Measuring electric fields or potentials

Industry

CPC
H01J2237/2594

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/2594Measuring electric fields or potentials

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Automated application of drift correction to sample studied under e...
- Patent number 11,902,665
- Issue date Feb 13, 2024
- PROTOCHIPS, INC.
- Franklin Stampley Walden
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Automated application of drift correction to sample studied under e...
- Patent number 11,514,586
- Issue date Nov 29, 2022
- PROTOCHIPS, INC.
- Franklin Stampley Walden
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Electrochemical measurement of electron beam-induced pH change duri...
- Patent number 11,264,199
- Issue date Mar 1, 2022
- University of Maryland, College Park
- Taylor Woehl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for detection of passive voltage contrast
- Patent number 11,035,899
- Issue date Jun 15, 2021
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Changqing Chen
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam irradiation method and scanning electron microscope
- Patent number 9,640,366
- Issue date May 2, 2017
- Hitachi High-Technologies Corporation
- Toshiyuki Yokosuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for inspecting sample surface
- Patent number 8,859,984
- Issue date Oct 14, 2014
- Ebara Corporation
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Grant
Sample electrification measurement method and charged particle beam...
- Patent number 8,835,844
- Issue date Sep 16, 2014
- Hitachi, Ltd.
- Makoto Ezumi
- G01 - MEASURING TESTING
Information Patent Grant
Ultra high precision measurement tool
- Patent number 8,785,849
- Issue date Jul 22, 2014
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnick mbH
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for detecting information of an electric potential on a samp...
- Patent number 8,766,182
- Issue date Jul 1, 2014
- Hitachi High-Technologies Corporation
- Minoru Yamazaki
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting sample surface
- Patent number 8,525,127
- Issue date Sep 3, 2013
- Ebara Corporation
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope and sample observation method
- Patent number 8,519,334
- Issue date Aug 27, 2013
- Hitachi High-Technologies Corporation
- Satoshi Tadaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for detecting information of an electronic potential on a sa...
- Patent number 8,487,250
- Issue date Jul 16, 2013
- Hitachi High-Technologies Corporation
- Minoru Yamazaki
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope
- Patent number 8,481,935
- Issue date Jul 9, 2013
- Hitachi High-Technologies Corporation
- Akira Ikegami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-part specimen holder with conductive patterns
- Patent number 8,334,519
- Issue date Dec 18, 2012
- Hitachi, Ltd.
- Shiano Ono
- G01 - MEASURING TESTING
Information Patent Grant
Method for detecting information of an electric potential on a samp...
- Patent number 8,263,934
- Issue date Sep 11, 2012
- Hitachi High-Technologies Corporation
- Minoru Yamazaki
- G01 - MEASURING TESTING
Information Patent Grant
Structure and method for determining a defect in integrated circuit...
- Patent number 8,193,491
- Issue date Jun 5, 2012
- Hermes-Microvision, Inc.
- Hong Xiao
- G11 - INFORMATION STORAGE
Information Patent Grant
Scanning electron microscope
- Patent number 7,989,768
- Issue date Aug 2, 2011
- Hitachi High-Technologies Corporation
- Akira Ikegami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of inspecting pattern and inspecting instrument
- Patent number 7,876,113
- Issue date Jan 25, 2011
- Hitachi, Ltd.
- Mari Nozoe
- G01 - MEASURING TESTING
Information Patent Grant
Method and device for measuring surface potential distribution, met...
- Patent number 7,869,725
- Issue date Jan 11, 2011
- Ricoh Company, Ltd.
- Hiroyuki Suhara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Non-destructive, below-surface defect rendering using image intensi...
- Patent number 7,835,564
- Issue date Nov 16, 2010
- International Business Machines Corporation
- Delia R. Bearup
- G01 - MEASURING TESTING
Information Patent Grant
Method and device for measuring surface potential distribution, met...
- Patent number 7,783,213
- Issue date Aug 24, 2010
- Ricoh Company, Ltd.
- Hiroyuki Suhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample electrification measurement method and charged particle beam...
- Patent number 7,700,918
- Issue date Apr 20, 2010
- Hitachi, Ltd.
- Makoto Ezumi
- G01 - MEASURING TESTING
Information Patent Grant
Charge control apparatus and measurement apparatus equipped with th...
- Patent number 7,683,319
- Issue date Mar 23, 2010
- Hitachi High-Technologies Corporation
- Hiroshi Makino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device probe operation
- Patent number 7,675,300
- Issue date Mar 9, 2010
- Zyvex Instruments, LLC
- Christof Baur
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for reviewing defects by detecting images havi...
- Patent number 7,656,171
- Issue date Feb 2, 2010
- Hitachi High-Technologies Corporation
- Toshifumi Honda
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor wafer inspection apparatus
- Patent number 7,633,303
- Issue date Dec 15, 2009
- Hitachi High-Technologies Corporation
- Takashi Furukawa
- G01 - MEASURING TESTING
Information Patent Grant
Surface-potential distribution measuring apparatus, image carrier,...
- Patent number 7,612,570
- Issue date Nov 3, 2009
- Ricoh Company, Limited
- Hiroyuki Suhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to reduce cross talk in a multi column e-beam test system
- Patent number 7,569,818
- Issue date Aug 4, 2009
- Applied Materials, Inc.
- Ralf Schmid
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Grant
Pattern defect inspection method and apparatus thereof
- Patent number 7,547,884
- Issue date Jun 16, 2009
- Hitachi High-Technologies Corporation
- Masaki Hasegawa
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and inspection system using charged particle beam
- Patent number 7,521,679
- Issue date Apr 21, 2009
- Hitachi High-Technologies Corporation
- Hidetoshi Nishiyama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE INSPECTION METHOD
- Publication number 20240412943
- Publication date Dec 12, 2024
- Samsung Electronics Co., LTD
- Jinwoo Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED APPLICATION OF DRIFT CORRECTION TO SAMPLE STUDIED UNDER E...
- Publication number 20240267628
- Publication date Aug 8, 2024
- PROTOCHIPS, INC.
- Franklin Stampley Walden
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ELECTROCHEMICAL MEASUREMENT OF ELECTRON BEAM-INDUCED PH CHANGE DURI...
- Publication number 20210249219
- Publication date Aug 12, 2021
- University of Maryland, College Park
- Taylor Woehl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION METHOD AND INSPECTION APPARATUS
- Publication number 20210043417
- Publication date Feb 11, 2021
- Kioxia Corporation
- Osamu NAGANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM FOR DETECTION OF PASSIVE VOLTAGE CONTRAST
- Publication number 20200363469
- Publication date Nov 19, 2020
- GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Changqing CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR INSPECTING SAMPLE SURFACE
- Publication number 20130313429
- Publication date Nov 28, 2013
- EBARA CORPORATION
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Application
Method for Detecting Information of an Electric Potential on a Samp...
- Publication number 20130284921
- Publication date Oct 31, 2013
- Minoru Yamazaki
- G01 - MEASURING TESTING
Information Patent Application
SCANNING ELECTRON MICROSCOPE AND SAMPLE OBSERVATION METHOD
- Publication number 20130037716
- Publication date Feb 14, 2013
- Hitachi High-Technologies Corporation
- Satoshi Tadaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Beam Irradiation Method and Scanning Electron Microscope
- Publication number 20130009057
- Publication date Jan 10, 2013
- Hitachi High-Technologies Corporation
- Toshiyuki Yokosuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Detecting Information of an Electronic Potential on a Sa...
- Publication number 20120298863
- Publication date Nov 29, 2012
- Hitachi High-Technologies Corporation
- Minoru Yamazaki
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR INSPECTING SAMPLE SURFACE
- Publication number 20120145921
- Publication date Jun 14, 2012
- EBARA CORPORATION
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Application
STRUCTURE AND METHOD FOR DETERMINING A DEFECT IN INTEGRATED CIRCUIT...
- Publication number 20120074314
- Publication date Mar 29, 2012
- HERMES MICROVISION INC.
- HONG XIAO
- G01 - MEASURING TESTING
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20110278454
- Publication date Nov 17, 2011
- Hitachi High-Technologies Corporation
- Akira IKEGAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sample Electrification Measurement Method and Charged Particle Beam...
- Publication number 20100294929
- Publication date Nov 25, 2010
- Makoto Ezumi
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND DEVICE FOR MEASURING SURFACE POTENTIAL DISTRIBUTION, MET...
- Publication number 20100239319
- Publication date Sep 23, 2010
- Hiroyuki Suhara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Structure and Method for Determining a Defect in Integrated Circuit...
- Publication number 20100078554
- Publication date Apr 1, 2010
- Hermes-Microvision, Inc.
- Hong Xiao
- G01 - MEASURING TESTING
Information Patent Application
ULTRA HIGH PRECISION MEASUREMENT TOOL
- Publication number 20090289185
- Publication date Nov 26, 2009
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Juergen FROSIEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Detecting Information of an Electric Potential on a Samp...
- Publication number 20090272899
- Publication date Nov 5, 2009
- Hitachi High-Technologies Corporation
- Minoru YAMAZAKI
- G01 - MEASURING TESTING
Information Patent Application
Inspection Method And Inspection System Using Charged Particle Beam
- Publication number 20090194690
- Publication date Aug 6, 2009
- Hidetoshi Nishiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charge control apparatus and measurement apparatus equipped with th...
- Publication number 20090166557
- Publication date Jul 2, 2009
- Hiroshi Makino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for reviewing defects by detecting images havi...
- Publication number 20090058437
- Publication date Mar 5, 2009
- Toshifumi Honda
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR INSPECTING SAMPLE SURFACE
- Publication number 20090050802
- Publication date Feb 26, 2009
- EBARA CORPORATION
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON MICROSCOPE
- Publication number 20090039264
- Publication date Feb 12, 2009
- Hitachi High-Technologies Corporation
- Akira IKEGAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NON-DESTRUCTIVE, BELOW-SURFACE DEFECT RENDERING USING IMAGE INTENSI...
- Publication number 20080270081
- Publication date Oct 30, 2008
- International Business Machines Corporation
- Delia R. Bearup
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND DEVICE FOR MEASURING SURFACE POTENTIAL DISTRIBUTION, MET...
- Publication number 20080253792
- Publication date Oct 16, 2008
- Hiroyuki Suhara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR WAFER INSPECTION APPARATUS
- Publication number 20080246497
- Publication date Oct 9, 2008
- Takashi Furukawa
- G01 - MEASURING TESTING
Information Patent Application
Sample electrification measurement method and charged particle beam...
- Publication number 20080201091
- Publication date Aug 21, 2008
- Makoto Ezumi
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM DEVICE PROBE OPERATION
- Publication number 20080150557
- Publication date Jun 26, 2008
- ZYVEX INSTRUMENTS, LLC
- Christof BAUR
- G01 - MEASURING TESTING
Information Patent Application
Method of inspecting pattern and inspecting instrument
- Publication number 20080122462
- Publication date May 29, 2008
- Hitachi, Ltd.
- Mari Nozoe
- G01 - MEASURING TESTING
Information Patent Application
Specimen Analyzing Apparatus and Specimen Holder
- Publication number 20080067374
- Publication date Mar 20, 2008
- Shiano Ono
- G01 - MEASURING TESTING

Measuring electric fields or potentials

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Automated application of drift correction to sample studied under e...

Automated application of drift correction to sample studied under e...

Electrochemical measurement of electron beam-induced pH change duri...

System for detection of passive voltage contrast

Electron beam irradiation method and scanning electron microscope

Method and apparatus for inspecting sample surface

Sample electrification measurement method and charged particle beam...

Ultra high precision measurement tool

Method for detecting information of an electric potential on a samp...

Method and apparatus for inspecting sample surface

Scanning electron microscope and sample observation method

Method for detecting information of an electronic potential on a sa...

Scanning electron microscope

Multi-part specimen holder with conductive patterns

Method for detecting information of an electric potential on a samp...

Structure and method for determining a defect in integrated circuit...

Scanning electron microscope

Method of inspecting pattern and inspecting instrument

Method and device for measuring surface potential distribution, met...

Non-destructive, below-surface defect rendering using image intensi...

Method and device for measuring surface potential distribution, met...

Sample electrification measurement method and charged particle beam...

Charge control apparatus and measurement apparatus equipped with th...

Charged particle beam device probe operation

Method and apparatus for reviewing defects by detecting images havi...

Semiconductor wafer inspection apparatus

Surface-potential distribution measuring apparatus, image carrier,...

Method to reduce cross talk in a multi column e-beam test system

Pattern defect inspection method and apparatus thereof

Inspection method and inspection system using charged particle beam

Patents Applicationslast 30 patents

SUBSTRATE INSPECTION METHOD

AUTOMATED APPLICATION OF DRIFT CORRECTION TO SAMPLE STUDIED UNDER E...

ELECTROCHEMICAL MEASUREMENT OF ELECTRON BEAM-INDUCED PH CHANGE DURI...

INSPECTION METHOD AND INSPECTION APPARATUS

SYSTEM FOR DETECTION OF PASSIVE VOLTAGE CONTRAST

METHOD AND APPARATUS FOR INSPECTING SAMPLE SURFACE

Method for Detecting Information of an Electric Potential on a Samp...

SCANNING ELECTRON MICROSCOPE AND SAMPLE OBSERVATION METHOD

Electron Beam Irradiation Method and Scanning Electron Microscope

Method for Detecting Information of an Electronic Potential on a Sa...

METHOD AND APPARATUS FOR INSPECTING SAMPLE SURFACE

STRUCTURE AND METHOD FOR DETERMINING A DEFECT IN INTEGRATED CIRCUIT...

SCANNING ELECTRON MICROSCOPE

Sample Electrification Measurement Method and Charged Particle Beam...

METHOD AND DEVICE FOR MEASURING SURFACE POTENTIAL DISTRIBUTION, MET...

Structure and Method for Determining a Defect in Integrated Circuit...

ULTRA HIGH PRECISION MEASUREMENT TOOL

Method for Detecting Information of an Electric Potential on a Samp...

Inspection Method And Inspection System Using Charged Particle Beam

Charge control apparatus and measurement apparatus equipped with th...

Method and apparatus for reviewing defects by detecting images havi...

METHOD AND APPARATUS FOR INSPECTING SAMPLE SURFACE

ELECTRON MICROSCOPE

NON-DESTRUCTIVE, BELOW-SURFACE DEFECT RENDERING USING IMAGE INTENSI...

METHOD AND DEVICE FOR MEASURING SURFACE POTENTIAL DISTRIBUTION, MET...

SEMICONDUCTOR WAFER INSPECTION APPARATUS

Sample electrification measurement method and charged particle beam...

CHARGED PARTICLE BEAM DEVICE PROBE OPERATION

Method of inspecting pattern and inspecting instrument

Specimen Analyzing Apparatus and Specimen Holder