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H01J2237/2814
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/2814
Measurement of surface topography
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Patents Grants
last 30 patents
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Patent Grant
System and methods for thermally conditioning a wafer in a charged...
Patent number
11,804,358
Issue date
Oct 31, 2023
ASML Netherlands B.V.
Martijn Petrus Christianus Van Heumen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device and method for analyzing a defect of a photolithographic mas...
Patent number
11,733,186
Issue date
Aug 22, 2023
Carl Zeiss SMT GmbH
Gabriel Baralia
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for generating and analyzing roughness measurements
Patent number
11,670,480
Issue date
Jun 6, 2023
Fractilia, LLC
Chris Mack
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Edge detection system
Patent number
11,664,188
Issue date
May 30, 2023
Fractilia, LLC
Chris Mack
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Enabling scanning electron microscope imaging while preventing samp...
Patent number
11,631,602
Issue date
Apr 18, 2023
KLA Corporation
Hari Sriraman Pathangi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for predicting stochastic-aware process window an...
Patent number
11,521,825
Issue date
Dec 6, 2022
Fractilia, LLC
Chris Mack
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
System and method for low-noise edge detection and its use for proc...
Patent number
11,508,546
Issue date
Nov 22, 2022
Fractilia, LLC
Chris Mack
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
System and method for generating and analyzing roughness measuremen...
Patent number
11,380,516
Issue date
Jul 5, 2022
Fractilia, LLC
Chris Mack
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
System and method for generating and analyzing roughness measuremen...
Patent number
11,361,937
Issue date
Jun 14, 2022
Fractilia, LLC
Chris Mack
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
System and method for generating and analyzing roughness measuremen...
Patent number
11,355,306
Issue date
Jun 7, 2022
Fractilia, LLC
Chris Mack
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Fiducial design for tilted or glancing mill operations with a charg...
Patent number
11,315,756
Issue date
Apr 26, 2022
FEI Company
Stacey Stone
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam probing techniques and related structures
Patent number
11,302,589
Issue date
Apr 12, 2022
Micron Technology, Inc.
Amitava Majumdar
G11 - INFORMATION STORAGE
Information
Patent Grant
Holes tilt angle measurement using FIB diagonal cut
Patent number
11,280,749
Issue date
Mar 22, 2022
Applied Materials Israel Ltd.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inspection tool, lithographic apparatus, electron beam source and a...
Patent number
11,243,179
Issue date
Feb 8, 2022
ASML Netherlands B.V.
Erwin Paul Smakman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for SEM-guided AFM scan with dynamically varied scan speed
Patent number
11,158,486
Issue date
Oct 26, 2021
JIANGSU JITRI MICRO-NANO AUTOMATION INSTITUTE CO., LTD.
Yu Sun
G01 - MEASURING TESTING
Information
Patent Grant
Systems and methods for thermally conditioning a wafer in a charged...
Patent number
11,139,141
Issue date
Oct 5, 2021
ASML Netherlands B.V.
Martijn Petrus Christianus Van Heumen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for performing profile metrology on semicondu...
Patent number
11,133,152
Issue date
Sep 28, 2021
Applied Materials, Inc.
Regina Freed
G01 - MEASURING TESTING
Information
Patent Grant
Method and system for backside planar view lamella preparation
Patent number
11,069,509
Issue date
Jul 20, 2021
FEI Company
James Clarke
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Edge detection system
Patent number
11,004,653
Issue date
May 11, 2021
Fractilia, LLC
Chris Mack
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
System and method for generating and analyzing roughness measurements
Patent number
11,004,654
Issue date
May 11, 2021
Fractilia, LLC
Chris Mack
G01 - MEASURING TESTING
Information
Patent Grant
Device and method for analysing a defect of a photolithographic mas...
Patent number
10,983,075
Issue date
Apr 20, 2021
Carl Zeiss SMT GmbH
Gabriel Baralia
G01 - MEASURING TESTING
Information
Patent Grant
Image-forming device, and dimension measurement device
Patent number
10,976,536
Issue date
Apr 13, 2021
HITACHI HIGH-TECH CORPORATION
Yasunori Takasugi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Use of electron beam scanning electron microscopy for characterizat...
Patent number
10,943,763
Issue date
Mar 9, 2021
Applied Materials, Inc.
Ofer Yuli
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for large-scale high throughput quantitative c...
Patent number
10,804,073
Issue date
Oct 13, 2020
THE NCS TESTING TECHNOLOGY CO., LTD.
Haizhou Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
3D defect characterization of crystalline samples in a scanning typ...
Patent number
10,784,076
Issue date
Sep 22, 2020
FEI Company
TomáTomá{hacek over (s)} Vystavel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-column spacing for photomask and reticle inspection and wafer...
Patent number
10,777,377
Issue date
Sep 15, 2020
KLA-Tencor Corporation
Robert Haynes
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus and image acquisition method
Patent number
10,763,077
Issue date
Sep 1, 2020
Jeol Ltd.
Takeshi Otsuka
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Methods and apparatus for high throughput SEM and AFM for character...
Patent number
10,714,310
Issue date
Jul 14, 2020
Nanowear Inc.
Vijay Varadan
B82 - NANO-TECHNOLOGY
Information
Patent Grant
System and method for generating and analyzing roughness measurements
Patent number
10,665,417
Issue date
May 26, 2020
Fractilia, LLC
Chris Mack
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
System and method for generating and analyzing roughness measurements
Patent number
10,665,418
Issue date
May 26, 2020
Fractilia, LLC
Chris Mack
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF AUTOMATED DATA ACQUISITION FOR A TRANSMISSION ELECTRON MI...
Publication number
20240128050
Publication date
Apr 18, 2024
FEI Company
Yuchen DENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR THERMALLY CONDITIONING A WAFER IN A CHARGED...
Publication number
20240079202
Publication date
Mar 7, 2024
ASML NETHERLANDS B.V.
Martijn Petrus, Christianus VAN HEUMEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMENTS
Publication number
20230326711
Publication date
Oct 12, 2023
FRACTILIA, LLC
Chris MACK
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SCREENING EDGE PLACEMENT UNIFORMITY WAFER STOCHASTICS
Publication number
20230326710
Publication date
Oct 12, 2023
KLA Corporation
Stefan Eyring
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STROBOSCOPIC ELECTRON-BEAM SIGNAL IMAGE MAPPING
Publication number
20230317408
Publication date
Oct 5, 2023
Intel Corporation
Xianghong Tong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR DETERMINING AND/OR PREDICTING UNBIASED PARAME...
Publication number
20230134093
Publication date
May 4, 2023
FRACTILIA, LLC
Chris MACK
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ANALYZING A SIDEWALL OF HOLE MILLED IN A SAMPLE TO DETERMINE THICKN...
Publication number
20230057148
Publication date
Feb 23, 2023
APPLIED MATERIALS ISRAEL LTD.
Ilya Blayvas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron Microscope and Image Generation Method
Publication number
20230015400
Publication date
Jan 19, 2023
JEOL Ltd.
Motohiro Nakamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Apparatus and Image Acquiring Method
Publication number
20220392738
Publication date
Dec 8, 2022
JEOL Ltd.
Takeshi Otsuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Scanning Electron Microscope and Image Generation Method Using Scan...
Publication number
20220392737
Publication date
Dec 8, 2022
JEOL Ltd.
Takeshi Otsuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Device
Publication number
20220344124
Publication date
Oct 27, 2022
Hitachi High-Tech Corporation
Hiroyuki CHIBA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PATTERN MEASUREMENT SYSTEM AND PATTERN MEASUREMENT METHOD
Publication number
20220230842
Publication date
Jul 21, 2022
HITACHI HIGH-TECH CORPORATION
Wei SUN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHODS FOR THERMALLY CONDITIONING A WAFER IN A CHARGED...
Publication number
20220102106
Publication date
Mar 31, 2022
ASML NETHERLANDS B.V.
Martijn Petrus, Christianus VAN HEUMEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DETECTION OF PROBABILISTIC PROCESS WINDOWS
Publication number
20220068594
Publication date
Mar 3, 2022
FRACTILIA, LLC
Chris MACK
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ENABLING SCANNING ELECTRON MICROSCOPE IMAGING WHILE PREVENTING SAMP...
Publication number
20210407834
Publication date
Dec 30, 2021
KLA Corporation
Hari Pathangi Sriraman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMENTS
Publication number
20210327675
Publication date
Oct 21, 2021
FRACTILIA, LLC
Chris MACK
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
EDGE DETECTION SYSTEM
Publication number
20210265131
Publication date
Aug 26, 2021
FRACTILIA, LLC
Chris MACK
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SYSTEM AND METHOD FOR PREDICTING STOCHASTIC-AWARE PROCESS WINDOW AN...
Publication number
20210225609
Publication date
Jul 22, 2021
FRACTILIA, LLC
Chris MACK
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SYSTEM AND METHOD FOR LOW-NOISE EDGE DETECTION AND ITS USE FOR PROC...
Publication number
20210202204
Publication date
Jul 1, 2021
FRACTILIA, LLC
Chris MACK
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMEN...
Publication number
20210142977
Publication date
May 13, 2021
FRACTILIA, LLC
Chris MACK
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
A METHOD FOR SEM-GUIDED AFM SCAN WITH DYNAMICALLY VARIED SCAN SPEED
Publication number
20210125809
Publication date
Apr 29, 2021
JIANGSU JITRI MICRO-NANO AUTOMATION INSTITUTE CO., LTD.
Yu SUN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
USE OF ELECTRON BEAM SCANNING ELECTRON MICROSCOPY FOR CHARACTERIZAT...
Publication number
20210090852
Publication date
Mar 25, 2021
Applied Materials, Inc.
Ofer YULI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMEN...
Publication number
20210082658
Publication date
Mar 18, 2021
FRACTILIA, LLC
Chris MACK
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMEN...
Publication number
20210066027
Publication date
Mar 4, 2021
FRACTILIA, LLC
Chris MACK
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHODS AND APPARATUS FOR PERFORMING PROFILE METROLOGY ON SEMICONDU...
Publication number
20200300618
Publication date
Sep 24, 2020
Applied Materials, Inc.
REGINA FREED
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR LARGE-SCALE HIGH THROUGHPUT QUANTITATIVE C...
Publication number
20200294760
Publication date
Sep 17, 2020
THE NCS TESTING TECHNOLOGY CO., LTD.
Haizhou WANG
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS
Publication number
20200251305
Publication date
Aug 6, 2020
ASML NETHERLANDS B.V.
Zhongwei CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSPECTION TOOL, LITHOGRAPHIC APPARATUS, ELECTRON BEAM SOURCE AND A...
Publication number
20200249181
Publication date
Aug 6, 2020
ASML NETHERLANDS B.V.
Erwin Paul SMAKMAN
G01 - MEASURING TESTING
Information
Patent Application
SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMENTS
Publication number
20200211813
Publication date
Jul 2, 2020
FRACTILIA, LLC
Chris MACK
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Image-Forming Device, and Dimension Measurement Device
Publication number
20200201019
Publication date
Jun 25, 2020
Hitachi High-Technologies Corporation
Yasunori TAKASUGI
G06 - COMPUTING CALCULATING COUNTING