTEM AND PATTERN MEASUREMENT METHOD

SYSTEM AND METHODS FOR THERMALLY CONDITIONING A WAFER IN A CHARGED...

DETECTION OF PROBABILISTIC PROCESS WINDOWS

ENABLING SCANNING ELECTRON MICROSCOPE IMAGING WHILE PREVENTING SAMP...

SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMENTS

EDGE DETECTION SYSTEM

SYSTEM AND METHOD FOR PREDICTING STOCHASTIC-AWARE PROCESS WINDOW AN...

SYSTEM AND METHOD FOR LOW-NOISE EDGE DETECTION AND ITS USE FOR PROC...

SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMEN...

A METHOD FOR SEM-GUIDED AFM SCAN WITH DYNAMICALLY VARIED SCAN SPEED

USE OF ELECTRON BEAM SCANNING ELECTRON MICROSCOPY FOR CHARACTERIZAT...

SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMEN...

SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMEN...